JP2002318546A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2002318546A5 JP2002318546A5 JP2002038071A JP2002038071A JP2002318546A5 JP 2002318546 A5 JP2002318546 A5 JP 2002318546A5 JP 2002038071 A JP2002038071 A JP 2002038071A JP 2002038071 A JP2002038071 A JP 2002038071A JP 2002318546 A5 JP2002318546 A5 JP 2002318546A5
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- film
- forming
- anode
- tft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 229910052581 Si3N4 Inorganic materials 0.000 claims 34
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 34
- 150000002894 organic compounds Chemical class 0.000 claims 32
- 238000000034 method Methods 0.000 claims 27
- 238000004519 manufacturing process Methods 0.000 claims 26
- 239000012212 insulator Substances 0.000 claims 24
- 238000005530 etching Methods 0.000 claims 12
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 6
- 229910052814 silicon oxide Inorganic materials 0.000 claims 6
- 239000004952 Polyamide Substances 0.000 claims 4
- 239000004642 Polyimide Substances 0.000 claims 4
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims 4
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 claims 4
- 229910003437 indium oxide Inorganic materials 0.000 claims 4
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims 4
- 229920002647 polyamide Polymers 0.000 claims 4
- 229920001721 polyimide Polymers 0.000 claims 4
- 239000011787 zinc oxide Substances 0.000 claims 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
- 239000011148 porous material Substances 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- 230000003746 surface roughness Effects 0.000 claims 2
- 230000001413 cellular effect Effects 0.000 claims 1
- 238000005406 washing Methods 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002038071A JP2002318546A (ja) | 2001-02-19 | 2002-02-15 | 発光装置およびその作製方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001-41201 | 2001-02-19 | ||
| JP2001041201 | 2001-02-19 | ||
| JP2002038071A JP2002318546A (ja) | 2001-02-19 | 2002-02-15 | 発光装置およびその作製方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002318546A JP2002318546A (ja) | 2002-10-31 |
| JP2002318546A5 true JP2002318546A5 (enrdf_load_stackoverflow) | 2005-08-25 |
Family
ID=26609596
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002038071A Withdrawn JP2002318546A (ja) | 2001-02-19 | 2002-02-15 | 発光装置およびその作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002318546A (enrdf_load_stackoverflow) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101220874B1 (ko) | 2004-08-13 | 2013-01-11 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 발광 장치 및 상기 발광 장치의 구동 방법 |
| JP2006113568A (ja) * | 2004-09-17 | 2006-04-27 | Semiconductor Energy Lab Co Ltd | 表示装置、及び表示装置の作製方法 |
| US8350466B2 (en) * | 2004-09-17 | 2013-01-08 | Semiconductor Energy Laboratory Co., Ltd. | Display device and manufacturing method thereof |
| US7442950B2 (en) | 2004-12-06 | 2008-10-28 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device |
| JP2008135189A (ja) * | 2005-03-02 | 2008-06-12 | Sharp Corp | コネクタ、電子機器の検査方法および電子機器の製造方法 |
| CN100538794C (zh) | 2005-05-02 | 2009-09-09 | 株式会社半导体能源研究所 | 发光器件及其驱动方法、显示模块以及电子器具 |
| JP2007066775A (ja) * | 2005-08-31 | 2007-03-15 | Sanyo Electric Co Ltd | 有機ｅｌ素子の製造方法及び有機ｅｌ素子 |
| EP1804229B1 (en) | 2005-12-28 | 2016-08-17 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for inspecting the same |
| JP2007188743A (ja) * | 2006-01-13 | 2007-07-26 | Fuji Electric Holdings Co Ltd | 有機ｅｌディスプレイパネルおよびその製造方法 |
| US20090220680A1 (en) * | 2008-02-29 | 2009-09-03 | Winters Dustin L | Oled device with short reduction |
| KR102203447B1 (ko) * | 2014-05-27 | 2021-01-18 | 엘지디스플레이 주식회사 | 유기발광 표시패널 및 그 제조방법 |
| WO2019207736A1 (ja) * | 2018-04-26 | 2019-10-31 | 堺ディスプレイプロダクト株式会社 | 有機ｅｌデバイスおよびその製造方法 |
| JP2019203957A (ja) * | 2018-05-22 | 2019-11-28 | 株式会社ジャパンディスプレイ | 表示装置及びアレイ基板 |
| JP7109492B2 (ja) * | 2020-02-18 | 2022-07-29 | 堺ディスプレイプロダクト株式会社 | 有機ｅｌデバイスの製造方法 |
-
2002
- 2002-02-15 JP JP2002038071A patent/JP2002318546A/ja not_active Withdrawn