JP2002260912A - Sintered magnetic oxide and high-frequency circuit part using the same - Google Patents
Sintered magnetic oxide and high-frequency circuit part using the sameInfo
- Publication number
- JP2002260912A JP2002260912A JP2001056153A JP2001056153A JP2002260912A JP 2002260912 A JP2002260912 A JP 2002260912A JP 2001056153 A JP2001056153 A JP 2001056153A JP 2001056153 A JP2001056153 A JP 2001056153A JP 2002260912 A JP2002260912 A JP 2002260912A
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- JP
- Japan
- Prior art keywords
- mol
- sintered body
- terms
- magnetic oxide
- glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
- H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
- H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
- H01F1/12—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
- H01F1/34—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials non-metallic substances, e.g. ferrites
- H01F1/342—Oxides
- H01F1/344—Ferrites, e.g. having a cubic spinel structure (X2+O)(Y23+O3), e.g. magnetite Fe3O4
- H01F1/348—Hexaferrites with decreased hardness or anisotropy, i.e. with increased permeability in the microwave (GHz) range, e.g. having a hexagonal crystallographic structure
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、高周波回路部品用
に使用される磁性酸化物焼結体およびそれを用いた高周
波回路部品に関する。The present invention relates to a magnetic oxide sintered body used for high-frequency circuit components and a high-frequency circuit component using the same.
【０００２】[0002]
【従来の技術】近年、電子機器の小型化や高周波化に伴
い、高周波帯域において高いインダクタンス、インピー
ダンスを持つ電子部品の需要が高まっている。小型で高
いインダクタンス、インピーダンスを得るためには、い
わゆる印刷工法やシート工法によって磁性体中に導体を
内蔵した積層構造のコイルを作製することが望ましい。
積層構造とすることでコイルの巻数を多くすることがで
き、構造も閉磁路となるため高いインダクタンス、イン
ピーダンスが得られる。2. Description of the Related Art In recent years, demands for electronic components having high inductance and impedance in a high frequency band have been increasing along with miniaturization and higher frequency of electronic devices. In order to obtain a small size and high inductance and impedance, it is desirable to produce a coil having a laminated structure in which a conductor is built in a magnetic material by a so-called printing method or sheet method.
With the laminated structure, the number of turns of the coil can be increased, and the structure also becomes a closed magnetic circuit, so that high inductance and impedance can be obtained.
【０００３】焼結体に内蔵される導体材料としては、電
気抵抗率、融点、コストの面から一般に銀（Ａｇ）が多
く用いられている。銀の融点は１０００℃以下であるた
め，積層構造用の磁性体材料としては、従来より一般
に、９００℃の焼成でも高い焼結密度が得られるＮｉＺ
ｎ系フェライトが用いられてきた。[0003] As a conductive material incorporated in a sintered body, silver (Ag) is generally widely used in view of electric resistivity, melting point and cost. Since the melting point of silver is 1000 ° C. or lower, NiZ which can obtain a high sintered density even at 900 ° C. is generally used as a magnetic material for a laminated structure.
N-based ferrites have been used.
【０００４】しかしながら、ＮｉＺｎ系フェライトは磁
気異方性が低いために数百ＭＨｚの周波数で自然共鳴を
起こしてしまい、ＧＨｚの周波数帯域で使用することが
できなかった。[0004] However, NiZn-based ferrite has a low magnetic anisotropy, causing natural resonance at a frequency of several hundred MHz, and cannot be used in a frequency band of GHz.
【０００５】高周波仕様として、非磁性体を用いた空心
コイルが用いられることもあるが、非磁性体を用いると
高いインダクタンスやインピーダンスを得ることが困難
になる。[0005] An air-core coil using a non-magnetic material may be used as a high-frequency specification. However, if a non-magnetic material is used, it is difficult to obtain high inductance and impedance.
【０００６】この一方で六方晶フェライトは、六角板状
結晶の面内方向とこの面に垂直な方向の磁気的異方性が
異なっているため、自然共鳴を起こしにくく、ＧＨｚの
周波数帯域まで高い透磁率を持つという特徴をもってい
る。しかしながら、このものは、所望の焼結密度や磁気
特性を得るためには、焼成温度を高くする必要があっ
た。On the other hand, hexagonal ferrite is unlikely to cause spontaneous resonance due to the difference in magnetic anisotropy between the in-plane direction of the hexagonal plate-like crystal and the direction perpendicular to this plane, and is high up to the GHz frequency band. It has the characteristic of having magnetic permeability. However, in this case, it was necessary to raise the firing temperature in order to obtain desired sintered density and magnetic properties.
【０００７】また、従来のいわゆるＹ型六方晶フェライ
トの電気抵抗率は、高くてもせいぜい１×１０5Ω・ｍ
程度までであり、また高特性を得るためにＣｕやＺｎな
どで置換したものについては、その電気抵抗率が１×１
０4Ω・ｍ程度であり、これらの値は、電子部品材料に
求められる電気抵抗率１×１０5Ω・ｍを超える値と比
べると低いといわざるを得ない。The electrical resistivity of the conventional so-called Y-type hexagonal ferrite is at most 1 × 10 5 Ω · m at most.
And the electric resistivity of the material substituted with Cu, Zn or the like in order to obtain high characteristics is 1 × 1
0 is about 4 Omega · m, these values must be said as compared with a value greater than the electrical resistivity of 1 × 10 5 Ω · m which is required for electronic component materials low.
【０００８】さらに、六方晶フェライトはスピネル型フ
ェライトに比べて誘電率が高いため、インダクタに発生
する寄生容量が大きくなってしまい、インダクタが自己
共振を起こしやすく、インダクタンスおよびインピーダ
ンスが低くなってしまうなどの問題があった。Further, since hexagonal ferrite has a higher dielectric constant than spinel type ferrite, the parasitic capacitance generated in the inductor increases, the inductor easily causes self-resonance, and the inductance and impedance decrease. There was a problem.
【０００９】[0009]
【発明が解決しようとする課題】このような実状のもと
に本発明は創案されたものであり、その目的は、上記の
課題を解決し、１０００℃以下特に、９００℃付近で焼
成可能であり、電気抵抗率が高く、誘電率が低い、Ｙ型
六方晶フェライトを主成分フェライトとする磁性酸化物
焼結体およびこれを用いた高周波回路部品を提供するこ
とにある。SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and an object of the present invention is to solve the above-mentioned problems and to make it possible to bake at 1000 ° C. or lower, especially around 900 ° C. It is an object of the present invention to provide a magnetic oxide sintered body having a high electric resistivity and a low dielectric constant and containing Y-type hexagonal ferrite as a main component ferrite, and a high-frequency circuit component using the same.
【００１０】[0010]
【課題を解決するための手段】このような課題を解決す
るために、本発明は、Ｙ型六方晶フェライトで８０％以
上占有されてなる磁性酸化物焼結体であって、該磁性酸
化物焼結体は、主成分として酸化コバルトをＣｏＯ換算
で３〜１５モル％、酸化銅をＣｕＯ換算で５〜１７モル
％、酸化鉄をＦｅ2Ｏ3換算で５７〜６１モル％、残部を
ＡＯ（ＡＯは、ＢａＯまたはＳｒＯの少なくとも１種）
として含み、副成分として硼珪酸ガラス、硼珪酸亜鉛ガ
ラスまたはビスマスガラスを０．６〜７ｗｔ％含有して
なるように構成される。In order to solve such problems, the present invention relates to a magnetic oxide sintered body occupied by 80% or more of Y-type hexagonal ferrite. In the sintered body, cobalt oxide is 3 to 15 mol% in terms of CoO, copper oxide is 5 to 17 mol% in terms of CuO, iron oxide is 57 to 61 mol% in terms of Fe 2 O 3 , and the remainder is AO as a main component. (AO is at least one of BaO and SrO)
And a borosilicate glass, a zinc borosilicate glass or a bismuth glass as an auxiliary component is contained in an amount of 0.6 to 7 wt%.
【００１１】また、本発明は、磁性酸化物焼結体中に導
電体が埋設された構造を備える高周波回路部品であっ
て、前記磁性酸化物焼結体は、Ｙ型六方晶フェライトで
８０％以上占有され、かつ、該磁性酸化物焼結体は、主
成分として酸化コバルトをＣｏＯ換算で３〜１５モル
％、酸化銅をＣｕＯ換算で５〜１７モル％、酸化鉄をＦ
ｅ 2Ｏ3換算で５７〜６１モル％、残部をＡＯ（ＡＯは、
ＢａＯまたはＳｒＯの少なくとも１種）として含み、副
成分として硼珪酸ガラス、硼珪酸亜鉛ガラスまたはビス
マスガラスを０．６〜７ｗｔ％含有してなるように構成
される。[0011] The present invention also relates to a magnetic oxide sintered body.
A high-frequency circuit component with a structure in which
The magnetic oxide sintered body is a Y-type hexagonal ferrite.
80% or more, and the magnetic oxide sintered body mainly
Cobalt oxide as a component is 3 to 15 mol in terms of CoO
%, Copper oxide is 5 to 17 mol% in terms of CuO, and iron oxide is F
e TwoOThree57-61 mol% in conversion, the remainder is AO (AO is
BaO or SrO).
Borosilicate glass, zinc borosilicate glass or bis
Constructed to contain 0.6-7 wt% of mass glass
Is done.
【００１２】また、本発明の好ましい態様として、前記
磁性酸化物焼結体の製造における仮焼温度は、８５０℃
〜１０００℃として構成される。In a preferred embodiment of the present invention, the calcination temperature in the production of the magnetic oxide sintered body is 850 ° C.
と し て 1000 ° C.
【００１３】また、本発明の高周波回路部品の好ましい
態様として、前記導電体は、銀（Ａｇ）を主成分として
なるように構成される。In a preferred embodiment of the high-frequency circuit component according to the present invention, the conductor is constituted so that silver (Ag) is a main component.
【００１４】[0014]
【発明の実施の形態】以下、本発明の磁性酸化物焼結体
について詳細に説明する。本発明の磁性酸化物焼結体は
セラミック焼結体であるために通常のセラミック作製プ
ロセスで製造することができる。BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, will be described in detail magnetic oxide sintered body of the present invention. Since the magnetic oxide sintered body of the present invention is a ceramic sintered body, it can be manufactured by an ordinary ceramic manufacturing process.
【００１５】本発明の磁性酸化物焼結体は、主成分とし
て酸化コバルトをＣｏＯ換算で３〜１５モル％（好まし
くは、３〜５モル％）、酸化銅をＣｕＯ換算で５〜１７
モル％（好ましくは、５．５〜１０モル％）、酸化鉄を
Ｆｅ2Ｏ3換算で５７〜６１モル％（好ましくは、５９〜
６０モル％）、残部をＡＯ（ＡＯは、ＢａＯまたはＳｒ
Ｏの少なくとも１種）として含んでいる。ＡＯの形態
は、ＢａＯあるいはＳｒＯの単独形態、またはＢａＯと
ＳｒＯの混在形態である。In the magnetic oxide sintered body of the present invention, as a main component, cobalt oxide is 3 to 15 mol% (preferably 3 to 5 mol%) in terms of CoO, and copper oxide is 5 to 17 mol% in terms of CuO.
Mol% (preferably 5.5 to 10 mol%), the iron oxide 57-61 mole% calculated as Fe 2 O 3 (preferably, 59 to
AO (AO is BaO or Sr
O at least one). The form of AO is a single form of BaO or SrO, or a mixed form of BaO and SrO.
【００１６】また、本発明の磁性酸化物焼結体は、副成
分として硼珪酸ガラス、硼珪酸亜鉛ガラスまたはビスマ
スガラスを０．６〜７ｗｔ％（好ましくは０．６〜５ｗ
ｔ％）、含有している。Further, the magnetic oxide sintered body of the present invention contains borosilicate glass, zinc borosilicate glass or bismuth glass as an auxiliary component in an amount of 0.6 to 7 wt% (preferably 0.6 to 5 watts).
t%).
【００１７】硼珪酸ガラスとは、一般にＢ2Ｏ3、ＳｉＯ
2を含むガラスを示し、硼珪酸亜鉛ガラスとは、一般に
Ｂ2Ｏ3、ＳｉＯ2、ＺｎＯを含むガラスを示し、ビスマ
スガラスとは、一般にＢｉ2Ｏ3を含むガラスを示す。こ
れらの各ガラスの定義において上記の各成分が主成分で
ある必要はない。[0017] The borosilicate glass generally B 2 O 3, SiO
2 indicates a glass containing zinc borosilicate glass generally indicates a glass containing B 2 O 3 , SiO 2 and ZnO, and a bismuth glass generally indicates a glass containing Bi 2 O 3 . In the definition of each of these glasses, each of the above components need not be the main component.
【００１８】これらの副成分のガラスの含有形態として
は、硼珪酸ガラス、硼珪酸亜鉛ガラスおよびビスマスガ
ラスの中の１種を単独で用いても良いし、また、これら
の中の２種または３種を混合して用いてもよい。２種以
上を混合して用いる場合には、混合した総計重量％が上
記の範囲に入るようにすればよい。As a form of containing the glass of these subcomponents, one of borosilicate glass, zinc borosilicate glass and bismuth glass may be used alone, or two or three of these may be used. Seeds may be used in combination. When two or more kinds are used as a mixture, the total weight% of the mixture may be within the above range.
【００１９】このようなガラスを添加することにより、
高電気抵抗率化（電気抵抗率を高くすること）および低
誘電率化（誘電率を低くすること）を得ることができ
る。従って、このような本願所定のガラスの添加によ
り、高周波回路部品としての例えば、積層部品材料に必
要な１×１０5Ω・ｍ以上の電気抵抗率が得られる。さ
らに、本願所定のガラスの添加により、誘電率を低減さ
せる効果も発現し、本発明焼結体を高周波部品として用
いた場合、高い周波数において高いインピーダンスを得
ることや、インピーダンスの広帯域化に効果がある。By adding such a glass,
It is possible to obtain high electric resistivity (high electric resistivity) and low dielectric constant (low dielectric constant). Therefore, by the addition of the glass specified in the present application, for example, an electrical resistivity of 1 × 10 5 Ω · m or more required for a laminated component material as a high frequency circuit component can be obtained. Furthermore, the addition of the prescribed glass of the present application also exerts an effect of reducing the dielectric constant, and when the sintered body of the present invention is used as a high-frequency component, it is possible to obtain a high impedance at a high frequency and to broaden the impedance. is there.
【００２０】なお、これらのガラス添加は添加時におけ
る状態がガラスであることが必要である。焼成後、用い
たガラス成分は、ガラス状態の有無を問わず焼成体の中
に存在する。The addition of these glasses requires that the state at the time of addition be glass. After firing, the glass components used are present in the fired body, whether or not in a glassy state.
【００２１】これらのガラスの中では、特に、硼珪酸亜
鉛ガラスや硼珪酸ガラスが高電気抵抗率、低誘電率をよ
り効果的に実現させるために好ましい。また、同じガラ
ス添加量で比較した場合、９０％以上の相対密度が得ら
れる温度を下げることができるという観点からは、特
に、ビスマスガラスが好ましい。Among these glasses, zinc borosilicate glass and borosilicate glass are particularly preferable for realizing a high electric resistivity and a low dielectric constant more effectively. In addition, when compared with the same glass addition amount, bismuth glass is particularly preferable from the viewpoint that the temperature at which a relative density of 90% or more can be obtained can be reduced.
【００２２】上記主成分の含有割合において、ＣｏＯが
３モル％未満となると、例えば２ＧＨｚにおける透磁率
が低下する（例えば２．０未満）という不都合が生じる
傾向にあり、ＣｏＯが１５モル％を超えると、例えば５
００ＭＨｚにおける透磁率が低下する（例えば２．０未
満）という不都合が生じる傾向にある。When the content of the main component is less than 3 mol%, there is a tendency that, for example, the magnetic permeability at 2 GHz decreases (for example, less than 2.0), and the content of CoO exceeds 15 mol%. And, for example, 5
There is a tendency that the magnetic permeability at 00 MHz decreases (for example, less than 2.0).
【００２３】また、ＣｕＯが５モル％未満となると、仮
焼き温度が１０００℃を超えるという不都合が生じる傾
向にあり、ＣｕＯが１７モル％を超えると、透磁率が低
下する（例えば２．０以下）という不都合が生じる傾向
にある。If the CuO content is less than 5 mol%, the calcination temperature tends to exceed 1000 ° C., and if the CuO content exceeds 17 mol%, the magnetic permeability decreases (for example, 2.0 or less). ) Tends to occur.
【００２４】また、Ｆｅ2Ｏ3が５７モル％未満となった
り、Ｆｅ2Ｏ3が６１モル％を超えたりすると透磁率が低
下するという不都合が生じる傾向にある。If Fe 2 O 3 is less than 57 mol% or Fe 2 O 3 is more than 61 mol%, the magnetic permeability tends to be disadvantageously reduced.
【００２５】上記の副成分の含有割合において、上記所
定のガラスの含有量が０．６ｗｔ％未満となると、１０
００℃以下の焼成で理論密度の９０％以上が得られなく
なるという不都合が生じる傾向にあり、上記ガラスの含
有量が７ｗｔ％を超えると、透磁率が低下するという不
都合が生じる傾向にある。When the content of the predetermined glass is less than 0.6 wt% in the content ratio of the subcomponent, 10%
When firing at a temperature of 00 ° C. or less, there is a tendency that 90% or more of the theoretical density cannot be obtained. When the content of the glass exceeds 7 wt%, a problem that the magnetic permeability tends to decrease tends to occur.
【００２６】このようなガラス副成分の添加は、特に、
上記のＣｕＯ量の含有と相俟って低温焼結を顕著に実現
させることができる。焼成温度が低くなると、安価で電
気抵抗の低いＡｇのような低融点の電極材料を内蔵した
形で同時焼成し、電極一体型の閉磁路構成の素子を容易
に製造できる。このようにして製造された素子は、例え
ば、小型でかつ高いＱ値を持つインダクタ、あるいは小
型で高周波帯の特に特定周波数でのインピーダンスが大
きいノイズフィルター等の高周波素子（高周波回路部
品）として利用される。The addition of such glass sub-components is, in particular,
Low temperature sintering can be remarkably realized in combination with the above-mentioned content of CuO. When the firing temperature is lowered, co-firing is performed with a low-melting-point electrode material such as Ag, which is inexpensive and has low electric resistance, and an element having an electrode-integrated closed magnetic circuit configuration can be easily manufactured. The element manufactured in this manner is used, for example, as a small-sized inductor having a high Q value or a small-sized high-frequency element (high-frequency circuit component) such as a noise filter having a large impedance in a high-frequency band, particularly at a specific frequency. You.
【００２７】さらに本発明における磁性酸化物焼結体
は、その８０％以上、特に好ましくは、９０％以上がＹ
型六方晶フェライトで形成されている。ここに言う
「％」は、エックス線回折強度のメインピーク比から算
出したものである。Further, the magnetic oxide sintered body of the present invention has a Y content of 80% or more, particularly preferably 90% or more.
It is made of type hexagonal ferrite. Here, “%” is calculated from the main peak ratio of the X-ray diffraction intensity.
【００２８】銀（Ａｇ）のような低融点電極材料と同時
焼成する場合、本焼成温度が低くなるため、焼結後のＹ
型六方晶フェライトを８０％以上とするためには、仮焼
時にＹ型六方晶フェライトを８０％以上生成しておく必
要がある。組成によって異なるが、８５０℃付近からＢ
ａＦｅ12Ｏ19およびＢａＦｅ2Ｏ4の分解が始まり、Ｙ型
六方晶フェライトの生成が始まる。しかしながら、Ｂａ
Ｆｅ12Ｏ19およびＢａＦｅ2Ｏ4の分解が十分に進まなけ
ればＹ型六方晶フェライトの生成が進まない。従って、
Ｙ型六方晶フェライトを８０％以上とするために、仮焼
温度を８５０℃以上，特に、８５０℃〜１０００℃とす
る必要がある。さらに、ＣｕＯ量を好ましくは５．５〜
１７モル％含有させる必要がある。仮焼温度が８５０℃
未満となったり、ＣｕＯ量が所定量存在しないと、８０
％を超えるＹ型六方晶フェライトの生成が困難となる。
また仮焼温度が１０００℃を超えて高くなりすぎると、
細かい粉砕粉が得られない。細かい粉砕粉の作製は、低
温焼成には極めて重要な技術である。When co-firing with a low-melting-point electrode material such as silver (Ag), the firing temperature becomes low, so that the sintered Y
In order to make the type hexagonal ferrite 80% or more, it is necessary to generate the Y type hexagonal ferrite 80% or more at the time of calcination. Depending on the composition, B
The decomposition of aFe 12 O 19 and BaFe 2 O 4 starts, and the formation of Y-type hexagonal ferrite starts. However, Ba
If the decomposition of Fe 12 O 19 and BaFe 2 O 4 does not proceed sufficiently, the formation of Y-type hexagonal ferrite does not proceed. Therefore,
In order to make the Y-type hexagonal ferrite 80% or more, the calcination temperature needs to be 850 ° C or more, particularly, 850 ° C to 1000 ° C. Further, the amount of CuO is preferably adjusted to 5.5 to 5.5.
It is necessary to contain 17 mol%. Calcination temperature is 850 ℃
If the amount is less than or less than the predetermined amount,
% Of Y-type hexagonal ferrite is difficult to form.
Also, if the calcination temperature is higher than 1000 ° C.,
Fine ground powder cannot be obtained. Production of fine ground powder is a very important technique for low-temperature firing.
【００２９】このような観点から、上述のごとく仮焼温
度を８５０〜１０００℃において、Ｙ型六方晶フェライ
トの生成率を高くするためには、主成分としての前記Ｃ
ｕＯ量を好ましくは５．５〜１７モル％含有させること
が必要となる。From such a viewpoint, in order to increase the yield of Y-type hexagonal ferrite at a calcination temperature of 850 to 1000 ° C. as described above, the above-mentioned C as a main component is required.
It is necessary to contain the uO amount preferably at 5.5 to 17 mol%.
【００３０】このような本発明における磁性酸化焼結体
は、磁性酸化物焼結体中に導電体が埋設された構造を備
える高周波回路部品、例えば、例えば、インピーダ、イ
ンダクタとして用いられる。The magnetic oxide sintered body according to the present invention is used as a high-frequency circuit component having a structure in which a conductor is embedded in a magnetic oxide sintered body, for example, as an impedance or an inductor.
【００３１】[0031]
【実施例】以下、具体的実施例を挙げて本発明をさらに
詳細に説明する。The present invention will be described below in further detail with reference to specific examples.
【００３２】[実験例Ｉ] （実施例および比較例サンプルの作製）焼結後の組成が
下記表１に示すような組成となるように各原料を秤量
し、鋼鉄製ボールミルで１５時間湿式混合した。次に、
この混合粉を大気中、表１に記載された温度で２時間仮
焼きした。次いで、表１に示されるごとく所定のガラス
を所定量添加した後、鉄鋼製ボールミルで１５時間粉砕
した。[Experimental Example I] (Preparation of Samples of Examples and Comparative Examples) Each raw material was weighed so that the composition after sintering had the composition shown in Table 1 below, and was wet-mixed for 15 hours using a steel ball mill. did. next,
This mixed powder was calcined in the air at the temperature shown in Table 1 for 2 hours. Next, as shown in Table 1, a predetermined amount of a predetermined glass was added, and the mixture was pulverized with a steel ball mill for 15 hours.
【００３３】このようにして得られた六方晶フェライト
粉を造粒して、１００ＭＰａの圧力で所望の形状に成形
した。The hexagonal ferrite powder thus obtained was granulated and formed into a desired shape at a pressure of 100 MPa.
【００３４】この成形体を大気中、表１に示される温度
で２時間焼結した。六方晶フェライト焼結体の組成は下
記表１に示すとおりであり、これらの各サンプルについ
て、２５℃における周波数５００ＭＨｚおよび２ＧＨｚ
の透磁率、並びに電気抵抗率、誘電率、をそれぞれ測定
して表１に示した。透磁率は周波数５００ＭＨｚおよび
２ＧＨｚの周波数において、２．０以上の値を目標とし
ている。また、電気抵抗率は１×１０5Ω・ｍの値を目
標としている。誘電率は低ければ低いほど良い。ちなみ
に、後述の実験結果より、電気抵抗率が１×１０5Ω・
ｍの値を超えていれば誘電率は３０以下の低い値を示し
ている。The compact was sintered in air at the temperature shown in Table 1 for 2 hours. The composition of the hexagonal ferrite sintered body is as shown in Table 1 below. For each of these samples, the frequency at 25 ° C. was 500 MHz and 2 GHz.
Table 1 shows the measured magnetic permeability, electrical resistivity, and dielectric constant. The permeability aims at a value of 2.0 or more at the frequencies of 500 MHz and 2 GHz. The electric resistivity is targeted at a value of 1 × 10 5 Ω · m. The lower the dielectric constant, the better. Incidentally, from the experimental results described later, the electric resistivity is 1 × 10 5 Ω ·
If it exceeds the value of m, the dielectric constant shows a low value of 30 or less.
【００３５】なお、Ｙ型六方晶フェライトによる占有率
は、焼結体の粉砕粉を用いて、Ｘ線回折ピークの強度比
より算出した。The occupancy by the Y-type hexagonal ferrite was calculated from the intensity ratio of X-ray diffraction peaks using the pulverized powder of the sintered body.
【００３６】[0036]
【表１】 [Table 1]
【００３７】[0037]
【表２】 [Table 2]
【００３８】[実験例II]上記実験例Ｉにおける実施例Ｉ
−６サンプルの主成分において、添加成分の種類および
添加量を下記表２に示すとおり変えて種々のサンプルを
作製した。これらのサンプルについて、９０％以上の相
対密度（理論密度１００に対して）が得られる温度を測
定した。[Experimental Example II] Example I in Experimental Example I above
With respect to the main components of -6 samples, various samples were prepared by changing the types and amounts of the added components as shown in Table 2 below. For these samples, the temperature at which a relative density of 90% or more (with respect to a theoretical density of 100) was obtained was measured.
【００３９】結果を下記表２に示した。The results are shown in Table 2 below.
【００４０】[0040]
【表３】 [Table 3]
【００４１】[実験例III]次に、本発明の磁性体を用い
てインダクタンス素子を作製した。すなわち、焼結後の
組成が上記表１の実施例Ｉ−６サンプルの主成分に示さ
れるような組成となるように各原料を秤量し、鋼鉄製ボ
ールミルで１５時間湿式混合した。次に、この混合粉を
大気中、９５０℃で２時間仮焼きした。次いで、副成分
としてビスマスガラスを５ｗｔ％添加した後、鉄鋼製ボ
ールミルで１５時間粉砕した。[Experimental Example III] Next, an inductance element was manufactured using the magnetic material of the present invention. That is, each raw material was weighed so that the composition after sintering had a composition as shown in the main component of the sample of Example I-6 in Table 1 above, and was wet-mixed for 15 hours with a steel ball mill. Next, this mixed powder was calcined in the air at 950 ° C. for 2 hours. Next, after adding 5 wt% of bismuth glass as a sub-component, the mixture was pulverized with a steel ball mill for 15 hours.
【００４２】この仮焼き粉末に有機バインダーを混合
し、ドクターブレード法により均一なグリーンシートを
形成した。An organic binder was mixed with the calcined powder, and a uniform green sheet was formed by a doctor blade method.
【００４３】比較のためにＮｉＺｎ系スピネルフェライ
ト粉末（ＮｉＯ＝４５モル％、ＣｕＯ＝５モル％、Ｚｎ
Ｏ＝１．５モル％、Ｆｅ2Ｏ3＝４８モル％、ＣｏＯ＝
０．５モル％）を用いて作製したグリーンシートも準備
した。For comparison, NiZn-based spinel ferrite powder (NiO = 45 mol%, CuO = 5 mol%, ZnO
O = 1.5 mol%, Fe 2 O 3 = 48 mol%, CoO =
(0.5 mol%) was also prepared.
【００４４】この一方で、銀を混合してなる導電性ペー
ストを用意し、先のグリーンシート上にコイルをスパイ
ラル状となるように積層した。厚み方向に圧力を加えて
圧着し、磁性体に電極がサンドイッチされたグリーンシ
ート積層体を作製した。これを９３０℃で２時間焼成し
た。得られた焼結体の側面の内部導電体の位置に銀ペー
ストを塗布し、外部電極を焼き付け、図１に概略的に示
されるインピーダンス素子（高周波回路部品）とした。
なお、図１は素子内部構造の理解を容易にするためにモ
デル図として描かれている。図１において、符号１１は
インナーコンダクタ（Ａｇコイル）であり、符号１０は
ターミナルコンダクタであり、符号２０はフェライトを
示している。[0044] In the other hand, silver prepared conductive paste obtained by mixing, was laminated coil on the previous green sheets so that the spiral shape. Pressure was applied in the thickness direction to perform compression bonding to produce a green sheet laminate in which electrodes were sandwiched between magnetic materials. This was fired at 930 ° C. for 2 hours. A silver paste was applied to the position of the internal conductor on the side surface of the obtained sintered body, and an external electrode was baked to obtain an impedance element (high-frequency circuit component) schematically shown in FIG.
FIG. 1 is drawn as a model diagram to facilitate understanding of the internal structure of the device. In FIG. 1, reference numeral 11 denotes an inner conductor (Ag coil), reference numeral 10 denotes a terminal conductor, and reference numeral 20 denotes a ferrite.
【００４５】得られたインダクタンス素子のインピーダ
ンスおよび透磁率を２ＧＨｚで測定したところ、本発明
のものではインピーダンスが２０８Ω（透磁率は３．
７）が得られた。ちなみに、ＮｉＣｕＺｎフェライトの
インピーダンスは１３５Ω（透磁率１．２）であった。When the impedance and the magnetic permeability of the obtained inductance element were measured at 2 GHz, the impedance of the present invention was 208Ω (the magnetic permeability was 3.
7) was obtained. Incidentally, the impedance of the NiCuZn ferrite was 135Ω (permeability 1.2).
【００４６】[0046]
【発明の効果】上記の結果より本発明の効果は明らかで
ある。すなわち、本発明は、Ｙ型六方晶フェライトで８
０％以上占有されてなる磁性酸化物焼結体であって、該
磁性酸化物焼結体は、主成分として酸化コバルトをＣｏ
Ｏ換算で３〜１５モル％、酸化銅をＣｕＯ換算で５〜１
７モル％、酸化鉄をＦｅ2Ｏ3換算で５７〜６１モル％、
残部をＡＯ（ＡＯは、ＢａＯまたはＳｒＯの少なくとも
１種）として含み、副成分として硼珪酸ガラス、硼珪酸
亜鉛ガラスまたはビスマスガラスを０．６〜７ｗｔ％含
有してなるように構成されているので、１０００℃以下
特に、９００℃付近で焼成可能であり、電気抵抗率が高
く、誘電率が低い、Ｙ型六方晶フェライトを主成分フェ
ライトとする磁性酸化物焼結体およびこれを用いた高周
波回路部品を提供するができる。The effects of the present invention are clear from the above results. That is, the present invention relates to a Y-type hexagonal ferrite,
A magnetic oxide sintered body occupied by 0% or more, wherein the magnetic oxide sintered body contains cobalt oxide as a main component in Co.
3 to 15 mol% in terms of O, and copper oxide in an amount of 5 to 1 in terms of CuO
7 mol%, iron oxide is 57 to 61 mol% in terms of Fe 2 O 3 ,
Since the remainder is contained as AO (AO is at least one of BaO and SrO), and 0.6 to 7 wt% of borosilicate glass, zinc borosilicate glass or bismuth glass is contained as an auxiliary component. , 1000 ° C. or lower, especially a magnetic oxide sintered body which can be fired at around 900 ° C., has a high electric resistivity and a low dielectric constant, and has a Y-type hexagonal ferrite as a main component ferrite, and a high-frequency circuit using the same Parts can be provided.
【図１】実施例で用いたインダクタンス素子（高周波回
路部品）の概略図面である。FIG. 1 is a schematic drawing of an inductance element (high-frequency circuit component) used in an example.
１０…ターミナルコンダクタ １１…インナーコンダクタ ２０…フェライト 10 terminal conductor 11 inner conductor 20 ferrite
フロントページの続き Ｆターム(参考） 4G018 AA01 AA09 AA10 AA22 AA24 AA25 AA27 AA31 AA37 AB03 AC16 5E041 AA06 AA19 BD01 CA01 HB01 NN01 NN02 NN06 NN18 Continued on the front page F term (reference) 4G018 AA01 AA09 AA10 AA22 AA24 AA25 AA27 AA31 AA37 AB03 AC16 5E041 AA06 AA19 BD01 CA01 HB01 NN01 NN02 NN06 NN18
Claims (5)
されてなる磁性酸化物焼結体であって、 該磁性酸化物焼結体は、主成分として酸化コバルトをＣ
ｏＯ換算で３〜１５モル％、酸化銅をＣｕＯ換算で５〜
１７モル％、酸化鉄をＦｅ2Ｏ3換算で５７〜６１モル
％、残部をＡＯ（ＡＯは、ＢａＯまたはＳｒＯの少なく
とも１種）として含み、 副成分として硼珪酸ガラス、硼珪酸亜鉛ガラスまたはビ
スマスガラスを０．６〜７ｗｔ％含有してなることを特
徴とする磁性酸化物焼結体。1. A magnetic oxide sintered body occupied by 80% or more of a Y-type hexagonal ferrite, wherein the magnetic oxide sintered body contains cobalt oxide as a main component.
3 to 15 mol% in terms of oO, copper oxide in 5 to 5 in terms of CuO
17 mol%, iron oxide 57-61 mol% in terms of Fe 2 O 3 , the balance being AO (AO is at least one of BaO and SrO), and borosilicate glass, zinc borosilicate glass or bismuth as a sub-component A magnetic oxide sintered body comprising 0.6 to 7% by weight of glass.
焼温度が８５０℃〜１０００℃である請求項１に記載の
磁性酸化物焼結体。2. The magnetic oxide sintered body according to claim 1, wherein a calcination temperature in the production of the magnetic oxide sintered body is 850 ° C. to 1000 ° C.
た構造を備える高周波回路部品であって、 前記磁性酸化物焼結体は、Ｙ型六方晶フェライトで８０
％以上占有され、かつ、 該磁性酸化物焼結体は、主成分として酸化コバルトをＣ
ｏＯ換算で３〜１５モル％、酸化銅をＣｕＯ換算で５〜
１７モル％、酸化鉄をＦｅ2Ｏ3換算で５７〜６１モル
％、残部をＡＯ（ＡＯは、ＢａＯまたはＳｒＯの少なく
とも１種）として含み、 副成分として硼珪酸ガラス、硼珪酸亜鉛ガラスまたはビ
スマスガラスを０．６〜７ｗｔ％含有してなることを特
徴とする高周波回路部品。3. A high-frequency circuit component having a structure in which a conductor is embedded in a magnetic oxide sintered body, wherein the magnetic oxide sintered body is a Y-type hexagonal ferrite.
% Or more, and the magnetic oxide sintered body contains cobalt oxide as a main component.
3 to 15 mol% in terms of oO, copper oxide in 5 to 5 in terms of CuO
17 mol%, iron oxide 57-61 mol% in terms of Fe 2 O 3 , the balance being AO (AO is at least one of BaO and SrO), and borosilicate glass, zinc borosilicate glass or bismuth as a sub-component A high frequency circuit component comprising 0.6 to 7% by weight of glass.
焼温度が８５０℃〜１０００℃である請求項３に記載の
高周波回路部品。4. The high-frequency circuit component according to claim 3, wherein a calcination temperature in the production of the magnetic oxide sintered body is 850 ° C. to 1000 ° C.
請求項３または請求項４に記載の高周波回路部品。5. The high-frequency circuit component according to claim 3, wherein the conductor is mainly composed of silver (Ag).
Priority Applications (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001056153A JP4074438B2 (en) | 2001-03-01 | 2001-03-01 | Magnetic oxide sintered body and high-frequency circuit component using the same |
| US10/070,706 US6660179B2 (en) | 2001-03-01 | 2001-08-03 | Sintered body and high-frequency circuit component |
| EP01954432A EP1364927B1 (en) | 2001-03-01 | 2001-08-03 | Magnetic oxide sinter and high-frequency circuit part employing the same |
| DE60136223T DE60136223D1 (en) | 2001-03-01 | 2001-08-03 | SINTERED MAGNETIC OXIDE AND HIGH FREQUENCY CIRCUIT UNIT USING THIS |
| KR10-2001-7016331A KR100423961B1 (en) | 2001-03-01 | 2001-08-03 | Sintered body and high-frequency circuit component |
| CNB018087744A CN1232471C (en) | 2001-03-01 | 2001-08-03 | Magnetic oxide sinter and high frequency circuit part employing same |
| PCT/JP2001/006691 WO2002070432A1 (en) | 2001-03-01 | 2001-08-03 | Magnetic oxide sinter and high-frequency circuit part employing the same |
| TW90119381A TW572864B (en) | 2001-03-01 | 2001-08-08 | Magnetic oxide sinter and high-frequency circuit part employing the same |
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|---|---|---|---|
| JP2001056153A JP4074438B2 (en) | 2001-03-01 | 2001-03-01 | Magnetic oxide sintered body and high-frequency circuit component using the same |
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| Publication Number | Publication Date |
|---|---|
| JP2002260912A true JP2002260912A (en) | 2002-09-13 |
| JP4074438B2 JP4074438B2 (en) | 2008-04-09 |
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| US7163667B2 (en) | 2002-01-21 | 2007-01-16 | Sanyo Electric Co., Ltd. | Production process for oxide magnetic material and oxide magnetic material |
| WO2007148438A1 (en) * | 2006-06-21 | 2007-12-27 | Hitachi Metals, Ltd. | Magnetic material antenna and ferrite sinter |
| US7651626B2 (en) | 2004-12-17 | 2010-01-26 | Hitachi Metals, Ltd. | Hexagonal ferrite, antenna using the same and communication apparatus |
| US20110025572A1 (en) * | 2009-07-28 | 2011-02-03 | Samsung Electronics Co. Ltd. | Y-type hexagonal ferrite, fabrication method thereof, and antenna apparatus using the same |
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| US8154464B2 (en) | 2006-06-21 | 2012-04-10 | Hitachi Metals, Ltd. | Magnetic material antenna and ferrite sintered body |
| US20110025572A1 (en) * | 2009-07-28 | 2011-02-03 | Samsung Electronics Co. Ltd. | Y-type hexagonal ferrite, fabrication method thereof, and antenna apparatus using the same |
| US8564493B2 (en) * | 2009-07-28 | 2013-10-22 | Samsung Electronics Co, Ltd. | Y-type hexagonal ferrite, fabrication method thereof, and antenna apparatus using the same |
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