JPH06273103A - Method for measuring outside diameter of cylindrical object - Google Patents

Method for measuring outside diameter of cylindrical object

Info

Publication number
JPH06273103A
JPH06273103A JP6222093A JP6222093A JPH06273103A JP H06273103 A JPH06273103 A JP H06273103A JP 6222093 A JP6222093 A JP 6222093A JP 6222093 A JP6222093 A JP 6222093A JP H06273103 A JPH06273103 A JP H06273103A
Authority
JP
Japan
Prior art keywords
outer diameter
outside diameter
measurement
value
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6222093A
Other languages
Japanese (ja)
Inventor
Kazuo Yamamoto
一男 山本
Kiyoharu Takase
清春 高瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP6222093A priority Critical patent/JPH06273103A/en
Publication of JPH06273103A publication Critical patent/JPH06273103A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To find a true outside diameter by joining a plurality of measuring errors within an outside measuring range of a detector, finding a calibration curve of the detector and applying a correction value obtained from the calibration curve to an outside diameter measured value of a measurement object of an arbitrary outside diameter. CONSTITUTION:Movement of a frame 4 having fixed an outside diameter measuring device 3 is controlled with a controller 8 and a signal transmitted from the device 3 is data-processed 7. The device 3 is moved up to a position of a calibration gage 6, outside diameter measurement is performed for gages 6 with different outside diameter values respectively and a differences between an outside diameter measured value and the outside diameter value of the gage 6 is plotted for each outside diameter value. Each plotted point is joined with a least square method and a calibration curve can be obtained. A series of data processing such as plotting of measured data and calculation of the calibration curve can be automatically, performed with a computer. Next, a correction value is found from the calibration curve for the outside diameter measured value, applied thereto and a true outside diameter value can be obtained.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は機械軸などの円筒状物体
の外径測定方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for measuring the outer diameter of a cylindrical object such as a mechanical shaft.

【0002】[0002]

【従来の技術】機械軸などのような円筒状物体の外径を
高精度に行うために、非接触式と接触式の両方式で、こ
れまでいくつかの測定方法が発案され実用化されてい
る。特にレーザーを利用した非接触式の外径測定器は測
定範囲が広いこと、測定精度が高いことなどから広く使
用されている。
2. Description of the Related Art In order to perform the outer diameter of a cylindrical object such as a machine shaft with high accuracy, both a non-contact type and a contact type have been proposed and put into practical use. There is. In particular, a non-contact type outer diameter measuring device using a laser is widely used because of its wide measuring range and high measuring accuracy.

【0003】レーザーを使用した非接触式方式には、測
定物をはさむように既知の距離離れて対向する2カ所の
基準点から測定物表面までの距離を測定し、基準点間の
距離から2つの距離測定値を差し引くことによって測定
物の外径を求める方法や、レーザー光を帯状に測定物に
照射し、測定物の影になる部分の幅を測定物の反対側に
ある検出器で検出することによって測定物の外径を測定
する方法などがある。具体的な外径測定方法を後者を例
にとって、図7で説明する。
In the non-contact method using a laser, the distance from the reference point at two points facing each other at a known distance so as to sandwich the measurement object to the surface of the measurement object is measured, and the distance between the reference points is set to 2 Method to determine the outer diameter of the measured object by subtracting two distance measurement values, or irradiate the measured object with a laser beam in a band shape and detect the width of the shadowed area of the measured object with the detector on the opposite side of the measured object. There is a method of measuring the outer diameter of the object to be measured. A specific outer diameter measuring method will be described with reference to FIG. 7 by taking the latter as an example.

【0004】測定物1をはさみ込むように、レーザー光
投光部3aと受光部3bとが測定物1の両側に配置され
ている。レーザー投光部3aからはスポット状のレーザ
ー光9が平行かつ等速度で測定物1に走査され、測定物
1の反対側にある受光部3bで受光される。受光された
信号は電気信号に変換された後、外径演算装置7に送ら
れ、測定物1でレーザー光9が遮断された時間を長さに
換算することにより、測定物1の外径を測定できる。レ
ーザー光9の進行方向をX方向、レーザー光9の走査方
向をY方向とするとX方向とY方向のなす角度は90度
である。
A laser light projecting portion 3a and a light receiving portion 3b are arranged on both sides of the object to be measured 1 so as to sandwich the object to be measured 1. A laser beam 9 in the form of a spot is scanned from the laser projecting unit 3a onto the object to be measured 1 in parallel and at a constant speed, and is received by a light receiving unit 3b on the opposite side of the object to be measured 1. The received signal is converted into an electric signal and then sent to the outer diameter computing device 7, where the time during which the laser beam 9 is blocked by the measuring object 1 is converted into a length, whereby the outer diameter of the measuring object 1 is calculated. Can be measured. When the traveling direction of the laser light 9 is the X direction and the scanning direction of the laser light 9 is the Y direction, the angle formed by the X direction and the Y direction is 90 degrees.

【0005】[0005]

【発明が解決しようとする課題】上記の外径測定方法で
は、検出器内部で使用する光学部品の特性や、部品取付
誤差、あるいは信号処理時の演算誤差などにより測定誤
差を生じる。その測定誤差は、図8に示すように、測定
範囲内の各外径値に対して、同一値とならない場合が多
い。
In the above outer diameter measuring method, a measurement error occurs due to the characteristics of the optical components used inside the detector, component mounting errors, or calculation errors during signal processing. As shown in FIG. 8, the measurement error often does not become the same value for each outer diameter value within the measurement range.

【0006】機械軸などの外径は非常に高精度に測定す
る必要があるため、通常は、外径測定を行う前に測定物
の外径にほぼ等しい外径値をもつ較正用ゲージで外径測
定を行って検出器のゼロ点を較正した後に、測定したい
測定物の外径測定を行う場合が多い。しかし、この方法
では測定前に測定物とほぼ同じ外径値を有する較正ゲー
ジを用意する必要があり準備に多くの手間を要する。ま
た、測定物と較正ゲージの外径値が異なる場合には、ゼ
ロ点の較正が完全に行われないため、外径測定誤差を生
じる要因にもなり、問題があった。
Since it is necessary to measure the outer diameter of a machine shaft or the like with extremely high accuracy, it is usually necessary to measure the outer diameter with a calibration gauge having an outer diameter value substantially equal to the outer diameter of the object to be measured before measuring the outer diameter. In many cases, the outer diameter of the object to be measured is measured after performing the diameter measurement to calibrate the zero point of the detector. However, according to this method, it is necessary to prepare a calibration gauge having substantially the same outer diameter value as that of the object to be measured before measurement, which requires a lot of labor for preparation. Further, when the measured object and the calibration gauge have different outer diameter values, the zero point is not completely calibrated, which causes a measurement error of the outer diameter, which is a problem.

【0007】[0007]

【課題を解決するための手段】このための本発明方法
は、円筒状測定物の軸方向の任意の位置の外径を測定す
る方法において、該測定物に対する外径測定を行う前
に、外径値が既知であり、かつそれぞれ外径値が異なる
複数の較正用ゲージで前記検出器のそれぞれの外径値に
対する測定誤差を求めておき、該複数の測定誤差を前記
検出器の外径測定範囲内で連ねることにより検出器の較
正曲線を求め、任意の外径の測定物の外径測定値に対し
て、較正曲線から求めた補正量を加えることにより真の
外径値を求めるものである。
The method of the present invention for this purpose is a method for measuring the outer diameter of an arbitrary position in the axial direction of a cylindrical object to be measured, before measuring the outer diameter of the object. The measurement error for each outer diameter value of the detector is obtained with a plurality of calibration gauges having known diameter values and different outer diameter values, and the plurality of measurement errors are measured for the outer diameter of the detector. The calibration curve of the detector is obtained by connecting in the range, and the true outer diameter value is obtained by adding the correction amount obtained from the calibration curve to the outer diameter measurement value of the measurement object of an arbitrary outer diameter. is there.

【0008】一般に、光学的な外径測定器などでは、外
径測定誤差は測定範囲内で外径値の変化に対して連続的
に変化する。これは、外径測定器の誤差発生要因が、検
出器内部で使用する光学部品の特性や、部品取付誤差、
あるいは信号処理時の演算誤差などによるものであり、
それぞれ測定範囲内の局所的な位置でのみ発生するもの
ではないからである。
Generally, in an optical outer diameter measuring device or the like, the outer diameter measurement error continuously changes with the change of the outer diameter value within the measuring range. This is because the error generation factor of the outer diameter measuring device is due to the characteristics of the optical components used inside the detector, component mounting error,
Or it is due to calculation error at the time of signal processing,
This is because each does not occur only at a local position within the measurement range.

【0009】そのため、測定物の外径測定に先だって、
事前に、測定範囲内の異なる複数の外径値に対して、離
散的に測定器の誤差量を求めて、それら離散的な外径値
に対する誤差量を連ねる曲線を求めることにより、測定
範囲内全域の測定器の誤差を推定することができる。そ
のようにして求めた誤差推定値を測定物の外径値に対す
る較正量とすれば、測定器の持つ誤差の影響を受けずに
高精度に外径測定を行うことが可能である。
Therefore, prior to measuring the outer diameter of the object to be measured,
Within the measurement range, the error amount of the measuring instrument is calculated discretely in advance for different outer diameter values within the measurement range, and the curve connecting the error amounts for these discrete outer diameter values is calculated. It is possible to estimate the error of the measuring device over the entire range. If the estimated error value thus obtained is used as the calibration amount for the outer diameter value of the object to be measured, the outer diameter can be measured with high accuracy without being affected by the error of the measuring instrument.

【0010】[0010]

【作用、実施例】以下、本発明の一実施例について図面
に基づき説明する。図1は、実施例において、機械軸の
外径を測定する状態を示す概略図である。円筒状の測定
物1は下方から支持機構2によって支持された状態で水
平に置かれる。外径測定器3は、測定物1をはさみこむ
ように門型の架台4に取り付けられており、測定物1と
同一軸上に配置された較正ゲージ6と測定物1との間を
レール5上を移動可能なようになっており、測定物1と
較正ゲージ6の両方の外径値を測定可能となっている。
外径測定器3を取り付けた架台4の移動はコントローラ
8によって制御される。また、外径測定器3からの信号
はデータ処理装置7により処理される。
DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic diagram showing a state in which an outer diameter of a mechanical shaft is measured in an example. The cylindrical object 1 is placed horizontally while being supported by the support mechanism 2 from below. The outer diameter measuring device 3 is attached to a gate-shaped stand 4 so as to sandwich the measurement object 1, and a rail 5 is provided between the calibration gauge 6 and the measurement object 1 arranged on the same axis as the measurement object 1. Can be moved, and the outer diameter values of both the measurement object 1 and the calibration gauge 6 can be measured.
The movement of the gantry 4 to which the outer diameter measuring device 3 is attached is controlled by the controller 8. Further, the signal from the outer diameter measuring device 3 is processed by the data processing device 7.

【0011】図2(a)は外径測定器3と較正用ゲージ
6の位置関係を示す図である。外径測定器3のレーザー
投光部3aと受光部3bは較正ゲージ6をはさみ込むよ
うに配置されている。較正ゲージ6は図2(b)に示す
ように異なる外径を持つ円筒を複数個、同心状に配置し
たものである。較正ゲージ6の各外径値は前もって別の
方法で精密に測定しておく。較正ゲージ6は、測定物1
と同じように、軸心がレーザーの投光方向および走査方
向と直角方向となるように配置される。
FIG. 2A is a diagram showing the positional relationship between the outer diameter measuring device 3 and the calibration gauge 6. The laser projecting portion 3a and the light receiving portion 3b of the outer diameter measuring device 3 are arranged so as to sandwich the calibration gauge 6. The calibration gauge 6 comprises a plurality of cylinders having different outer diameters and arranged concentrically as shown in FIG. 2 (b). Each outer diameter value of the calibration gauge 6 is precisely measured in advance by another method. The calibration gauge 6 is the measurement object 1.
In the same manner as the above, the axis is arranged so as to be perpendicular to the laser projecting direction and the scanning direction.

【0012】図3は各種サイズの較正ゲージ6に対して
外径を測定した結果をプロットしたものである。横軸に
較正ゲージの外径値をとり、縦軸に外径測定値と較正ゲ
ージの外径値の差をとる。図3の各点を最小2乗法など
の演算を行って連続的に連ねてゆくと、図4に示すよう
に、この外径測定器の測定範囲内の誤差特性、すなわち
外径測定器の較正曲線を求めることができる。測定物の
外径測定を行う場合には、図5に示すように、外径測定
を行った後、測定する外径値に対応する補正量を測定値
に加え合わせればよい。
FIG. 3 is a plot of the results of measuring the outer diameter of calibration gauges 6 of various sizes. The horizontal axis represents the outer diameter of the calibration gauge, and the vertical axis represents the difference between the measured outer diameter and the outer diameter of the calibration gauge. When the points in FIG. 3 are continuously connected by performing a calculation such as the least square method, as shown in FIG. 4, the error characteristic within the measuring range of the outer diameter measuring device, that is, the calibration of the outer diameter measuring device is performed. A curve can be obtained. When measuring the outer diameter of the measurement object, as shown in FIG. 5, after the outer diameter is measured, a correction amount corresponding to the outer diameter value to be measured may be added to the measured value.

【0013】図6に本実施例における測定動作のフロー
チャートを示す。外径測定器3を較正ゲージ6の位置へ
移動する。異なる外径値をもつ較正ゲージ6に対して、
それぞれ外径測定を行う。外径測定値と較正ゲージの外
径値の差を各外径値に対してプロットする。プロットし
た各点を最小2乗法などの手法で連ねて較正曲線を求め
る。測定データのプロット、較正曲線の計算など一連の
データ処理はコンピューターを使用して自動で実行可能
である。次に、外径測定器を測定物位置へ移動する。測
定物に対する外径測定を行う。外径測定値に対して、較
正曲線から補正量を求め、外径測定値に加えて真の外径
値を求める。
FIG. 6 shows a flow chart of the measuring operation in this embodiment. The outer diameter measuring device 3 is moved to the position of the calibration gauge 6. For calibration gauges 6 with different outer diameter values,
Measure the outer diameter of each. The difference between the outer diameter measurement and the outer diameter value of the calibration gauge is plotted for each outer diameter value. A calibration curve is obtained by connecting the plotted points by a method such as the least square method. A series of data processing such as plotting of measurement data and calculation of a calibration curve can be automatically executed by using a computer. Next, the outer diameter measuring device is moved to the measurement object position. Measure the outer diameter of the object to be measured. A correction amount is obtained from the calibration curve for the outer diameter measurement value, and the true outer diameter value is obtained in addition to the outer diameter measurement value.

【0014】本発明によれば、複数個の較正ゲージに対
しての事前の外径測定を行うだけで、外径測定器の測定
範囲の全領域の補正量を較正曲線から求めることができ
るため、測定物とほぼ同じ外径値の較正ゲージを毎回用
意する必要がなくなり、較正作業の簡易化、測定物とほ
ぼ同じ外径値の較正ゲージがない場合に発生する測定誤
差の解消をはかることができる。
According to the present invention, it is possible to obtain the correction amount of the entire area of the measuring range of the outer diameter measuring device from the calibration curve only by performing the outer diameter measurement in advance for a plurality of calibration gauges. , It is not necessary to prepare a calibration gauge with the same outer diameter value as that of the object to be measured, simplifying calibration work and eliminating the measurement error that occurs when there is no calibration gauge with the same outer diameter value as the object to be measured. You can

【0015】例えば、外径200mmの機械軸の測定物の
外径をレーザー式外径測定器で測定した場合、本発明を
使用しない場合には外径測定誤差は30μm程度となる
が、本発明により50mm、100mm、150mm、200
mm、250mm、300mmの較正ゲージに対して前もって
外径測定を行って検出器の較正を行った結果、測定誤差
は10μm以下に減少し、高精度な外径測定が可能とな
った。・
For example, when measuring the outer diameter of a machine shaft having an outer diameter of 200 mm with a laser outer diameter measuring device, the outer diameter measuring error is about 30 μm when the present invention is not used. 50mm, 100mm, 150mm, 200
As a result of calibrating the detector by performing outer diameter measurement in advance for mm, 250 mm, and 300 mm calibration gauges, the measurement error was reduced to 10 μm or less, and highly accurate outer diameter measurement became possible.・

【0016】[0016]

【発明の効果】本発明を機械軸などのような円筒状物体
の外径測定に適用することにより、外径測定器を使用す
る際に問題となっていた検出器の測定誤差を大幅に軽減
でき、測定の高精度化がはかれるとともに、測定前の事
前の検出器の較正作業を容易かつ正確に行うことが可能
となった。
By applying the present invention to the outer diameter measurement of a cylindrical object such as a mechanical shaft, the measurement error of the detector, which has been a problem when using the outer diameter measuring instrument, is significantly reduced. As a result, the accuracy of the measurement can be improved, and the calibration work of the detector before the measurement can be easily and accurately performed.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明を機械軸の外径測定に適用した例を示す
概略図。
FIG. 1 is a schematic view showing an example in which the present invention is applied to measurement of an outer diameter of a mechanical shaft.

【図2】(a)は外径測定器と較正用ゲージの位置関係
を示す図。(b)は異なる外径をもつ円筒を同心状に配
置した図。
FIG. 2A is a diagram showing a positional relationship between an outer diameter measuring device and a calibration gauge. FIG. 6B is a diagram in which cylinders having different outer diameters are arranged concentrically.

【図3】較正ゲージの外径値と、外径測定値と較正ゲー
ジ外径値の差との関係を示す図。
FIG. 3 is a diagram showing a relationship between an outer diameter value of a calibration gauge and a difference between an outer diameter measurement value and a calibration gauge outer diameter value.

【図4】外径測定器の較正曲線を示す図。FIG. 4 is a diagram showing a calibration curve of an outer diameter measuring device.

【図5】図4に補正量を加えた場合の曲線図。5 is a curve diagram when a correction amount is added to FIG.

【図6】実施例における測定動作のフローチャート。FIG. 6 is a flowchart of a measurement operation in the example.

【図7】従来の外径測定方法の説明図。FIG. 7 is an explanatory diagram of a conventional outer diameter measuring method.

【図8】図7の方法による測定誤差の説明図。FIG. 8 is an explanatory diagram of a measurement error by the method of FIG.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 円筒状測定物の軸方向の任意の位置の外
径を測定する方法において、該測定物に対する外径測定
を行う前に、外径値が既知であり、かつそれぞれ外径値
が異なる複数の較正用ゲージで前記検出器のそれぞれの
外径値に対する測定誤差を求めておき、該複数の測定誤
差を前記検出器の外径測定範囲内で連ねることにより検
出器の較正曲線を求め、任意の外径の測定物の外径測定
値に対して、較正曲線から求めた補正量を加えることに
より真の外径値を求めることを特徴とする外径測定方
法。
1. A method for measuring an outer diameter at an arbitrary position in the axial direction of a cylindrical measurement object, wherein the outer diameter value is known and the outer diameter value is known before the outer diameter measurement is performed on the measurement object. The measurement error for each outer diameter value of the detector is obtained with a plurality of different calibration gauges, and the calibration curve of the detector is obtained by connecting the plurality of measurement errors within the outer diameter measurement range of the detector. An outer diameter measuring method, wherein the true outer diameter value is obtained by adding the correction amount obtained from the calibration curve to the outer diameter measurement value of a measurement object having an arbitrary outer diameter.
JP6222093A 1993-03-22 1993-03-22 Method for measuring outside diameter of cylindrical object Pending JPH06273103A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6222093A JPH06273103A (en) 1993-03-22 1993-03-22 Method for measuring outside diameter of cylindrical object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6222093A JPH06273103A (en) 1993-03-22 1993-03-22 Method for measuring outside diameter of cylindrical object

Publications (1)

Publication Number Publication Date
JPH06273103A true JPH06273103A (en) 1994-09-30

Family

ID=13193853

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6222093A Pending JPH06273103A (en) 1993-03-22 1993-03-22 Method for measuring outside diameter of cylindrical object

Country Status (1)

Country Link
JP (1) JPH06273103A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103499325A (en) * 2013-09-30 2014-01-08 西安航空动力控制科技有限公司 Processing method for three-wire set measured data
CN106441128A (en) * 2016-11-25 2017-02-22 中核建中核燃料元件有限公司 Pellet diameter measuring method
CN110000639A (en) * 2019-04-26 2019-07-12 合肥工业大学 A kind of roller diameter based on roll grinder and taper on-position measure device and measurement method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103499325A (en) * 2013-09-30 2014-01-08 西安航空动力控制科技有限公司 Processing method for three-wire set measured data
CN106441128A (en) * 2016-11-25 2017-02-22 中核建中核燃料元件有限公司 Pellet diameter measuring method
CN110000639A (en) * 2019-04-26 2019-07-12 合肥工业大学 A kind of roller diameter based on roll grinder and taper on-position measure device and measurement method

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