JP2002246308A5 - - Google Patents

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Publication number
JP2002246308A5
JP2002246308A5 JP2001376974A JP2001376974A JP2002246308A5 JP 2002246308 A5 JP2002246308 A5 JP 2002246308A5 JP 2001376974 A JP2001376974 A JP 2001376974A JP 2001376974 A JP2001376974 A JP 2001376974A JP 2002246308 A5 JP2002246308 A5 JP 2002246308A5
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JP
Japan
Prior art keywords
optical system
lens group
lens
illumination
condenser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2001376974A
Other languages
English (en)
Japanese (ja)
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JP2002246308A (ja
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Publication date
Application filed filed Critical
Priority to JP2001376974A priority Critical patent/JP2002246308A/ja
Priority claimed from JP2001376974A external-priority patent/JP2002246308A/ja
Publication of JP2002246308A publication Critical patent/JP2002246308A/ja
Publication of JP2002246308A5 publication Critical patent/JP2002246308A5/ja
Withdrawn legal-status Critical Current

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JP2001376974A 2000-12-14 2001-12-11 コンデンサー光学系、および該光学系を備えた照明光学装置並びに露光装置 Withdrawn JP2002246308A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001376974A JP2002246308A (ja) 2000-12-14 2001-12-11 コンデンサー光学系、および該光学系を備えた照明光学装置並びに露光装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000-379838 2000-12-14
JP2000379838 2000-12-14
JP2001376974A JP2002246308A (ja) 2000-12-14 2001-12-11 コンデンサー光学系、および該光学系を備えた照明光学装置並びに露光装置

Publications (2)

Publication Number Publication Date
JP2002246308A JP2002246308A (ja) 2002-08-30
JP2002246308A5 true JP2002246308A5 (cg-RX-API-DMAC7.html) 2005-08-04

Family

ID=26605807

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001376974A Withdrawn JP2002246308A (ja) 2000-12-14 2001-12-11 コンデンサー光学系、および該光学系を備えた照明光学装置並びに露光装置

Country Status (1)

Country Link
JP (1) JP2002246308A (cg-RX-API-DMAC7.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003057557A (ja) * 2001-08-09 2003-02-26 Yokogawa Electric Corp バイオチップ読取装置
US8873151B2 (en) * 2005-04-26 2014-10-28 Carl Zeiss Smt Gmbh Illumination system for a microlithgraphic exposure apparatus
JP5393055B2 (ja) * 2008-05-28 2014-01-22 キヤノン株式会社 照明光学系、及びそれを用いた画像投影装置

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