JP2002338365A - Aluminum nitride-base composite powder and method of manufacturing for the same - Google Patents
Aluminum nitride-base composite powder and method of manufacturing for the sameInfo
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、熱伝導性が必要な
自動車部品や機械部品、半導体製造用治具等に使用され
る高熱伝導・高耐摩耗・低摩擦の構造用セラミックス材
料として、優れた特性を有する窒化アルミニウム系焼結
体の原料粉末及びその製造方法に関するものである。TECHNICAL FIELD The present invention is excellent as a ceramic material for structural use having high heat conductivity, high wear resistance and low friction used for automobile parts and machine parts requiring heat conductivity, jigs for semiconductor production and the like. The present invention relates to a raw material powder of an aluminum nitride-based sintered body having excellent characteristics and a method for producing the same.
【０００２】[0002]
【従来の技術】窒化アルミニウム（ＡｌＮ）は軽量で熱
伝導性、耐食性、耐熱衝撃性に優れた材料であるため
に、半導体製造用治具や放熱基板、ヒーター等に幅広く
使用されている。2. Description of the Related Art Aluminum nitride (AlN) is widely used in jigs for manufacturing semiconductors, heat-radiating substrates, heaters, and the like because it is lightweight and has excellent thermal conductivity, corrosion resistance, and thermal shock resistance.
【０００３】このような優れた特性を持つ窒化アルミニ
ウム材料の用途を広げるためには、窒化アルミニウムに
新規な機械的特性を付与することが重要である。その一
つの試みとして、窒化アルミニウムの高い熱伝導性を利
用した摺動部品等への応用が考えられる。In order to expand the applications of aluminum nitride materials having such excellent properties, it is important to impart new mechanical properties to aluminum nitride. As one of the attempts, application to sliding parts utilizing the high thermal conductivity of aluminum nitride can be considered.
【０００４】窒化アルミニウムを摺動部品等の用途に適
用するためには、機械的特性の他、高耐摩耗性及び低摩
擦係数を持つことが必要であるが、このような特性を持
つ窒化アルミニウム材料については未だ研究されていな
い。In order to apply aluminum nitride to applications such as sliding parts, it is necessary to have high wear resistance and low coefficient of friction in addition to mechanical properties. Materials have not yet been studied.
【０００５】[0005]
【発明が解決しようとする課題】低摩擦係数を有するセ
ラミック材料を作製するために一般的に行われる手法と
しては、窒化ホウ素、硫化モリブデン、グラファイト等
の固体潤滑材を材料中に分散させる手法がよく知られて
いる。As a general method for producing a ceramic material having a low coefficient of friction, a method of dispersing a solid lubricant such as boron nitride, molybdenum sulfide, and graphite in the material is known. well known.
【０００６】しかしながら、これら固体潤滑材の第２相
はサブミクロン程度の大きさでしか分散させることがで
きず、組織的にバラツキが生じるため、セラミック材料
における摩擦係数の低下は困難であった。[0006] However, the second phase of these solid lubricants can be dispersed only in a size of about a submicron, and there is a systematic variation, so that it has been difficult to reduce the friction coefficient of the ceramic material.
【０００７】本発明は、このような従来の事情に鑑み、
優れた熱伝導性を有すると共に、低い摩擦係数と高い耐
摩耗性を備えた窒化アルミニウム系焼結体の原料粉末、
及びその製造方法を提供することを目的とする。The present invention has been made in view of such a conventional situation,
Raw material powder of aluminum nitride sintered body with excellent thermal conductivity, low coefficient of friction and high wear resistance,
And a method for producing the same.
【０００８】[0008]
【課題を解決するための手段】上記目的を達成するため
に、本発明は、平均粒径がいずれも３０ｎｍ以下の窒化
アルミニウム、窒化チタン、窒化ホウ素、ホウ化チタン
と、これらの粒子の表面を覆っている少なくともアモル
ファスを含む相とからなり、平均粒径が０.３μｍ以上
である窒化アルミニウム系複合粉末を提供するものであ
る。In order to achieve the above object, the present invention provides an aluminum nitride, a titanium nitride, a boron nitride, a titanium boride having an average particle diameter of 30 nm or less, and the surface of these particles. An object of the present invention is to provide an aluminum nitride-based composite powder having a covering phase containing at least an amorphous phase and having an average particle size of 0.3 μm or more.
【０００９】また、本発明における窒化アルミニウム系
複合粉末の製造方法は、窒化アルミニウム粉末と窒化ホ
ウ素粉末及び金属チタン粉末を、窒素雰囲気中において
室温〜２５０℃の温度にて、５〜２００Ｇの加速度で混
合することを特徴とする。The method for producing an aluminum nitride-based composite powder according to the present invention is characterized in that the aluminum nitride powder, the boron nitride powder and the metal titanium powder are mixed at a temperature of room temperature to 250 ° C. in a nitrogen atmosphere at an acceleration of 5 to 200 G. It is characterized by mixing.
【００１０】上記本発明の窒化アルミニウム系複合粉末
の製造方法においては、窒素雰囲気の圧力が０.０５〜
１.０ＭＰａであること、金属チタン粉末の添加量が５
〜５０重量％であること、窒化ホウ素粉末の添加量が２
〜４０重量％であること、及び混合時間が０.５〜５０
時間であることが望ましい。In the method for producing an aluminum nitride-based composite powder according to the present invention, the pressure of the nitrogen atmosphere is 0.05 to 5%.
1.0 MPa, and the addition amount of metallic titanium powder is 5
To 50% by weight, and the amount of boron nitride powder added is 2
-40% by weight, and the mixing time is 0.5-50
Desirably time.
【００１１】[0011]
【発明の実施の形態】本発明の窒化アルミニウム系複合
粉末においては、平均粒径３０ｎｍ以下の微細な窒化ア
ルミニウム（ＡｌＮ）粒子と、窒化チタン（ＴｉＮ）、
窒化ホウ素（ＢＮ）、ホウ化チタン（ＴｉＢ２）の微細
な各粒子が分散しているために、焼結中におこるＡｌＮ
の粒成長並びにその分散粒子自身の粒成長を抑制するこ
とができる。従って、この窒化アルミニウム系複合粉末
を用いることにより、窒化ホウ素が極めて微細且つ均一
に分散した、低摩擦係数、高耐摩耗性を持つ、ナノ構造
の窒化アルミニウム系焼結体を得ることができる。BEST MODE FOR CARRYING OUT THE INVENTION In the aluminum nitride-based composite powder of the present invention, fine aluminum nitride (AlN) particles having an average particle size of 30 nm or less, titanium nitride (TiN),
Since fine particles of boron nitride (BN) and titanium boride (TiB 2 ) are dispersed, AlN occurs during sintering.
And the grain growth of the dispersed particles themselves can be suppressed. Therefore, by using this aluminum nitride-based composite powder, it is possible to obtain a nanostructured aluminum nitride-based sintered body in which boron nitride is extremely finely and uniformly dispersed, which has a low friction coefficient and high wear resistance.
【００１２】また、平均粒径３０ｎｍ以下の微細な窒化
アルミニウム、窒化チタン、窒化ホウ素、ホウ化チタン
の各粒子は、互いに凝集して複合粉末を形成しているほ
か、その周りを主にアモルファスからなる金属チタン及
び／又はアルミニウム又はその化合物で覆われているた
めに、通常の非酸化物系のナノ粉末よりも簡便に取り扱
うことができる。また、その凝集体である複合粉末の平
均粒径は０.３〜１.０μｍ程度であるため、従来の市販
粉末と同様に取り扱うことができる。In addition, fine aluminum nitride, titanium nitride, boron nitride, and titanium boride particles having an average particle diameter of 30 nm or less are aggregated with each other to form a composite powder, and the surroundings are mainly amorphous. Can be handled more easily than ordinary non-oxide nanopowder because it is covered with metallic titanium and / or aluminum or its compound. Further, since the average particle size of the composite powder, which is the aggregate, is about 0.3 to 1.0 μm, it can be handled in the same manner as a conventional commercial powder.
【００１３】上記の窒化アルミニウム系複合粉末の製造
方法としては、市販の窒化アルミニウム粉末に、窒化ホ
ウ素粉末と金属チタン粉末を添加して、窒素雰囲気中に
て室温〜２５０℃の温度で、５〜２００Ｇの高加速度で
混合する。尚、混合手段としては、粉砕を伴うボールミ
ルやアトライターを用いることが好ましい。As a method for producing the above-mentioned aluminum nitride-based composite powder, boron nitride powder and metal titanium powder are added to commercially available aluminum nitride powder, and the resulting mixture is heated to room temperature to 250 ° C. in a nitrogen atmosphere at a temperature of 5 to 250 ° C. Mix at a high acceleration of 200G. In addition, as a mixing means, it is preferable to use a ball mill or an attritor with pulverization.
【００１４】かかる高加速度での混合により、金属チタ
ンが下記化学式１の各反応を起こして窒化ホウ素と窒化
アルミニウムを微細化していくものと考えられる。ここ
で加速度を５〜２００Ｇに限定する理由は、５Ｇ未満で
は均一な粉末の微細化が起こり難く、最終的な焼結体の
結晶粒径が不均一になってしまうためである。また、混
合時の加速度が２００Ｇを超えると、ポットやボールが
摩耗するため不純物が混入され、熱伝導率が低下するた
めである。It is considered that the mixing at such a high acceleration causes the titanium metal to cause each reaction of the following chemical formula 1 to make boron nitride and aluminum nitride finer. Here, the reason why the acceleration is limited to 5 to 200 G is that if the acceleration is less than 5 G, uniform powder refinement is unlikely to occur, and the crystal grain size of the final sintered body becomes non-uniform. On the other hand, if the acceleration during mixing exceeds 200 G, the pots and balls will be worn, so that impurities are mixed in and the thermal conductivity decreases.
【００１５】[0015]
【化１】２ＢＮ＋Ｔｉ→ＴｉＢ２＋Ｎ２ ＡｌＮ＋Ｔｉ→ＴｉＮ＋Ａｌ ２Ｔｉ＋Ｎ２→２ＴｉＮ ２Ａｌ＋Ｎ２→２ＡｌＮEmbedded image 2BN + Ti → TiB2+ N2 AlN + Ti → TiN + Al 2Ti + N2→ 2TiN 2Al + N2→ 2AlN
【００１６】この高加速度混合する際の温度としては、
室温〜２５０℃、好ましくは５０℃〜２００℃である。
この温度領域において上記反応が促進され、短時間で目
的とする複合粉末を得ることができる。混合時間につい
ては、０.５時間未満では反応に伴う微細化が進行せ
ず、５０時間を超えると不純物が混入するため、０.５
〜５０時間とすることが望ましい。尚、混合の際の加速
度、温度、混合時間は、その作製したい複合粉末の条件
により適宜制御することが必要である。The temperature at the time of the high acceleration mixing is as follows:
Room temperature to 250 ° C, preferably 50 ° C to 200 ° C.
In this temperature range, the above reaction is promoted, and the desired composite powder can be obtained in a short time. With respect to the mixing time, if the mixing time is less than 0.5 hour, the fineness accompanying the reaction does not progress, and if the mixing time is more than 50 hours, impurities are mixed.
It is desirable to set it to 50 hours. In addition, it is necessary to appropriately control the acceleration, temperature and mixing time during mixing depending on the conditions of the composite powder to be produced.
【００１７】また、上記の反応を起こすためには窒素雰
囲気が必要であり、その窒素雰囲気の圧力は０.０５〜
１.０ＭＰａの範囲が好ましく、０.０８〜０.１５ＭＰ
ａの範囲が更に好ましい。窒素雰囲気の圧力が０.０５
ＭＰａ未満では制御が困難であり、また１.０ＭＰａを
超えると耐圧容器等の特殊な容器が必要となるので好ま
しくない。In order to cause the above reaction, a nitrogen atmosphere is required.
The range of 1.0 MPa is preferable, and 0.08 to 0.15 MPa
The range of a is more preferable. Nitrogen atmosphere pressure is 0.05
If it is less than MPa, it is difficult to control, and if it exceeds 1.0 MPa, a special container such as a pressure-resistant container is required, which is not preferable.
【００１８】金属チタン粉末の添加量は、特に制限はな
いが、５重量％未満の場合には反応するＴｉの量が少な
過ぎるために、窒化ホウ素及び窒化アルミニウムを微細
化することができない。また、その添加量が５０重量％
を超えると、反応するＴｉの量が多くなり、焼結体の色
ムラ等が発生するために好ましくない。従って、金属チ
タン粉末の添加量は、５〜５０重量％の範囲が好まし
い。The amount of the metal titanium powder added is not particularly limited. However, if it is less than 5% by weight, the amount of reactive Ti is too small, so that boron nitride and aluminum nitride cannot be miniaturized. In addition, the addition amount is 50% by weight.
Exceeding the range is undesirable because the amount of reactive Ti increases and uneven color of the sintered body occurs. Therefore, the addition amount of the metal titanium powder is preferably in the range of 5 to 50% by weight.
【００１９】また、窒化ホウ素粉末の添加量について
も、特に制限はないが、十分な低摩擦特性を得るために
は２重量％以上の窒化ホウ素が必要であり、また材料の
優れた機械的特性を維持するためには４０重量％以下が
適当であることから、２〜４０重量％の範囲が好まし
い。The amount of boron nitride powder to be added is not particularly limited, but boron nitride must be contained in an amount of 2% by weight or more in order to obtain sufficient low friction characteristics. Is preferably 40% by weight or less in order to maintain the above, the range of 2 to 40% by weight is preferable.
【００２０】かかる本発明の窒化アルミニウム系複合粉
末を用いて製造される窒化アルミニウム系複合焼結体
は、ＡｌＮ、ＴｉＮ、ＴｉＢ２、ＢＮが微細な粒径で制
御された結晶構造を持っており、高い熱伝導性を有する
と共に、窒化ホウ素が極めて微細且つ均一に分散してい
るため、摩擦係数が低く、しかも優れた耐摩耗性を備え
ている。The aluminum nitride-based composite sintered body manufactured using the aluminum nitride-based composite powder of the present invention has a crystal structure in which AlN, TiN, TiB 2 , and BN are controlled with a fine particle size. In addition to having high thermal conductivity, boron nitride is extremely finely and uniformly dispersed, so that it has a low friction coefficient and excellent wear resistance.
【００２１】[0021]
【実施例】実施例１ 市販の平均粒径０.６μｍのＡｌＮ粉末に、焼結助剤と
して２.５ｗｔ％のＹ２Ｏ３粉末を加え、更に平均粒径
１０μｍの金属Ｔｉ粉末を２０ｗｔ％、平均粒径５μｍ
のＢＮ粉末を１０ｗｔ％添加して、０.１ＭＰａの窒素
雰囲気中において５０℃の温度条件で、遊星ボールミル
を用いて１００Ｇの加速度で８時間混合した。【Example】Example 1 A commercially available AlN powder having an average particle size of 0.6 μm was mixed with a sintering aid.
And 2.5 wt% Y2O3Add powder and average particle size
20 wt% of 10 μm metal Ti powder, average particle size 5 μm
10wt% of BN powder of 0.1MPa nitrogen
Planetary ball mill at 50 ° C in atmosphere
Was mixed at an acceleration of 100 G for 8 hours.
【００２２】得られた複合粉末をＸＲＤにて定性分析を
行ったところ、ＡｌＮ、ＴｉＮ、ＴｉＢ２、及びＢＮの
各ピークを確認することができた。また、この複合粉末
を透過電子顕微鏡で観察した結果、ＡｌＮ、ＴｉＮ、Ｔ
ｉＢ２、及びＢＮの各粒子の平均粒径はいずれも３０ｎ
ｍ以下であり、それらの粒子は主にアモルファスのＴｉ
／Ａｌ及びその化合物で覆われている構造であることが
分かった。尚、得られた複合粉末の平均粒径は０.８μ
ｍであった。When the obtained composite powder was subjected to qualitative analysis by XRD, peaks of AlN, TiN, TiB 2 and BN could be confirmed. Further, as a result of observing this composite powder with a transmission electron microscope, AlN, TiN, TN
The average particle size of each of iB 2 and BN particles is 30 n.
m, and those particles are mainly amorphous Ti
/ Al and its structure. The average particle size of the obtained composite powder was 0.8 μm.
m.
【００２３】この複合粉末をカーボンダイスに充填した
後、放電プラズマ焼結機（ＳＰＳ）を用いて１４００℃
で焼結した。得られた焼結体について、研削、ラッピン
グ処理した後、ボールオンディスク試験機で耐摩耗特性
を評価した。その結果、得られた焼結体は摩擦係数０.
３と低摩擦係数であり、比摩耗量が３.０×１０−７ｍ
ｍ２／Ｎという高い耐摩耗性を示した。また、得られた
焼結体は４０Ｗ／ｍ・Ｋの熱伝導率を持っていた。After the composite powder is filled in a carbon die, it is heated to 1400 ° C. using a discharge plasma sintering machine (SPS).
Sintered. After the obtained sintered body was subjected to grinding and lapping treatment, the wear resistance was evaluated using a ball-on-disk tester. As a result, the obtained sintered body had a coefficient of friction of 0.1.
3 and a low coefficient of friction with a specific wear of 3.0 × 10 −7 m
It exhibited high abrasion resistance of m 2 / N. Further, the obtained sintered body had a thermal conductivity of 40 W / m · K.
【００２４】また、この焼結体を研磨した後、Ａｒイオ
ンエッチングで薄膜試験片を作製し、透過電子顕微鏡を
用いてＡｌＮ、ＴｉＮ、ＢＮ、ＴｉＢ２の各粒径を評価
した結果、各々の粒子は２００ｎｍ以下と非常に微細で
あった。Further, after polishing the sintered body, and a thin film specimen in Ar ion etching, using a transmission electron microscope AlN, TiN, BN, results of evaluation of the particle size of the TiB 2, each of the The particles were very fine, less than 200 nm.
【００２５】比較のために、遊星ボールミルに代えて、
同じ原料粉末を超音波混合した以外は上記の実施例１と
同様にして複合粉末を作製し、その複合粉末を上記と同
様に焼結した。得られた比較例の焼結体中には数μｍの
大きさのＴｉＮ粒子やＢＮ粒子が観察され、その摩擦係
数も０.７程度と高く、比摩耗量は６.０×１０−５ｍｍ
２／Ｎであった。For comparison, instead of a planetary ball mill,
A composite powder was prepared in the same manner as in Example 1 except that the same raw material powder was ultrasonically mixed, and the composite powder was sintered as described above. TiN particles and BN particles having a size of several μm were observed in the obtained sintered body of Comparative Example, the coefficient of friction was as high as about 0.7, and the specific wear amount was 6.0 × 10 −5 mm.
2 / N.
【００２６】実施例２ 市販の平均粒径０.６μｍのＡｌＮ粉末に、実施例１と
同じ焼結助剤を加え、更に平均粒径１０μｍの金属Ｔｉ
粉末と平均粒径５μｍのＢＮ粉末をそれぞれ下記表１に
示す添加量で加えた。[0026]Example 2 Example 1 was added to a commercially available AlN powder having an average particle size of 0.6 μm.
The same sintering aid is added, and a metal Ti having an average particle size of 10 μm is further added.
The powder and the BN powder having an average particle size of 5 μm are shown in Table 1 below, respectively.
It was added in the indicated amount.
【００２７】[0027]
【表１】 [Table 1]
【００２８】上記表１における各試料の原料粉末を、雰
囲気、圧力、温度、加速度、混合時間の各混合条件につ
いて下記表２に示す条件Ａ〜Ｈにより、実施例１と同様
に遊星ボールミルを用いて混合した。The raw material powder of each sample in Table 1 was mixed with an atmosphere, pressure, temperature, acceleration, and mixing time by using a planetary ball mill in the same manner as in Example 1 under the conditions A to H shown in Table 2 below. And mixed.
【００２９】[0029]
【表２】 [Table 2]
【００３０】得られた各複合粉末について、実施例１と
同様にして、ＡｌＮ、ＴｉＮ、ＢＮ、ＴｉＢ２の各粒子
の平均粒径を求めた。その結果を下記表３に示す。[0030] For each composite powder obtained in the same manner as in Example 1, AlN, TiN, BN, an average particle size of each particle of TiB 2 was obtained. The results are shown in Table 3 below.
【００３１】[0031]
【表３】 [Table 3]
【００３２】上記の結果から、金属Ｔｉ粉末とＢＮ粉末
の添加量、並びに雰囲気、圧力、温度、加速度、混合時
間の各混合条件について、本発明の範囲内で適切に選択
することによって、微細な粒子からなる複合粉末が得ら
れることが分かる。また、遊星ボールミル以外の混合装
置、アトライター等を用いた場合でも、５〜２００Ｇの
加速度で混合すれば、ほぼ同様な結果を得ることができ
た。From the above results, fine selection of the addition amounts of the metal Ti powder and the BN powder and the respective mixing conditions of the atmosphere, pressure, temperature, acceleration, and mixing time within the scope of the present invention can provide finer powder. It can be seen that a composite powder composed of particles is obtained. Even when a mixing device other than a planetary ball mill, an attritor, or the like was used, almost the same results could be obtained by mixing at an acceleration of 5 to 200 G.
【００３３】[0033]
【発明の効果】本発明によれば、窒化アルミニウム系焼
結体の原料粉末として、生産が比較的容易であり、低温
での焼結が可能であって、焼結時における粒成長を抑制
することができる、微細な粒子からなる窒化アルミニウ
ム系複合粉末を提供することができる。According to the present invention, as a raw material powder for an aluminum nitride-based sintered body, production is relatively easy, sintering at a low temperature is possible, and grain growth during sintering is suppressed. And an aluminum nitride-based composite powder comprising fine particles.
【００３４】また、本発明の窒化アルミニウム系複合粉
末を用いることにより、高い熱伝導性を有すると共に、
低い摩擦係数を有し、耐摩耗性に優れた窒化アルミニウ
ム系焼結体を得ることができる。Further, by using the aluminum nitride-based composite powder of the present invention, not only has high thermal conductivity,
An aluminum nitride-based sintered body having a low coefficient of friction and excellent wear resistance can be obtained.
Claims (6)
アルミニウム、窒化チタン、窒化ホウ素、ホウ化チタン
と、これらの粒子の表面を覆っている少なくともアモル
ファスを含む相とからなり、平均粒径が０.３μｍ以上
である窒化アルミニウム系複合粉末。Claims: 1. An aluminum nitride, titanium nitride, boron nitride, or titanium boride having an average particle diameter of 30 nm or less, and a phase containing at least an amorphous phase covering the surface of these particles. An aluminum nitride-based composite powder having a size of 0.3 μm or more.
及び金属チタン粉末を、窒素雰囲気中において室温〜２
５０℃の温度にて、５〜２００Ｇの加速度で混合するこ
とを特徴とする窒化アルミニウム系複合粉末の製造方
法。2. An aluminum nitride powder, a boron nitride powder and a metal titanium powder are mixed at room temperature to 2
A method for producing an aluminum nitride-based composite powder, comprising mixing at a temperature of 50C at an acceleration of 5 to 200 G.
ａであることを特徴とする、請求項２に記載の窒化アル
ミニウム系複合粉末の製造方法。3. The pressure of a nitrogen atmosphere is 0.05 to 1.0 MPa.
3. The method for producing an aluminum nitride-based composite powder according to claim 2, wherein the method is a.
％であることを特徴とする、請求項２又は３に記載の窒
化アルミニウム系複合粉末の製造方法。4. The method for producing an aluminum nitride-based composite powder according to claim 2, wherein the addition amount of the metal titanium powder is 5 to 50% by weight.
％であることを特徴とする、請求項２〜４のいずれかに
記載の窒化アルミニウム系複合粉末の製造方法。5. The method for producing an aluminum nitride-based composite powder according to claim 2, wherein the addition amount of the boron nitride powder is 2 to 40% by weight.
を特徴とする、請求項２〜５のいずれかに記載の窒化ア
ルミニウム系複合粉末の製造方法。6. The method for producing an aluminum nitride-based composite powder according to claim 2, wherein the mixing time is 0.5 to 50 hours.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102344286A (en) * | 2010-07-27 | 2012-02-08 | 台盐实业股份有限公司 | Aluminum nitride ceramic radiating fin and manufacturing method thereof |
| JP7055811B2 (en) | 2018-03-26 | 2022-04-18 | 日本碍子株式会社 | Wafer support |
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| JPH11139875A (en) * | 1997-11-06 | 1999-05-25 | Isuzu Ceramics Res Inst Co Ltd | Silicon nitride-boron nitride composite sintered compact |
| JPH11139882A (en) * | 1997-11-06 | 1999-05-25 | Sumitomo Electric Ind Ltd | Composite silicon nitride powder and its production |
| JP2000297301A (en) * | 1999-04-15 | 2000-10-24 | Sumitomo Electric Ind Ltd | Silicon carbide based composite material, its powder, and their manufacture |
| WO2002085812A1 (en) * | 2001-04-20 | 2002-10-31 | Sumitomo Electric Industries, Ltd. | Silicon nitride based composite sintered product and method for production thereof |
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| JPS55453B2 (en) * | 1973-02-15 | 1980-01-08 | ||
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| JPH11139882A (en) * | 1997-11-06 | 1999-05-25 | Sumitomo Electric Ind Ltd | Composite silicon nitride powder and its production |
| JP2000297301A (en) * | 1999-04-15 | 2000-10-24 | Sumitomo Electric Ind Ltd | Silicon carbide based composite material, its powder, and their manufacture |
| WO2002085812A1 (en) * | 2001-04-20 | 2002-10-31 | Sumitomo Electric Industries, Ltd. | Silicon nitride based composite sintered product and method for production thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102344286A (en) * | 2010-07-27 | 2012-02-08 | 台盐实业股份有限公司 | Aluminum nitride ceramic radiating fin and manufacturing method thereof |
| JP7055811B2 (en) | 2018-03-26 | 2022-04-18 | 日本碍子株式会社 | Wafer support |
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