JP2002257506A - Non-contact coating thickness measuring device - Google Patents
Non-contact coating thickness measuring deviceInfo
- Publication number
- JP2002257506A JP2002257506A JP2001051615A JP2001051615A JP2002257506A JP 2002257506 A JP2002257506 A JP 2002257506A JP 2001051615 A JP2001051615 A JP 2001051615A JP 2001051615 A JP2001051615 A JP 2001051615A JP 2002257506 A JP2002257506 A JP 2002257506A
- Authority
- JP
- Japan
- Prior art keywords
- displacement meter
- metal plate
- coating film
- distance
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、金属板上の塗工膜
厚を測定する非接触膜厚測定装置に関するものであり、
さらに詳しくは、装着された塗工機に塗工膜厚をフィー
ドバックするインライン非接触膜厚測定装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a non-contact film thickness measuring device for measuring a coating film thickness on a metal plate,
More specifically, the present invention relates to an in-line non-contact film thickness measuring device that feeds back a coating film thickness to a mounted coating machine.
【0002】[0002]
【従来の技術】従来、金属板上の塗工膜の厚さを測定す
る方法として、例えば、特開平6−229709号公報
に開示されているように、設定された基準位置から金属
板表面までの距離を測定する渦電流式測定器と、基準位
置から塗工膜表面までの距離を測定するために、200
〜350μmの光源波長を用いた光学式測定器を一体化
し、それぞれの距離の差を算出し、塗工膜の厚さを得る
非接触膜厚測定方法が知られている。2. Description of the Related Art Conventionally, as a method for measuring the thickness of a coating film on a metal plate, for example, as disclosed in JP-A-6-229709, from a set reference position to a metal plate surface. And an eddy current measuring device for measuring the distance between the reference position and the coating film surface.
There is known a non-contact film thickness measuring method in which an optical measuring device using a light source wavelength of up to 350 μm is integrated, a difference between respective distances is calculated, and a thickness of a coating film is obtained.
【0003】また、その他の方法として、金属板上から
部分的に塗工膜を削り取り、金属板の表面から塗膜表面
までの高さを機械的に接触測定する接触式膜厚測定方法
がある。[0003] As another method, there is a contact-type film thickness measuring method in which a coating film is partially cut off from a metal plate and the height from the surface of the metal plate to the surface of the coating film is mechanically contacted. .
【0004】[0004]
【発明が解決しようとする課題】しかしながら、上記の
従来技術において、前者の非接触膜厚測定方法での反射
強度を測定する光学式変位計を用いた場合は、その光源
波長を色の影響の少ない200〜350μmとしている
ものの、少なからず塗工膜表面の色、傾き、粗さの影響
を受けるため、基材(金属板に相当)および塗工膜表面
の平坦度や塗工膜表面の粗さが一定でない場合が多く、
この場合は測定誤差が大きくなるという問題点がある。However, in the above prior art, when an optical displacement meter for measuring the reflection intensity in the former non-contact film thickness measuring method is used, the wavelength of the light source is affected by the color. Although the thickness is 200 to 350 μm, it is affected by the color, inclination and roughness of the coating film surface, so that the flatness of the substrate (corresponding to a metal plate) and the coating film surface and the roughness of the coating film surface Is often not constant,
In this case, there is a problem that a measurement error increases.
【0005】また、後者の接触式膜厚測定方法では、全
面塗工をした金属板の塗工膜厚測定に接触式膜厚計を使
用するためには乾燥後に部分的に塗膜を削らなければな
らず、未乾燥状態での測定は不可能であるとともに、乾
燥後に測定する場合は塗工膜厚制御部へフィードバック
が遅れてしまい良品率が低下し、かつ削り粉が出て清浄
度が要求される塗工装置には不都合な方法であった。In the latter contact-type film thickness measuring method, in order to use the contact-type film thickness meter for measuring the coating film thickness of a metal plate coated on the entire surface, the coating film must be partially shaved after drying. In addition, measurement in the undried state is impossible, and when measurement is performed after drying, the feedback to the coating film thickness control unit is delayed, the yield rate is reduced, and shavings are generated and the cleanliness is reduced. This was inconvenient for the required coating equipment.
【0006】本発明は、かかる従来技術の問題点を解決
するものであり、その課題とするところは、走行する金
属板上に塗工された塗工膜厚を搬送ローラーの振れ精
度、塗工膜の表面状態(色、傾き、粗さ)の不安定さを
考慮し高精度にインラインで測定する非接触膜厚測定装
置を提供することにある。The present invention has been made to solve the above-mentioned problems of the prior art, and the object thereof is to determine the thickness of a coating film applied on a traveling metal plate, the deflection accuracy of a conveying roller, the coating accuracy, and the like. It is an object of the present invention to provide a non-contact film thickness measuring device for performing highly accurate in-line measurement in consideration of instability of a film surface state (color, inclination, roughness).
【0007】[0007]
【課題を解決するための手段】本発明に於いて上記課題
を達成するために、まず請求項1の発明では、回転する
金属ローラーに接触して走行する金属板上に塗工された
塗工膜厚を非接触で測定する非接触膜厚測定装置であっ
て、測定のための変位計ユニットは、前記金属板の走行
方向の同一線上に金属板の表面からの距離を測定する渦
電流式変位計と塗工膜表面からの距離を測定する共焦型
レーザー変位計が一体となり、さらに幅方向位置検出用
エンコーダーにより幅方向の位置を認識しながら移動可
能な構造となっていて、前記金属ローラーの側端部には
金属ローラーの振れ誤差を補正するための回転方向位置
検出用エンコダーが装着され、前記幅方向位置検出用エ
ンコーダーと回転方向位置検出用エンコーダーおよび渦
電流式変位計により金属ローラー全域の渦電流式変位計
の基準位置から金属ローラー表面までの距離を補正値1
として予め記憶させ、同様に共焦型レーザー変位計につ
いても補正値2として予め記憶させ、前記渦電流変位計
にてその基準位置から金属板表面までの距離を測定し、
その値から前記補正値1を減算して測定値1とし、さら
に前記測定と同じ位置で共焦型レーザー変位計にてその
基準位置から塗工膜表面までの距離の測定し、それから
前記補正2を減算して測定値2とし、前記測定値2から
測定値1を減算して塗工膜の厚さを算出することを特徴
とする非接触膜厚測定装置としたものである。In order to achieve the above object, according to the present invention, there is provided a method of coating a metal sheet on a metal plate running in contact with a rotating metal roller. A non-contact film thickness measuring device for measuring a film thickness in a non-contact manner, wherein a displacement gauge unit for measurement is an eddy current type measuring a distance from a surface of the metal plate on the same line in a running direction of the metal plate. The displacement meter and a confocal laser displacement meter that measures the distance from the coating film surface are integrated, and have a structure that can be moved while recognizing the position in the width direction by a width position detection encoder. At the side end of the roller, an encoder for detecting the rotational direction position for correcting the run-out error of the metal roller is mounted, and the encoder for detecting the width direction position, the encoder for detecting the rotational direction position, and the eddy current displacement meter are used. Correction value the distance to the metal roller surface from a reference position of the eddy current type displacement gauge metal roller entire 1
Is stored in advance as the correction value 2 for the confocal laser displacement meter, and the distance from the reference position to the surface of the metal plate is measured by the eddy current displacement meter.
The correction value 1 is subtracted from the value to obtain a measurement value 1, and the distance from the reference position to the surface of the coating film is measured at the same position as the measurement using a confocal laser displacement meter. Is subtracted to obtain a measured value 2, and the measured value 1 is subtracted from the measured value 2 to calculate the thickness of the coating film.
【0008】上記請求項1の発明によれば、渦電流式変
位計により金属板表面までの距離を測定するとともに、
共焦型レーザー変位計により塗工膜表面までの距離を測
定し、それぞれの測定値の差から塗工膜厚を非接触で測
定し、幅方向位置検出用エンコーダーと回転方向位置検
出用エンコダーの装着によって、金属ローラー全域の渦
電流式変位計の基準位置から金属ローラー表面までの距
離で補正値を算出して前記の塗工膜厚を補正せしめるの
で、金属ローラーの振れ精度、塗工膜の表面状態(色、
傾き、粗さ)に影響されずに安定して高精度に測定でき
る非接触膜厚測定装置を提供することができる。According to the first aspect of the present invention, the distance to the metal plate surface is measured by the eddy current type displacement meter,
The distance to the coating film surface is measured by a confocal laser displacement meter, and the coating film thickness is measured in a non-contact manner based on the difference between the measured values, and the width direction position detection encoder and rotation direction position detection encoder are used. By mounting, the correction value is calculated by the distance from the reference position of the eddy current type displacement meter of the entire metal roller to the surface of the metal roller to correct the coating film thickness. Surface condition (color,
It is possible to provide a non-contact film thickness measuring device that can measure stably and accurately without being affected by inclination and roughness.
【0009】また、請求項2の発明では、前記金属板の
幅および厚さの規格、塗工膜厚および塗工幅の規格、そ
の測定範囲を別途設ける演算装置に入力し、測定データ
を入力し、比較することによって、塗工装置に対する塗
工膜厚制御のフィードバックと金属板のキズや変形の検
出を可能にすることを特徴とする請求項1記載の非接触
膜厚測定装置としたものである。According to the second aspect of the present invention, the specification of the width and thickness of the metal plate, the specification of the coating film thickness and the coating width, and the measuring range are separately provided, and the measurement data is input. 2. A non-contact film thickness measuring apparatus according to claim 1, wherein the feedback of the coating film thickness control to the coating apparatus and the detection of scratches and deformation of the metal plate are enabled by comparing. It is.
【0010】上記請求項2の発明によれば、別途演算装
置を設け、それに規格データ、測定データ等の入力と比
較とによって、装着された塗工機に塗工膜厚の制御をフ
ィードバックするインライン非接触膜厚測定装置とする
ことができる。According to the second aspect of the present invention, an arithmetic unit is separately provided, in which the control of the coating film thickness is fed back to the mounted coating machine by inputting and comparing standard data, measurement data, and the like. A non-contact film thickness measuring device can be used.
【0011】[0011]
【発明の実施の形態】以下本発明の実施の形態を図面を
用いて説明する。本発明は、図1の斜視図に示すよう
に、走行する金属板(11)上の塗工膜(12)の厚さ
を測定する非接触膜厚測定装置(1)に関するものであ
り、例えば回転する金属ローラー(15)に接触卷着さ
れているフープ(輪)状の金属板(11)に塗工して塗
工膜(12)とし、この塗工膜(12)を他の被転写体
(図示せず)に転写する塗工機に設置して、その塗工膜
(12)厚の測定と制御に用いるインライン非接触膜厚
測定装置(1)である。Embodiments of the present invention will be described below with reference to the drawings. The present invention relates to a non-contact film thickness measuring device (1) for measuring the thickness of a coating film (12) on a traveling metal plate (11) as shown in the perspective view of FIG. A hoop (ring) -shaped metal plate (11) wound in contact with a rotating metal roller (15) is applied to form a coating film (12), and this coating film (12) is used as another transfer target. An in-line non-contact film thickness measuring device (1) installed in a coating machine for transferring to a body (not shown) and used for measuring and controlling the thickness of the coating film (12).
【0012】上記本発明の非接触膜厚測定装置(1)
は、図1に示すように、金属ローラー(15)に接触卷
着した金属板(11)の表面までの距離を測定する渦電
流式変位計(13)と塗工膜(12)の表面までの距離
を測定する共焦型レーザー変位計(14)を金属板(1
1)の走行方向(P)に対し、同一直線上に一体となる
よう配置してあり、さらにリニアガイド(19)、ボー
ルネジ(10)、サーボモーター(18)によって金属
板(11)の幅方向に移動可能な構造となっている。The non-contact film thickness measuring apparatus of the present invention (1)
As shown in FIG. 1, an eddy current type displacement meter (13) for measuring a distance to a surface of a metal plate (11) wound in contact with a metal roller (15) and a surface of a coating film (12). Confocal laser displacement meter (14) for measuring the distance of a metal plate (1)
In the running direction (P) of 1), they are arranged so as to be integrated on the same straight line, and furthermore, in the width direction of the metal plate (11) by a linear guide (19), a ball screw (10), and a servomotor (18). It has a structure that can be moved.
【0013】また、金属ローラー(15)の振れ誤差お
よび渦電流式変位計(13)と共焦型レーザー変位計
(14)の基準位置の場所によるばらつきを補正し、測
定精度を向上させるための回転方向位置検出用エンコー
ダー(16)と金属板(11)の幅方向位置検出用エン
コーダー(17)が装着されている。その補正値は金属
板(11)がない状態で予め測定し記憶しておく。[0013] The present invention is also intended to correct the run-out error of the metal roller (15) and the variation of the eddy current displacement meter (13) and the reference position of the confocal type laser displacement meter (14) depending on the location, thereby improving the measurement accuracy. The encoder (16) for detecting the position in the rotational direction and the encoder (17) for detecting the position in the width direction of the metal plate (11) are mounted. The correction value is measured and stored in advance without the metal plate (11).
【0014】その補正値の具体的には、金属板(11)
がない状態で金属ローラー(15)全域の各位置での渦
電流式変位計(13)の基準位置から金属ローラー(1
5)の表面までの距離を回転方向位置検出用エンコーダ
ー(16)および幅方向位置検出用エンコーダー(1
7)と対応させ補正値1として記憶しておく。同様のこ
とを共焦型レーザー変位計(14)についても実施し、
補正値2として記憶しておく。Specifically, the correction value is determined by a metal plate (11).
In the state where there is no metal roller (15) from the reference position of the eddy current displacement meter (13) at each position of the entire area of the metal roller (15),
The distance to the surface of 5) is determined by the encoder for detecting the position in the rotational direction (16) and the encoder for detecting the position in the width direction (1).
7) and is stored as the correction value 1. The same is performed for the confocal laser displacement meter (14),
It is stored as the correction value 2.
【0015】次に、金属板(11)に塗工している状態
で、補正値1を得たのと同じ位置で渦電流式変位計(1
3)にてその基準位置から金属板(11)の表面までの
距離を測定し、それから補正値1を減算する。この値が
金属板(11)の厚さとなり測定値1とする。Next, while the metal plate (11) is being coated, the eddy current displacement meter (1) is placed at the same position where the correction value 1 was obtained.
In 3), the distance from the reference position to the surface of the metal plate (11) is measured, and the correction value 1 is subtracted from it. This value becomes the thickness of the metal plate (11), and the measured value is 1.
【0016】さらに、上記測定と同じ位置で共焦型レー
ザー変位計(14)にてその基準位置から塗工膜(1
2)表面までの距離を測定し、それから補正値2を減算
する。この値が金属板(11)と塗工膜(12)の厚さ
の合計となり測定値2とする。この測定値2から測定値
1を減算することで塗工膜(12)の厚さを得ることが
でき、これらデータを塗工装置へフィードバックするこ
とによって塗工膜厚制御が可能になる。Further, at the same position as the above measurement, the coating film (1) is moved from its reference position by the confocal laser displacement meter (14).
2) Measure the distance to the surface and subtract the correction value 2 from it. This value is the sum of the thicknesses of the metal plate (11) and the coating film (12), and is referred to as a measured value 2. The thickness of the coating film (12) can be obtained by subtracting the measurement value 1 from the measurement value 2, and the coating film thickness can be controlled by feeding back these data to the coating device.
【0017】上記補正では金属ローラー(15)表面と
塗工膜(12)表面の距離を比較するため、使用される
光学式変位計は、色、反射率、表面粗さの影響を受けな
いようにしなければならないが、本発明の非接触膜厚測
定装置(1)に使用している共焦型レーザー変位計(1
4)はそれら色、反射率、表面粗さの影響を受けないも
のである。In the above correction, the distance between the surface of the metal roller (15) and the surface of the coating film (12) is compared, so that the optical displacement meter used is not affected by color, reflectance, and surface roughness. The confocal laser displacement meter (1) used in the non-contact film thickness measuring device (1) of the present invention
4) is not affected by the color, the reflectance, and the surface roughness.
【0018】また、上記補正値2と補正値1の差は渦電
流変位計(13)の基準位置と共焦型レーザー変位計
(14)の基準位置の差である。また金属ローラー(1
5)全域の各位置で補正値測定を行うことによって、例
えば金属ローラー(15)とリニアガイド(19)との
平行度の誤差による各基準位置の差のばらつきを補正す
ることができるため、これらの組立時に微妙な調整が不
要となる。The difference between the correction value 2 and the correction value 1 is the difference between the reference position of the eddy current displacement meter (13) and the reference position of the confocal laser displacement meter (14). In addition, metal roller (1
5) By performing the correction value measurement at each position in the entire region, it is possible to correct the variation in the difference between the respective reference positions due to the parallelism error between the metal roller (15) and the linear guide (19). No delicate adjustments are required when assembling.
【0019】さらに、渦電流式変位計(13)の基準位
置から金属板(11)表面までの距離から補正値1を減
算した値、すなわち金属板(11)の板厚と請求項2に
記載の金属板の板厚の規格を比較することによって金属
板(11)のキズや変形の検出が可能となるものであ
る。Further, a value obtained by subtracting a correction value of 1 from the distance from the reference position of the eddy current type displacement meter to the surface of the metal plate, that is, the plate thickness of the metal plate, is set forth in claim 2. By comparing the specifications of the thickness of the metal plate, it is possible to detect the scratches and deformation of the metal plate (11).
【0020】以上のような非接触膜厚測定装置(1)
は、例えば上述のようなフープ状の金属板(11)にレ
ジスト等を塗布して塗工膜(12)とし、この塗工膜
(12)を他の基材に転写して製品とするための塗工・
転写機に適用でき、さらにシート状の金属板(例えば自
動車用外板)の塗工機などにも好適に使用できる非接触
膜厚測定装置(1)である。Non-contact film thickness measuring apparatus as described above (1)
For example, in order to apply a resist or the like to the above-mentioned hoop-shaped metal plate (11) to form a coating film (12), and transfer the coating film (12) to another base material to obtain a product. Coating /
The non-contact film thickness measuring device (1) which can be applied to a transfer machine and can be suitably used for a coating machine for a sheet-like metal plate (for example, an outer plate for automobiles).
【0021】[0021]
【発明の効果】本発明は以上の構成であるから、下記に
示す如き効果がある。即ち、金属ローラー上の金属板の
塗工膜の厚さを渦電流式変位計と共焦型レーザー変位計
の併用とし、さらに金属ローラーの振れ、前記両変位計
の基準位置のばらつき、両変位計の移動機構の組立誤差
をなくすための補正によって、微妙な組立・調整を必要
とせず、かつ塗工膜表面の色、傾き、粗さの影響を受け
ずに正確に測定することを可能にした非接触膜厚測定装
置とすることができる。As described above, the present invention has the following effects. That is, the thickness of the coating film of the metal plate on the metal roller is used in combination with the eddy current displacement meter and the confocal laser displacement meter, and furthermore, the deflection of the metal roller, the variation in the reference positions of the two displacement meters, Correction to eliminate assembly errors of the moving mechanism of the meter enables accurate measurement without the need for delicate assembly and adjustment, and without being affected by the color, tilt, or roughness of the coating film surface. A non-contact film thickness measuring device can be obtained.
【0022】また、上記のように塗工膜表面の状態の影
響を受けないため、未乾燥状態でも測定ができるので、
塗工直後に測定しその結果を塗工膜厚制御部へフィード
バックして製品の収率向上に寄与できる効果がある。Further, since it is not affected by the state of the surface of the coating film as described above, the measurement can be performed even in an undried state.
Measurement is performed immediately after coating, and the result is fed back to the coating film thickness control unit, which has the effect of improving the product yield.
【0023】さらにまた、同様に塗工膜表面の状態の影
響を受けないため、塗工物の色を替えても、変位計のキ
ャリブレーションの必要がなく、段取り時間の短縮がで
きるため生産効率を向上させる効果がある。Furthermore, since the coating film surface is similarly unaffected, the displacement meter does not need to be calibrated even if the color of the coating material is changed, and the setup time can be shortened. Has the effect of improving.
【0024】また、渦電流式変位計と共焦型レーザー変
位計は非接触式であるため、塗膜に傷をつけることがな
く、かつ塗工膜の削れによる発塵もないので清浄度の高
い環境下で製品化を可能にする。Since the eddy current displacement meter and the confocal type laser displacement meter are non-contact type, they do not damage the coating film and do not generate dust due to the scraping of the coating film, so that the cleanliness is low. Enables commercialization in high environments.
【0025】さらにまた、金属板の板厚の測定値と予め
入力されている規格値を比較することによって、金属板
の傷や変形の検出が可能となるので、製品の検査にも貢
献できる効果がある。Furthermore, by comparing the measured value of the thickness of the metal plate with the standard value inputted in advance, it is possible to detect the flaws and deformation of the metal plate, thereby contributing to the inspection of the product. There is.
【0026】従って本発明は、金属板上の塗工膜厚を測
定する非接触膜厚測定装置において、特に装着された塗
工機に塗工膜厚をフィードバックするインライン非接触
膜厚測定装置として、優れた実用上の効果を発揮する。Accordingly, the present invention relates to a non-contact film thickness measuring device for measuring a coating film thickness on a metal plate, and more particularly, to an in-line non-contact film thickness measuring device for feeding back the coating film thickness to a mounted coating machine. Demonstrate excellent practical effects.
【図1】本発明の非接触膜厚測定装置の一実施の形態を
説明する斜視図である。FIG. 1 is a perspective view illustrating an embodiment of a non-contact film thickness measuring apparatus according to the present invention.
1‥‥非接触膜厚測定装置 10‥‥ボールネジ 11‥‥金属板 12‥‥塗工膜 13‥‥渦電流式変位計 14‥‥共焦型レーザー変位計 15‥‥金属ローラー 16‥‥回転方向一検出エンコーダー 17‥‥幅方向一検出エンコーダー 18‥‥サーボモーター 19‥‥リニアガイド P‥‥金属板の走行方向 W‥‥金属板の幅方向 1 Non-contact film thickness measuring device 10 Ball screw 11 Metal plate 12 Coating film 13 Eddy current displacement meter 14 Confocal laser displacement meter 15 Metal roller 16 Rotation Direction one detection encoder 17 ‥‥ Width direction one detection encoder 18 ‥‥ Servo motor 19 ガ イ ド Linear guide P ‥‥ Metal plate running direction W ‥‥ Metal plate width direction
Claims (2)
金属板上に塗工された塗工膜厚を非接触で測定する非接
触膜厚測定装置であって、測定のための変位計ユニット
は、前記金属板の走行方向の同一線上に金属板の表面か
らの距離を測定する渦電流式変位計と塗工膜表面からの
距離を測定する共焦型レーザー変位計が一体となり、さ
らに幅方向位置検出用エンコーダーにより幅方向の位置
を認識しながら移動可能な構造となっていて、前記金属
ローラーの側端部には金属ローラーの振れ誤差を補正す
るための回転方向位置検出用エンコダーが装着され、前
記幅方向位置検出用エンコーダーと回転方向位置検出用
エンコーダーおよび渦電流式変位計により金属ローラー
全域の渦電流式変位計の基準位置から金属ローラー表面
までの距離を補正値1として予め記憶させ、同様に共焦
型レーザー変位計についても補正値2として予め記憶さ
せ、前記渦電流変位計にてその基準位置から金属板表面
までの距離を測定し、その値から前記補正値1を減算し
て測定値1とし、さらに前記測定と同じ位置で共焦型レ
ーザー変位計にてその基準位置から塗工膜表面までの距
離の測定し、それから前記補正2を減算して測定値2と
し、前記測定値2から測定値1を減算して塗工膜の厚さ
を算出することを特徴とする非接触膜厚測定装置。1. A non-contact film thickness measuring device for measuring a coating film thickness applied on a metal plate running in contact with a rotating metal roller in a non-contact manner, comprising a displacement meter unit for measurement. The eddy current displacement meter that measures the distance from the surface of the metal plate and the confocal laser displacement meter that measures the distance from the surface of the coating film are integrated on the same line in the running direction of the metal plate, and the width is further integrated. It has a structure that can be moved while recognizing the position in the width direction by a direction position detection encoder, and a rotation direction position detection encoder for correcting a deflection error of the metal roller is attached to a side end of the metal roller. The distance from the reference position of the eddy current displacement meter over the entire metal roller to the surface of the metal roller is corrected by the width direction position detection encoder, the rotation direction position detection encoder, and the eddy current displacement meter. 1 is stored in advance, and the confocal laser displacement meter is also stored in advance as a correction value 2, and the distance from the reference position to the surface of the metal plate is measured by the eddy current displacement meter. The value 1 is subtracted to obtain a measurement value 1, and the distance from the reference position to the surface of the coating film is measured at the same position as the measurement using a confocal laser displacement meter, and then the correction 2 is subtracted from the measurement. A non-contact film thickness measuring device, wherein the thickness of the coating film is calculated by subtracting the measured value 1 from the measured value 2 as the value 2.
厚および塗工幅の規格、その測定範囲を別途設ける演算
装置に入力し、測定データを入力し、比較することによ
って、塗工装置に対する塗工膜厚制御のフィードバック
と金属板のキズや変形の検出を可能にすることを特徴と
する請求項1記載の非接触膜厚測定装置。2. A standard for the width and thickness of the metal plate, a standard for the coating film thickness and a coating width, and a measuring range are separately input to an arithmetic unit, and measurement data is input and compared. 2. The non-contact thickness measuring device according to claim 1, wherein feedback of control of the coating thickness to the coating device and detection of scratches and deformation of the metal plate are enabled.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001051615A JP4599728B2 (en) | 2001-02-27 | 2001-02-27 | Non-contact film thickness measuring device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001051615A JP4599728B2 (en) | 2001-02-27 | 2001-02-27 | Non-contact film thickness measuring device |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2002257506A true JP2002257506A (en) | 2002-09-11 |
JP4599728B2 JP4599728B2 (en) | 2010-12-15 |
Family
ID=18912366
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2001051615A Expired - Fee Related JP4599728B2 (en) | 2001-02-27 | 2001-02-27 | Non-contact film thickness measuring device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4599728B2 (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006308381A (en) * | 2005-04-27 | 2006-11-09 | Yokohama Rubber Co Ltd:The | Selvage rubber adhesion amount measuring method and its device |
WO2006136030A1 (en) * | 2005-06-24 | 2006-12-28 | Avestor Limited Partnership | Method and apparatus for measuring a thickness of a thin film in motion |
JP2011038856A (en) * | 2009-08-07 | 2011-02-24 | Toyota Motor Corp | Film thickness measuring device and film thickness measuring method |
US8531680B2 (en) | 2009-01-15 | 2013-09-10 | Toyota Jidosha Kabushiki Kaisha | Method of detecting the width of a coated film and detection device used in said detection method |
CN111364070A (en) * | 2020-02-24 | 2020-07-03 | 广东嘉元科技股份有限公司 | Post-processing single machine for preventing foil breakage, production process, control method and control system |
CN114136201A (en) * | 2021-12-30 | 2022-03-04 | 西安交通大学 | Eddy current probe based on optical transparent conductive medium material and film thickness measuring system and method |
CN114184129A (en) * | 2021-10-25 | 2022-03-15 | 上海航天化工应用研究所 | Engine lining thickness measuring device with two head bands closing in |
CN117367351A (en) * | 2023-12-07 | 2024-01-09 | 山东中科机械再制造有限公司 | Coating thickness detection equipment of laser cladding machine |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS587508A (en) * | 1981-07-08 | 1983-01-17 | Fuji Electric Co Ltd | Scanning type measuring device |
JPH03123811A (en) * | 1989-10-09 | 1991-05-27 | Meisan Kk | Sheet thickness measuring instrument |
JPH05223559A (en) * | 1992-02-14 | 1993-08-31 | Nippon Steel Corp | Film thickness measuring device of surface of conductive material |
JPH05231856A (en) * | 1992-02-21 | 1993-09-07 | Mitsubishi Electric Corp | Thickness measuring instrument |
JPH0949725A (en) * | 1995-05-26 | 1997-02-18 | Japan Steel Works Ltd:The | Method and apparatus for measuring thickness of resin film sheet and roll with tapered part |
JPH102883A (en) * | 1996-06-18 | 1998-01-06 | Mitsubishi Heavy Ind Ltd | Eddy current flaw detection apparatus |
JPH11183155A (en) * | 1997-12-24 | 1999-07-09 | Meisan Kk | Method and apparatus with improved measurement accuracy for measuring sheet thickness |
JP2000346635A (en) * | 1999-06-02 | 2000-12-15 | Nkk Corp | Method and apparatus for controlling thickness of coating film |
-
2001
- 2001-02-27 JP JP2001051615A patent/JP4599728B2/en not_active Expired - Fee Related
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS587508A (en) * | 1981-07-08 | 1983-01-17 | Fuji Electric Co Ltd | Scanning type measuring device |
JPH03123811A (en) * | 1989-10-09 | 1991-05-27 | Meisan Kk | Sheet thickness measuring instrument |
JPH05223559A (en) * | 1992-02-14 | 1993-08-31 | Nippon Steel Corp | Film thickness measuring device of surface of conductive material |
JPH05231856A (en) * | 1992-02-21 | 1993-09-07 | Mitsubishi Electric Corp | Thickness measuring instrument |
JPH0949725A (en) * | 1995-05-26 | 1997-02-18 | Japan Steel Works Ltd:The | Method and apparatus for measuring thickness of resin film sheet and roll with tapered part |
JPH102883A (en) * | 1996-06-18 | 1998-01-06 | Mitsubishi Heavy Ind Ltd | Eddy current flaw detection apparatus |
JPH11183155A (en) * | 1997-12-24 | 1999-07-09 | Meisan Kk | Method and apparatus with improved measurement accuracy for measuring sheet thickness |
JP2000346635A (en) * | 1999-06-02 | 2000-12-15 | Nkk Corp | Method and apparatus for controlling thickness of coating film |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006308381A (en) * | 2005-04-27 | 2006-11-09 | Yokohama Rubber Co Ltd:The | Selvage rubber adhesion amount measuring method and its device |
JP4655307B2 (en) * | 2005-04-27 | 2011-03-23 | 横浜ゴム株式会社 | Ear rubber adhesion amount measuring method and apparatus |
WO2006136030A1 (en) * | 2005-06-24 | 2006-12-28 | Avestor Limited Partnership | Method and apparatus for measuring a thickness of a thin film in motion |
US8531680B2 (en) | 2009-01-15 | 2013-09-10 | Toyota Jidosha Kabushiki Kaisha | Method of detecting the width of a coated film and detection device used in said detection method |
JP2011038856A (en) * | 2009-08-07 | 2011-02-24 | Toyota Motor Corp | Film thickness measuring device and film thickness measuring method |
CN111364070A (en) * | 2020-02-24 | 2020-07-03 | 广东嘉元科技股份有限公司 | Post-processing single machine for preventing foil breakage, production process, control method and control system |
CN114184129A (en) * | 2021-10-25 | 2022-03-15 | 上海航天化工应用研究所 | Engine lining thickness measuring device with two head bands closing in |
CN114184129B (en) * | 2021-10-25 | 2023-11-10 | 上海航天化工应用研究所 | Two-end engine lining thickness measuring device with closing-in |
CN114136201A (en) * | 2021-12-30 | 2022-03-04 | 西安交通大学 | Eddy current probe based on optical transparent conductive medium material and film thickness measuring system and method |
CN117367351A (en) * | 2023-12-07 | 2024-01-09 | 山东中科机械再制造有限公司 | Coating thickness detection equipment of laser cladding machine |
CN117367351B (en) * | 2023-12-07 | 2024-02-06 | 山东中科机械再制造有限公司 | Coating thickness detection equipment of laser cladding machine |
Also Published As
Publication number | Publication date |
---|---|
JP4599728B2 (en) | 2010-12-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI502672B (en) | Method for manufacturing electronic or non-electronic comoponents, apparatus therefor, and substrate for manufacturing electronic or non-electronic components | |
JP2013026288A (en) | Imprint device and manufacturing method of article | |
KR20150102935A (en) | Chuck, in particular for use in a mask aligner | |
JP5930699B2 (en) | Imprint apparatus, imprint method, and device manufacturing method | |
JP4599728B2 (en) | Non-contact film thickness measuring device | |
JP2013131577A5 (en) | ||
US4930440A (en) | Coater gap control arrangement | |
JP2965065B2 (en) | Sheet thickness measuring device | |
US12098912B2 (en) | Sheet producing device and sheet producing method | |
JP2000346635A (en) | Method and apparatus for controlling thickness of coating film | |
JP4091378B2 (en) | Substrate processing equipment | |
US8237139B2 (en) | Method for detecting substrate position of charged particle beam photolithography apparatus and charged particle beam photolithography apparatus | |
JP5592516B2 (en) | Coating apparatus and coating gap measuring method | |
US9366975B2 (en) | Stage transferring device and position measuring method thereof | |
JPH05223526A (en) | Plate thickness measuring apparatus | |
JP2991932B2 (en) | Steel plate flatness measurement method | |
JPH01136009A (en) | Non-contact type film thickness measuring device | |
JP2006266959A (en) | Instrument and method for measuring color of object surface | |
JPH05223559A (en) | Film thickness measuring device of surface of conductive material | |
JP7528965B2 (en) | Method for adjusting the layout of a surface defect detection device, method for detecting surface defects, method for manufacturing a product, and method for controlling product quality | |
JPH09199573A (en) | Positioning stage apparatus and aligner using the same | |
JPH05326363A (en) | Aligner and interval setting method for substrate | |
JPH06273103A (en) | Method for measuring outside diameter of cylindrical object | |
JP3734321B2 (en) | Hard substrate coater | |
JP2017138125A (en) | Spectral reflectance measurement device, and spectral reflectance measurement method |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20080124 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20100525 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100726 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20100831 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20100913 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131008 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
LAPS | Cancellation because of no payment of annual fees |