JPH05231856A - Thickness measuring instrument - Google Patents
Thickness measuring instrumentInfo
- Publication number
- JPH05231856A JPH05231856A JP3381992A JP3381992A JPH05231856A JP H05231856 A JPH05231856 A JP H05231856A JP 3381992 A JP3381992 A JP 3381992A JP 3381992 A JP3381992 A JP 3381992A JP H05231856 A JPH05231856 A JP H05231856A
- Authority
- JP
- Japan
- Prior art keywords
- roll
- sheet
- measured
- thickness
- distance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明は、紙またはフィルムな
どの非金属シートの厚みを測定する膜厚測定装置に関す
るものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a film thickness measuring device for measuring the thickness of a non-metal sheet such as paper or film.
【０００２】[0002]
【従来の技術】図６および図９は例えば特開平１−１２
７００５号公報に示された従来の厚み測定装置の全体構
成図とブロック図、図７は図６のVII −VII 線に沿った
断面図で、図８は図７のVIII−VIII線に沿った断面図で
ある。図６において１は金属製ロール、２はロール１を
回転可能に支持するフレーム、３はロール１を回転駆動
する回転駆動モータ、４はロール１の表面から所定の間
隔をあけて軸方向に平行に配置された遮光板、５はロー
ル１の表面を走行する被測定物のシート、次に図９にお
いて、11は検出ヘッド、６はレーザ光６ａを発生するレ
ーザ光発生器、７は反射ミラーで、レーザ光発生器６よ
りのレーザ光６ａを集光レンズ８で集光し、シート５の
表面と遮光板４との間を走査するように制御される。９
はレーザ光６ａを集光レンズ10を介して受光する受光器
であり、11はレーザ光発生器６、反射ミラー７、集光レ
ンズ８と10、受光器９を内蔵しており、下部に遮光板４
を保持し図９の太矢印方向に移動できる。この検出ヘッ
ド11の上部は図６に示す懸架機構12により懸架されてい
る。13はモータ14により懸架機構12を介して検出ヘッド
11をロール１の軸方向に走査するヘッド移動機構であ
る。2. Description of the Related Art FIGS. 6 and 9 show, for example, JP-A-1-12.
FIG. 7 is a sectional view taken along line VII-VII of FIG. 6, and FIG. 8 is taken along line VIII-VIII of FIG. 7. FIG. In FIG. 6, 1 is a metal roll, 2 is a frame that rotatably supports the roll 1, 3 is a rotary drive motor that rotationally drives the roll 1, and 4 is a predetermined distance from the surface of the roll 1 and is parallel to the axial direction. 9 is a sheet of the object to be measured traveling on the surface of the roll 1, 11 is a detection head, 6 is a laser beam generator for generating a laser beam 6a, and 7 is a reflection mirror. Then, the laser light 6a from the laser light generator 6 is controlled by the condenser lens 8 so as to scan between the surface of the sheet 5 and the light shielding plate 4. 9
Is a light receiver for receiving the laser beam 6a through the condenser lens 10, and 11 is a built-in laser light generator 6, a reflection mirror 7, condenser lenses 8 and 10, and a light receiver 9, and is shielded at the bottom. Board 4
Can be moved in the direction of the thick arrow in FIG. The upper part of the detection head 11 is suspended by a suspension mechanism 12 shown in FIG. 13 is a detection head via a suspension mechanism 12 by a motor 14.
A head moving mechanism for scanning 11 in the axial direction of the roll 1.
【０００３】16は受光器９の出力信号をパルスでカウン
トするカウンタ、17はカウンタ16のパルスカウント数よ
り被測定物のシート５の厚みを演算する演算器、18はこ
の演算器17で算出された厚みを表示する表示器である。Reference numeral 16 is a counter for counting the output signal of the light receiver 9 with pulses, 17 is a calculator for calculating the thickness of the sheet 5 of the object to be measured from the pulse count number of the counter 16, and 18 is a calculator for calculating the thickness. It is an indicator that displays the thickness.
【０００４】次に動作について説明する。レーザ光発生
器６から発射されたレーザ光６ａは、反射ミラー７で反
射された後、集光レンズ８で集光され、ロール１およ
び、シート５と遮光板４との間を通過する時点でビーム
径が最小となりロール１の回転軸に垂直な方向、ここで
はシート５と遮光板４までの距離、即ち、間隙30を測る
方向に一定の速度で走査される。間隙30通過後、レーザ
光６ａは集光レンズ10で集光され受光器９で受光され
る。この場合レーザ光６ａは間隙30を通過している間だ
け受光器９に入射されるので、受光器９は間隙30に比例
した幅の信号を出力し、これをカウンタ16で間隙30に比
例したデジィタル信号に変換する。Next, the operation will be described. The laser light 6 a emitted from the laser light generator 6 is reflected by the reflection mirror 7, is then condensed by the condenser lens 8, and at the time of passing between the roll 1 and the sheet 5 and the light shielding plate 4. Scanning is performed at a constant speed in the direction perpendicular to the rotation axis of the roll 1 where the beam diameter is minimum, that is, the distance between the sheet 5 and the light shielding plate 4, that is, the direction in which the gap 30 is measured. After passing through the gap 30, the laser light 6 a is condensed by the condenser lens 10 and received by the light receiver 9. In this case, since the laser beam 6a is incident on the light receiver 9 only while passing through the gap 30, the light receiver 9 outputs a signal having a width proportional to the gap 30, and the counter 16 proportionates the signal to the gap 30. Convert to digital signal.
【０００５】上記、構成において、シート５の無い状態
において、前記ロール１上の間隙30を測定し、各測定点
における間隙値を演算器17内のメモリに記憶し、次に、
シートをかけた状態でシートまでの距離を測定し、各測
定点での間隙値と前記間隙値の差を演算器17で計算し厚
みを算出し、表示器18で表示される。なお、図示してい
ないが、ロール１のシート厚測定に関係のない端部に段
差を設け、この段差を測定することにより、測定値の長
さの校正を行う。In the above structure, the gap 30 on the roll 1 is measured in the absence of the sheet 5, and the gap value at each measurement point is stored in the memory in the calculator 17, and then,
The distance to the sheet is measured with the sheet applied, and the difference between the gap value at each measurement point and the gap value is calculated by the calculator 17 to calculate the thickness, which is displayed on the display 18. Although not shown, a step is provided at the end of the roll 1 which is not related to the sheet thickness measurement, and the step is measured to calibrate the length of the measured value.
【０００６】[0006]
【発明が解決しようとする課題】従来の厚み測定装置は
以上のように構成されているので、予めシート５が無い
状態にて測定したロール１と遮光板４との間隙30と、ロ
ール１にシート５が密着した状態でのシート５と遮光板
４の間隙30との差によってシート５の厚みを算出してい
るため、ロール１、フレーム２などの温度変化による熱
変形、ロール１の偏心などでロール１と遮光板４との間
隙が変化するため予め測定した間隙30と差がでるため、
厚み測定に誤差を生じ問題点があった。Since the conventional thickness measuring device is configured as described above, the gap 30 between the roll 1 and the light shielding plate 4 measured in the state without the sheet 5 in advance, and the roll 1 Since the thickness of the sheet 5 is calculated by the difference between the sheet 5 and the gap 30 between the light shielding plate 4 and the sheet 5 in close contact with each other, thermal deformation due to temperature change of the roll 1, the frame 2, eccentricity of the roll 1, etc. Since the gap between the roll 1 and the light shielding plate 4 changes with, there is a difference from the gap 30 measured in advance,
There was a problem that an error occurred in the thickness measurement.
【０００７】この発明は上記のような問題点を解消する
ためになされたもので、熱変形、ロールの偏心などによ
る影響をなくし被測定のシートの厚みを精度よく測定す
ることのできる厚み測定装置を得ることを目的とするも
のである。The present invention has been made to solve the above problems, and is capable of accurately measuring the thickness of a sheet to be measured by eliminating the influence of thermal deformation, roll eccentricity, and the like. The purpose is to obtain.
【０００８】[0008]
【課題を解決するための手段】この発明に係る厚み測定
装置は、金属製ロール外から非金属のシートの表面まで
の距離を測定する第１の変位計と、その被測定部分の近
傍に金属にのみ感知する非接触で金属製ロールの表面ま
での距離を測る第２の変位計と、第１及び第２の変位計
の出力差よりシート厚みを算出する演算器とより構成し
たものである。A thickness measuring device according to the present invention comprises a first displacement meter for measuring the distance from the outside of a metal roll to the surface of a non-metallic sheet, and a metal in the vicinity of the portion to be measured. A second displacement meter that measures the distance to the surface of the metal roll in a non-contact manner that senses only the sheet and a calculator that calculates the sheet thickness from the output difference of the first and second displacement meters. ..
【０００９】さらに、第１と第２の変位計を測定領域外
へ移動可能な機構を備え、シートのない測定領域外の位
置で金属製ロールまでの距離を計り、その両者の測定値
を比較しその基準値の校正を行う演算器とより構成す
る。Further, the first and second displacement gauges are provided with a mechanism that can be moved outside the measurement area, the distance to the metal roll is measured at a position outside the measurement area where there is no sheet, and the measured values of both are compared. It consists of an arithmetic unit that calibrates the reference value.
【００１０】[0010]
【作用】この発明における厚み測定装置は、第１の変位
計によりシート表面までの距離を測定するとともに、金
属にのみ感知する第２の変位計により、金属製ロールの
表面までの距離を測定し、第１と第２の変位計の測定値
の差によりシートの厚さを測定する。In the thickness measuring device according to the present invention, the distance to the surface of the sheet is measured by the first displacement meter, and the distance to the surface of the metal roll is measured by the second displacement meter which senses only the metal. The thickness of the sheet is measured by the difference between the measured values of the first and second displacement gauges.
【００１１】[0011]
実施例１．装置全体の概略構成は図６の場合と同様にな
っている。図１はの発明の一実施例の構成を示すブロッ
ク図である。図２、図３はそれぞれ従来例の図７、図８
に対応するこの発明の実施例の断面図である。図におい
て１〜18は前記従来例と同様のものである。検出ヘッド
11はシート５の表面までの距離を測る第１の変位計とし
て用いられている。20は渦電流型変位計で第２の変位計
として用いられている。渦電流型変位計20は検出ヘッド
11内の遮光板４とロール１の間の距離を測る被測定部の
近傍に配置され、金属にのみ感知する非接触型の変位計
である。21は渦電流型変位計20の変位値を演算器17に出
力する増幅器である。Example 1. The schematic configuration of the entire apparatus is the same as that shown in FIG. FIG. 1 is a block diagram showing the configuration of an embodiment of the invention. 2 and 3 are the conventional example shown in FIGS.
It is sectional drawing of the Example of this invention corresponding to. In the figure, 1 to 18 are the same as those in the conventional example. Detection head
Reference numeral 11 is used as a first displacement meter for measuring the distance to the surface of the sheet 5. 20 is an eddy current type displacement meter and is used as a second displacement meter. Eddy current type displacement meter 20 is a detection head
It is a non-contact type displacement meter which is arranged in the vicinity of the portion to be measured for measuring the distance between the light shielding plate 4 and the roll 1 in 11 and which senses only metal. Reference numeral 21 is an amplifier that outputs the displacement value of the eddy current displacement meter 20 to the calculator 17.
【００１２】次に動作について、図４と図５を用いて説
明する。図４は、ロール１および検出ヘッド取り付けフ
レーム２の形状変化が無く、ロール１の偏心の無い状態
を示している。まず、シート５のない部分で、検出ヘッ
ド11と渦電流型変位計20の出力が共に０になるように調
整する。この場合の検出ヘッド11と渦電流型変位計20の
測定対象距離はそれぞれＡ1 、Ｂ1 である。次に、図５
（ａ）は、シート５のある部分での測定を示す図であ
る。この図では、検出ヘッド11とシート５の表面までの
距離はＡ2 で、Ａ1 よりＤ短い。従って検出ヘッド11の
出力はＤとなる。一方、渦電流型変位計20とロール１の
表面までの距離はＢ2 で、Ｂ1 と同じである。渦電流型
変位計20はシート厚の影響を受けずにロール表面までの
変位を測定するため出力は０である。このため、検出ヘ
ッド11の出力と渦電流型変位計20の出力差はＤとなり被
測定のシートの厚みが測れる。図１において、渦電流型
変位計20の出力を増幅器21を通して演算器17に入力し、
検出ヘッド11からの出力との差を求めてシート５の厚み
を算出する。検出ヘッド11を図１の太矢印方向に動か
し、さらにロール１の回転によりシート５を走行させる
と、シート５の厚さを２次元的に測定できる。Next, the operation will be described with reference to FIGS. 4 and 5. FIG. 4 shows a state in which the roll 1 and the detection head mounting frame 2 do not change in shape and the roll 1 is not eccentric. First, in the portion where the seat 5 is not present, adjustment is made so that the outputs of the detection head 11 and the eddy current displacement meter 20 are both zero. In this case, the measurement target distances of the detection head 11 and the eddy current displacement meter 20 are A 1 and B 1 , respectively. Next, FIG.
(A) is a figure which shows a measurement in a certain part of the sheet 5. In this figure, the distance between the detection head 11 and the surface of the sheet 5 is A 2, which is D shorter than A 1 . Therefore, the output of the detection head 11 becomes D. On the other hand, the distance between the eddy current displacement meter 20 and the surface of the roll 1 is B 2 , which is the same as B 1 . The eddy current type displacement meter 20 measures the displacement to the roll surface without being affected by the sheet thickness, so that the output is zero. Therefore, the difference between the output of the detection head 11 and the output of the eddy current displacement meter 20 is D, and the thickness of the sheet to be measured can be measured. In FIG. 1, the output of the eddy current displacement meter 20 is input to the calculator 17 through the amplifier 21,
The thickness of the sheet 5 is calculated by obtaining the difference from the output from the detection head 11. When the detection head 11 is moved in the direction of the thick arrow in FIG. 1 and the sheet 5 is run by the rotation of the roll 1, the thickness of the sheet 5 can be measured two-dimensionally.
【００１３】次に図５（ｂ）に示すように、熱変形によ
り、ロール１の半径が△Ｒ変化し、検出ヘッド11を取り
付けているフレームの形状が△Ｆ変化した場合、検出ヘ
ッド11とロール１の表面の距離Ａ3 はＡ2 に比べ（△Ｒ
＋△Ｆ）短い。従って検出ヘッド11の出力は（Ｄ＋△Ｒ
＋△Ｆ）となる。これに対して、渦電流型変位計20とシ
ート５の表面までの距離はＢ3 となり、これはＢ2 より
（△Ｒ＋△Ｆ）短い。従って渦電流型変位計20の出力は
（△Ｒ＋△Ｆ）となる。以上より両変位計の出力差はＤ
となり、誤差が相殺されてシート５の厚さが正確に求ま
る。Next, as shown in FIG. 5B, when the radius of the roll 1 changes by ΔR due to thermal deformation and the shape of the frame on which the detection head 11 is mounted changes by ΔF, the detection head 11 and distance a 3 on the surface of the roll 1 is compared with the a 2 (△ R
+ △ F) Short. Therefore, the output of the detection head 11 is (D + ΔR
+ ΔF). On the other hand, the distance between the eddy current type displacement meter 20 and the surface of the sheet 5 is B 3 , which is shorter than B 2 by (ΔR + ΔF). Therefore, the output of the eddy current displacement meter 20 is (ΔR + ΔF). From the above, the output difference of both displacement meters is D
Then, the error is canceled out, and the thickness of the sheet 5 is accurately obtained.
【００１４】さらに、シート５のないロール１の部分に
おいて、検出ヘッド11と渦電流型変位計20とで同じ場所
の距離を測定して、両者間の測定値の０点の校正をす
る。この校正を時々行うことにより、両者の変位計のド
リフトなどによる誤差が減ずる。さらに、シート５のか
からないロール１の部分で、測定した値を基準にして、
ロール１上の任意の定まった位置における渦電流型変位
計20の出力を予め記憶しておき、その後、検出ヘッド11
がロール１上を往復して測定するごとに、予め記憶した
値とよりシート５の厚を求めるようにしてもよい。これ
により、渦電流型変位計20はロール軸を往復して計測す
る場合、測定ごとに計測しなくてもよいため、全体とし
て測定時間が短縮できる。また、ロール１の回転角と検
出ヘッド11の軸方向の移動を同期させると、測定点は常
にロール上の同じ点になるため、ロール１の偏心に対し
ても誤差なく測定可能である。Further, in the portion of the roll 1 without the sheet 5, the distance between the detection head 11 and the eddy current type displacement gauge 20 at the same place is measured, and the zero point of the measured value between the two is calibrated. By performing this calibration from time to time, the error due to the drift of both displacement gauges can be reduced. Furthermore, on the part of the roll 1 where the sheet 5 does not hang, based on the measured value,
The output of the eddy current displacement meter 20 at an arbitrary fixed position on the roll 1 is stored in advance, and then the detection head 11
It is also possible to obtain the thickness of the sheet 5 based on the value stored in advance every time the measurement is performed by reciprocating on the roll 1. As a result, when the eddy current displacement meter 20 makes a reciprocating measurement on the roll axis, it does not have to be measured for each measurement, and therefore the measurement time can be shortened as a whole. Further, if the rotation angle of the roll 1 and the movement of the detection head 11 in the axial direction are synchronized, the measurement point is always the same point on the roll, so that the eccentricity of the roll 1 can be measured without error.
【００１５】この実施例で第１の変位計として光を走査
する方式の変位計を用いたが、この代わりに三角測量方
式を用いた光学式変位計、反射光量検出方式の変位計、
静電容量変位計、空気マイクロメータ式の変位計などで
もよい。In this embodiment, as the first displacement gauge, a displacement gauge of the type that scans light is used, but instead of this, an optical displacement gauge using the triangulation method, a displacement gauge of the reflected light quantity detection type,
It may be a capacitance displacement meter, an air micrometer type displacement meter, or the like.
【００１６】[0016]
【発明の効果】シート表面までの距離を測る第１の変位
計の近傍に金属製ロール表面までの距離を測定する第２
の変位計を設け、両者変位計の出力差を求めることによ
り、ロール及び、検出ヘッド取り付けのフレームの熱に
よる形状変化、ロールの偏心などに起因する誤差を除去
してシート厚みを精度よく測定できるものが得られる。EFFECTS OF THE INVENTION A second measuring device for measuring the distance to the sheet surface, a second measuring device for measuring the distance to the surface of the metal roll, is provided
By measuring the output difference between the two displacement gauges, it is possible to accurately measure the sheet thickness by eliminating the error caused by the shape change of the roll and the frame of the detection head mounting due to heat, the eccentricity of the roll, etc. You get something.
【図１】この発明の一実施例による厚み測定装置の概略
構成を示すブロック図である。FIG. 1 is a block diagram showing a schematic configuration of a thickness measuring apparatus according to an embodiment of the present invention.
【図２】図１の実施例で、従来例の図７に相当する断面
図である。2 is a sectional view of the embodiment of FIG. 1 corresponding to FIG. 7 of a conventional example.
【図３】図１の実施例で、従来例の図８に相当する断面
図である。3 is a cross-sectional view of the embodiment of FIG. 1 corresponding to FIG. 8 of a conventional example.
【図４】図１の厚み測定装置の動作を説明する説明図で
ある。FIG. 4 is an explanatory diagram illustrating an operation of the thickness measuring device of FIG.
【図５】図１の厚み測定装置の動作を説明する説明図で
ある。5 is an explanatory diagram illustrating an operation of the thickness measuring device of FIG. 1. FIG.
【図６】従来の厚み測定装置の概略構成を示す全体構成
図である。FIG. 6 is an overall configuration diagram showing a schematic configuration of a conventional thickness measuring device.
【図７】図６のVII −VII 線に沿った断面図である。FIG. 7 is a sectional view taken along line VII-VII of FIG.
【図８】図７のVIII−VIII線に沿った断面図である。8 is a cross-sectional view taken along the line VIII-VIII of FIG.
【図９】図６の概略構成を示すブロック図である。9 is a block diagram showing a schematic configuration of FIG.
１ ロール ４ 遮光板 ５ シート 11 検出ヘッド 13 ヘッド移動機構 17 演算器 20 渦電流型変位計 1 roll 4 light shield 5 sheet 11 detection head 13 head moving mechanism 17 calculator 20 eddy current displacement meter
Claims (2)
持させながら走行させ、前記シートの厚みを測定する厚
み測定装置において、前記金属製ロール外から前記シー
トの表面までの距離を測定する第１の変位計と、その被
測定部分の近傍に金属にのみ感知し非接触で前記金属製
ロールの表面までの距離を測る第２の変位計と、前記第
１及び第２の変位計の出力差より前記シートの厚みを算
出する演算器とを備えたことを特徴とする厚み測定装
置。1. A thickness measuring device for measuring the thickness of a sheet by running a non-metal sheet while closely supporting the sheet on a metal roll, and measuring the distance from the outside of the metal roll to the surface of the sheet. No. 1 displacement meter, a second displacement meter that senses only the metal in the vicinity of the portion to be measured, and measures the distance to the surface of the metal roll in a non-contact manner, and the outputs of the first and second displacement meters A thickness measuring device comprising: a calculator that calculates the thickness of the sheet from the difference.
領域外へ移動可能な機構を備え、前記測定領域外の位置
において前記両者の変位計で金属製ロールまでの距離を
計り、その両者の測定値を比較し、基準値の校正を行う
演算器とよりなる請求項第１項記載の厚み測定装置。2. A mechanism capable of moving the first and second displacement gauges to the outside of the measurement area without the sheet, and at a position outside the measurement area, the displacement gauges of both of them measure the distance to the metal roll. The thickness measuring device according to claim 1, further comprising an arithmetic unit that compares the measured values of the two and calibrates the reference value.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3381992A JPH05231856A (en) | 1992-02-21 | 1992-02-21 | Thickness measuring instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3381992A JPH05231856A (en) | 1992-02-21 | 1992-02-21 | Thickness measuring instrument |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05231856A true JPH05231856A (en) | 1993-09-07 |
Family
ID=12397096
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3381992A Pending JPH05231856A (en) | 1992-02-21 | 1992-02-21 | Thickness measuring instrument |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05231856A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002257506A (en) * | 2001-02-27 | 2002-09-11 | Toppan Printing Co Ltd | Non-contact coating thickness measuring device |
| KR101329596B1 (en) * | 2010-06-09 | 2013-11-14 | 건국대학교 산학협력단 | An apparatus for real-time measurement of surface roughness of roll-to-roll printed pattern using non-contact sensors |
-
1992
- 1992-02-21 JP JP3381992A patent/JPH05231856A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002257506A (en) * | 2001-02-27 | 2002-09-11 | Toppan Printing Co Ltd | Non-contact coating thickness measuring device |
| KR101329596B1 (en) * | 2010-06-09 | 2013-11-14 | 건국대학교 산학협력단 | An apparatus for real-time measurement of surface roughness of roll-to-roll printed pattern using non-contact sensors |
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