JP2002208743A - Laminate displacement element - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a laminate displacement element excellent in piezoelectric properties, in restriction of pollution, and in environmental and ecological aspects. SOLUTION: The displacement element has a laminate 10 composed of a plurality of piezoelectric layers 11 and a plurality of inner electrodes 2 alternately laminated. The piezoelectric layers 11 contain BaTiO3 as a main component and are laminated to obtain a high displacement quantity and make the displacement quantity adjustable by the number of the laminated layers. The piezoelectric layer 11 may contain at least one element selected as a sub-component among rare elements such as Mn, Y, etc., or Si, Li and B. This improves the breakdown voltage and the drive reliability.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laminated body displacement element used for an actuator for positioning precision equipment or precision equipment.

[0002]

2. Description of the Related Art Piezoelectric materials have conventionally been used as materials for elements that convert electric energy and mechanical energy. Among them, lead titanate (PbTiO ₃ ; PT)
A solid solution type (PZT) piezoelectric material composed of lead and zirconate (PbZrO ₃ ; PZ) has a high electromechanical coupling coefficient, and is widely used for a filter or an actuator.

However, such PZT-based piezoelectric materials contain a large amount of highly volatile lead oxide (PbO) even at low temperatures. Therefore, when manufacturing a PZT-based piezoelectric material, an extremely large amount of lead oxide is volatilized and diffused into the atmosphere at an industrial level in a firing step for a porcelain and a heat treatment step for a single crystal product such as a melting step. Resulting in. Also,
Although it is possible to recover lead oxide released during the manufacturing stage, it is currently difficult to recover lead oxide contained in piezoelectric products marketed as industrial products.
When these are widely released into the environment, there is concern about elution of lead due to acid rain. Therefore, as the application fields of piezoelectric ceramics and single crystals expand in the future and the amount of use increases, the problem of lead-free becomes a very important issue.

Examples of piezoelectric materials containing no lead include:
For example, lithium niobate (LiNbO)_Three), Tantalic acid
Lithium (LiTaO)_Three), Barium titanate (BaT)
iO _Three), Bismuth layered compound, or bis titanate
Mass sodium (Na_0.5Bi_0.5TiO_Three)
It is.

[0005]

However, these lead-free piezoelectric materials have lower piezoelectric characteristics than lead-based piezoelectric materials, and have not yet obtained a large displacement. Among them, barium titanate has relatively high piezoelectric properties,
Although promising as a piezoelectric material, there are problems that the breakdown voltage is low and the reliability by continuous driving is low.

The present invention has been made in view of the above problems, and has as its object to show excellent piezoelectric characteristics, reduce pollution,
It is an object of the present invention to provide a laminated body displacement element which is excellent in terms of environmental friendliness and ecological aspects.

[0007]

SUMMARY OF THE INVENTION A laminate displacement element according to the present invention includes a plurality of piezoelectric layers and a plurality of internal electrodes alternately laminated, and the piezoelectric layers are made of barium (Ba) and titanium (T).
It contains an oxide containing i) and oxygen.

In the laminated body displacement element according to the present invention, a large displacement can be obtained because a plurality of piezoelectric layers containing an oxide containing barium, titanium and oxygen are laminated.

It is preferable that the piezoelectric layer contains manganese (Mn) in a range of 1 mol or less with respect to 100 mol of the oxide, thereby improving the breakdown voltage or driving reliability. The piezoelectric layer preferably contains the rare earth element in a range of less than 20 mol per 100 mol of the oxide, whereby the electromechanical coupling coefficient or the driving reliability is improved.

The piezoelectric layer further comprises at least one member selected from the group consisting of silicon (Si), lithium (Li) and boron (B) in an amount of 15 mol per 100 mol of oxide.
It is preferable to include them in the following ranges, and these function as sintering aids.

The internal electrodes are made of nickel (Ni), copper (Cu), gold (Au), platinum (Pt), palladium (P
at least one of the group consisting of d) and silver (Ag)
Preferably, it contains a species.

[0012]

Embodiments of the present invention will be described below in detail with reference to the drawings.

FIG. 1 shows a sectional structure of a laminated body displacement element according to an embodiment of the present invention. The laminate displacement element includes, for example, a laminate 10 in which a plurality of piezoelectric layers 11 and a plurality of internal electrodes 12 are alternately laminated. The internal electrodes 12 are alternately extended in, for example, opposite directions, and a pair of terminal electrodes 21 and 22 electrically connected to the internal electrodes 12 are provided in the extending direction.

The piezoelectric layer 11 is composed of a piezoelectric ceramic which is a sintered body of a plurality of particles, and the thickness of one layer of the piezoelectric layer 11 is preferably, for example, about 1 μm to 100 μm.
The number of stacked piezoelectric layers 11 is determined according to the desired displacement. The piezoelectric ceramic constituting the piezoelectric layer 11 contains, as a main component, an oxide containing barium, titanium, and oxygen.
For example, it is preferable to include at least one of the subcomponents shown in Table 1. The average crystal particle diameter of the piezoelectric ceramic is preferably, for example, 1 μm to 50 μm.

[0015]

[Table 1]

The oxide as a main component has a perovskite structure, and a part of barium is strontium (S
r), calcium (Ca) or magnesium (M
g), or a part of titanium may be replaced by another element such as zirconium (Zr), hafnium (Hf) or tin (Sn). This oxide has a stoichiometric composition, and is represented as shown in the following chemical formula 1, but may be different from the stoichiometric composition.

[0017]

## STR1 ## _{(Ba x MI 1-x)} (Ti y MII 1-y) O ₃ wherein, MI represents a substitutable element barium, MII represents a substitutable element and titanium. x and y are values within the range of 0 <x ≦ 1, 0 <y ≦ 1.

Manganese among the subcomponents is for improving the breakdown voltage or driving reliability, and the rare earth element is for improving the electromechanical coupling coefficient or driving reliability. In particular, it is preferable to include both manganese and a rare earth element because driving reliability can be improved. These manganese and rare earth elements may be present alone or in plural as oxides at the grain boundaries of the oxide as the main component, but are diffused into some of the crystal grains of the oxide as the main component. It may be present. Further, at least one of the sub-components of the group consisting of silicon, lithium and boron functions as a sintering aid. These are mainly present alone or in a plurality as oxides at the grain boundaries of the oxide as the main component.

The content of these subcomponents is preferably in the range of Mn: 1 mol or less, and rare earth element: less than 20 mol, Si, Li, B: 15 mol or less, relative to 100 mol of the main component oxide. , Mn: 0.01 mol to 0.5 mol, Rare earth element: 0.02 mol to 12 mol, Si, Li, B: 0.01 mol to 15 mol, more preferably.

If the manganese content is too small, the breakdown voltage cannot be sufficiently improved, and if the manganese content is too large, the breakdown voltage becomes small and the life is shortened. If the content of the rare earth element is too small, the driving reliability cannot be sufficiently improved, and if the content is too large, the electromechanical coupling coefficient and the driving reliability decrease. If the content of at least one of the group consisting of silicon, lithium and boron is too small, the firing temperature cannot be lowered sufficiently, and if it is too large, the breakdown voltage and the driving reliability decrease. .

The internal electrode 12 contains a conductive material. Although the conductive material is not particularly limited, for example, at least one of a group consisting of nickel, copper, gold, platinum, palladium, and silver, or an alloy thereof is preferable. Among them, nickel or nickel alloy is particularly preferable.
As the nickel alloy, an alloy of nickel and one or more elements selected from manganese, chromium (Cr), cobalt (Co), aluminum (Al) and the like is preferable, and the content of nickel in the alloy is 95% by mass. It is preferable that it is above. The internal electrode 12 may contain various trace components such as phosphorus (P) at about 0.1% by mass or less. It is preferable that the thickness of the internal electrode 12 is, for example, about 0.5 μm to 3 μm. 0.
If the thickness is less than 5 μm, the internal electrodes 12 are interrupted, and sufficient piezoelectric characteristics cannot be obtained. If the thickness is more than 3 μm, the distortion of the fired laminate 10 increases.

The terminal electrodes 21 and 22 are formed, for example, by baking a paste for terminal electrodes. This terminal electrode paste is, for example, a conductive material,
Contains glass frit and vehicle. The conductive material includes, for example, at least one member from the group consisting of silver, gold, copper, nickel, palladium, and platinum. The vehicle includes an organic vehicle or an aqueous vehicle. The organic vehicle is obtained by dissolving a binder in an organic solvent, and the aqueous vehicle is obtained by dissolving a water-soluble binder and a dispersant in water. The binder is not particularly limited, and may be selected from various binders such as ethyl cellulose and polyvinyl butyral. The organic solvent is not particularly limited, either, and is selected according to the molding method. For example, when molding by a printing method or a sheet method, terpineol, butyl carbitol, acetone, toluene or the like is selected. The water-soluble binder is not particularly limited, and is selected from, for example, polyvinyl alcohol, cellulose, water-soluble acrylic resin, emulsion, and the like. The thickness of the terminal electrodes 21 and 22 is appropriately determined according to the application and the like.
It is about μm.

[Method of Manufacturing Laminated Body Displacement Element] The laminated body displacement element having such a configuration can be manufactured, for example, as follows.

First, a piezoelectric layer paste for forming the piezoelectric layer 11 is prepared. For example, an oxide or a composite oxide containing them as a raw material of the above-mentioned main component and sub-components is prepared, and after mixing this raw material powder such that the ratio of the sub-component to the main component is within the above-described range, A vehicle is added to this raw material mixed powder and kneaded. At that time, a carbonate, a sulfate, a nitrate, an oxalate, a hydroxide, an organometallic compound, or the like, which becomes an oxide upon firing, may be used in place of the oxide. When a plurality of types of raw material powders such as barium oxide powder and titanium oxide powder are used as the main component raw materials, these are mixed and calcined. Mixing may be carried out, or plural kinds of raw material powders of the main component and raw material powders of the sub-components may be mixed without calcining.

The vehicle is the same as that described for the terminal electrode paste described above. The content of the vehicle in the piezoelectric layer paste is not particularly limited, and is usually adjusted so that the binder is about 1 to 5% by mass and the solvent is about 10 to 50% by mass. Further, an additive such as a dispersant or a plasticizer may be added to the piezoelectric layer paste as needed. It is preferable that the total amount be 10% by mass or less.

Next, an internal electrode paste for forming the internal electrodes 12 is prepared. For example, the above-described conductive material or various oxides that become the above-described conductive material after firing,
An organic metal compound or a resinate is kneaded with the vehicle. The vehicle is the same as the piezoelectric layer paste, and the content of the vehicle in the internal electrode paste is also the same as the piezoelectric layer paste. Further, additives such as a dispersant, a plasticizer, a dielectric material, and an insulator material may be added to the internal electrode paste as needed. It is preferable that the total amount be 10% by mass or less.

Subsequently, using the paste for the piezoelectric layer and the paste for the internal electrode, a green chip as a precursor of the laminate 10 is manufactured by, for example, a printing method or a sheet method. For example, when a printing method is used, a paste for a piezoelectric layer and a paste for an internal electrode are alternately printed on a substrate made of polyethylene terephthalate (hereinafter, referred to as a PET substrate) and the like, thermocompression-bonded, and then formed into a predetermined shape. It is cut and peeled from the substrate to form a green chip. When the sheet method is used, a green sheet is formed by using a paste for a piezoelectric layer, and a paste layer for an internal electrode is printed on the green sheet. Cut into green chips.

After manufacturing the green chip, binder removal processing is performed. The conditions for the binder removal treatment may be ordinary conditions. For example, when a base metal such as nickel or a nickel alloy is used for the internal electrode 12, it is preferable to adjust as follows. Heating rate: 5 ° C / h to 300 ° C / h Holding temperature: 180 ° C to 400 ° C Holding time: 0.5 to 24 hours Atmosphere: In air

After performing the binder removal treatment, firing is performed to form the laminate 10. The atmosphere during firing is the internal electrode 12
May be appropriately selected according to the constituent material of the internal electrode 1.
When a base metal such as nickel or a nickel alloy is used for 2, it is preferable to use a reducing atmosphere. For example, as an atmosphere gas, hydrogen gas is added to nitrogen
It is preferable that the mixture is humidified by mixing with volume%, and the oxygen partial pressure is 1
× It is preferable that the 10 ^-2 Pa~1 × 10 ^-8 Pa.
If the oxygen partial pressure is less than this range, the internal electrode 12 may be abnormally sintered and may be interrupted. If the oxygen partial pressure exceeds this range, the internal electrode 12 tends to be oxidized. Because there is. When a noble metal is used for the internal electrode 12, it is preferable to perform firing in air.

The other firing conditions are preferably as follows, for example. Heating rate: 50 ° C./h to 500 ° C./h Holding temperature: 1100 ° C. to 1400 ° C. Holding time: 0.5 to 8 hours Cooling rate: 50 ° C./h to 500 ° C./h

When firing is performed in a reducing atmosphere, it is preferable to perform annealing after firing. Annealing is a process for reoxidizing the piezoelectric layer 11. It is preferable to use a humidified nitrogen gas as an atmosphere gas at the time of annealing, and its oxygen partial pressure is preferably 1 × 10 ⁻³ Pa or more, particularly preferably 1 × 10 ⁻² Pa to 10 Pa.

The other annealing conditions are preferably, for example, as follows. Holding temperature: 1100 ° C or less Holding time: 0 to 20 hours Cooling rate: 50 ° C / h to 500 ° C / h

Incidentally, the annealing may be constituted only by the temperature raising process and the temperature lowering process, and the holding time may be set to zero.
In this case, the holding temperature is synonymous with the maximum temperature. Incidentally, when the atmospheric gas is humidified in the above-described binder removing step, baking step and annealing step, for example, a wetter may be used. In this case, the water temperature is preferably set to about 0 ° C to 75 ° C.

The binder removing step, the firing step, and the annealing step may be performed continuously or independently of each other. When performing these steps continuously, after removing the binder, the atmosphere is changed without cooling, the temperature is raised to the holding temperature of firing, firing is performed, and then the temperature is cooled to the holding temperature of the annealing step, and the atmosphere is changed. Preferably, annealing is performed. If these steps are performed independently, in the firing step, the temperature is increased in a nitrogen gas or humidified nitrogen gas atmosphere until the holding temperature during the binder removal treatment, and then the temperature is changed to the firing atmosphere to increase the temperature. After cooling to the holding temperature at the time of annealing, it is preferable to change to a nitrogen gas or humidified nitrogen gas atmosphere again and continue cooling. At the time of annealing, the atmosphere may be changed after the temperature is raised to the holding temperature in a nitrogen gas atmosphere, or the entire annealing process may be performed in a humidified nitrogen gas atmosphere.

After the laminate 10 is formed, the end face is polished by, for example, barrel polishing or sand blasting, and the terminal electrode paste prepared in the same manner as the internal electrode paste is printed or transferred and baked.
To form At that time, the atmosphere is, for example, a mixed gas of humidified nitrogen gas and hydrogen gas, and the baking temperature is 600
C. to 800.degree. C. and the holding temperature are preferably about 10 minutes to 1 hour. Thereby, the laminated body displacement element shown in FIG. 1 is obtained.

As described above, according to the present embodiment, a large amount of displacement can be obtained because a plurality of piezoelectric layers 11 mainly containing an oxide containing barium, titanium and oxygen are laminated. At the same time, the displacement can be arbitrarily adjusted depending on the number of layers. Therefore, it is possible to use a laminate displacement element which has a low lead content and is extremely excellent in terms of low pollution, environmental friendliness and ecological aspects.

In particular, if the piezoelectric layer 11 contains manganese as a subcomponent, the breakdown voltage can be improved, and if the piezoelectric layer 11 contains a rare earth element as a subcomponent, the electromechanical coupling coefficient can be reduced. If both are included, the drive reliability can be improved.

The piezoelectric layer 11 is composed of silicon,
At least one of the group consisting of lithium and boron
If a seed is included, high sinterability can be obtained even when sintering at a low temperature.

[0039]

FIG. 1 shows a specific embodiment of the present invention.
This will be described with reference to FIG.

As Examples 1 to 52, first, the piezoelectric layer 11
Barium titanate powder which is a raw material of the main component in,
Manganese carbonate (MnCO ₃ ) powder,
Yttrium oxide (Y ₂ O ₃ ) powder and silicon dioxide (SiO ₂ ) glass powder were prepared. Then
These raw material powders were wet-mixed for 16 hours by a ball mill as required, and dried to obtain a raw material mixed powder. that time,
In Examples 1 to 52, barium titanate powder 100 mol
Was adjusted so that the content of the auxiliary component with respect to the values shown in Table 2 or Table 3 was obtained.

The contents of the subcomponents shown in Tables 2 and 3 are values based on manganese, yttrium, and silicon atoms, respectively. Therefore, the number of moles of manganese oxide and silicon dioxide added is shown in Table 2 or Table 3.
However, the number of moles of yttrium oxide added is と of the value shown in Table 2 or Table 3.

[0042]

[Table 2]

[0043]

[Table 3]

Subsequently, 5.0 parts by mass of an acrylic resin, 2.5 parts by mass of benzyl butyl phthalate, and 6.5 parts of mineral spirit are added to 100 parts by mass of the raw material mixed powder.
Parts by mass, 4.0 parts by mass of acetone, 20.5 parts by mass of trichloroethane, and 41.5 parts by mass of methylene chloride were added and mixed by a ball mill to prepare a paste for a piezoelectric layer.

Further, terpineol 52 parts by mass, ethyl cellulose 3 parts by mass, and benzotriazole 0.4 part by mass were added to nickel particles 44.6 parts by mass, and kneaded with a three-roll mill to form an internal electrode. Paste was prepared.

Further, an organic vehicle was added to the copper particles in the same manner as the internal electrode paste, and kneaded with a three-roll mill to prepare a terminal electrode paste.

After each of the piezoelectric layer paste, the internal electrode paste and the terminal electrode paste is prepared, a green sheet is formed on the film-shaped PET substrate by using the piezoelectric layer paste. Was printed with an internal electrode paste. Next, the green sheet on which the internal electrode paste was printed was peeled from the PET substrate, a plurality of the green sheets were laminated and pressed, and cut into a predetermined size to obtain a green chip. At this time, the number of green sheets laminated is such that the number of piezoelectric layers 11 sandwiched between the internal electrodes 12 is three.
It was made to have zero layer.

Subsequently, the green chip was subjected to binder removal processing, firing and annealing under the following conditions, respectively, to produce a laminate 10. <Binder removal processing conditions> Heating rate: 20 ° C / h Holding temperature: 300 ° C Holding time: 2 hours Atmosphere: In air

<Firing conditions> Temperature rising rate: 200 ° C./h Holding temperature: Temperature shown in Table 2 or Table 3 Holding time: 2 hours Cooling rate: 300 ° C./h Atmosphere: Mixed gas of humidified nitrogen and hydrogen The oxygen partial pressure is 1 × 10 ⁻³ Pa. The holding temperature is the optimum temperature in each case.

<Annealing conditions> Holding temperature: 1000 ° C. Holding time: 3 hours Cooling rate: 300 ° C./h Atmosphere: Humidified nitrogen gas Oxygen partial pressure: 1 × 10 ⁻² Pa Atmosphere gas during firing and annealing For the humidification, a wetter with a water temperature of 35 ° C. was used.

After the laminate 10 is manufactured, the end face is polished by sandblasting, the terminal electrode paste is transferred to the end face, and baked at 800 ° C. for 10 minutes in a mixed gas atmosphere of nitrogen gas and hydrogen gas. , Terminal electrodes 21 and 22
Was formed. As a result, FIG.
Were obtained, respectively. The size of the obtained laminated body displacement element is 3.2 mm × 1.6 mm × 0.6.
mm, the thickness of the piezoelectric layer 11 sandwiched between the internal electrodes 12 was 10 μm, and the thickness of the internal electrodes 12 was 1.5 μm.

For Examples 1 to 52, disk-shaped samples for measuring the characteristics of the piezoelectric layer 11 were prepared in addition to the laminated body displacement elements. This disk-shaped sample was processed into a disk having a diameter of 25 mm and a thickness of 1.2 mm by performing binder removal processing, firing, and annealing under the same conditions as for the multilayer capacitor, using the above-described piezoelectric layer paste. Thereafter, a silver paste was printed and baked at 600 ° C.

The characteristics of the laminated body displacement elements and disk samples of Examples 1 to 52 thus produced were evaluated. <Electromechanical Coupling Coefficient (Kr)> A disc-shaped sample is polarized in an oil at 50 ° C. at an electric field strength of 5 kV / mm for 2 minutes, aged for 1 day, and then spread by a resonance anti-resonance method using an impedance analyzer. The electromechanical coupling coefficient Kr was measured in the directions.

<Destruction Voltage> A DC voltage was applied to the laminated body displacement element at a step-up rate of 100 V / sec, and a leakage current of 0.1 mA was detected, or a voltage when the element was broken was measured.

<Driving Reliability> Regarding the laminated body displacement element,
70 ° C., electric field intensity V _pp 5 kV / mm, sin wave 2 kHz
It was driven 1 billion times under the environment of z, and the insulation resistance and the displacement of the element were measured. It is determined that there is no drive reliability when the resistance value after one billion times drops by three digits or more from the initial resistance value, or when the displacement amount after one billion times drops by more than 10% from the initial displacement value. did.

The results are shown in Table 2 or Table 3. Although not shown in Table 2 or Table 3, a large amount of displacement could be obtained in any of the examples as compared with the case where the piezoelectric layer 11 was a single layer. Further, as shown in Table 2, Examples 2 to 7 in which manganese was added to the piezoelectric layer 11 were used.
According to Examples 8 to 10 in which yttrium was added to the piezoelectric layer, a higher breakdown voltage can be obtained as compared with Example 1 in which manganese was not added, and Example 1 in which yttrium was not added was used. As a result, a larger electromechanical coupling coefficient could be obtained.

Further, as can be seen from Examples 11 to 28 shown in Table 2, when both manganese and yttrium were added to the piezoelectric layer 11, a large breakdown voltage and high driving reliability could be obtained. In addition, the content of manganese is preferably 1 mol or less, more preferably in the range of 0.01 mol to 0.5 mol with respect to 100 mol of barium titanate. The content of yttrium is preferably 1 mol of barium titanate.
It was also found that the amount is preferably less than 20 mol and more preferably 0.02 mol to 12 mol with respect to 00 mol.

Further, as can be seen from Examples 29 to 52 shown in Table 3, if silicon is added to the piezoelectric layer 11, even if the firing temperature is lowered, the electromechanical coupling coefficient and the breakdown voltage each increase. As a result, the driving reliability was improved. Furthermore, it was also found that the content of silicon is preferably 15 mol or less, more preferably 0.01 mol to 15 mol based on 100 mol of barium titanate.

Although not described in detail here, similar results can be obtained by using other components described in the embodiment as main components and subcomponents.

As described above, the present invention has been described with reference to the embodiments and examples. However, the present invention is not limited to the above embodiments and examples, and can be variously modified. For example, in the above-described embodiments and examples, the case where the piezoelectric layer 11 includes the sub-components in addition to the main component oxides has been described. It can be widely applied to the case where no component is contained. Further, the present invention can be applied to a case where the piezoelectric layer 11 includes another subcomponent.

[0061]

As described above, according to the laminate displacement element according to any one of claims 1 to 5,
Since a plurality of piezoelectric layers containing an oxide containing barium, titanium, and oxygen are stacked, a large amount of displacement can be obtained, and the amount of displacement can be arbitrarily adjusted depending on the number of layers. Therefore, the content of lead is small, and there is an effect that it is possible to use the laminate displacement element which is extremely excellent in terms of low pollution, environmental friendliness and ecological viewpoint.

In particular, according to the laminated body displacement element according to any one of claims 2 to 5, since the piezoelectric layer contains manganese, the breakdown voltage or the drive reliability can be improved. This has the effect.

According to the laminated body displacement element of any one of claims 3 to 5, the piezoelectric layer contains a rare earth element, so that the electromechanical coupling coefficient or the drive reliability is improved. It has the effect that it can be done.

Furthermore, according to the laminated body displacement element according to claim 4 or 5, since the piezoelectric layer includes at least one of the group consisting of silicon, lithium and boron, it is sintered at a low temperature. Even so, there is an effect that high sinterability can be obtained.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view illustrating a configuration of a laminate displacement element according to an embodiment of the present invention.

[Explanation of symbols]

10: laminated body, 11: piezoelectric layer, 12: internal electrode, 21,
22 ... Terminal electrode.

 ────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Shogo Murosawa 1-13-1 Nihonbashi, Chuo-ku, Tokyo Inside TDK Corporation (72) Inventor Masahito Furukawa 1-13-1 Nihonbashi, Chuo-ku, Tokyo F-term in DK Corporation (reference) 4G031 AA01 AA06 AA07 AA11 AA19 AA28 AA30 AA39 BA10

Claims (5)

[Claims] 1. A semiconductor device comprising: a plurality of piezoelectric layers and a plurality of internal electrodes alternately stacked; wherein the piezoelectric layer contains an oxide containing barium (Ba), titanium (Ti), and oxygen. The laminated body displacement element described above. 2. The stacked body displacement element according to claim 1, wherein the piezoelectric layer contains manganese (Mn) in a range of 1 mol or less based on 100 mol of the oxide. 3. The multilayer displacement element according to claim 1, wherein the piezoelectric layer contains a rare earth element in a range of less than 20 mol with respect to 100 mol of the oxide. 4. The piezoelectric layer comprises at least one selected from the group consisting of silicon (Si), lithium (Li), and boron (B) in an amount of 15 mol per 100 mol of the oxide.
The laminated body displacement element according to any one of claims 1 to 3, wherein the element is included within a range of 1 or less. 5. The internal electrode includes nickel (Ni), copper (Cu), gold (Au), platinum (Pt), and palladium (P).
at least one of the group consisting of d) and silver (Ag)
The laminated body displacement element according to claim 1, further comprising a seed.