JPH11100265A - Piezoelectric ceramic composition - Google Patents

Piezoelectric ceramic composition

Info

Publication number
JPH11100265A
JPH11100265A JP9265468A JP26546897A JPH11100265A JP H11100265 A JPH11100265 A JP H11100265A JP 9265468 A JP9265468 A JP 9265468A JP 26546897 A JP26546897 A JP 26546897A JP H11100265 A JPH11100265 A JP H11100265A
Authority
JP
Japan
Prior art keywords
compounds
srbi
ceramic composition
compound
lattice constant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9265468A
Other languages
Japanese (ja)
Inventor
Mitsuo Hayashibara
光男 林原
Tomio Ishida
富雄 石田
Hideo Suzuki
秀夫 鈴木
Osamu Shiono
修 塩野
Motoyuki Miyata
素之 宮田
Seiji Watabiki
誠次 綿引
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9265468A priority Critical patent/JPH11100265A/en
Publication of JPH11100265A publication Critical patent/JPH11100265A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To attain practical piezoelectric characteristic and excellent strength by controlling a value obtained by dividing the difference of the lattice constant of single compounds such as plural kinds of bismuth layer compounds constituting a multiple compound by the average value of the lattice constant of the single compounds to equal to or below a specific value. SOLUTION: The multiple compound is constituted of plural kinds of the bismuth layer compounds as the single compounds and is controlled to be smaller in the value obtained by dividing the difference of the lattice constant of the single compounds by average value of the lattice constant of the single compounds than 0.029. As the multiple compound, (SrBi4 Ti4 O15 )x (BaBi4 Ti4 O15 )1-x , (SrBi2 Ta2 O9 )x (SrBi2 Nb2 O9 )1-x or the like are exemplified. A bulk sintered compact is obtained by blening and mixing SrO, Ba2 O3 and TiO2 each having several μm particle diameter so as to have the composition of SrBi4 Ti4 O15 and BaCO3 , Bi2 O3 and TiO2 so as to have the composition of BaBi4 Ti4 O15 , calcining, further pulverizing and mixing, adding a coupling agent to press mold and firing the molding at 900-1,000 deg.C.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、アクチュエータ,
振動子,圧力センサ,フィルタ,トランス等に用いられ
る圧電磁器組成物に関する。
[0001] The present invention relates to an actuator,
The present invention relates to a piezoelectric ceramic composition used for a vibrator, a pressure sensor, a filter, a transformer, and the like.

【0002】[0002]

【従来の技術】圧電磁器組成物としては、PZTと呼ば
れるPbZrO3−PbTiO3を含有する多成分系材料
が主流である。鉛を含有しない系としては特開昭60−21
937 号公報,特開昭60−52098 号公報に記載のNa1-x
LixNbO3,特開平9−165262号公報に記載の
NaNbO−BaNiO3−KNbO3 、あるいはビ
スマス層状化合物としては、FC Report 15(1997)No.6
(社団法人 日本ファインセラミックス協会発行)に記
載の(Na0.5Bi0.5)0.95Ca0.05Bi4Ti415
MnCO3(0.1wt%)が知られている。
2. Description of the Related Art As a piezoelectric ceramic composition, the multi-component material containing a PbZrO 3 -PbTiO 3 called PZT is the mainstream. A system containing no lead is disclosed in JP-A-60-21.
937 JP, Na 1-x described in JP-A-60-52098
Li x NbO 3, as the NaNbO 3 -BaNiO 3 -KNbO 3, or bismuth layer compound described in JP-A-9-165262, FC Report 15 (1997) No.6
(Na 0.5 Bi 0.5 ) 0.95 Ca 0.05 Bi 4 Ti 4 O 15 + described in (issued by Japan Fine Ceramics Association)
MnCO 3 (0.1 wt%) is known.

【0003】[0003]

【発明が解決しようとする課題】現在の代表的な圧電磁
器組成物であるPZTは鉛(酸化鉛)を含有する。環境
問題がクローズアップされるに従い、この材料の廃棄処
理が問題になっており、鉛を含有しない、実用的な圧電
特性を有する材料の出現が強く望まれている。
SUMMARY OF THE INVENTION PZT, which is a typical piezoelectric ceramic composition at present, contains lead (lead oxide). As environmental issues are becoming more important, disposal of this material has become a problem, and the emergence of a lead-free material having practical piezoelectric properties has been strongly desired.

【0004】そこで、上述したような非鉛系の材料、あ
るいは環境負荷を少しでも低減する観点から、PbBi
4Ti415系の様な鉛含有量の比較的小さい材料も開発
されているが、圧電特性的あるいは強度的な理由から用
途は限定されている。
[0004] In view of the above, from the viewpoint of reducing lead-free materials or the environmental burden as much as possible, PbBi
Materials with a relatively low lead content, such as 4 Ti 4 O 15, have been developed, but their use is limited for reasons of piezoelectric properties or strength.

【0005】以上の様な状況を鑑み、本発明の第1の目
的は、鉛を含有しない、実用的な圧電特性を有する圧電
磁器組成物を提供することである。
[0005] In view of the above situation, a first object of the present invention is to provide a piezoelectric ceramic composition containing no lead and having practical piezoelectric characteristics.

【0006】本発明の第2の目的は、鉛を含有しない、
材料強度的にも優れた圧電磁器組成物を提供することで
ある。
[0006] A second object of the present invention is to contain no lead,
An object of the present invention is to provide a piezoelectric ceramic composition having excellent material strength.

【0007】[0007]

【課題を解決するための手段】第1の目的を達成する第
1の手段は、圧電磁器組成物を鉛を含まない複数種のビ
スマス層状化合物により構成された複合化合物におい
て、複合化合物の基になる単体化合物(ビスマス層状化
合物)の格子定数の差を単体化合物の格子定数の平均値
で除した値を0.029 よりも小にすることである。
The first means for achieving the first object is to provide a piezoelectric ceramic composition comprising a plurality of bismuth layered compounds not containing lead, wherein The value obtained by dividing the difference in the lattice constant of the simple compound (bismuth layered compound) by the average value of the lattice constant of the simple compound is set to be smaller than 0.029.

【0008】第1の目的を達成する第2の手段は、圧電
磁器組成物を鉛を含まない複数種のビスマス層状化合物
により構成された複合化合物において、複合化合物の基
になる単体化合物(ビスマス層状化合物)を強誘電体と
強誘電体でないものの組み合わせにすることである。
A second means for achieving the first object is to provide a piezoelectric ceramic composition in a composite compound composed of a plurality of types of bismuth layered compounds containing no lead, and a simple compound (bismuth layered compound) serving as a base of the composite compound. Compound) in a combination of a ferroelectric substance and a non-ferroelectric substance.

【0009】第2の目的を達成する第1の手段は、第1
の目的を達成する第1および第2の手段において、単体
化合物としてSrBi2Ta29およびSrBi2Nb2
9を用いることである。
The first means for achieving the second object is the first means.
In the first and second means for achieving the object of the invention, SrBi 2 Ta 2 O 9 and SrBi 2 Nb 2
O 9 is used.

【0010】第2の目的を達成する第2の手段は、第2
の目的を達成する第1の手段において、SrBi2Ta2
9の含有量が10mol%以上40mol% 以下とすること
である。
A second means for achieving the second object is a second means.
In a first means for achieving the object of (1), SrBi 2 Ta 2
The content of O 9 is 10 mol% or more and 40 mol% or less.

【0011】[0011]

【発明の実施の形態】第1の発明をSrBi4Ti415
−BaBi4Ti415複合化合物を基に説明する。ま
ず、出発原料として、粒径数μmのSrO,Bi23
TiO2 を、SrBi4Ti415組成と成るように秤量
した。同様にBaCO3,Bi23,TiO2 も所定量
秤量した。なお、SrOは水分と発熱反応するので、S
rOの代わりにSrCO3 を用いても良い。次に、これ
らの出発原料を、直径1〜5mmのジルコニアボールによ
り、24〜48時間、湿式混合を行い、それを乾燥した
後、700〜750℃で約2時間、仮焼を行った。
BEST MODE FOR CARRYING OUT THE INVENTION The first invention is described as SrBi 4 Ti 4 O 15
The description will be based on a BaBi 4 Ti 4 O 15 composite compound. First, as starting materials, SrO, Bi 2 O 3 ,
TiO 2 was weighed to give a SrBi 4 Ti 4 O 15 composition. Similarly, BaCO 3 , Bi 2 O 3 , and TiO 2 were also weighed in predetermined amounts. Since SrO reacts exothermically with water,
SrCO 3 may be used instead of rO. Next, these starting materials were wet-mixed with zirconia balls having a diameter of 1 to 5 mm for 24 to 48 hours, dried, and then calcined at 700 to 750 ° C. for about 2 hours.

【0012】次に、ポットミルあるいはボールミルによ
り、約2時間の粉砕混合を行い、PVA,PVB等のバ
インダーを入れて加圧成形し、900〜1000℃で約
2時間の焼成を行いバルク焼結体を得た。
Next, pulverization and mixing are performed by a pot mill or a ball mill for about 2 hours, and a binder such as PVA or PVB is put in, pressed and formed, and baked at 900 to 1000 ° C. for about 2 hours to obtain a bulk sintered body. I got

【0013】このバルク焼結体をX線回折により構造解
析したところ、ビスマス層状化合物であることがわかっ
た。次に焼結体を3mm×3mm×10mmの寸法に加工し、
100〜200℃のシリコンオイル中で3〜5kV/mmの
電圧を1時間印加して分極を起こさせた。そして、得ら
れた試料の圧電定数d33をインピーダンスアナライザ
ーによる共振反共振法により測定した。
When the structure of this bulk sintered body was analyzed by X-ray diffraction, it was found to be a bismuth layered compound. Next, the sintered body is processed into a size of 3 mm x 3 mm x 10 mm,
A voltage of 3 to 5 kV / mm was applied for 1 hour in silicon oil at 100 to 200 ° C. to cause polarization. Then, the piezoelectric constant d33 of the obtained sample was measured by a resonance anti-resonance method using an impedance analyzer.

【0014】[0014]

【表1】 [Table 1]

【0015】圧電定数d33は、表1に示す様にSrB
4Ti415単体(試料a−1)の場合で15pC/
N,BaBi4Ti415単体(試料a−2)の場合で1
2pC/Nであった。一方、上記の手順によって作製し
た(SrBi4Ti415)x(BaBi4Ti415)1-x′
=0.4(試料a−3)の場合、d33は40pC/N
となり、単体の場合の約3倍であった。
As shown in Table 1, the piezoelectric constant d33 is SrB
15 pC / i 4 Ti 4 O 15 alone (sample a-1)
N, 1 in the case of BaBi 4 Ti 4 O 15 alone (sample a-2)
It was 2 pC / N. On the other hand, (SrBi 4 Ti 4 O 15 ) x (BaBi 4 Ti 4 O 15 ) 1-x ′ x prepared by the above procedure.
In the case of = 0.4 (sample a-3), d33 is 40 pC / N
, Which is about three times that of a single unit.

【0016】同様の手順で種々のビスマス層状化合物を
作製したところ、表1の試料a−4は、d33が約10
pC/Nと小さく、実用的な圧電特性は示さなかった。
また、試料a−5は焼結体とならないか、小さな固まり
になったとしても、電気抵抗が小さく分極できなかっ
た。一方、試料a−6〜試料a−8については、試料a
−3と同程度のd33を示した。
When various bismuth layered compounds were prepared by the same procedure, sample a-4 in Table 1 showed that d33 was about 10%.
As small as pC / N, practical piezoelectric characteristics were not shown.
Further, even if the sample a-5 did not become a sintered body or became a small mass, the electric resistance was small and the sample could not be polarized. On the other hand, for samples a-6 to a-8, sample a-6
D33 comparable to -3 was shown.

【0017】ビスマス層状化合物はa軸とc軸方向の格
子定数により格子寸法が規定される。単体化合物間で比
較的大きな差が生じるa軸の格子定数に着目し、単体化
合物のa軸の格子定数の差を、a軸の格子定数の平均値
で除した値(Δa/aave )を表1に示す。
The lattice dimensions of the bismuth layered compound are defined by lattice constants in the a-axis and c-axis directions. Focusing on the lattice constant of the a-axis where a relatively large difference occurs between the single compounds, a value (Δa / a ave ) obtained by dividing the difference of the lattice constant of the a-axis of the single compound by the average value of the lattice constants of the a-axis. It is shown in Table 1.

【0018】Δa/aave を基にd33を見ると、Δa
/aaveが0.029と比較的大きい材料系においては、
実用的な圧電材料は得られず、これが0.029 未満の
材料系で大きなd33が得られることがわかった。
Looking at d33 based on Δa / a ave , Δa
In a material system where / a ave is relatively large at 0.029,
It was found that a practical piezoelectric material could not be obtained, and a large d33 could be obtained with a material system having a material less than 0.029.

【0019】[0019]

【表2】 [Table 2]

【0020】次に第2の発明を表2を用いて説明する。
表2に示す材料も上述した手順で作製した。いずれもX
線回折によりビスマス層状化合物であることを確認でき
た。表中のFは強誘電体であることを示し、NFは非強
誘電体であることを示す。試材b−1〜b−4の比較か
ら、強誘電体と非強誘電体との組み合わせで比較的大き
なd33が得られることがわかった。また、表2のSr
Bi2Ta29−SrBi2Nb29 のd33は80p
C/Nと特に大きく、実用的な特性が得られることがわ
かった。
Next, the second invention will be described with reference to Table 2.
The materials shown in Table 2 were also manufactured by the above-described procedure. Both are X
It was confirmed by a line diffraction that the compound was a bismuth layered compound. F in the table indicates a ferroelectric, and NF indicates a non-ferroelectric. From the comparison of the test materials b-1 to b-4, it was found that a relatively large d33 was obtained by the combination of the ferroelectric and the non-ferroelectric. In addition, Sr in Table 2
D33 of Bi 2 Ta 2 O 9 -SrBi 2 Nb 2 O 9 is 80p
It was found that C / N was particularly large and practical characteristics were obtained.

【0021】ところで、圧電素子の用途は、上述したよ
うにアクチュエータ,振動子,圧力センサ,フィルタ,
トランス等、広範な分野に及び、近年、高温で使用でき
る素子が強く望まれている。
As described above, piezoelectric elements are used for actuators, vibrators, pressure sensors, filters,
In a wide range of fields, such as transformers, in recent years, devices that can be used at high temperatures have been strongly desired.

【0022】一般に、高温で圧電素子を使用すると、熱
エネルギーによって、脱分極を起こす。そのため通常
は、キュリー温度(摂氏表現)の1/2程度を使用上限
とする。SrBi2Ta29−SrBi2Nb29の場
合、キュリー温度が370℃であることから、脱分極の
ため圧電素子の使用が容易ではなかった180℃付近の
高温においても使用できる。
Generally, when a piezoelectric element is used at a high temperature, depolarization is caused by thermal energy. Therefore, normally, about 1/2 of the Curie temperature (expressed in Celsius) is set as the upper limit of use. In the case of SrBi 2 Ta 2 O 9 -SrBi 2 Nb 2 O 9 , since the Curie temperature is 370 ° C., it can be used even at a high temperature of around 180 ° C. where the use of the piezoelectric element was not easy due to depolarization.

【0023】また、SrBi2Ta29−SrBi2Nb
29複合化合物は、圧電定数d33が大きいことから、
性能的にはアクチュエータとしても使用可能である。一
般に、アクチュエータ用の圧電材料は、高強度であるこ
とも必要である。この観点から、SrBi2Ta29
SrBi2Nb29材料の抵抗強度を測定すると、60
〜80Mpaであり、通常のPZTの1.5 倍から2倍
であった。一般的に、ビスマス層状化合物は高強度のも
のが多く、これは、ミクロな柱状の結晶が互いに絡まっ
た構造をしていることに起因すると考えられる。
Also, SrBi 2 Ta 2 O 9 -SrBi 2 Nb
Since the 2O 9 composite compound has a large piezoelectric constant d33,
In terms of performance, it can also be used as an actuator. Generally, a piezoelectric material for an actuator also needs to have high strength. From this viewpoint, SrBi 2 Ta 2 O 9
When the resistance strength of the SrBi 2 Nb 2 O 9 material was measured, it was 60
8080 Mpa, which is 1.5 to 2 times that of normal PZT. In general, bismuth layered compounds often have a high strength, which is considered to be due to a structure in which micro columnar crystals are entangled with each other.

【0024】図1はSrBi2Ta29−SrBi2Nb
29材料のSrBi2Ta29のmol分率とd33との関
係を示した図である。SrBi2Ta29のmol分率が3
0mol% 付近をピークとして、10mol%以上40mol%
以下でd33が大きくなることを見出した。
FIG. 1 shows SrBi 2 Ta 2 O 9 -SrBi 2 Nb
FIG. 3 is a view showing the relationship between the mole fraction of SrBi 2 Ta 2 O 9 of 2 O 9 material and d33. The mole fraction of SrBi 2 Ta 2 O 9 is 3
10 mol% or more and 40 mol% with the peak around 0 mol%
In the following, it was found that d33 increased.

【0025】[0025]

【発明の効果】本発明によれば、鉛を含有せず、実用的
な圧電特性を有し、材料強度的にも優れた圧電磁器組成
物を創製できる。従って、本発明を用いれば、環境的に
問題がなく、広範な用途で使用できる圧電素子を得るこ
とができる。
According to the present invention, a piezoelectric ceramic composition containing no lead, having practical piezoelectric characteristics, and excellent material strength can be created. Therefore, according to the present invention, it is possible to obtain a piezoelectric element which has no environmental problems and can be used in a wide range of applications.

【図面の簡単な説明】[Brief description of the drawings]

【図1】図1はSrBi2Ta29−SrBi2Nb29
のSrBi2Ta29のmol分率と圧電定数との関係を示
す特性図である。
FIG. 1 shows SrBi 2 Ta 2 O 9 -SrBi 2 Nb 2 O 9
FIG. 3 is a characteristic diagram showing a relationship between a mole fraction of SrBi 2 Ta 2 O 9 and a piezoelectric constant of the present invention.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 塩野 修 茨城県日立市大みか町七丁目1番1号 株 式会社日立製作所日立研究所内 (72)発明者 宮田 素之 茨城県日立市大みか町七丁目1番1号 株 式会社日立製作所日立研究所内 (72)発明者 綿引 誠次 茨城県日立市大みか町七丁目1番1号 株 式会社日立製作所日立研究所内 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Osamu Shiono 7-1-1, Omikacho, Hitachi City, Ibaraki Prefecture Within Hitachi Research Laboratory, Hitachi, Ltd. (72) Inventor Motoyuki Miyata 7, Omikamachi, Hitachi City, Ibaraki Prefecture No. 1-1, Hitachi Research Laboratory, Hitachi, Ltd.

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】鉛を含まない複数種のビスマス層状化合物
により構成された複合化合物において、複合化合物の基
になる単体化合物(ビスマス層状化合物)の格子定数の
差を単体化合物の格子定数の平均値で除した値が、0.
029 よりも小であることを特徴とする圧電磁器組成
物。
1. In a composite compound composed of a plurality of types of bismuth layered compounds not containing lead, the difference between the lattice constants of the simple compounds (bismuth layered compounds) that form the basis of the composite compound is calculated as the average value of the lattice constants of the single compounds. The value divided by
A piezoelectric ceramic composition having a size smaller than 029.
【請求項2】鉛を含まない複数種のビスマス層状化合物
により構成された複合化合物において、複合化合物の基
になる単体化合物(ビスマス層状化合物)が強誘電体と
強誘電体でないものの組み合わせであるわせであること
を特徴とする圧電磁器組成物。
2. A composite compound comprising a plurality of types of bismuth layered compounds not containing lead, wherein a simple compound (bismuth layered compound) serving as a base of the composite compound is a combination of a ferroelectric substance and a non-ferroelectric substance. A piezoelectric ceramic composition characterized by the following.
【請求項3】上記請求項1および請求項2において、単
体化合物としてSrBi2Ta29およびSrBi2Nb
29 を用いることを特徴とする圧電磁器組成物。
3. The method according to claim 1, wherein the single compounds are SrBi 2 Ta 2 O 9 and SrBi 2 Nb.
A piezoelectric ceramic composition using 2 O 9 .
【請求項4】請求項3において、SrBi2Ta29
含有量が10mol%以上40mol% 以下であることを特
徴とする電圧磁器組成物。
4. The voltage ceramic composition according to claim 3, wherein the content of SrBi 2 Ta 2 O 9 is 10 mol% or more and 40 mol% or less.
JP9265468A 1997-09-30 1997-09-30 Piezoelectric ceramic composition Pending JPH11100265A (en)

Priority Applications (1)

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JP9265468A JPH11100265A (en) 1997-09-30 1997-09-30 Piezoelectric ceramic composition

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Application Number Priority Date Filing Date Title
JP9265468A JPH11100265A (en) 1997-09-30 1997-09-30 Piezoelectric ceramic composition

Publications (1)

Publication Number Publication Date
JPH11100265A true JPH11100265A (en) 1999-04-13

Family

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Country Status (1)

Country Link
JP (1) JPH11100265A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
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KR20000057811A (en) * 1999-02-08 2000-09-25 무라타 야스타카 Piezoelectric ceramic composition and piezoelectric ceramic device using the same
KR100397136B1 (en) * 1999-09-22 2003-09-06 가부시키가이샤 무라타 세이사쿠쇼 Piezoelectric device
KR100661234B1 (en) * 1999-08-26 2006-12-22 가부시키가이샤 무라타 세이사쿠쇼 Piezoelectric ceramic composition and Piezoelectric ceramic device using the same
JP2011213538A (en) * 2010-03-31 2011-10-27 Tdk Corp Piezoelectric composition, piezoelectric ceramic, vibrator, and ultrasonic motor
CN109320204A (en) * 2018-11-09 2019-02-12 天元羲王控股有限公司 A kind of graphene modified ceramic brick and preparation method thereof
CN111807838A (en) * 2020-07-18 2020-10-23 长沙麓桥科技有限公司 Na0.25K0.25Bi2.5Nb2O9Method for preparing ceramic and product thereof

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000057811A (en) * 1999-02-08 2000-09-25 무라타 야스타카 Piezoelectric ceramic composition and piezoelectric ceramic device using the same
KR100661234B1 (en) * 1999-08-26 2006-12-22 가부시키가이샤 무라타 세이사쿠쇼 Piezoelectric ceramic composition and Piezoelectric ceramic device using the same
KR100397136B1 (en) * 1999-09-22 2003-09-06 가부시키가이샤 무라타 세이사쿠쇼 Piezoelectric device
JP2011213538A (en) * 2010-03-31 2011-10-27 Tdk Corp Piezoelectric composition, piezoelectric ceramic, vibrator, and ultrasonic motor
CN109320204A (en) * 2018-11-09 2019-02-12 天元羲王控股有限公司 A kind of graphene modified ceramic brick and preparation method thereof
CN111807838A (en) * 2020-07-18 2020-10-23 长沙麓桥科技有限公司 Na0.25K0.25Bi2.5Nb2O9Method for preparing ceramic and product thereof
CN111807838B (en) * 2020-07-18 2023-05-02 怀仁市鸿达瓷业有限公司 Na (Na) 0.25 K 0.25 Bi 2.5 Nb 2 O 9 Ceramic preparation method and product thereof

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