JPH02159079A - Piezo-electric material for actuator and laminated displacement element thereof - Google Patents
Piezo-electric material for actuator and laminated displacement element thereofInfo
- Publication number
- JPH02159079A JPH02159079A JP63313621A JP31362188A JPH02159079A JP H02159079 A JPH02159079 A JP H02159079A JP 63313621 A JP63313621 A JP 63313621A JP 31362188 A JP31362188 A JP 31362188A JP H02159079 A JPH02159079 A JP H02159079A
- Authority
- JP
- Japan
- Prior art keywords
- piezo
- electric
- piezoelectric material
- electric material
- powder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 16
- 239000002305 electric material Substances 0.000 title abstract 6
- 239000000203 mixture Substances 0.000 claims abstract description 10
- 239000000463 material Substances 0.000 claims description 42
- 239000013078 crystal Substances 0.000 claims description 14
- 239000000843 powder Substances 0.000 abstract description 11
- 239000004020 conductor Substances 0.000 abstract description 8
- 239000000919 ceramic Substances 0.000 abstract description 7
- AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Chemical compound [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 abstract description 4
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 abstract description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 abstract description 3
- BDAGIHXWWSANSR-NJFSPNSNSA-N hydroxyformaldehyde Chemical compound O[14CH]=O BDAGIHXWWSANSR-NJFSPNSNSA-N 0.000 abstract description 3
- 229910000018 strontium carbonate Inorganic materials 0.000 abstract description 3
- 229910002113 barium titanate Inorganic materials 0.000 abstract description 2
- 229910010252 TiO3 Inorganic materials 0.000 abstract 1
- 229910052788 barium Inorganic materials 0.000 abstract 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical group [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 abstract 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 abstract 1
- 229910052712 strontium Inorganic materials 0.000 abstract 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 abstract 1
- 238000000034 method Methods 0.000 description 7
- 230000005684 electric field Effects 0.000 description 6
- 229910052573 porcelain Inorganic materials 0.000 description 3
- 230000009466 transformation Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052684 Cerium Inorganic materials 0.000 description 1
- AYJRCSIUFZENHW-DEQYMQKBSA-L barium(2+);oxomethanediolate Chemical compound [Ba+2].[O-][14C]([O-])=O AYJRCSIUFZENHW-DEQYMQKBSA-L 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- 238000002789 length control Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
- 238000004857 zone melting Methods 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は自動車のブレーキ装置等に使用するアクチュエ
ータ用の圧電材料、及びそれを用いた積層型変位素子に
関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a piezoelectric material for actuators used in automobile brake systems and the like, and a laminated displacement element using the piezoelectric material.
電界を加えると機械的な歪みを生じる性質を有する物質
は一般に圧電材料と呼ばれ、電気機械変換素子としてバ
イモルフ、圧電火花素子、超音波振動子、圧電ブザー、
セラミックフィルター等に広く利用されている。またこ
のような用途に使用し得る圧電材料として、３ａＴ＋０
３、Ｐｂ（Ｚｒ、 Ｔ＋）Ｏｔし＋ＮｂＯ３，１ｉＴａ
ｏｉ等が知られている。Substances that have the property of causing mechanical distortion when an electric field is applied are generally called piezoelectric materials, and are used as electromechanical transducers such as bimorphs, piezoelectric spark elements, ultrasonic vibrators, piezoelectric buzzers,
Widely used in ceramic filters, etc. In addition, 3aT+0 is a piezoelectric material that can be used for such purposes.
3, Pb(Zr, T+)Ot+NbO3,1iTa
oi etc. are known.
一般に圧電材料に電界をかけるとその結晶構造が変化し
、その結晶変態点において極大の歪量（電気機械結合定
数）を示す。結晶変態点は各圧電材料により異なるので
、目的の作動温度に応じ、適当な圧電材料を選択して用
いている。Generally, when an electric field is applied to a piezoelectric material, its crystal structure changes and exhibits maximum strain (electromechanical coupling constant) at its crystal transformation point. Since the crystal transformation point differs depending on each piezoelectric material, an appropriate piezoelectric material is selected and used depending on the intended operating temperature.
最近、精密工作機械における位置決め、流体量制御バル
ブ、あるいは光学装置の光路長制御などの駆動源として
使用されるアクチュエータ用圧電材料にＢａＴｉＯ３系
磁器を使用することが提案されたく特開昭６２−１５４
６８０ 号）。Recently, it has been proposed to use BaTiO3-based porcelain as a piezoelectric material for actuators used as drive sources for positioning in precision machine tools, fluid volume control valves, and optical path length control in optical devices.
No. 680).
このＢａＴｉ０．系磁器は５ｉｎ２及びｉ、Ｏ，、さら
に必要に応じ、Ｙ、Ｌａ、Ｃｅ等の希土類元素を添加し
たもので、磁器中に空間電荷を有し、この空間電荷とＢ
ａＴｉ０．の強誘電性とがあいまって、電界の印加に伴
う歪量が分極方向に依存せず、高い負電圧を印加しても
分極反転が起こらない等の特徴を有する。This BaTi0. 5in2 and i, O, and if necessary, rare earth elements such as Y, La, and Ce are added to the porcelain, and the porcelain has a space charge, and this space charge and B
aTi0. Combined with its ferroelectric property, it has the characteristics that the amount of strain accompanying the application of an electric field does not depend on the polarization direction, and polarization reversal does not occur even when a high negative voltage is applied.
しかしながら、このＢａＴ＋Ｏｚ系磁器からなる圧電材
料は、Ｐｂ（Ｚｒ、 Ｔｉ）Ｏｓ のように例えば菱面
体晶系強誘電相と正方晶系強誘電相の結晶変態点が実際
の作動温度において得られず、実際の作動温度（約−３
０℃〜約＋７０℃）の範囲においては十分に大きな歪量
が得られないという問題がある。However, piezoelectric materials made of BaT+Oz ceramics cannot achieve the crystal transformation points of rhombohedral ferroelectric phase and tetragonal ferroelectric phase at actual operating temperatures, for example, unlike Pb(Zr, Ti)Os. , the actual operating temperature (approximately -3
There is a problem that a sufficiently large amount of strain cannot be obtained in the range of 0°C to about +70°C.
従って、本発明の目的は実際の作動温度において大きな
歪量を示すアクチュエータ用圧電材料を提供することで
ある。Therefore, an object of the present invention is to provide a piezoelectric material for actuators that exhibits a large amount of strain at actual operating temperatures.
本発明のもう１つの目的は、かかる圧電材料からなる薄
膜を電極技と交互に積層してなる積層型変位素子を提供
することである。Another object of the present invention is to provide a laminated displacement element in which thin films made of such piezoelectric material are laminated alternately with electrodes.
上記目的に鑑み鋭意研究の結果、本発明者等はＢａＴｉ
Ｏ３中の８ａを所定の割合のＳｒで置換することにより
キュリー点を低下することができ、もって実際の作動温
度における歪量を大きくすることができることを発見し
、本発明に想到した。As a result of intensive research in view of the above purpose, the present inventors have discovered that BaTi
It was discovered that by replacing 8a in O3 with a predetermined proportion of Sr, the Curie point could be lowered, thereby increasing the amount of strain at actual operating temperatures, and the present invention was conceived.
すなわち、本発明のアクチュエータ用圧電材料は下記一
般式：
％式％）
（ただしＸ＝０．１〜０．５）
により表される組成を有することを特徴とする。That is, the piezoelectric material for actuators of the present invention is characterized by having a composition represented by the following general formula: % formula %) (where X=0.1 to 0.5).
また本発明のアクチュエータ用積層型変位素子は、下記
一般式：
％式％）
（ただしＸ＝０．１〜０．５）
により表される組成を有する圧電材料からなる複数の薄
板と、電極板とを交互に積層したことを特徴とする。Further, the laminated displacement element for an actuator of the present invention includes a plurality of thin plates made of a piezoelectric material having a composition expressed by the following general formula: % formula %) (where X = 0.1 to 0.5), and an electrode plate. It is characterized by being alternately laminated.
本発明を以下詳細に説明する。The present invention will be explained in detail below.
本発明の圧電材料は下記一般式により表される組成を有
する。The piezoelectric material of the present invention has a composition represented by the following general formula.
（Ｂａ＋−ｘ Ｓｒ、ｔ ）Ｔｉｎ３
（ただしｘ＝０．１〜０．５）
ＢａＴ＋Ｏｚ自身は１２０ ℃のキュリー点（Ｔｃ）を
有するが、Ｓｒの量が増大するにつれてキュリー点が低
下する。一般に作動温度において常誘電相（立方晶）と
強誘電相（正方晶）との共存状態にある場合、外部電場
の印加により常誘電相から強誘電相への相変化が起こり
、結晶の格子定数が大きく変化することにより大きな歪
みが発生する。この相転移歪が通常のＢａＴｌＯｓの圧
電歪に加わることにより、全体として大きな歪量が得ら
れる。(Ba+-xSr,t)Tin3 (where x=0.1 to 0.5) BaT+Oz itself has a Curie point (Tc) of 120°C, but as the amount of Sr increases, the Curie point decreases. Generally, when a paraelectric phase (cubic crystal) and a ferroelectric phase (tetragonal crystal) coexist at the operating temperature, a phase change from the paraelectric phase to the ferroelectric phase occurs when an external electric field is applied, and the lattice constant of the crystal A large change in will cause large distortion. By adding this phase transition strain to the piezoelectric strain of normal BaTlOs, a large amount of strain can be obtained as a whole.
大きな歪量を得るためにはキ、 ＩＪ−点は作動温度に
近いことが必要である。例えば作動温度が室温（２４℃
）の場合、圧電材料のキュリー点は２４℃に対して一１
Ｏ℃〜＋１５℃の範囲（１４〜３９℃の範囲）である必
要がある。この場合Ｓｒの量Ｘは０．２４〜０．３４の
範囲であり、このときの歪量はＢａＴｉ０．と比べて平
均で２０％、最大では４０％以上向上している。In order to obtain a large amount of strain, the IJ point must be close to the operating temperature. For example, if the operating temperature is room temperature (24℃)
), the Curie point of the piezoelectric material is -1 at 24°C.
It needs to be in the range of 0°C to +15°C (range of 14 to 39°C). In this case, the amount X of Sr is in the range of 0.24 to 0.34, and the amount of strain at this time is BaTi0. This is an average improvement of 20% and a maximum of over 40%.
次に、作動温度が７０℃と比較的高い場合、キュリー点
は７０℃に対して一２０℃〜＋２３℃の範囲であり、こ
のときのＳｒの量Ｘは０．１〜０．２５の範囲である。Next, when the operating temperature is relatively high at 70°C, the Curie point is in the range of -20°C to +23°C with respect to 70°C, and the amount of Sr at this time is in the range of 0.1 to 0.25. It is.
逆に作動温度が一３０℃と低い場合、キュリー点は一３
０℃に対して一５℃〜＋７℃の範囲であり、このときの
Ｓｒの量は０．４５〜０．５ の範囲である。Conversely, if the operating temperature is as low as 130°C, the Curie point is 13°C.
The temperature ranges from -5°C to +7°C with respect to 0°C, and the amount of Sr at this time ranges from 0.45 to 0.5°C.
一般に自動車等のアクチユエータとしては、作動温度は
一３０℃〜＋７０℃の範囲であるので、Ｓｒの量Ｘは０
．１〜０．５ の範囲にあればよい。Generally, the operating temperature of actuators for automobiles etc. is in the range of -30°C to +70°C, so the amount of Sr X is 0.
．． It is sufficient if it is in the range of 1 to 0.5.
本発明の（Ｂａ、−、Ｓｒｘ ）Ｔｉ口、系圧電材料は
次のようにして製造することができる。まず炭酸バリウ
ム粉末と炭酸ストロンチウム粉末と酸化チタン粉末とを
所定の割合で混合し、９００〜１２００℃で１〜５時間
仮焼した後粉砕することにより所望の組成の圧電材料粉
末を得る。この粉末を金型プレス、冷間静水圧プレス等
により所望の形状に成形した後、１３５０〜１５００℃
で１〜５時間焼結することにより圧電セラミックスとす
る。これを必要に応じ所望の厚さにスライスして使用す
る。The (Ba,-,Srx) Ti-based piezoelectric material of the present invention can be manufactured as follows. First, barium carbonate powder, strontium carbonate powder, and titanium oxide powder are mixed in a predetermined ratio, calcined at 900 to 1200°C for 1 to 5 hours, and then pulverized to obtain piezoelectric material powder with a desired composition. After molding this powder into a desired shape using a mold press, cold isostatic press, etc.,
Piezoelectric ceramics are obtained by sintering for 1 to 5 hours. Slice this to the desired thickness as needed.
本発明において上記圧電材料を単結晶とするのが好まし
い。圧電材料の単結晶化は、例えば所望の組成の圧電材
料の焼結体又は粉末を白金るつぼに入れ、高周波で加熱
溶融した後、チョクラルスキー法で単結晶を育成する方
法や、焼結体の円柱の一部の帯域（ゾーン）に高周波レ
ーザ光又はノ１０ゲン光を集中させることにより溶融さ
せ、単結晶する方法（ゾーンメルティング法）等により
行うことができる。単結晶化した（Ｂａ ５ｒ）Ｔｉｎ
、は特定の方向（Ｃ軸方向）において、より大きな歪量
を示すので、単結晶の圧電材料をＣ軸に垂直にスライス
し、それを積層することにより大きな歪量を示す変位素
子を作ることができる。In the present invention, it is preferable that the piezoelectric material is a single crystal. Single crystallization of piezoelectric materials can be achieved by, for example, placing a sintered body or powder of a piezoelectric material of a desired composition in a platinum crucible, heating and melting it with high frequency, and then growing a single crystal using the Czochralski method, or This can be carried out by a method such as a method (zone melting method) in which high-frequency laser light or high-frequency laser light is focused on a part of a zone of a cylinder to melt and form a single crystal. Single crystallized (Ba 5r)Tin
, shows a larger amount of strain in a specific direction (C-axis direction), so a displacement element that shows a larger amount of strain is created by slicing a single-crystal piezoelectric material perpendicular to the C-axis and stacking them. Can be done.
本発明の圧電材料を用いた変位素子は以下のような構成
である。すなわち、圧電材料の薄板を電極板を介して複
数枚（ｎ枚）積層して、積層体とし、１枚おきの電極板
と接触する導電体を積層体の両側に設けた構造とする。The displacement element using the piezoelectric material of the present invention has the following configuration. That is, a structure is employed in which a plurality (n) of thin plates of piezoelectric material are laminated with electrode plates interposed therebetween to form a laminate, and conductors in contact with every other electrode plate are provided on both sides of the laminate.
その−例を第１図及び第２図に示す。圧電材料１の間に
は正の電極板２と負の電極板３とが交互に配置されてお
り、正の電極板２は導電体４に、また負の電極板３は導
電体５にそれぞれ接続している。従って、導電体４．５
間に電圧を印加すれば、圧電効果により各薄板が歪み、
素子全体としてはそのｎ倍の歪量が得られる。各圧電材
料の薄板は０．２〜１ｍｍの厚さを有し、１００〜２０
０枚程度積層するのが好ましい。Examples thereof are shown in FIGS. 1 and 2. Positive electrode plates 2 and negative electrode plates 3 are arranged alternately between the piezoelectric materials 1, and the positive electrode plates 2 are connected to the conductor 4, and the negative electrode plates 3 are connected to the conductor 5, respectively. Connected. Therefore, the conductor 4.5
If a voltage is applied between them, each thin plate will be distorted due to the piezoelectric effect.
As a whole of the element, a strain amount n times that amount can be obtained. Each thin plate of piezoelectric material has a thickness of 0.2-1 mm, with a thickness of 100-20 mm.
It is preferable to laminate about 0 sheets.
また電極板は、スクリーン印刷法、蒸着法、メツキ法、
ドクターブレード法等により、圧電材料の薄板上に形成
することができる。In addition, the electrode plate can be made by screen printing method, vapor deposition method, plating method,
It can be formed on a thin plate of piezoelectric material by a doctor blade method or the like.
圧電材料が単結晶の場合、各薄板をＣ軸に垂直に形成し
、それを積層する。このような構造とすることにより、
多結晶の圧電材料を使用する場合と比較して約３倍以上
の歪特性が得られる。When the piezoelectric material is a single crystal, each thin plate is formed perpendicular to the C-axis and stacked. By having such a structure,
Strain characteristics approximately three times or more can be obtained compared to the case where a polycrystalline piezoelectric material is used.
なお本明細書において用悟「圧電材料」は一般に電気既
械変換特性を有する材料を意味し、圧電セラミックスの
みならずいわゆる電歪材料をも包含するものである。In this specification, the term "piezoelectric material" generally refers to a material having electromechanical conversion characteristics, and includes not only piezoelectric ceramics but also so-called electrostrictive materials.
本発明を以下の実施例によりさらに詳細に説明する。 The present invention will be explained in further detail by the following examples.
実施例１
出発原料として炭酸バリウム、炭酸ストロンチウム及び
酸化チタンを用い、一般式： （Ｂａ、 Ｘ ５ｒｘ）
Ｔｉｅ、においてｘ＝Ｑ〜０．４の範囲内の各種の割合
で出発原料を配合した。得られた各混合物を５００ｋｇ
／ｃＩ１１の圧力で金型成形し、１４５０℃で２時間焼
結した。焼結体を厚さＱ、５ｍｍにスライスし、薄板と
した。これに金からなる電極板をスパッタ法により形成
し、全体として１０ｃｍの高さとなるように積層した。Example 1 Using barium carbonate, strontium carbonate and titanium oxide as starting materials, general formula: (Ba, X 5rx)
Starting materials were blended in various ratios within the range of x=Q~0.4 in Tie. 500 kg of each mixture obtained
It was molded at a pressure of /cI11 and sintered at 1450°C for 2 hours. The sintered body was sliced into a thickness Q of 5 mm to form a thin plate. Electrode plates made of gold were formed on this by sputtering and laminated to a total height of 10 cm.
このようにして得られた積層型の変位素子に、２４℃に
おいて３．２にＶ／ｍｍの電界強度となるように電圧を
かけ、変位素子の歪量を測定した。これにより、圧電材
料中のＳｒの量Ｘと歪量（△１／ｌ）との関係を求めた
。結果を第３図に示す。A voltage was applied to the thus obtained laminated displacement element at 24° C. so that the electric field strength was 3.2 V/mm, and the amount of strain in the displacement element was measured. Thereby, the relationship between the amount X of Sr in the piezoelectric material and the amount of strain (Δ1/l) was determined. The results are shown in Figure 3.
第３図から明らかな通り、２４℃の作動温度の場合ｘ＝
０．２４〜０．３４の範囲において大きな歪量が得られ
ることがわかる。特に好ましいＳｒの割合は、ｘ＝０．
２７〜０．３３である。As is clear from Figure 3, for an operating temperature of 24°C, x =
It can be seen that a large amount of strain can be obtained in the range of 0.24 to 0.34. A particularly preferable proportion of Sr is x=0.
27 to 0.33.
実施例２
実施例１と同様にして、ｘ＝Ｑ〜０．５ となるように
（Ｂａｌ−ｘ Ｓｒ、）Ｔｉｎｓ 圧電セラミックスを
製造し、各Ｓｒ量におけるキュリー点（Ｔｃ）を測定し
た。結果を第４図に示す。Example 2 In the same manner as in Example 1, (Bal-x Sr,) Tins piezoelectric ceramics were manufactured so that x=Q~0.5, and the Curie point (Tc) at each Sr amount was measured. The results are shown in Figure 4.
第４図から明らかな通り、Ｓｒ量Ｘが増大するにつれて
キュリー点が低下する。As is clear from FIG. 4, as the Sr amount X increases, the Curie point decreases.
実施例３
実施例１と同様にして、（Ｂａ、−ｘ Ｓｒ、）ＴｉＯ
ａ においてｘ＝Ｑ〜０．５ となるように圧電材料を
製造し、それから第１図に示す構造の変位素子を形成し
た。Example 3 In the same manner as in Example 1, (Ba, -x Sr,)TiO
A piezoelectric material was manufactured so that x=Q~0.5 at a, and then a displacement element having the structure shown in FIG. 1 was formed.
得られた変位素子に一３０℃、＋２４℃及び＋７０℃の
作動温度において、３．２にｖ／ｆｆ１ｍ２ の電界強
度となるように電圧をかけ、歪量（ΔＩ！／ｌ＞を測定
した。A voltage was applied to the obtained displacement element at operating temperatures of -30°C, +24°C, and +70°C so that the electric field strength was 3.2 v/ff1m2, and the amount of strain (ΔI!/l>) was measured.
各作動温度における歪量が０．６Ｘ１０−３以上となる
Ｓｒ量を求めた。結果を第５図に示す。The amount of Sr at which the amount of strain at each operating temperature was 0.6×10 −3 or more was determined. The results are shown in Figure 5.
第５図から明らかなように、良好な歪特性を示す組成範
囲は作動温度により異なり、一般に作動温度が高くなる
に従ってＸが小さくなる。本実施例においては作動温度
とＸとは以下の関係がある。As is clear from FIG. 5, the composition range exhibiting good strain characteristics varies depending on the operating temperature, and in general, the higher the operating temperature, the smaller X becomes. In this embodiment, the operating temperature and X have the following relationship.
３０℃： ｘ＝０．４５〜０．５０
＋２４℃： ｘ＝０．２４〜０．３４＋７０℃：
ｘ＝０．１０〜０．２５〔発明の効果〕
以上に詳述した通り、本発明の圧電材料は（Ｂａ。30℃: x=0.45~0.50 +24℃: x=0.24~0.34+70℃:
x=0.10 to 0.25 [Effects of the Invention] As detailed above, the piezoelectric material of the present invention has (Ba).
Ｘ Ｓｒ、）Ｔｉ０３ 系圧電セラミックスにおいてＸ
＝０．１〜０．５ の範囲にあるので、実際の作動温度
（−３０℃〜＋７０℃）において大きな歪量を示す。X Sr, ) In Ti03-based piezoelectric ceramics
=0.1 to 0.5, it exhibits a large amount of strain at actual operating temperatures (-30°C to +70°C).
このような圧電材料からなる積層型変位素子は、自動車
のプレーキー装置におけるアクチュエータや、精密機械
のアクチュエータ等に使用するのに適する。特に自動車
のブレーキ装置に用いる場合、車輪のブレーキによるロ
ックを防止する装置（アンチロックブレーキ装置）用の
アクチュエータとして使用するのに好適である。Such a laminated displacement element made of a piezoelectric material is suitable for use in an actuator in an automobile brake key device, an actuator in a precision machine, and the like. In particular, when used in an automobile brake system, it is suitable for use as an actuator for a device (anti-lock brake device) that prevents wheels from being locked by brakes.
第１図は本発明の圧電材料からなる積層型変位素子の一
例を示す斜視図であり、
第２図は第１図の積層型変位素子の拡大部分断面図であ
り、
第３図は本発明の（Ｂａ＋−１１Ｓｒ、）Ｔ＋０．系圧
電材料における５ｒｌｘと歪量との関係を示すグラフで
あり、
第４図は本発明の（Ｂａ＋−１１ＳｒＭ）ＴｓＯ３系圧
電材料におけるＳｒ量Ｘとキｓ ’）−点（Ｔｃ）との
関係を示すグラフであり、
第５図は本発明の（Ｂａ＋−ｎ ＳｒＭ）ＴｔＯｔ系圧
電材料が大きな歪量を示すときの５ｒｌｌと作動温度と
の関係を示すグラフである。
１ ・・・・圧電材料薄板
２．３ ・・・電極板
４．５ ・・・外部導電体FIG. 1 is a perspective view showing an example of a laminated displacement element made of a piezoelectric material of the present invention, FIG. 2 is an enlarged partial cross-sectional view of the laminated displacement element of FIG. 1, and FIG. (Ba+-11Sr,)T+0. FIG. 4 is a graph showing the relationship between 5rlx and the amount of strain in the piezoelectric material based on the (Ba+-11SrM)TsO3 system of the present invention. FIG. FIG. 5 is a graph showing the relationship between 5rll and operating temperature when the (Ba+-n SrM)TtOt-based piezoelectric material of the present invention exhibits a large amount of strain. 1... Piezoelectric material thin plate 2.3... Electrode plate 4.5... External conductor
Claims (3)
エータ用圧電材料。(1) A piezoelectric material for actuators characterized by having a composition represented by the following general formula: (Ba_1_-_xSr_x)TiO_3 (where x=0.1 to 0.5).
板と、電極板とを交互に積層したことを特徴とするアク
チュエータ用積層型変位素子。(2) A plurality of thin plates made of a piezoelectric material having a composition represented by the following general formula: (Ba_1_−_xSr_x)TiO_3 (where x=0.1-0.5) and electrode plates are alternately laminated. A laminated displacement element for actuators characterized by:
圧電材料が単結晶であり、かつ前記薄板の結晶軸が一致
していることを特徴とする積層型変位素子。(3) The laminated displacement element according to claim 2, wherein the piezoelectric material is a single crystal, and the crystal axes of the thin plates coincide with each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63313621A JPH02159079A (en) | 1988-12-12 | 1988-12-12 | Piezo-electric material for actuator and laminated displacement element thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63313621A JPH02159079A (en) | 1988-12-12 | 1988-12-12 | Piezo-electric material for actuator and laminated displacement element thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02159079A true JPH02159079A (en) | 1990-06-19 |
Family
ID=18043523
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63313621A Pending JPH02159079A (en) | 1988-12-12 | 1988-12-12 | Piezo-electric material for actuator and laminated displacement element thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02159079A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7309450B2 (en) | 2001-06-15 | 2007-12-18 | Tdk Corporation | Piezoelectric porcelain and method for preparation thereof |
| EP2113952A2 (en) | 2008-03-31 | 2009-11-04 | TDK Corporation | Piezoelectric ceramic and piezoelectric element employing it |
| JP4748291B2 (en) * | 2001-01-10 | 2011-08-17 | Ｔｄｋ株式会社 | Laminate displacement element |
| US8231803B2 (en) | 2008-03-26 | 2012-07-31 | Tdk Corporation | Piezoelectric ceramic and piezoelectric ceramic composition |
-
1988
- 1988-12-12 JP JP63313621A patent/JPH02159079A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4748291B2 (en) * | 2001-01-10 | 2011-08-17 | Ｔｄｋ株式会社 | Laminate displacement element |
| US7309450B2 (en) | 2001-06-15 | 2007-12-18 | Tdk Corporation | Piezoelectric porcelain and method for preparation thereof |
| US8231803B2 (en) | 2008-03-26 | 2012-07-31 | Tdk Corporation | Piezoelectric ceramic and piezoelectric ceramic composition |
| EP2113952A2 (en) | 2008-03-31 | 2009-11-04 | TDK Corporation | Piezoelectric ceramic and piezoelectric element employing it |
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