JP2002319615A - Manual opening/closing jig for container lid - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a manual opening/closing jig for lid of container that can be used using only one hand, can be suppressed and prevented from being dropped down or lost, and has no possibility of wrong opening of the lid of a container. SOLUTION: The container is provided with a lid body 10, which closes the opening of the body of the container; a latching mechanism 20 which is incorporated in the lid body 10, makes the lid body 10 which closes the main body of the container removable by unlocking the lid body 10 when rotary plates 21 are normally rotated, and locks the lid body 10, when the rotary plates 21 are rotated in reverse; and the manual opening/closing jig 30, which rotates the rotary plates 21 of the latching mechanism 20. The jig 30 is constituted of a control lever 30, which is incorporated and journaled in an enclosure 31 via a gear 34, control keys 37 which are journaled on the surface of the enclosure 31 and respectively inserted into the rotating plates 21, and a slidable rack 43 which makes the keys 37 rotate by transmitting the power generated, when the control lever 35 rocks to the keys 37.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a manual opening / closing jig for a lid of a container used for accommodating a substrate, carrying or storing the substrate in an airtight state, and the like.

[0002]

2. Description of the Related Art Although a conventional substrate storage container is not shown,
A container body for aligning and storing a plurality of substrates (e.g., semiconductor wafers, etc.), a detachable lid for closing the open front of the container body in a sealed state, and a built-in lid for opening and closing the lid; And a latch mechanism for locking or locking. The latch mechanism includes a rotating plate having a key hole that can be operated from the front side of the lid, and a lid that is disengaged from a locking hole on the front of the container body when the rotating plate rotates in one direction, and hermetically closes the container body. And a locking piece that fits and locks from the outer periphery of the lid to the locking hole on the front of the container body when the rotary plate rotates in the other direction, thereby maintaining the closed state of the lid. The substrate storage container having such a configuration is usually connected to a processing apparatus, and after the lid is opened and closed by an expensive automatic lid opening and closing device, necessary processing is performed on the substrate.

That is, when the substrate storage container is mounted and connected to the processing apparatus, the flange of the container body and the lid cover member of the lid opening / closing device abut against each other in a sealed state, and the key hole on the surface of the lid is covered with the lid. The key of the body opening / closing device is inserted and rotated by 90 °, the latch mechanism of the lid is unlocked, and the lid is removed from the container body. When the front of the container body is opened in this way,
The substrate is loaded from the container main body, taken into the processing apparatus, processed, unloaded, and aligned and stored in the container main body from the processing apparatus. Then, after all the processes are completed, the lid is fitted to the container body again, the latch mechanism is locked, and the substrate storage container is sealed.

It is desirable that the lid opening / closing device be used in all steps of semiconductor manufacturing, but in practice it is extremely difficult for various reasons such as technical and economic reasons. In an emergency, a test, an inspection, or the like, the lid may need to be manually opened and closed instead of automatically. Therefore, conventionally, the lid is manually opened and closed when necessary in an emergency, a test, an inspection, or the like. Specifically, a key of a separate jig is inserted into a key hole on the surface of the lid, and the
° Opening and closing the lid by rotating. Also,
There is also a method in which a manual handle is pivotally supported on the rotating plate of the latch mechanism, the handle is raised and the rotating plate is rotated to open and close the lid (Japanese Patent Laid-Open No. 11-91).
865).

[0005]

Conventionally, the lid was manually opened and closed by the above-described method. However, the above-described method has the following problems. First, in the case of using a separate jig, usually a pair of left and right rotating plates of the latch mechanism is built in the lid, so use both hands to insert the left and right key holes on the lid surface. The keys of the jig must be inserted and rotated. Therefore, the next operation cannot be performed unless the used jig is placed somewhere, so that the operation cannot be performed smoothly, simply, or quickly. Further, since the jig is a relatively small article, there is a problem that the jig is easily dropped or lost during operation.

[0006] Next, in the case of a method using a manual handle, although there is no risk of loss, both hands have to be used, so the used jig must be placed on a mounting table or the like. Can not move to the operation. Therefore, as described above, it is not possible to achieve smooth or quick work, and the like.
In addition, there is even a risk of contamination of the lid contact portion. further,
Although it is convenient to attach the handle to the rotating plate of the latch mechanism, anyone can open the lid, so if you do not need it, you can accidentally open the lid or contaminate the board in a bad environment that contaminates the board. There is a problem that there is a risk of being opened by mistake.

SUMMARY OF THE INVENTION The present invention has been made in view of the above, and can be used with one hand. It suppresses the possibility of dropping or losing, and prevents the lid from being accidentally opened. It is intended to provide an opening and closing jig.

[0008]

According to the first aspect of the present invention, in order to achieve the above object, a lid for closing an opening of a container body, and a built-in lid for the rotating plate in one direction. And a latch mechanism for locking the lid closing the opening of the container body by rotating the rotating plate in the other direction by rotating the rotating plate in the other direction. In the manual opening and closing jig for the lid of the container,
The manual opening / closing jig for the lid is a manual opening / closing jig for rotating the rotating plate of the latch mechanism, and the manual opening / closing jig is supported by an operating member supported by a housing and the housing. And an operation key detachably connected to the rotary plate, and a power transmission member for transmitting power based on rotation of the operation member to the operation key and rotating the operation key.

A stand for erecting the lid to be removed can be attached to the housing of the manual opening / closing jig. Also, the housing of the manual opening / closing jig supports a driving gear contacting the power transmission member, and connects the operating member to a non-central portion thereof, and suppresses unnecessary rotation of the driving gear with a suppressing member. It is preferable to regulate.

Here, the container body in the claims only needs to be open at least on one surface such as the front or top, and may have a plurality of open surfaces. This container body may or may not be transparent. In the container body, a substrate is mainly stored, and the substrate has at least one or a plurality (for example, 13, 25, or 26)
Semiconductor wafers and glass substrates. Of course, it is also possible to store one or more articles other than the substrate in the container body. The number of rotating plates of the latch mechanism is mainly one pair, but can be increased or decreased as needed.

The operation member of the manual opening / closing jig may be configured to protrude from an upper portion of the housing, or may be configured to protrude from a lower portion, a side portion, or the like of the housing. The operation member is mainly supported indirectly on the housing via a drive gear, but may be directly supported on the housing. The operation member and the operation key rotate respectively, and the term rotation includes rotation and swing. The power transmission member includes at least a rack, an endless belt, a gear, and the like. One or more stands can be rotatably (including rocking), detachably attached to the housing. Further, a single or plural leaf springs, coil springs, wires and the like can be used as the suppressing members.

According to the present invention, when the lid is opened and closed using the manual opening / closing jig, the operating member of the manual opening / closing jig is operated. Then, by the operation of the operation member, the drive gear rotates in one direction to operate the power transmission member, and the operation key rotates in one direction. Thereby, the operation key can be connected to the rotating plate of the latch mechanism. When the operation member is returned, the drive gear rotates in the other direction to operate the power transmission member, and the operation key rotates in the other direction to return to the original position. When the operation key returns to the original position, the rotating plate of the lid also rotates, and the lid closing the container body is unlocked. As described above, in the manual opening / closing jig, the operation key is connected to the rotating plate of the lid when the operating member is operated, and when the operating member is returned, the rotating plate and the operating key of the lid are rotated so as not to come off, so that the lid is united. I do. Thereby, the lid can be removed from the container body.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of the present invention will be described below with reference to the accompanying drawings. A manual opening / closing jig for a container lid according to this embodiment is, as shown in FIGS. A lid 10 that seals and closes the front face, which is the opening of the main body 1, via a frame-shaped sealing member 8, and a lid that is built into the lid 10 and closes the container main body 1 by rotating each rotation plate 21 forward. 10 is unlocked to make it detachable, and the lid 1 for closing the container body 1 by reversing each rotating plate 21
The latch mechanism 20 is a locking means for locking the lock mechanism 0, and a separate manual opening / closing jig 30 for rotating each rotating plate 21 of the latch mechanism 20 is provided.

As shown in FIG. 1, the container body 1 is formed of a transparent front open box type using a thermoplastic resin having sufficient strength and rigidity, such as polycarbonate or polybutylene terephthalate, and a semiconductor wafer (not shown). A plurality of substrates (for example, 300 mm silicon wafers) are vertically aligned and housed. A plurality of locking holes 2 are respectively formed in the upper and lower portions of the inner periphery of the front surface of the container main body 1 in which the inside can be viewed, and substantially shelf-shaped support portions 4 are provided on both inner side walls, respectively. A plurality of substrates are horizontally supported at regular intervals by the pair of support portions 4.
A substantially rectangular rear retainer that contacts and supports the rear end of the substrate may be provided on the inner rear surface of the container body 1.

V-grooves (not shown) functioning as positioning means are respectively formed on the front sides of the bottom surface of the container main body 1 and the center of the rear part. A bottom plate (not shown) is detachably fitted and held in the plurality of V-grooves. Is done. At the center of the ceiling of the container body 1, a robotic handle 5 gripped by a transfer robot (not shown) is selectively mounted. Bottom rails 6 for transport are selectively attached to lower portions of both side walls of the container body 1, respectively, and manual handles 7 for manual operation are provided on upper portions of both outer side walls of the container body 1.
Are selectively mounted.

As shown in FIG. 1, the lid 10 has a hollow structure including a case 11 having a substantially U-shaped cross section and a substantially U-shaped cross section, and a surface plate 12 covering an open surface of the case 11. The case 11 has a front retainer 3 having a substantially rectangular shape mounted on its vertical surface, and a pair of left and right through holes 13 formed in the upper and lower portions of the peripheral wall. 2 opposite. A pair of left and right key holes 14 that are inserted into keys of a lid opening / closing device (not shown) are formed on the left and right sides of the surface plate 12, respectively.

As shown in FIGS. 2 to 5, the latch mechanism 20 includes a pair of left and right rotating plates 21 rotatably supported in the case 11 of the lid 10, and each rotating plate 21.
A plurality of power transmission plates 24 connected to the lid 10 and directed in the up-down direction of the lid 10, and a plurality of retractable locking pieces pivotally supported on the inner periphery of the lid 10 and supported by the power transmission plate 24. 27, the locking pieces 27 are retracted from the locking holes 2 in the front of the container body 1 into the through holes 13 of the lid 10 when the respective rotating plates 21 rotate in the forward direction, and the lid is rotated when the respective rotating plates 21 rotate in the reverse direction. The locking piece 27 protruding from the through hole 13 on the outer periphery of the body 10 functions to fit and lock into the locking hole 2 of the container body 1. Each rotating plate 21 is formed to have a substantially convex cross section,
A pair of fitting grooves 22 are cut out in a substantially semicircular shape at 180 ° intervals on the outer periphery of the surface. Rotating plate 21
A key hole 23 for a key of the lid opening / closing device is formed in the surface of the protruding central portion.

Each power transmission plate 24 is formed in an elongated rectangular plate, and is supported in the case 11 of the lid 10 via a plurality of guides 25 so as to be vertically slidable. A lower end or an upper end of the power transmission plate 24 is formed in a substantially semicircular arc shape, and has a connecting pin 26 projecting therefrom.
2 is inserted. Each locking piece 27 is formed, for example, in a substantially L-shape, and is rotatably supported via a pin in the vicinity of the through hole 13 of the case 11.
4 is rotatably connected to a free end via a pin.

In FIG. 2 and FIG. 3, when the key of the lid opening / closing device is inserted through each key hole 14 on the surface of the lid 10 and rotated by 90 ° in FIG. By rotating, the power transmission plate 24 is slid in the vertical direction, in other words, in the direction of the through hole 13 of the lid 10. Then, each locking piece 27 swings while drawing an arc and protrudes from the through hole 13 of the lid 10, and each protruding locking piece 27 fits into the locking hole 2 of the container main body 1 and the container main body 1
Is securely locked (see FIGS. 4 and 5).

As shown in FIGS. 6 to 14, the manual opening / closing jig 30 includes a horizontally long rectangular housing 31 and a housing 31.
A driving gear 34 pivotally supported in the inside, an operation lever 35 as an operation member pivotally supported by the driving gear 34, and a rotating plate 2 which is pivotally supported on the left and right surfaces of the housing 31 to face each other.
A pair of rotatable operation keys 37 detachably connected to one key hole 23 and a rack 43 that is a power transmission member that transmits power based on rotation of the operation lever 35 to each operation key 37 and rotates the operation keys 37. It is configured.

As shown in FIGS. 6 and 8, the housing 31 is formed in an elongated hollow shape using various synthetic resins, and a substantially L-shaped stand 32 can be raised and lowered through pins inside the hollow. The stand 32 is pivotally supported so that the stand 32 projects downward and stands when the cover 10 is manually opened and closed (see the arrow in FIG. 6). As shown in FIG.
As shown in the figure, a rectangular through hole 33 is perforated.

As shown in FIGS. 6 and 9, the drive gear 34 is formed of a pinion having a large number of teeth arranged on its peripheral surface, and is rotatably supported near the side of the housing 31.
A swingable operation lever 35 is eccentrically supported on the outer peripheral portion of the surface, which is a non-center portion.
5 penetrates through the through hole 33 of the housing 31 and protrudes obliquely upward. As shown in FIG. 13, coil springs 36 serving as restraining members are respectively stretched between the upper and lower outer peripheral portions of the surface of the drive gear 34 and the left and right sides of the housing 31, and each coil spring 36 effectively turns over the rotation of the drive gear 34. This prevents the operation lever 35 from being restricted or coming into contact with the through hole 33 of the housing 31.

As shown in FIGS. 6 to 10 and the like, each operation key 37 has a rotating shaft 38 that is supported by the housing 31, and is screwed and fixed to the tip of the rotating shaft 38 so that the cover 10 And a contact body 41 that comes into contact with the surface plate 12. A substantially T-shaped key 39 which is inserted into the key hole 23 of the rotating plate 21 protrudes at the most distal end of the rotating shaft 38, and a transmission gear 40 which meshes with the rack 43 is fitted at the end. . The key 39 is configured similarly to the key of the lid opening / closing device. Further, the contact body 41 includes a pair of circular nuts 42 having a double nut structure overlapping each other, and a left screw is threaded on an inner peripheral surface of a through hole of each circular nut 42. A screw at the tip end of the rotating shaft 38 protruding from the body 31 is screwed.

If each circular nut 42 is fixed to the housing 31 with a knock pin or the like so as not to rotate, and the interference of the left screw of the circular nut 42 is set to 0.5 to 2 mm, the contact member 4
1 is the amount of tightening of the left screw with the rotation of the rotating shaft 38, and the key 3
9 slightly moves in the projecting direction, and the rattle between the key hole 23 and the key 39 can be absorbed when the key 9 comes into contact with the lid 10.

Further, as shown in FIG. 6, FIG. 7, FIG. 9, FIG.
Is installed horizontally below the inside of the device through an auxiliary member 44 such as a slide rail or a linear motion bearing. The rack 43 meshes with the drive gear 34 and the transmission gears 40, respectively, and slides in the left-right direction in FIG.
7 is rotated.

In the above configuration, when the lid 10 is manually opened and closed using the manual opening / closing jig 30, first, as shown in FIG. To prevent the operation lever 35 from being exposed from the upper part of the housing 31. Then, the operation lever 3
5, the drive gear 34 rotates clockwise to slide the rack 43 to the left, and each transmission gear 40, in other words, each operation key 37, rotates clockwise to point in the horizontal direction. The key 39 to be turned (see FIG. 6) is turned 90 °, and the key 39 is oriented vertically (see FIG. 9). This allows
The key 39 of the manual opening / closing jig 30 is inserted into each key hole 23 of the lid 10.
Can be inserted.

Next, when the operation lever 35 is returned and erected by releasing the finger, the drive gear 34 rotates counterclockwise due to the contraction of one coil spring 36 with the operation lever 35 being erected, thereby moving the rack 43 rightward. By sliding, each transmission gear 40, in other words, each operation key 37 rotates counterclockwise to rotate the key 39 pointing in the vertical direction by 90 °, and the key 39 points in the original horizontal direction. When the key 39 is rotated by 90 ° in this manner, each rotating plate 21 of the lid 10 is also rotated by 90 ° through the key hole 23 and the power transmission plate 24 is rotated.
Slides in the direction of the anti-through hole 13 of the lid 10. Then, each protruding locking piece 27 swings and returns while drawing an arc, and retreats into the through hole 13 of the lid 10.
7 is released from the locking hole 2 of the container body 1 to put the lid 10 closing the container body 1 into the unlocked state.

As described above, the manual opening / closing jig 30 allows the key 3 to be inserted into each key hole 23 of the lid 10 with the operation lever 35 in the down state.
9 is inserted, and the lid 1 is
Each of the key holes 23 and the key 39 is rotated 90 ° and cannot be removed, and engages with the lid 10. Thereby, the lid 10 can be removed from the container body 1. At this time, the housing 31
When the stand 32 is protruded downward so as to stand upright with respect to the lid 10, as shown in FIG. 8, the lid 10 removed by manual operation can be supported and stand alone. The possibility of contamination of the inner surface of the body 10 can be effectively suppressed and prevented.

Conversely, when the lid 10 is fitted to the open front of the container body 1, the operation may be reversed. That is, when the latch mechanism 20 fits the unlocked lid 10 to the open front of the container body 1 and presses down the operation lever 35 of the manual opening / closing jig 30 with one finger, the operation keys 37 are pressed. Is rotated clockwise to rotate the key 39 by 90 °, and the latch mechanism 20 is locked. At this time, key hole 2
Since the key 3 and the key 39 are in a parallel state, the manual opening / closing jig 30 can be removed from the lid 10.

According to the above configuration, since one-touch operation is performed with one hand instead of using a separate jig or rotating using both hands, the used manual opening / closing jig 30 is placed on a table or the like. Even without this, the operation can be shifted to the next operation very easily, and the operation can be remarkably smoothed, simplified and speeded up. In addition, if the stand 32 is used, there is no possibility that particles adhere to the lid 10 placed on a table or the like and become contaminated. Further, since the manual opening / closing jig 30 is relatively large as compared with the conventional jig, the risk of dropping or losing during operation can be greatly reduced.

The rotating plate 21 of the latch mechanism 20
The cover 10 can be opened only by a specific worker under ID management. Therefore, there is no possibility that the lid 10 may be erroneously opened when it is not necessary, or that the lid 10 may be erroneously opened in a bad environment that contaminates the substrate. In addition, the drive gear 3
4. Since the transmission gear 40 and the rack 43 are used, there is no slippage, and strong power transmission can be greatly expected.

FIGS. 15 and 16 show a second embodiment of the present invention. In this case, a manual opening / closing jig 30 is used.
The power transmission member is an endless timing belt 50 that meshes with the drive gear 34 instead of the rack 43, and the timing belt 50 is tension-wound between the left and right inside the housing 31 via a pulley 51, and each pulley 51 Each operation key 3
7 instead of the transmission gear 40. The other parts are the same as those in the above-described embodiment, and a description thereof will be omitted.

In this embodiment, the same operation and effect as those in the above embodiment can be expected. Further, since the timing belt 50 is used instead of the gear mechanism, the operation is smooth and quite quiet.

The latch mechanism 20 of the above embodiment is
The lid 10 that closes the container body 1 may be unlocked and removed by reversing the rotation plates 21, and the lid 10 closing the container body 1 may be locked by rotating the rotation plates 21 forward. good. Further, a pair of connecting pins 26 are respectively protruded from the outer periphery of the surface of the rotating plate 21 at intervals of 180 °, and a fitting groove 22 is formed at a lower end or an upper end of the power transmission plate 24. The connection pin 26 may be fitted. Further, the operation lever 35 can be protruded from either the left or right of the housing 31 according to the dominant arm of the operator. Further, instead of the operation lever 35, a push button or the like can be used as an operation member. In this case, it is preferable that the drive gear 34 be rotated by a motor. Further, instead of the rack 43 and the timing belt 50, a plurality of gears and the like can be used side by side for power transmission.

[0035]

As described above, according to the present invention, the manual opening / closing jig can be used with one hand, and the risk of dropping or losing can be effectively suppressed or prevented. Further, there is an effect that there is little possibility that the lid is opened by mistake.

[Brief description of the drawings]

FIG. 1 is an overall perspective explanatory view showing an embodiment of a manual opening / closing jig for a container lid according to the present invention.

FIG. 2 is an explanatory diagram showing an unlocked state of a latch mechanism in the embodiment of the manual lid opening / closing jig according to the present invention.

FIG. 3 is a sectional view taken along line III-III of FIG. 2;

FIG. 4 is an explanatory view showing a locked state of a latch mechanism in the embodiment of the manual lid opening / closing jig according to the present invention.

FIG. 5 is a sectional view taken along line VV of FIG. 4;

FIG. 6 is a front view showing a manual opening / closing jig in the embodiment of the manual lid opening / closing jig according to the present invention.

FIG. 7 is a plan view of FIG. 6;

FIG. 8 is a side view of the manual opening / closing jig for the container according to the embodiment of the present invention, showing a stand used state of the manual opening / closing jig.

FIG. 9 is an explanatory diagram showing a state in which the manual opening / closing jig of the embodiment of the manual opening / closing jig according to the present invention is used.

FIG. 10 is an explanatory sectional view showing operation keys and the like of the manual opening / closing jig in the embodiment of the manual opening / closing jig for the lid of the container according to the present invention.

FIG. 11 is an explanatory sectional view showing a state in which the manual opening / closing jig in the embodiment of the manual lid opening / closing jig according to the present invention is connected to the lid.

FIG. 12 is a cross-sectional explanatory view showing a state in which the manual opening / closing jig in the embodiment of the manual lid opening / closing jig according to the present invention is connected to the lid and unlocked.

FIG. 13 is an explanatory view showing a rack of the manual opening / closing jig in the embodiment of the manual opening / closing jig for the lid of the container according to the present invention.

FIG. 14 is an enlarged explanatory view showing a main part of FIG. 13;

FIG. 15 is an explanatory view showing a second embodiment of the manual opening / closing jig for the lid of the container according to the present invention.

FIG. 16 is an enlarged explanatory view showing a main part of FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Container main body 2 Locking hole 10 Lid 11 Case 12 Surface plate 13 Through hole 14 Key hole 20 Latch mechanism 21 Rotating plate 23 Key hole 27 Locking piece 30 Manual opening / closing jig 31 Housing 32 Stand 33 Through hole 34 Drive gear 35 Operation lever (operation member) 36 Coil spring (suppression member) 37 Operation key 39 Key 43 Rack (power transmission member) 50 Timing belt (power transmission member)

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 3E096 AA06 BA16 BB04 CA01 DA17 EA02X FA30 FA40 GA07 5F031 CA02 DA08 LA13 LA14 PA07 PA09 PA23

Claims (3)

[Claims] 1. A lid for closing an opening of a container main body, and a lid built in the lid and closing the opening of the container main body by rotating a rotating plate in one direction, and unlocking the lid. A manual opening / closing jig for a lid of a container, comprising: a latch mechanism for locking a lid closing the opening of the container main body by rotating the rotating plate in the other direction. A manual opening / closing jig for rotating a rotating plate of the latch mechanism, the manual opening / closing jig being connected to an operating member supported by a housing and being detachably connected to the rotating plate supported by the housing. A manual opening / closing jig for a container lid, comprising: an operation key to be operated; and a power transmission member that transmits power based on rotation of the operation member to the operation key to rotate the operation key. 2. The manual opening / closing jig for a lid of a container according to claim 1, wherein a stand for erecting the lid to be removed is attached to a housing of the manual opening / closing jig. 3. A housing of the manual opening / closing jig supports a driving gear in contact with the power transmission member, and the operation member is connected to a non-central portion thereof to rotate the driving gear more than necessary. The manual opening / closing jig for a container lid according to claim 1 or 2, wherein the jig is regulated by a suppressing member.