JP2002235170A5 - - Google Patents

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Publication number
JP2002235170A5
JP2002235170A5 JP2001028505A JP2001028505A JP2002235170A5 JP 2002235170 A5 JP2002235170 A5 JP 2002235170A5 JP 2001028505 A JP2001028505 A JP 2001028505A JP 2001028505 A JP2001028505 A JP 2001028505A JP 2002235170 A5 JP2002235170 A5 JP 2002235170A5
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JP
Japan
Prior art keywords
output terminal
power supply
voltage
switching
sputtering
Prior art date
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Application number
JP2001028505A
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English (en)
Japanese (ja)
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JP2002235170A (ja
JP4763897B2 (ja
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Priority to JP2001028505A priority Critical patent/JP4763897B2/ja
Priority claimed from JP2001028505A external-priority patent/JP4763897B2/ja
Publication of JP2002235170A publication Critical patent/JP2002235170A/ja
Publication of JP2002235170A5 publication Critical patent/JP2002235170A5/ja
Application granted granted Critical
Publication of JP4763897B2 publication Critical patent/JP4763897B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2001028505A 2001-02-05 2001-02-05 スパッタリング用電源装置 Expired - Lifetime JP4763897B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001028505A JP4763897B2 (ja) 2001-02-05 2001-02-05 スパッタリング用電源装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001028505A JP4763897B2 (ja) 2001-02-05 2001-02-05 スパッタリング用電源装置

Related Child Applications (3)

Application Number Title Priority Date Filing Date
JP2011053780A Division JP5284396B2 (ja) 2011-03-11 2011-03-11 スパッタリング用電源装置
JP2011053782A Division JP5301594B2 (ja) 2011-03-11 2011-03-11 スパッタリング用電源装置
JP2011053781A Division JP5284397B2 (ja) 2011-03-11 2011-03-11 スパッタリング用電源装置

Publications (3)

Publication Number Publication Date
JP2002235170A JP2002235170A (ja) 2002-08-23
JP2002235170A5 true JP2002235170A5 (fr) 2008-03-21
JP4763897B2 JP4763897B2 (ja) 2011-08-31

Family

ID=18892995

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001028505A Expired - Lifetime JP4763897B2 (ja) 2001-02-05 2001-02-05 スパッタリング用電源装置

Country Status (1)

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JP (1) JP4763897B2 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4673653B2 (ja) * 2005-03-30 2011-04-20 オリジン電気株式会社 真空装置における異常放電発生予防方法及び真空装置
US20060283702A1 (en) * 2005-06-21 2006-12-21 Applied Materials, Inc. Random pulsed DC power supply
EP1928009B1 (fr) * 2006-11-28 2013-04-10 HÜTTINGER Elektronik GmbH + Co. KG Système de détection d'arc, alimentation de puissance pour appareil à plasma et procédé de détection d'arc
EP2075823B1 (fr) 2007-12-24 2012-02-29 Huettinger Electronic Sp. z o. o Dispositif de limitation de changement de courant
JP4492974B2 (ja) * 2008-11-14 2010-06-30 芝浦メカトロニクス株式会社 電源、スパッタ用電源及びスパッタ装置
JP4492975B2 (ja) * 2008-11-14 2010-06-30 芝浦メカトロニクス株式会社 電源、スパッタ用電源及びスパッタ装置
DE102010031568B4 (de) 2010-07-20 2014-12-11 TRUMPF Hüttinger GmbH + Co. KG Arclöschanordnung und Verfahren zum Löschen von Arcs
WO2012023276A1 (fr) * 2010-08-18 2012-02-23 株式会社アルバック Dispositif d'alimentation en courant continu

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3047277B2 (ja) * 1993-08-23 2000-05-29 日本電子工業株式会社 グロー放電処理装置におけるアーク放電後の復帰方法
JP2835322B2 (ja) * 1997-02-20 1998-12-14 芝浦メカトロニクス株式会社 スパッタリング用電源装置および該装置を用いたスパッタリング装置
JP4034008B2 (ja) * 1998-07-03 2008-01-16 キヤノンアネルバ株式会社 インバータ式ｄｃ電源

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