JP2002299324A5 - - Google Patents

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Publication number
JP2002299324A5
JP2002299324A5 JP2001105442A JP2001105442A JP2002299324A5 JP 2002299324 A5 JP2002299324 A5 JP 2002299324A5 JP 2001105442 A JP2001105442 A JP 2001105442A JP 2001105442 A JP2001105442 A JP 2001105442A JP 2002299324 A5 JP2002299324 A5 JP 2002299324A5
Authority
JP
Japan
Prior art keywords
substrate
plasma processing
antenna
vacuum
high frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001105442A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002299324A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001105442A priority Critical patent/JP2002299324A/ja
Priority claimed from JP2001105442A external-priority patent/JP2002299324A/ja
Priority to US09/968,810 priority patent/US20020038791A1/en
Priority to US10/207,183 priority patent/US6830653B2/en
Publication of JP2002299324A publication Critical patent/JP2002299324A/ja
Priority to US10/983,670 priority patent/US7406925B2/en
Publication of JP2002299324A5 publication Critical patent/JP2002299324A5/ja
Pending legal-status Critical Current

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JP2001105442A 2000-10-03 2001-04-04 プラズマ処理方法及び装置 Pending JP2002299324A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2001105442A JP2002299324A (ja) 2001-04-04 2001-04-04 プラズマ処理方法及び装置
US09/968,810 US20020038791A1 (en) 2000-10-03 2001-10-03 Plasma processing method and apparatus
US10/207,183 US6830653B2 (en) 2000-10-03 2002-07-30 Plasma processing method and apparatus
US10/983,670 US7406925B2 (en) 2000-10-03 2004-11-09 Plasma processing method and apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001105442A JP2002299324A (ja) 2001-04-04 2001-04-04 プラズマ処理方法及び装置

Publications (2)

Publication Number Publication Date
JP2002299324A JP2002299324A (ja) 2002-10-11
JP2002299324A5 true JP2002299324A5 (enExample) 2005-09-02

Family

ID=18958137

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001105442A Pending JP2002299324A (ja) 2000-10-03 2001-04-04 プラズマ処理方法及び装置

Country Status (1)

Country Link
JP (1) JP2002299324A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6548484B2 (ja) * 2015-07-01 2019-07-24 東京エレクトロン株式会社 プラズマ処理装置およびそれに用いる排気構造

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