JP2002283295A5 - - Google Patents
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- Publication number
- JP2002283295A5 JP2002283295A5 JP2001091333A JP2001091333A JP2002283295A5 JP 2002283295 A5 JP2002283295 A5 JP 2002283295A5 JP 2001091333 A JP2001091333 A JP 2001091333A JP 2001091333 A JP2001091333 A JP 2001091333A JP 2002283295 A5 JP2002283295 A5 JP 2002283295A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- manufacturing
- microstructure
- substrate
- fine structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 238000004519 manufacturing process Methods 0.000 claims 15
- 239000000758 substrate Substances 0.000 claims 9
- 239000000463 material Substances 0.000 claims 3
- 239000011347 resin Substances 0.000 claims 2
- 229920005989 resin Polymers 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 230000003287 optical Effects 0.000 claims 1
- 238000005507 spraying Methods 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001091333A JP3972591B2 (ja) | 2001-03-27 | 2001-03-27 | 微細構造体の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001091333A JP3972591B2 (ja) | 2001-03-27 | 2001-03-27 | 微細構造体の製造方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2002283295A JP2002283295A (ja) | 2002-10-03 |
JP2002283295A5 true JP2002283295A5 (sv) | 2005-04-07 |
JP3972591B2 JP3972591B2 (ja) | 2007-09-05 |
Family
ID=18945964
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2001091333A Expired - Fee Related JP3972591B2 (ja) | 2001-03-27 | 2001-03-27 | 微細構造体の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3972591B2 (sv) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7514283B2 (en) * | 2003-03-20 | 2009-04-07 | Robert Bosch Gmbh | Method of fabricating electromechanical device having a controlled atmosphere |
KR100584424B1 (ko) * | 2004-11-04 | 2006-05-26 | 삼성전자주식회사 | 카메라 렌즈 어셈블리의 손떨림 보정 장치 |
-
2001
- 2001-03-27 JP JP2001091333A patent/JP3972591B2/ja not_active Expired - Fee Related
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