JP2002338364A - Green sheet for ceramic laminated material and method of producing ceramic laminated material using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide green sheets for a ceramic laminated material, which exhibit excellent handleability such as release property or lamination property, and a method of producing the ceramic laminated material using the same. SOLUTION: The green sheets for the ceramic laminated material are characterized in that a thermoplastic resin layer is formed on at least one surface of each ceramic green sheet. The ceramic laminated material is produced by laminating at least two green sheets and firing the laminated sheets under prescribed conditions.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a ceramic laminated green sheet suitably used for manufacturing electronic components such as a laminated ceramic capacitor, a multilayer ceramic substrate, a laminated IC package, a piezoelectric element, an inductor, a transformer, and a filter. The present invention relates to a method for manufacturing a ceramic laminate used.

[0002]

2. Description of the Related Art In recent years, with the miniaturization of electronic equipment, thinning and high capacity of ceramic substrates and ceramic capacitors used for the electronic equipment have been advanced, and therefore, thin films of ceramic green sheets used for these electronic parts have been developed. Is needed.

Conventionally, for example, in a multilayer ceramic capacitor, a slurry in which ceramic powder as a dielectric substance, a binder, a solvent, and additives such as a plasticizer, a dispersant, and an antistatic agent are uniformly dispersed is coated on a carrier sheet. Then, dried to produce a ceramic green sheet, a conductive pattern to be an internal electrode is formed on the green sheet by a printing method, and then laminated into a predetermined size,
It is manufactured by pressing and sintering, and then attaching external electrodes.

[0004] However, when the thickness of the ceramic green sheet is reduced in the conventional manufacturing process, the strength of the green sheet is reduced, so that the green sheet is deformed or cracked when the green sheet is peeled from the carrier sheet. As a result, the multilayer ceramic capacitor obtained by laminating and firing such green sheets has a problem that voids are likely to be generated between the laminations. In order to increase the strength of the green sheet, for example, it is conceivable to increase the degree of polymerization of the binder resin, or to increase the concentration of the binder.However, when the degree of polymerization of the binder resin is increased, the viscosity of the slurry increases. As a result, it becomes easier to embrace air during coating, and as a result, fine pores are generated in the green sheet, and the dispersibility of the ceramic powder is deteriorated, and the electrical characteristics as a capacitor are reduced. There was a problem.

A carrier sheet used in the production of a conventional ceramic green sheet has a cured surface of a silicone resin formed on a surface on which a ceramic slurry is applied to improve releasability. The cured film is transferred to the ceramic green sheet side, lowering the lamination adhesiveness of the ceramic green sheet, remaining as a foreign substance in the ceramic laminate, forming a void after firing, and improving the performance of the capacitor. There was a problem of lowering.

[0006]

SUMMARY OF THE INVENTION The present invention provides a green sheet for ceramic lamination which has improved the drawbacks of the prior art and has excellent handling properties such as peeling and lamination, and a method for producing a ceramic laminate using the same. It is something you want to do.

[0007]

The present invention employs the following means in order to solve the above-mentioned problems. That is, the green sheet for ceramic lamination of the present invention is characterized in that a thermoplastic resin layer is formed on at least one surface of the ceramic green sheet. Further, the method for manufacturing a ceramic laminate of the present invention,
After laminating two or more green sheets for ceramic lamination, firing is performed under predetermined firing conditions.

[0008]

DETAILED DESCRIPTION OF THE INVENTION The present invention has been made as a result of intensive studies on the above-mentioned problems, that is, a green sheet for ceramic lamination excellent in handling properties such as peeling and lamination and a method for producing a ceramic laminate using the same. On one side, using a carrier sheet formed with a thermoplastic resin layer capable of being peeled off from the base film, the ceramic green sheet formed on the thermoplastic resin surface of the carrier sheet is peeled off from the base film together with the thermoplastic resin layer. It has been found that such a problem can be solved at once by laminating and then firing.

It is important that the green sheet for ceramic lamination of the present invention has a thermoplastic resin layer formed on at least one surface of the ceramic green sheet.

By forming a thermoplastic resin layer on at least one side of a ceramic green sheet,
Even if the thermoplastic resin layer serves as a reinforcing material and is a thin ceramic green sheet, the green sheet may be deformed or cracked when peeled from the carrier sheet or laminated. And excellent handleability can be achieved. Further, according to the embodiment of the present invention, there is no need to provide a cured film such as a silicone resin on the surface of the carrier sheet, and therefore, there is an advantage that the adverse effect that the cured film of the silicone resin is transferred to the green sheet side is eliminated. .

In the green sheet for ceramic lamination of the present invention, the method of forming a thermoplastic resin layer on at least one surface of the ceramic green sheet is not particularly limited. For example, a peelable thermoplastic resin layer is formed on one surface of a polyester film. Using the formed carrier sheet, a ceramic slurry is applied to the surface of the thermoplastic resin layer of the carrier sheet and dried to form a ceramic green sheet. Then, when the ceramic green sheet is peeled off, the ceramic green sheet and the thermoplastic resin layer are removed. Can be preferably produced by integrally peeling off.

The ceramic raw material in the present invention includes:
There is no particular limitation, and various dielectric materials can be used. For example, oxides composed of titanium, aluminum, barium, lead, zirconium, silicon, yttrium, etc., barium titanate, Pb (Mg _1/3 , Nb _2/3 ) O ₃ , Pb (S
m _1/2 , Nb _1/2 ) O ₃ , Pb (Zn _1/3 , Nb _2/3 ) O
₃ , PbThO ₃ , PbZrO _{3 and the} like can be used. These may be used alone or as a mixture of two or more.

The binder used in the ceramic slurry of the present invention includes polyurethane resin, urea resin,
Melamine resin, epoxy resin, vinyl acetate resin,
An acrylic resin type, an aqueous polymer type, or the like can be used. These may be used alone or as a mixture of two or more.

As the solvent used in the ceramic slurry of the present invention, toluene, ethanol, methyl ethyl ketone, isopropyl alcohol, γ-butyl lactone and the like can be used. These may be used alone or as a mixture of two or more.

In the ceramic slurry of the present invention, if necessary, a plasticizer, a dispersant, an antistatic agent, a surfactant and the like may be added.

The thermoplastic resin layer formed on the green sheet for ceramic lamination of the present invention has a proper adhesiveness with a base film as a carrier sheet, and has an adhesive strength with the ceramic green sheet as a carrier sheet. It is sufficient that the adhesive strength with the base film is higher. For example, when the base film is a polyester film, a polyolefin resin, a polyphenylene sulfide resin, a polyamide resin, a resin mainly composed of polyhydroxycarboxylic acid, a polyvinyl alcohol resin And the like can be preferably used.

As the above-mentioned polyolefin resin, polyolefin and polyolefin copolymer resin are used. As the polyolefin, polyethylene, polypropylene and the like are used. Further, the polyolefin copolymer resin is preferably a polymer containing polypropylene as a main component from the viewpoint of releasability, and among them, a random copolymer with another α-olefin containing propylene as a main component is transparent. It can be preferably used from the viewpoint of sex.

Examples of the α-olefin monomer to be copolymerized include ethylene, butene-1, pentene-1, 4-methylpentene-1, hexene-1, octene-1, and the like, with ethylene and butene-1 being particularly preferred. . As specific embodiments, ethylene-propylene copolymer, ethylene-propylene-butene-1 copolymer, propylene-
Butene-1 copolymer and the like can be used.

Examples of the polyamide resin include nylon 6, nylon 66, nylon 610, nylon 11,
Nylon 12, polyethylene isophthalamide, polymethaxylene adipamide, poly (hexamethylene isophthalamide / terephthalamide), poly (hexamethylene terephthalamide / monomethyl terephthalamide), hexamethylene isophthalamide / terephthalamide and ε- Copolymers with caprolactam, copolymers of hexamethylene terephthalamide and hexamethylene adipamide, and the like can be mentioned.
Of course, these may be used alone or as a mixture of two or more components.

Examples of the resin mainly composed of polyhydroxycarboxylic acid include L-lactic acid, D-lactic acid, glycolic acid, 3-hydroxybutyric acid, 4-hydroxybutyric acid, 3-hydroxyvaleric acid, 4-hydroxyvaleric acid, Polymers such as 6-hydroxycaproic acid and copolymers thereof can be used. Among these, lactic acid homopolymer (polylactic acid), a copolymer of lactic acid and another hydroxycarboxylic acid, or a mixture thereof can be particularly preferably used.

Further, dicarboxylic acids and glycols can be used as long as the effects of the present invention are not impaired. The mixture of the lactic acid component and other components is preferably used in various combinations so that the content of the lactic acid component in the polymer is 50 mol% or more.

The polyolefin resin, polyphenylene sulfide resin, polyamide resin, resin mainly composed of polyhydroxycarboxylic acid, polyvinyl alcohol resin, etc. constituting the thermoplastic resin layer of the present invention may be added with a heat stabilizer if necessary. An antioxidant, an ultraviolet absorber, an antistatic agent, a crystal nucleating agent, a pigment, a plasticizer, a terminal blocking agent, an organic lubricant such as a fatty acid ester and a wax, or an antifoaming agent such as a polysiloxane may be blended.

In the present invention, surface treatment such as corona surface treatment is performed on the surface of the thermoplastic resin layer to be bonded to the ceramic green sheet to increase the wetting tension on the surface of the thermoplastic resin layer. It can be preferably employed to improve the adhesiveness. As the atmosphere gas during the corona discharge treatment, oxygen, air, carbon dioxide, a mixed system of nitrogen / carbon dioxide, or the like is preferable.

In the present invention, the thickness of the thermoplastic resin layer is
The thickness is preferably not more than the thickness of the ceramic green sheet to be produced, usually in the range of 0.05 to 5 μm, more preferably 0.1 to 3 μm, and still more preferably 0.1 to 2 μm.
μm.

Next, a method for manufacturing a ceramic laminate of the present invention will be described.

According to the method for producing a ceramic laminate of the present invention, a ceramic green sheet is formed on a thermoplastic resin layer surface of a carrier sheet having a thermoplastic resin layer releasable from the base film on at least one surface of the base film. Removing the ceramic green sheet from the carrier sheet integrally with the thermoplastic resin layer to obtain a ceramic lamination green sheet, laminating the ceramic lamination green sheet in two or more layers, and firing under predetermined conditions. And obtaining a ceramic laminate.

As the base film constituting the carrier sheet used in the present invention, a film made of a polyester resin, a polyphenylene sulfide resin, a polyamide resin, a polyimide resin or the like is preferably used. From the viewpoint, a polyester film is more preferable.

As the polyester used for the polyester film, a polyester containing a dicarboxylic acid component and a glycol component as main components is preferably used. Copolymers of ethylene terephthalate and ethylene isophthalate, copolymers of butylene terephthalate and ethylene terephthalate, copolymers of ethylene terephthalate and ethylene-2,6-naphthalate, and blends thereof can be used.

The thickness of the base film used for the carrier sheet of the present invention is 10 to 500 μm in terms of rigidity and strength.
m is preferred.

In the production method of the present invention, the method of forming a peelable thermoplastic resin layer on one side of a base film serving as a carrier sheet is not particularly limited. For example, when a polyester film is used as a base film, the polyester raw material and A method in which the thermoplastic resin raw material is put into two extruders, melted, co-extruded from a die and stretched, and the above-mentioned thermoplastic resin layer raw material is put into an extruder on a polyester film produced as a single film. A method of laminating while extruding from a die by melt extrusion and extrusion, a method of separately producing a polyester film and the thermoplastic resin as a single film, and thermocompression bonding with a heated roll group, etc., a method of applying a thermoplastic resin on the surface of the polyester film Coating method and the like can be adopted, but particularly to obtain the effect of the present invention. As a preferable method also is a way.

In the method described above, for example, the above-mentioned thermoplastic resin (polyolefin resin, polyphenylene sulfide resin, polyamide resin, resin mainly composed of polyhydroxycarboxylic acid, etc.) constituting the peelable thermoplastic resin layer from the base film is used. One type and a polyester resin are laminated using two or more extruders, two or more layers of manifolds, and a merging block at a temperature equal to or higher than the melting point of the resin so that the peelable thermoplastic resin layer becomes the outermost layer, It is melt-extruded into a sheet form from a slit die, adhered to a casting drum by an electrostatic application method, cooled and solidified to obtain an unstretched laminated film, and the unstretched laminated film was subjected to simultaneous biaxial stretching method or sequential biaxial stretching method. By co-stretching and subjecting to a heat setting treatment, a thermoplastic resin film is applied to one side of the polyester film. It can be produced laminated carrier sheet.

In the method (1), for example, a carrier sheet can be prepared by applying an aqueous solution of a polyvinyl alcohol resin to the surface of a biaxially stretched polyester film and drying.

In the present invention, “peelable” means that the peel strength between the base film and the thermoplastic resin layer is 1 mN.
/ Cm to 500 mN / cm. More preferably, 1 mN / cm or more and 300 mN / cm
Or less, particularly preferably 1 mN / cm or more and 200 mN / c
m or less.

The green sheet for lamination of the ceramic of the present invention uses a carrier sheet produced by the above method, and while the carrier sheet is conveyed in one direction, a dielectric material is formed on the peelable thermoplastic resin layer surface of the carrier sheet. A ceramic slurry having a viscosity adjusted by mixing a certain ceramic powder, an organic binder, a solvent, a plasticizer, etc., is applied to a desired thickness using a blade coater, a knife coater, a cast coater, etc., and then the slurry is applied. The resulting carrier sheet is led to a drying step, and after removing the solvent to produce a ceramic green sheet, when peeling the ceramic green sheet from the carrier sheet, at the interface between the base film of the carrier sheet and the thermoplastic resin layer, By peeling ceramic green sheet and thermoplastic resin layer together Seisuru can.

After laminating two or more layers of the green sheets for ceramic lamination thus obtained and pressing them to form a laminate, the laminate is placed in a firing furnace and fired to obtain a ceramic laminate.

In the above manufacturing process, a conductive pattern containing a metal such as palladium, silver-palladium, nickel or the like may be printed on the surface of the ceramic green sheet by a method such as screen printing to form a conductive pattern. Alternatively, a plurality of sheets may be laminated to form a laminate, and then cut into a predetermined size. Further, an external electrode which is electrically connected to the internal electrode of the obtained ceramic laminate may be baked.
By combining such steps, a multilayer ceramic capacitor and a ceramic multilayer substrate can be suitably manufactured.

In the present invention, when the ceramic green sheet is separated from the carrier sheet, the ceramic green sheet is separated from the thermoplastic resin layer at the interface between the base film and the thermoplastic resin layer constituting the carrier sheet. It is important that they are peeled off together.
That is, by forming a green sheet for ceramic lamination in which a thermoplastic resin layer is formed on at least one surface of the ceramic green sheet, even if the thickness of the ceramic green sheet is reduced, the thermoplastic resin layer functions as a reinforcing material. As a result, the ceramic green sheet is easily peeled off from the carrier sheet, and the ceramic green sheet is not deformed or cracked at the time of peeling, and is excellent in handleability. Therefore, the yield of products is improved without occurrence of defective products.

In the present invention, the ceramic green sheet and the thermoplastic resin layer are laminated in an integrated state to form a ceramic laminate. Since the thermoplastic resin layer laminated in the laminate is formed of an organic resin, it can be decomposed and vaporized and eliminated in the firing process, similarly to the binder in the ceramic. Therefore, there is no need to add a special process to the conventional ceramic laminate manufacturing process.

Further, according to the method of the present invention, it is not necessary to form a cured silicone resin film on the surface of a carrier sheet, which has been conventionally required. Therefore, unlike the conventional manufacturing method, the silicone resin does not transfer to the ceramic green sheet side to form impurities,
A high-performance ceramic laminate with higher purity can be obtained.

Further, in the present invention, since the ceramic green sheet and the thermoplastic resin layer are peeled off integrally,
After peeling off the green sheet,
No impurities such as ceramic residue or cured silicone resin film remain. Therefore, there is an advantage that the used base film can be easily collected, and the collected film can be melted and re-formed to be recycled.

[0041]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail by taking a multilayer ceramic capacitor as an example, but the present invention is not limited to the following examples.

Example 1 (Preparation of Carrier Sheet) A polyethylene terephthalate raw material (hereinafter referred to as PET) having an intrinsic viscosity of 0.61 was vacuum-dried at 180 ° C. for 3 hours, and extruded into an extruder 1. %)-Propylene (94.5% by weight) copolymer (hereinafter referred to as EPC) is supplied to the extruder 2 to be heated and melted, passed through a three-layer manifold, extruded from a T-type die, and has a diameter of 600 mm. It was cast on a cooling drum to produce a three-layer unstretched film of PET / EPC / PET having a thickness of about 900 μm.

The obtained unstretched film was supplied to a group of heating rolls to be preheated, stretched 3.3 times in the length direction between rolls having a peripheral speed of 90 ° C., and then cooled once to room temperature. Subsequently, the stretched film was guided to a tenter type stretching machine, stretched 3.5 times in the width direction while being heated at a hot air temperature of 95 ° C., and further heat-treated at 220 ° C. in a tenter to obtain a film having a thickness of 7 mm.
8 μm (PET 38 μm / EPC 2 μm / PET 38 μ
m) to produce a biaxially stretched three-layer laminated film.

Subsequently, one of the PET layers of the three-layer laminated film was peeled off to obtain a carrier sheet composed of two layers of PET 38 μm / EPC 2 μm. (Preparation of ceramic green sheet) A ceramic slurry having the following composition was applied to the surface of the above-mentioned carrier sheet by a doctor blade method, dried at 85 ° C to obtain a ceramic green sheet having a thickness of 10 µm. Produced.

Then, a nickel conductive paste was printed on the surface of the green sheet by a screen printing method and dried to form an internal electrode pattern. Next, peeling was performed at the interface between the PET layer and the EPC layer of the carrier sheet to obtain a ceramic laminated green sheet in which an EPC layer was formed on one surface of the ceramic green sheet.

<< Ceramic slurry composition >> Ceramic powder (barium titanate) 100 parts Binder (polyvinyl butyral resin) 5 parts Plasticizer (dioctyl phthalate) 1 part Toluene / MEK mixed solvent (1: 1 mixing ratio) 10 Part (Preparation of Ceramic Laminated Body) Forty-eight green sheets for ceramic lamination were laminated, and one green sheet for ceramic lamination having no internal electrode was laminated on the upper and lower sides of each, and pressed at a temperature of 85 ° C. The laminated ceramic sheet was produced by pressure bonding at a pressure of 50 kg / cm ² . Next, the ceramic laminated sheet was cut into a chip size and fired at 1200 ° C. in an electric furnace to obtain a ceramic laminated body.

By coating and baking a nickel conductive paste on both ends of the ceramic laminate, external electrodes were formed to produce a multilayer ceramic capacitor.

The cross section of the obtained ceramic laminate was SEM
As a result, no void was formed between the layers.

Example 2 A ceramic laminate was prepared in the same manner as in Example 1 except that a carrier sheet was prepared by the following method using a resin mainly composed of polylactic acid as the thermoplastic resin layer. A body and a laminated ceramic capacitor were manufactured.

The cross section of the obtained ceramic laminate was SEM
As a result, no void was formed between the layers. (Preparation of Carrier Sheet) A polyethylene terephthalate raw material (hereinafter, PET) having an intrinsic viscosity of 0.61 is vacuum-dried at 180 ° C. for 3 hours and extruder 1 is vacuum-dried at 120 ° C. for 3 hours. The resin pellets (hereinafter, PLA) are supplied to the extruder 2, heated and melted, extruded from a T-type die after passing through a three-layer manifold,
Cast on a 600 mm diameter cooling drum and have a thickness of about 4
A two-layer unstretched film of 40 μm PET / PLA was prepared.

The obtained unstretched film was supplied to a group of heating rolls to be preheated, stretched 3.3 times in the length direction between rolls having different peripheral speeds at a temperature of 85 ° C., and then cooled once to room temperature. Subsequently, the stretched film was guided to a tenter type stretching machine, stretched 3.5 times in the width direction while being heated at a hot air temperature of 95 ° C., and further heat-treated at 200 ° C. in a tenter to obtain a film having a thickness of 4 mm.
A biaxially stretched two-layer laminate film of 0 μm (PET 38 μm / PLA 2 μm) was prepared and used as a carrier sheet.

Example 3 (Preparation of Carrier Sheet) In Example 1, a polyester film having a thickness of 40 μm was prepared using only the PET raw material. One side of the polyester film was coated with a 5% by weight aqueous solution of a polyvinyl alcohol resin (Kuraray “Poval” KL318) using a bar coater to a thickness of 1 μm after drying to obtain a carrier sheet. A ceramic laminate and a multilayer ceramic capacitor were produced in the same manner as in Example 1 except for the above.

The cross section of the obtained ceramic laminate was examined by SEM.
As a result, no void was formed between the layers. Comparative Example 1 (Preparation of Carrier Sheet) In Example 1, a polyester film having a thickness of 40 μm was prepared using only the PET raw material. One side of the polyester film was coated with a curable silicone resin having the following composition and cured by heating to obtain a carrier sheet.

<< Curable Silicone Resin Composition >> 100 parts of curable silicone resin (manufactured by Shin-Etsu Chemical: KS-779H) 1 part of curing agent (manufactured by Shin-Etsu Chemical: CAT-PL-8) 1 part MEK / toluene 2000 parts (ceramic green sheet) Production) The ceramic slurry of Example 1 was applied to the silicone cured film surface of the carrier sheet by a doctor blade method, and dried at 85 ° C. to produce a ceramic green sheet having a thickness of 10 μm.

Next, a nickel conductive paste was printed and dried on the surface of the green sheet by a screen printing method to form an internal electrode pattern. (Preparation of Ceramic Laminate) Forty-eight ceramic green sheets were peeled off from the carrier sheet and laminated, and one ceramic green sheet having no internal electrode was laminated on the upper and lower sides of the ceramic green sheet, and pressed at a temperature of 85 ° C. Pressure 50kg
/ Cm ² to produce a ceramic laminated sheet.
At this time, some of the peeled green sheets were partially cracked, and were removed.

Next, the ceramic laminated sheet was cut into a chip size and fired at 1200 ° C. in an electric furnace to obtain a ceramic laminated body. An external electrode was formed by applying and baking a nickel conductive paste to both ends of the ceramic laminate to produce a multilayer ceramic capacitor.

The cross section of the obtained ceramic laminate was SEM
As a result, voids were generated between the layers.

As described above, Examples 1 to 3 using the green sheet for ceramic lamination of the present invention were excellent in handleability, and no voids were formed between the layers of the obtained ceramic laminate. Comparative Example 1 was inferior in the handleability of the green sheet, and the resulting ceramic laminate had voids between layers.

[0059]

The green sheet for ceramic lamination of the present invention has a structure in which a thermoplastic resin layer is formed on at least one surface of the ceramic green sheet. Therefore, even if the thickness of the ceramic green sheet is small, the thermoplastic resin layer can be formed. Since it functions as a reinforcing material, the ceramic green sheet is easily peeled off from the carrier sheet, and the ceramic green sheet is not deformed or broken at the time of peeling or lamination, and is excellent in handleability. Therefore, the yield of products is improved without occurrence of defective products.

Further, in the ceramic green sheet of the present invention, since the thermoplastic resin layer formed on one side protects the conductor pattern at the time of lamination, the conductor pattern is not damaged in the laminating step.

Further, according to the manufacturing method of the present invention, the ceramic green sheet and the thermoplastic resin layer are laminated in an integrated state to form a ceramic laminate. Since the thermoplastic resin layer laminated in the laminate is formed of an organic resin, it can be decomposed and vaporized and eliminated in the sintering process similarly to the binder in the ceramic, so that voids are generated between layers. Nothing. Also, there is no need to add a special process to the conventional ceramic laminate manufacturing process.

Further, according to the method of the present invention, it is not necessary to form a cured silicone resin film on the surface of the carrier sheet, which has been conventionally required. Therefore, unlike the conventional manufacturing method, the silicone resin does not transfer to the ceramic green sheet side, so that delamination between layers does not occur. Further, since the silicone resin is not transferred, impurities are not formed in the ceramic laminate, so that a high-purity and high-performance ceramic laminate can be obtained.

Further, in the present invention, since the ceramic green sheet and the thermoplastic resin layer are peeled off integrally,
After peeling off the green sheet,
No impurities such as residual ceramics and cured silicone resin film remain. Therefore, there is an advantage that the used base film that has been discarded after use can be easily collected without being discarded, and the collected base film can be melt-reformed and recycled.

The green sheet for ceramic lamination of the present invention having the above-mentioned effects can be used not only for a multilayer ceramic capacitor but also for a ceramic multilayer substrate, a multilayer IC package,
It can be suitably used for manufacturing electronic components such as piezoelectric elements, dry photoresist, inductors, transformers, and filters.

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) H01G 4/30 311 H01G 13/00 351Z 13/00 351 H05K 3/46 H H05K 3/46 C04B 35/00 GF term (reference) 4F100 AA34A AD00A AK01B AK03B AK21B AK23A AK46B AK57B BA02 BA08 EJ48 EJ91 GB41 JB16B JL05 4G030 AA07 AA10 AA11 AA12 AA16 AA17 AA20 AA17 GAA AGAA GAA 5E082 AB03 FF05 FG06 FG26 FG46 FG54 5E346 AA02 AA12 AA22 AA51 CC16 DD02 EE21 EE24 EE27 EE28 EE29 EE30 GG04 GG08 GG09 GG10 HH11 HH31

Claims (4)

[Claims] 1. A green sheet for laminating ceramics, wherein a thermoplastic resin layer is formed on at least one surface of the ceramic green sheet. 2. The resin forming the thermoplastic resin layer is at least one selected from the group consisting of a polyolefin resin, a polyphenylene sulfide resin, a polyamide resin, a resin mainly composed of polyhydroxycarboxylic acid, and a polyvinyl alcohol resin. The green sheet for ceramic lamination according to claim 1, wherein: 3. The thermoplastic resin layer has a thickness of 0.05 to 5
The green sheet for ceramic lamination according to claim 1, wherein the green sheet has a thickness of μm. 4. A ceramic green sheet is formed on a thermoplastic resin layer surface of a carrier sheet having a thermoplastic resin layer releasable from the base film formed on at least one surface of the base film. A step of obtaining the green sheet for ceramic lamination according to any one of claims 1 to 3 by integrally peeling off from the carrier sheet with the thermoplastic resin layer, and after laminating two or more green sheets for ceramic lamination, B. Obtaining a ceramic laminate by firing under the following conditions.