JP2002340963A - Continuity inspection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a continuity inspection device for preventing damage of a probe substrate, preventing peeling of the joint part of the probe substrate and a flexible substrate, and facilitating attachment and detachment of the probe substrate. SOLUTION: The continuity inspection device is composed of a push plate 19a for setting a fixing member fixing the joint part 22a of the probe substrate 18 and the flexible substrate 22 longer than length of a width direction of the joint part 22a of the probe substrate 18 and the flexible substrate 22 and bolts 20a for detachably mounting both the end sides of the push plate 19a on the surface of a probe fixing part 13.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a continuity inspection apparatus in which a joint between a probe substrate and a flexible substrate is detachably fixed to a probe support.

[0002]

2. Description of the Related Art Conventionally, lines of a substrate having an electrode pattern have been inspected based on the presence or absence of electrical continuity. For example, there is an apparatus disclosed in JP-A-2000-249938. This device inspects the continuity of the electrode pattern by moving the probe support with the probe protruding from the lower surface with respect to the electrode pattern of the substrate, and bringing the electrode portion of the electrode pattern into contact with the probe. is there. The positioning between the electrode pattern and the probe is performed based on an image captured by a CCD camera.

In the above apparatus, the probe is attached to the probe support by making the compression spring support the probe inside the probe support, and the tip of the probe is provided at the lower end of the probe support. The hole of the mounting body is inserted so that it can advance and retreat from the lower surface of the mounted body. Some other conventional devices fix the probe substrate to the probe support with screws or with an adhesive.

[0004]

However, in the former device, since a hole is provided for the probe to be inserted into the body to be mounted on the probe support, the number of probes to be mounted on the body to be mounted and the size of the body to be mounted are reduced. There are restrictions. Therefore, in this apparatus, a large number of probes cannot be attached to the probe support, and there is a problem that a conduction test of an electrode pattern having a complicated shape cannot be performed and a problem that a conduction test of a substrate having a fine electrode pattern cannot be performed. .

When the probe substrate is fixed to the probe support by screws, a large number of probes can be attached. However, stress concentrates on a part of the probe substrate to which the probe substrate is screwed, and the probe substrate cannot be mounted. There is a problem that it is easily damaged. On the other hand, when the probe substrate is fixed to the probe support with an adhesive, there is a problem that workability when replacing the probe substrate is deteriorated. Furthermore, there is a problem that peeling is likely to occur at the joint between the probe substrate and the flexible substrate to be joined to the probe substrate in both the case where the screw is used and the case where the adhesive is used.

[0006]

SUMMARY OF THE INVENTION The present invention has been made to address the above-described problems, and an object of the present invention is to prevent the probe board from being damaged by eliminating the concentration of stress on the probe board, and at the same time to prevent the probe board from being damaged. An object of the present invention is to provide a continuity inspection device which prevents separation of a joint portion of a flexible substrate and further facilitates attachment and detachment of a probe substrate.

[0007] In order to achieve the above object, a continuity inspection apparatus according to the present invention is characterized in that a flexible substrate and a probe substrate are stacked and fixed between a probe support and a fixing member. A continuity inspection device that performs a continuity inspection of an electrode pattern by positioning and contacting a probe of a substrate and an electrode portion of an electrode pattern using an image capturing device and a moving mechanism, wherein a fixing member is connected to the probe substrate. The present invention is configured to include a holding member that is set to be longer than the length of the joint portion of the flexible substrate in the width direction, and a fixing member that detachably fixes both ends of the holding member to the surface of the probe support.

According to the feature of the present invention configured as described above, a holding member is applied to the joint between the probe substrate and the flexible substrate, and both ends of the holding member are detachably attached to the surface of the probe support by fixing members. By fixing to
The probe substrate can be attached to a prog support. Further, since the length of the holding member with which the joining portion comes into contact is formed longer than the width of the joining portion, the stress due to the pressing force of the holding member is dispersed throughout the width of the joining portion, and the stress is applied to a specific portion. Is not concentrated, and damage to the probe substrate due to stress concentration is eliminated.

Further, the probe substrate and the flexible substrate are pressed against each other by the probe support and the holding member, and as a result, separation of the joint between the probe substrate and the flexible substrate is prevented. By exhibiting these effects, it is possible to further firmly fix and fix. In addition, since the fixture is detachable, attachment and replacement of the probe board becomes easy. Further, since the probe substrate is fixed to the surface of the probe support, a large number of probes can be attached.

Another structural feature of the present invention resides in that an elastic layer is interposed between the joint between the probe substrate and the flexible substrate and the holding member. According to this, the contact surface to the joint is softened, so that the stress applied to the joint can be further dispersed, and the probe board can be prevented from being damaged by the pressing of the holding member.

Another structural feature of the present invention resides in that a layer made of anisotropic conductive rubber is interposed between the probe substrate and the flexible substrate. According to this, the conductivity between the probe on the probe board and the wiring on the flexible board is improved, and normal conduction can be achieved even if there is some deviation in the contact portion between the probe and the wiring on the flexible board. As a result, there is no erroneous inspection result that determines that the electrode pattern is not conducting despite good conduction of the electrode pattern.

Another structural feature of the present invention resides in that a light emitting device suitable for an image photographing device is mounted on a probe support. According to this, since the probe and the electrode pattern can be photographed using the transmitted light from the light emitting device, halation is eliminated and a good image can be obtained. As a result, accurate positioning can be performed, and an appropriate conduction test can be performed.

[0013]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a front view showing a probe head provided in the continuity inspection device according to the embodiment, and FIG.
Is a bottom view of the main part. This probe head 1
Numeral 0 indicates whether or not the electrode pattern provided on the sheet-like substrate is properly conducted. The central connector mounting portion 11 and the two connector mounting portions 2 connected to the side surface of the connector mounting portion 11 are connected. The probe support 14 includes frame-shaped connector mounting portions 12 a and 12 b and a probe fixing portion 13 mounted on the lower surface of the connector mounting portion 11.

The connector mounting portion 11 is provided with a window 11a for work at the front, and as shown in FIGS. 3 and 4,
Windows 11b, 1 for the same work are also provided on the left, right, side and back.
1c, 11d is formed in the shape of a rectangular solid frame provided,
A mounting piece 11e is provided therein. And a plurality of connectors 15 are attached to this attachment piece 11e. The connector mounting portions 12a and 12b
Both are formed in a U-shaped frame-like body having a vertical cross-sectional shape, and a plurality of connectors 15 are attached to the U-shaped vertical pieces 12c and 12d, respectively.

The probe fixing portion 13 has an upper portion having a quadrangular shape and a lower portion having a substantially quadrangular pyramid shape.
Bolts 16a and 16b and bolt 16
They are attached to the lower surface of the connector attaching portion 11 by c and 16d. An accommodation recess 13 a is provided inside the probe fixing portion 13, and the accommodation recess 13 a is provided.
A light passage 13b communicating with the outside is provided on the bottom surface of a. A light emitting body 17 made of an LED is housed in the housing recess 13a, and light emitted from the light emitting body 17 is emitted downward through the light passage 13b. The light-emitting body 17 is fixed in the housing recess 13a by two bolts 17a and 17b.

At four positions on the lower surface of the probe fixing portion 13, probe substrates 18 having fine line-shaped probes 18a projecting from the tips are provided with holding plates 19a, 19 as holding members.
b, 19c and bolts 20a, 20b, 2 as fixtures
0c. Among these, the mounting structure of the probe board 18 on the surface shown in FIG. 3B and a surface symmetrical to the surface is as shown in FIGS.

That is, a sheet layer 21 made of anisotropic conductive rubber is laminated on the probe substrate 18, and an end portion of the flexible substrate 22 is further laminated on the upper surface of the sheet layer 21 to form a joint 22 a. are doing. Then, with the upper surface of the joining portion 22a pressed by the pressing plate 19a via the elastic rubber layer 23, the bolt 20 is attached to the lower surface of the probe fixing portion 13 (the upper surface in FIGS. 5 and 6).
It is fixed with a.

This will be described in more detail.
9a, a concave portion 19d is formed at the center of the lower surface, and an elastic rubber layer 23 and a joint portion 22a formed of the probe substrate 18, the sheet layer 21 and the flexible substrate 22 are formed in the concave portion 19d. Positioning is performed in a state of being superimposed on the back side of 19d. And the holding plate 19
A bolt 20a is inserted into an insertion hole (not shown) provided in the wall portion 19e at each end of the hole a, and a screw portion of the bolt 20a is provided in the probe fixing portion 13 (not shown).
Screwing the joint portion 22a to the holding plate 19
The probe is fixed to the probe fixing portion 13 by the thin portion 19f of FIG.

On the surface shown in FIG. 4B and a surface symmetrical to the surface, two inner and outer probe substrates 18 are attached, respectively. The inner probe board 18 is formed by a wide holding plate 19b and bolts 20b in the same manner as the probe board 18 shown in FIGS.
Together with the sheet layer 21 and the flexible substrate 22, it is fixed to the lower surface of the probe fixing section 13 via an elastic rubber layer 23.

A joint 22a of the outer probe board 18 composed of the flexible board 22 and the like, like the inner probe 18, is fixed to the lower surface of the holding plate 19b by the narrow holding plate 19c and the bolt 20c. Have been. The holding plate 19a has a width substantially equal to that of the holding plate 19b and a shorter length than the holding plate 19b.
In addition, the holding plate 19b is compared with the holding plate 19c.
The width is narrow and the length is set substantially equal.

These probe boards 18 are connected to the flexible board 22 at the joints 22a, respectively.
It is connected to a connector 15 provided on the connector mounting portions 11, 12a, 12b, and further connected to an inspection device (not shown) via a flat cable 24 connected by the connector 15. In addition, this probe fixing portion 13
The overall shape on the plane of the probe 18a protruding from the tips of the six probe substrates 18 fixed to the lower surface of the probe is set to be the same as the electrode portion (not shown) in the electrode pattern on which the continuity test is performed. The continuity test can be performed by bringing the tip of the probe 18a into contact with the electrode.

The probe head 10 constructed as described above
Is a main body 2 of the continuity inspection device shown in FIGS.
5 is assembled in the state shown in FIG. That is, FIG. 7 is a front view schematically showing a main body portion 25 including an image photographing device and a moving mechanism for moving the image photographing device, and FIGS. 8 and 9 are plan views showing the respective portions. The main body portion 25 includes a CCD camera 27 as an image photographing device,
-Axis moving mechanism 28 and Y-axis moving mechanism 2 for moving 7
9 are provided.

The CCD camera 27 is mounted movably in a horizontal plane parallel to the upper surface of the base 26, and is moved by an X-axis moving mechanism 28 in the X-axis direction (the longitudinal direction of the base 26 in FIGS. 7 to 9). ), And can be moved in the Y-axis direction orthogonal to the X-axis direction by the Y-axis moving mechanism 29.

The X-axis moving mechanism 28 includes a motor 30 disposed on the upper surface of the base 26, and a rotating shaft 30a of the motor 30.
, A ball screw 31 extending in the X-axis direction, a rail portion 32 having a concave vertical cross-sectional shape, and a moving member 33 moving along the rail portion 32. Rail part 32
Is mounted along the X-axis direction on the upper surface of the base 26 via the support members 34a and 34b, and the moving member 33 is slidably mounted in the recess. The moving member 33 is provided with a screw hole (not shown), and the ball screw 31 is screwed into the screw hole.

At both ends of the concave portion of the rail portion 32, wall portions 32a and 32b provided with holes (not shown) are attached with their upper sides projecting upward from the concave portion. The rotary shaft 30a of the motor 30 is inserted into the hole of the wall 32b, and the ball screw 31 is inserted into the hole of the wall 32b.
Are rotatably supported. Therefore, when the rotation shaft 30a rotates by the driving of the motor 30, the ball screw 31 rotates together with the rotation shaft 30a, whereby the moving member 33 moves along the rail portion 32.

The Y-axis moving mechanism 29 includes a rail 35 mounted on the upper surface of the moving member 33, a motor 36 fixed to one end of the rail 35, and a ball connected to a rotating shaft 36a of the motor 36. Screw 37 and rail 35
11 (see FIG. 11B). The rail portion 35 is formed in the same shape as the rail portion 32, is disposed along a Y-axis direction orthogonal to the rail portion 32, and a moving member 38 is slidably mounted in a concave portion thereof. A screw hole 38a is provided in the moving member 38, and the ball screw 3 is inserted into the screw hole 38a.
7 is screwed.

On both sides of the lower side of the moving member 38, ridges 38b and 38c are provided so as to protrude.
On both inner side surfaces of the rail portion 35 corresponding to the rails b and 38c, grooves are provided which are in sliding contact with the ridges 38b and 38c, respectively. Thereby, the moving member 38 can move smoothly along the rail portion 35 without floating or rattling from the rail portion 35. The ridges and grooves are also formed on the moving member 33 and the rail portion 32, so that the moving member 33 can move smoothly along the rail portion 32.

Further, like the rail section 32, the rail section 3
5, wall portions 35a provided with holes, respectively,
35b is attached, and in the hole of the wall 35a,
A rotating shaft 36a of the motor 36 is inserted therethrough, and a tip of a ball screw 37 is rotatably supported in a hole of the wall 35b. Therefore, when the motor 36 is driven, the rotating shaft 3
6a and the ball screw 37 rotate, whereby the moving member 38 moves in the Y-axis direction along the rail portion 35.

Further, on the upper surface of the moving member 38, FIG.
(A), a plate-shaped carriage base 3 as shown in (b)
The CCD camera 27 is attached to one end of the carriage base 39 via an up-down adjustment unit 40. A CCD camera 2 is provided on the lower surface of the vertical adjustment unit 40.
An adjustment screw 40a for adjusting the height of the CCD 7 is provided, and a CCD adjusted to the height adjusted by the adjustment screw 40a is provided on the front side.
A fixing screw 40b for fixing the camera 27 is provided. A mounting piece 41 having an L-shaped cross section is mounted above the vertical adjustment section 40, and a ring-shaped lighting device 42 is mounted on the upper surface of the horizontal section 41a. The horizontal section 41a has a lens section 2 of the CCD camera 27.
An insertion hole through which the lens portion 7a is inserted is provided.
“a” is inserted through the insertion hole and the center hole of the lighting device 42 to expose the upper end thereof upward.

Further, at the other end of the carriage base 39,
A horizontal mounting piece 43 is mounted, and a cavity 4 in which the inside accommodates the cable 45 is provided on the upper surface of the mounting piece 43.
The distal end of the caterpillar-shaped cable guide 44, which has become 4a, is fixed. The tip of the same cable guide 46 is also fixed to the tip of the rail 35.

Also, at the portions corresponding to the periphery of the X-axis moving mechanism 28 on the upper surface of the base 26,
a, 47b, 47c, 47d are bolts 48a, 48b,
It is fixed by 48c and 48d. And narrow plate-like bases 49a and 49b each having an upper surface formed in a horizontal plane are laid over the upper surfaces of the columns 47a and 47b and the upper surfaces of the columns 47c and 47d, respectively.

Further, a column 47 on the upper surface of the base 26 is provided.
A flat support plates 50a and 50b having substantially the same height as the upper surfaces of the bases 49a and 49b are provided upright on both outer portions surrounding the a and 47b and the columns 47c and 47d by fixing bolts 51a and 51b. . And the bases 49a, 49b
And five shafts 52 a, 52 b, 52 c, while being bridged on the upper surfaces of the support plates 50 a, 50 b, respectively.
52d and 52e are placed at regular intervals. These shafts 52a, 52b, 52c, 52d, 52
e are all formed of straight round bars of the same diameter and length.

The bases 49a and 49b and the support plate 5
0a, 50b each shaft 52a, 52 on the upper surface
b, 52c, 52d, 52e and between shaft 52e
As shown in FIG. 9, horizontal portions 53a, 53b, 53c and 53 are respectively provided on the front side of the shaft (the shaft 52e side is the front side and the shaft 52a side is the rear side).
d, 53e, 53f are the shafts 52a, 52b, 5
2c, 52d and 52e are mounted so as to be positioned with some degree of freedom. In addition, a gap is provided between the horizontal plates 53b and 53c as a window for exposing the lens unit 27a of the CCD camera 27 and the illumination device 42 upward, and the gap is formed by a transparent portion made of a transparent acrylic plate. 53g is attached.

At the rear side (both ends of the shaft 52a) on both sides along the X-axis direction on the upper surface of the pedestal 26, columns 54a and 54b are erected, respectively.
b, 52c, 52d, 52e and horizontal plates 53a, 53
b, 53c, 53d, 53e, 53f
5 are provided. Then, on the front side of the frame base 55,
An operation panel 56 is provided.

An XY table driving device (only a part of which is shown) 57 is provided behind the base 26. The XY table driving device 57 includes an X-axis moving mechanism, a Y-axis moving mechanism (both are installed inside the base 26), and a θ-axis moving mechanism 58. The XY driving device 57 supports the XY table 59 shown in FIG. 12 and moves the XY table 59 in the X-axis direction, the Y-axis direction, and the θ-axis direction (direction rotating on a horizontal plane).
The XY table 59 is provided with the engagement hole 59a and the θ axis moving mechanism 58.
The XY table mounting portion 5 of the XY table driving device 57 is engaged with the engagement shaft 58b connected to the motor 58a of the XY table.
7a. Then, the motor 58a is driven to rotate in the θ-axis direction.

The X-axis moving mechanism and the Y-axis moving mechanism installed inside the base 26 are configured in the same manner as the X-axis moving mechanism 28 and the Y-axis moving mechanism 29, and drive the motors provided respectively. Thereby, the XY table 59 is moved in the X-axis direction and the Y-axis direction together with the θ-axis moving mechanism 58.

A frame-shaped base 60 is attached to the lower surface of the XY table 59, and a fixed table 61 made of a transparent acrylic plate shown in FIG. 13 is attached to the upper surface of the base 60. A pair of small-diameter shafts 62 are attached to both lower surfaces of the base 60 by shaft support portions 62a. The pair of shafts 62 are disposed so as to be orthogonal to the shafts 52b, 52c and the like so as to be in point contact with each other, so that the horizontality of the base 60 and the fixed table 61 is kept good.

Guide pins 63a and 63b are erected at the center of both sides on the upper surface of the base 60,
At the mounting portion 59b of the XY table 59 corresponding to the guide pins 63a and 63b, sliding support portions 59b and 59c made of a bearing or the like having an insertion hole are provided. For this reason, the base 60 can slide up and down with respect to the XY table 59 by inserting the guide pins 63a and 63b into the insertion holes of the sliding support portions 59b and 59c.

The fixing table 61 is for fixing a sheet-like substrate on which a plurality of electrode patterns are printed. The fixing table 61 is provided with a lattice-shaped air vent linear groove 61a and a wide shallow groove 61b on the upper surface. I have. Further, a suction device (not shown) for bleeding air is connected to the fixed table 61 via a hose 64a, a joint 64b, and the like, and a sheet-like substrate is placed on the fixed table 61. When the suction device is driven, the substrate is suction-fixed to the upper surface of the fixed table 61.

A support portion (not shown) having a rail portion is bridged over a portion connecting the upper ends of the columns 54a and 54b, and the probe head 10 described above is respectively mounted on the support portion in the Z-axis direction. There is provided a Z-axis moving mechanism for moving (vertically). Then, two probe heads 10 are suspended from this mechanism via a connecting member 65.

The continuity inspection device is provided with an image processing device and a microcomputer for position control in addition to the above-described devices and the like. The image captured by the CCD camera 27 is image-processed to obtain position data. To
The X-axis moving mechanism 28, the Y-axis moving mechanism 29, and the X-axis moving mechanism, the Y-axis moving mechanism, and the θ-axis of the XY table driving device 57 are used as correction data with the difference between the two position data between the electrode portion of the electrode pattern and the probe 18a. It has a function of outputting to the moving mechanism 58.

In such a configuration, when conducting continuity inspection of each electrode pattern along a plurality of electrode patterns provided on the substrate, the X-axis movement is performed while photographing the probe head 10 with the CCD camera 27. The lens unit 2 of the CCD camera 27 is driven by driving the mechanism 28 and the Y-axis moving mechanism 29.
7a is positioned directly below the probe 18a of the probe head 10.

Then, the sheet-like substrate is placed on the upper surface of the fixed table 61 attached to the XY table 59, and the suction device for bleeding air is operated to suction air between the upper surface of the fixed table 61 and the substrate. Thus, the substrate is fixed on the fixing table 61. Then, by driving the X-axis moving mechanism and the Y-axis moving mechanism of the XY table driving device 57, the position of the electrode pattern of the work is changed to the watermark portion 53g.
The fixed table 61 is moved so as to match the position.
Next, the θ-axis moving mechanism 58 is driven to rotate the fixed table 61 so that the vertical and horizontal arrangement of the electrode patterns are aligned in the Y-axis direction and the X-axis direction.

Then, with the arrangement of the electrode patterns aligned in the Y-axis direction and the X-axis direction, the XY table driving device 57 shoots the first one of the electrode patterns to be subjected to the continuity test by the CCD camera 27. The X-axis moving mechanism and the Y-axis moving mechanism are driven to match the position of the electrode pattern with the position of the probe 18a of the probe head 10.

Then, by driving the Z-axis moving mechanism, the probe head 10 is lowered and the probe 18
a is brought into contact with the contacted portion of the electrode pattern. Thus, it is possible to inspect whether or not the electrode pattern is conductive, and the result is displayed on the inspection device. Next, when the next inspection of the electrode pattern is performed, the probe head 10 is raised by driving the Z-axis moving mechanism,
In this state, the X-axis moving mechanism or the Y-axis moving mechanism is driven to match the position of the next electrode pattern with the position of the probe head 10.

Then, by driving the Z-axis moving mechanism, the probe head 10 is lowered and the probe 18 is moved downward.
a is brought into contact with the electrode portion of the electrode pattern. Thus, it is possible to inspect whether or not the electrode pattern is conductive. Since the continuity inspection apparatus is provided with two probe heads 10, after the first inspection,
By moving the CCD camera 27 to the position of another probe head 10, the probe head 10 and the electrode pattern thereunder are positioned, and the conduction test of the electrode pattern can be performed. Thus, the probe head 10
Are provided and the CCD camera 27 is movable, so that the operation can be sequentially performed at two places.

By repeating the above operation, a continuity test can be performed for all the electrode patterns.
When replacing the probe board 18 of the probe head 10 with another probe board, the bolts 20a, 20b,
By loosening 20c, holding plates 19a, 19
b, 19c are removed, and the joint between the probe substrate 18 and the flexible substrate 22 is separated from the probe support 14. Next, the probe board 18 is peeled off and removed from the other part of the joint, and the end of the probe board to be newly attached is combined with the joint.

Then, the joining portion is connected to the holding plate 19a,
The holding plates 19a, 19b, and 19c are positioned at predetermined positions of the probe fixing portion 13 with the holding plates 19a, 19b, and 19c placed in the recesses 19d of the 19b and 19c, and fixed with bolts 20a, 20b, and 20c. As a result, the probe board can be replaced.
Also, instead of replacing all the probe boards, if they need to be replaced due to damage or the like, the holding plate and the bolts that fix the target probe board are attached and detached to remove them. Replace the probe board.

As described above, in this continuity inspection device, the holding plates 19a, 19b, 19c and the bolts 20a, 20b,
20c, the probe board 18 and the flexible board 22
Is fixed, the attachment and detachment of the probe board 18 becomes easy. Further, the joining portion 22a and the holding plate 19
a, 19b and 19c, respectively, the elastic rubber layer 23 is disposed, so that the probe
8, the probe substrate 18 and the flexible substrate 22 do not peel off. Therefore, there is no inspection failure.

Further, the holding plates 19a, 19b, 19c
Since a plurality of fixing members including the bolts 20a, 20b, and 20c can be attached to one probe support 14, a large number of probe substrates 18 can be attached. Further, when photographing the electrode pattern and the probe 18a with the CCD camera 27, the CCD camera 27
The illuminating device 42 attached to the side illuminates the object side to obtain a clear image, and the illuminant 17 provided on the probe head 10 emits light to prevent the occurrence of halation. And a good image is obtained.

Since the watermark 53g and the fixed table 61 are made of a transparent material, the CCD camera 2
7. The electrode pattern and the probe head 10 can be positioned on a straight line. Therefore, the CCD camera 2
There is no so-called offset in the photographing angle of No. 7, and accurate positioning of the electrode pattern can be performed. As a result, a proper conduction test can be performed.

In the above-described embodiment, the holding member is replaced with holding plates 19a, 19b, 19c provided with recesses 19d.
However, the present invention is not limited to this, and may be a flat plate without a concave portion or a rod-like body having a square or round cross section. Further, a plate-like body in which a plurality of round bars are connected and integrated may be used. In short, any plate-like body that can disperse and fix the stress due to the pressing force of the pressing tool over the entire width of the joint portion 22a may be used. Further, the elastic layer is not limited to rubber, and any material having elasticity that can be formed into a layer, such as styrene foam or sponge, can be used. Further, the watermark portion 53g is formed of a transparent plate, but the watermark portion 53g may be formed of a simple window having nothing.

[Brief description of the drawings]

FIG. 1 is a front view of a probe head provided in a continuity inspection device according to an embodiment of the present invention.

FIG. 2 is a bottom view showing a main part of the probe head.

FIG. 3A is a left side view of the probe head,
(B) is a diagram for explaining one surface on the lower surface.

FIG. 4A is a rear view of the probe head,
(B) is a diagram for explaining one surface on the lower surface.

FIG. 5 is a perspective view showing a fixed state of a probe.

FIG. 6 is a longitudinal sectional view showing a fixed state of the probe.

FIG. 7 is a schematic front view showing a main body of the continuity inspection device.

FIG. 8 is a plan view of FIG. 7;

FIG. 9 is a plan view showing a state in which a shaft and a horizontal plate are juxtaposed on a main body of the continuity inspection device.

FIG. 10 is a front view showing a state where the XY table is attached to the XY table driving device.

FIG. 11A is a plan view of a carriage base to which a CCD camera is attached, and FIG. 11B is a front view thereof.

FIG. 12 is a plan view of an XY table.

FIG. 13A is a plan view of a fixed table,
(B) is a front view with a part thereof cut away.

[Explanation of symbols]

10: Probe head, 13: Probe fixing part, 13a
... accommodation recess, 13b ... light path, 14 ... probe support,
17: luminous body, 18: probe substrate, 18a: probe, 19a, 19b. 19c: holding plate, 20a, 20
b. 20c bolt, 21 sheet layer, 22 flexible substrate, 22a joint, 23 elastic rubber layer, 27
CCD camera, 28 ... X-axis moving mechanism, 29 ... Y-axis moving mechanism.

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Kengo Tsuchida 283 Aoyacho, Ayacho, Hamamatsu City, Shizuoka Prefecture Inside (72) Inventor Takeshi Ito 283 283 Aoyacho, Ayamachi, Hamamatsu City, Shizuoka Prefecture Inside Yamahafa Intec ( 72) Inventor Ken Kasahara 283 Aoya-cho, Hamamatsu-shi, Shizuoka Prefecture F-term in Yamahafa Intec Co., Ltd. 2G011 AF01 2G014 AA02 AA03 AB02 AB59 AC09

Claims (4)

[Claims] 1. An image photographing apparatus comprising: a flexible substrate and a probe substrate which are sandwiched and fixed between a probe support and a fixing member in a state where the flexible substrate and the probe substrate are overlapped; A continuity inspection device that conducts continuity inspection of the electrode pattern by positioning and then contacting using a moving mechanism, wherein the fixing member is arranged to be wider than a width in a width direction of a joint between the probe substrate and the flexible substrate. A continuity inspection device comprising: a holding member that is set to be long; and a fixing member that detachably fixes both end sides of the holding member to a surface of the probe support. 2. The continuity inspection device according to claim 1, wherein an elastic layer is interposed between the joint between the probe substrate and the flexible substrate and the holding member. 3. A device according to claim 1, wherein a layer made of anisotropic conductive rubber is interposed between said probe substrate and said flexible substrate.
Or the continuity inspection device according to 2. 4. The continuity inspection device according to claim 1, wherein a light emitting device is attached to the probe support toward the image photographing device.