JP2002205272A - Super abrasive grain tool and its manufacturing method - Google Patents
Super abrasive grain tool and its manufacturing methodInfo
- Publication number
- JP2002205272A JP2002205272A JP2001001224A JP2001001224A JP2002205272A JP 2002205272 A JP2002205272 A JP 2002205272A JP 2001001224 A JP2001001224 A JP 2001001224A JP 2001001224 A JP2001001224 A JP 2001001224A JP 2002205272 A JP2002205272 A JP 2002205272A
- Authority
- JP
- Japan
- Prior art keywords
- brazing
- superabrasive
- layer
- grains
- super abrasive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、超砥粒工具及びそ
の製造方法に関する。さらに詳しくは、本発明は、超砥
粒が強力に保持され、しかも超砥粒に割れや欠けが発生
しにくい超砥粒工具及びその製造方法に関する。[0001] The present invention relates to a superabrasive tool and a method for producing the same. More specifically, the present invention relates to a superabrasive tool in which superabrasive grains are strongly held, and in which cracks and chips are less likely to occur in the superabrasive grains, and a method of manufacturing the same.
【０００２】[0002]
【従来の技術】超砥粒工具における超砥粒の固定方法と
して、レジンボンド、ビトリファイドボンド、メタルボ
ンド、電着などが行われている。レジンボンドは、切れ
味は良好であるが、耐久性が低い。ビトリファイドボン
ドは、切れ味がよく、耐摩耗性も良好であるが、脆く欠
けやすい。メタルボンドは、砥粒保持力と耐摩耗性に優
れている。Ｃｕ−Ａｇ−Ｔｉ系ロウ材やＮｉ−Ｃｒ系ロ
ウ材などを用いで超砥粒を固定すると、超砥粒表面とロ
ウ材とが化学的に結合し、強い保持力が得られる。しか
し、超砥粒とロウ材との熱膨張率の差から、ロウ付け後
に超砥粒に内部応力が発生し、砥粒が割れたり、欠けや
すくなると言う問題がある。この傾向は、超砥粒の埋め
込み量を増やすほど顕著になる。電着は、形状の自由度
が大きく、切れ味も良好であり、幅広く使用されている
が、超砥粒とメッキとの間に化学的な反応はなく、機械
的な保持のみである。2. Description of the Related Art As a method of fixing superabrasive grains in a superabrasive tool, a resin bond, a vitrified bond, a metal bond, an electrodeposition, and the like are performed. Resin bond has good sharpness but low durability. Vitrified bonds have good sharpness and good abrasion resistance, but are brittle and easily chipped. Metal bond is excellent in abrasive holding power and wear resistance. When the superabrasive grains are fixed using a Cu-Ag-Ti brazing filler metal or a Ni-Cr brazing filler metal, the surface of the superabrasive grains is chemically bonded to the brazing filler metal, and a strong holding force is obtained. However, due to the difference in the coefficient of thermal expansion between the superabrasive grains and the brazing material, there is a problem that internal stress is generated in the superabrasive grains after brazing, and the abrasive grains are likely to crack or chip. This tendency becomes remarkable as the amount of embedded superabrasive grains increases. Electrodeposition has a large degree of freedom in shape, good sharpness, and is widely used, but there is no chemical reaction between superabrasive grains and plating, and only mechanical retention.
【０００３】[0003]
【発明が解決しようとする課題】本発明は、超砥粒が強
力に保持され、しかも超砥粒に割れや欠けが発生しにく
い超砥粒工具及びその製造方法を提供することを目的と
してなされたものである。SUMMARY OF THE INVENTION An object of the present invention is to provide a superabrasive tool in which superabrasive grains are strongly held, and in which the superabrasive grains are less likely to crack or chip, and a method of manufacturing the same. It is a thing.
【０００４】[0004]
【課題を解決するための手段】本発明者らは、上記の課
題を解決すべく鋭意研究を重ねた結果、台金上に超砥粒
をロウ付けにより固定したのち、さらに超砥粒をメッキ
で埋め込むことにより、超砥粒が強力に保持され、しか
も超砥粒に割れや欠けの発生しにくい超砥粒工具が得ら
れることを見いだし、この知見に基づいて本発明を完成
するに至った。すなわち、本発明は、（１）台金の作用
面に超砥粒を単層に固定した超砥粒工具であって、超砥
粒を固定する層が、台金の作用面に接するロウ付け層及
びロウ付け層を覆うメッキ層の２層からなることを特徴
とする超砥粒工具、及び、（２）台金の作用面に超砥粒
をロウ付けにより固定したのち、メッキにより超砥粒を
埋め込むことを特徴とする超砥粒工具の製造方法、を提
供するものである。さらに、本発明の好ましい態様とし
て、（３）超砥粒工具が、ＣＭＰコンディショナである
第１項記載の超砥粒工具、（４）ロウ材が、Ｃｕ−Ａｇ
−Ｔｉ系ロウ材又はＮｉ−Ｃｒ系ロウ材である第１項記
載の超砥粒工具、（５）ロウ付け層の厚みが、超砥粒の
平均粒径の５〜５０％である第１項記載の超砥粒工具、
（６）メッキが、Ｎｉメッキである第１項記載の超砥粒
工具、（７）ロウ付け層とメッキ層の合計の厚みが、超
砥粒の平均粒径の４０〜９０％である第１項記載の超砥
粒工具、及び、（８）ロウ付け層の厚みとメッキ層の厚
みの比が、０.７〜１.５である第１項記載の超砥粒工
具、を挙げることができる。Means for Solving the Problems The inventors of the present invention have conducted intensive studies to solve the above-mentioned problems, and as a result, after fixing superabrasive grains on a base metal by brazing, further plating the superabrasive grains. By embedding with, it has been found that a super-abrasive grain is strongly retained, and that a super-abrasive grain tool in which cracking and chipping hardly occurs can be obtained, and based on this finding, the present invention has been completed. . That is, the present invention provides (1) a superabrasive tool in which superabrasive grains are fixed in a single layer on a working surface of a base metal, wherein the layer for fixing the superabrasive grains is in contact with the working surface of the base metal. A superabrasive tool characterized by comprising two layers of a layer and a plating layer covering a brazing layer, and (2) superabrasive grains fixed to the working surface of a base metal by brazing, and then superabrasive by plating. A method for producing a superabrasive tool characterized by embedding grains. Furthermore, as a preferable aspect of the present invention, (3) the superabrasive tool according to item 1, wherein the superabrasive tool is a CMP conditioner, and (4) the brazing material is Cu-Ag.
The super-abrasive tool according to claim 1, which is a Ti-based brazing material or a Ni-Cr-based brazing material, (5) a first brazing layer in which the thickness of the brazing layer is 5 to 50% of the average grain size of the superabrasives. Super abrasive grain tool described in the paragraph
(6) The superabrasive tool according to (1), wherein the plating is Ni plating. (7) The superabrasive tool having a total thickness of the brazing layer and the plating layer of 40 to 90% of the average grain size of the superabrasive. 2. The superabrasive tool according to item 1, and (8) the superabrasive tool according to item 1, wherein the ratio of the thickness of the brazing layer to the thickness of the plating layer is 0.7 to 1.5. Can be.
【０００５】[0005]
【発明の実施の形態】本発明の超砥粒工具は、台金の作
用面に超砥粒を単層に固定した超砥粒工具であって、超
砥粒を固定する層が、台金の作用面に接するロウ付け層
及びロウ付け層を覆うメッキ層の２層からなる超砥粒工
具である。本発明の超砥粒工具の製造方法においては、
台金の作用面に超砥粒をロウ付けにより固定したのち、
メッキにより超砥粒を埋め込む。本発明の超砥粒工具の
形態に特に制限はなく、例えば、ＪＩＳ Ｂ ４１３１に
規定される各種の形状のホイールをはじめとして、ホー
ニングストーン、ギヤドレッサ、ロータリドレッサ、リ
ーマ、エンドミル、バイト、ドリル、バンドソー、ＩＤ
ブレード、ソーブレード、ワイヤソー、ドラムホイー
ル、コアドリルなどを挙げることができる。本発明の超
砥粒工具は、ＣＭＰコンディショナ及び眼鏡芯取りホイ
ールとして特に好適に用いることができる。本発明に用
いる超砥粒としては、ダイヤモンド砥粒及び立方晶窒化
ホウ素（ｃＢＮ）砥粒を挙げることができる。本発明に
用いる超砥粒の粒度に特に制限はないが、＃３５〜＃４
００の超砥粒を好適に用いることができる。BEST MODE FOR CARRYING OUT THE INVENTION A superabrasive tool according to the present invention is a superabrasive tool in which superabrasive grains are fixed in a single layer on the working surface of a base metal, wherein the layer for fixing the superabrasive grains is a base metal. This is a superabrasive tool consisting of two layers, a brazing layer in contact with the working surface of (1) and a plating layer covering the brazing layer. In the method for producing a superabrasive tool of the present invention,
After fixing the superabrasive grains to the working surface of the base metal by brazing,
Super abrasive grains are embedded by plating. There is no particular limitation on the form of the superabrasive tool of the present invention. , ID
Examples include a blade, a saw blade, a wire saw, a drum wheel, a core drill, and the like. The superabrasive tool of the present invention can be particularly suitably used as a CMP conditioner and an eyeglass centering wheel. Examples of the super abrasive used in the present invention include diamond abrasive and cubic boron nitride (cBN) abrasive. The particle size of the superabrasive used in the present invention is not particularly limited.
00 superabrasives can be suitably used.
【０００６】本発明に用いるロウ材に特に制限はなく、
例えば、ＪＩＳに規定される銀ロウ、銅及び銅合金ロ
ウ、アルミニウム合金ロウ、りん銅ロウ、ニッケルロ
ウ、金ロウ、パラジウムロウ、真空用貴金属ロウなど
や、Ａｕ−Ｐｄ−Ｎｉ系ロウ材、Ａｕ−Ｃｕ−Ｎｉ系ロ
ウ材、Ａｕ−Ｎｉ系ロウ材、Ａｇ−Ｃｕ−Ｐｄ系ロウ
材、Ｃｕ−Ｍｎ−Ｎｉ系ロウ材、Ａｇ−Ｃｕ−Ｎｉ系ロ
ウ材、Ｃｕ−Ａｇ−Ｔｉ系ロウ材、Ａｇ−Ｃｕ−Ｎｉ−
Ｓｎ系ロウ材、Ａｇ−Ｃｕ系ロウ材、Ａｇ−Ｃｕ−Ｓｎ
系ロウ材、Ｎｉ−Ｃｒ系ロウ材などを挙げることができ
る。これらの中で、Ｃｕ−Ａｇ−Ｔｉ系ロウ材及びＮｉ
−Ｃｒ系ロウ材は、ダイヤモンド砥粒及びｃＢＮ砥粒と
の濡れが良好であり、特に好適に用いることができる。
本発明方法において、ロウ付け方法に特に制限はない
が、不活性ガス雰囲気中又は真空において、好適にロウ
付けすることができる。本発明において、ロウ付け層の
厚みが、超砥粒の平均粒径の５〜５０％であることが好
ましく、１０〜４５％であることがより好ましく、１５
〜４０％であることがさらに好ましい。ロウ付け層の厚
みが超砥粒の平均粒径の５％未満であると、超砥粒を保
持する力が不足するおそれがある。ロウ付け層の厚みが
超砥粒の平均粒径の５０％を超えると、超砥粒に割れや
欠けが発生しやすくなるおそれがある。There is no particular limitation on the brazing material used in the present invention.
For example, silver brazing, copper and copper alloy brazing, aluminum alloy brazing, phosphor brass brazing, nickel brazing, gold brazing, palladium brazing, precious metal brazing for vacuum, Au-Pd-Ni brazing material, Au -Cu-Ni-based brazing material, Au-Ni-based brazing material, Ag-Cu-Pd-based brazing material, Cu-Mn-Ni-based brazing material, Ag-Cu-Ni-based brazing material, Cu-Ag-Ti-based brazing material , Ag-Cu-Ni-
Sn-based brazing material, Ag-Cu-based brazing material, Ag-Cu-Sn
Series brazing material, Ni-Cr series brazing material, and the like. Among them, Cu-Ag-Ti brazing filler metal and Ni
-Cr-based brazing material has good wettability with diamond abrasive grains and cBN abrasive grains, and can be particularly preferably used.
In the method of the present invention, the brazing method is not particularly limited, but the brazing can be suitably performed in an inert gas atmosphere or in a vacuum. In the present invention, the thickness of the brazing layer is preferably 5 to 50% of the average particle size of the superabrasive grains, more preferably 10 to 45%, and more preferably 15 to 45%.
More preferably, it is ４０40%. If the thickness of the brazing layer is less than 5% of the average particle size of the superabrasive grains, there is a possibility that the force for holding the superabrasive grains may be insufficient. If the thickness of the brazing layer exceeds 50% of the average particle size of the superabrasive grains, the superabrasive grains may be easily cracked or chipped.
【０００７】本発明において、メッキ層を形成する金属
に特に制限はなく、例えば、Ｎｉ、Ｃｒ、Ｃｕなどを挙
げることができる。これらの中で、Ｎｉを特に好適に用
いることができる。メッキの方法は特に制限なく、電気
メッキ、無電解メッキなど公知の方法が使用できる。本
発明において、ロウ付け層とメッキ層の合計の厚みが、
超砥粒の平均粒径の１５〜９０％であることが好まし
く、３０〜８０％であることがより好ましく、４０〜７
０％であることがさらに好ましい。ロウ付け層とメッキ
層の合計の厚みが超砥粒の平均粒径の１５％未満である
と、超砥粒を保持する力が不足するおそれがある。ロウ
付け層とメッキ層の合計の厚みが超砥粒の平均粒径の９
０％を超えると、超砥粒の突き出し量が不足して切れ味
が低下するおそれがある。図１は、本発明の超砥粒工具
の一態様の模式的説明図である。本態様の超砥粒工具
は、台金１の作用面に超砥粒２が単層に固定され、超砥
粒を固定する層が、台金の作用面に接するロウ付け層３
と、ロウ付け層を覆うメッキ層４の２層により形成され
ている。In the present invention, the metal forming the plating layer is not particularly limited, and examples thereof include Ni, Cr, and Cu. Among them, Ni can be particularly preferably used. The plating method is not particularly limited, and known methods such as electroplating and electroless plating can be used. In the present invention, the total thickness of the brazing layer and the plating layer,
It is preferably 15 to 90%, more preferably 30 to 80%, and more preferably 40 to 7% of the average particle size of the superabrasive grains.
More preferably, it is 0%. If the total thickness of the brazing layer and the plating layer is less than 15% of the average grain size of the superabrasive grains, the force for holding the superabrasive grains may be insufficient. The total thickness of the brazing layer and the plating layer is 9 times the average grain size of the superabrasive grains.
If it exceeds 0%, there is a possibility that the protruding amount of the superabrasive grains is insufficient and the sharpness is reduced. FIG. 1 is a schematic explanatory view of one embodiment of the superabrasive tool of the present invention. In the superabrasive tool of this embodiment, the superabrasive grains 2 are fixed to a single layer on the working surface of the base metal 1, and the layer for fixing the superabrasive grains is a brazing layer 3 in contact with the working surface of the base metal.
And a plating layer 4 covering the brazing layer.
【０００８】本発明の超砥粒工具をＣＭＰコンディショ
ナとして用いる場合は、メッキ層を形成したのちに、作
用面にさらにコーティングを施すことができる。使用す
るコーティング材料に特に制限はなく、例えば、アクリ
ル樹脂、テフロン（登録商標）などの合成樹脂、Ｔｉ
Ｃ、ＴｉＮ、ＴｉＡｌＮなどのセラミック、セラミック
と金属の複合材料であるサーメット、ＣＶＤダイヤモン
ド、ダイヤモンド状炭素（ＤＬＣ）、メタルＤＬＣなど
を挙げることができる。作用面にコーティングを施すこ
とにより、切り粉の付着を防止し排出を促進し、研削抵
抗を下げ、また、ＣＭＰコンディショナの場合はメッキ
やロウ材の溶出を防止することができる。本発明の超砥
粒工具は、従来よりロウ付け法や電着法により製造され
た超砥粒工具が適用されている分野で、特に制限なく使
用することができるが、ＣＭＰコンディショナ及び眼鏡
芯取りホイールとして特に好適に用いることができる。
ＣＭＰコンディショナは、超砥粒の脱落が絶対に許され
ないので、超砥粒がロウ付け層により台金に強力に保持
され、かつメッキ層により保護されて割れや欠けの発生
しにくい本発明の超砥粒工具が適している。When the superabrasive tool of the present invention is used as a CMP conditioner, after forming a plating layer, the working surface can be further coated. There is no particular limitation on the coating material used. For example, acrylic resin, synthetic resin such as Teflon (registered trademark), Ti
Examples thereof include ceramics such as C, TiN, and TiAlN, cermets as a composite material of ceramic and metal, CVD diamond, diamond-like carbon (DLC), and metal DLC. By applying a coating to the working surface, it is possible to prevent chips from adhering and promote discharge, reduce grinding resistance, and in the case of a CMP conditioner, prevent plating and brazing material from eluting. The superabrasive tool of the present invention can be used without particular limitation in a field to which a superabrasive tool manufactured by a brazing method or an electrodeposition method has been conventionally applied. It can be used particularly suitably as a take-off wheel.
In the CMP conditioner, since the super-abrasive grains are never allowed to fall off, the super-abrasive grains are strongly held on the base metal by the brazing layer, and are protected by the plating layer to prevent cracking and chipping. Super abrasive tools are suitable.
【０００９】[0009]
【実施例】以下に、実施例を挙げて本発明をさらに詳細
に説明するが、本発明はこれらの実施例によりなんら限
定されるものではない。 実施例１ ＪＩＳ Ｈ ２１０４に規定されるニッケル地金１種を用
いて、寸法１００Ｄ−４Ｔの台金を作製した。格子線間
隔０.５mmの正方格子の交点に直径２５０μｍの穴をあ
けたマスキングテープを台金の作用面に貼付し、マスキ
ングテープの穴に粒度＃１００のダイヤモンド砥粒を各
１個ずつ載置し、台金の作用面に接着剤［セメダイン
(株)、工業用セメダイン］を用いて仮固定した。マスキ
ングテープを除去したのち、Ｎｉ−Ｃｒ系ロウ材粉末を
ダイヤモンド砥粒の間に充填し、真空炉中に１,０５０
℃で２０分保持して、ダイヤモンド砥粒を固定した。こ
のとき、ロウ材の埋め込み量は、ダイヤモンド砥粒の平
均粒径の３５％とした。この後、さらにニッケルメッキ
により平均粒径の７０％まで埋め込んで、ＣＭＰコンデ
ィショナを完成した。このＣＭＰコンディショナを用い
てパッドをコンディショニングしたのち、酸化膜付きシ
リコンウェーハのＣＭＰ加工を行った。加工後のシリコ
ンウェーハは、平坦度が良好であり、スクラッチも見ら
れなかった。また、光学顕微鏡で個々のダイヤモンド砥
粒を観察したところ、砥粒の脱落や、割れなどは認めら
れなかった。 実施例２ 寸法１００Ｄ−２０Ｔ−２０Ｈの眼鏡レンズ芯取り用ダ
イヤモンドホイールを作製した。ＳＵＳ３０４製のホイ
ール台金の作用面に、ホイール回転方向のピッチ２.０m
m、ホイール厚み方向のピッチ０.９mmの長方格子の交点
に、粒度＃８０のダイヤモンド砥粒を接着剤［セメダイ
ン(株)、工業用セメダイン］を用いて仮固定した。仮固
定したダイヤモンド砥粒の間にＣｕ−Ａｇ−Ｔｉ系ロウ
材粉末を充填し、外周から三つ割の黒鉛製外型で固定
し、真空炉中に１,０５０℃で１５分保持して、ダイヤ
モンド砥粒を固定した。このとき、ロウ材の埋め込み量
は、ダイヤモンド砥粒の平均粒径の３０％とした。この
後、さらにニッケルメッキにより平均粒径の６０％まで
埋め込んだ。このホイールの砥粒面を光学顕微鏡で観察
したが、個々のダイヤモンド砥粒に脱落や割れなどは認
められなかった。EXAMPLES The present invention will be described in more detail with reference to the following Examples, which should not be construed as limiting the present invention. Example 1 A base metal having a size of 100D-4T was manufactured using one type of nickel metal specified in JIS H 2104. A masking tape having a hole of 250 μm in diameter at the intersection of a square lattice with a lattice line interval of 0.5 mm is attached to the working surface of the base metal, and one diamond abrasive of grain size # 100 is placed in each hole of the masking tape. And an adhesive [Cemedine]
Co., Ltd., industrial mededine]. After removing the masking tape, Ni-Cr brazing material powder was filled between the diamond abrasive grains and placed in a vacuum furnace at 1,050.
C. for 20 minutes to fix the diamond abrasive grains. At this time, the embedding amount of the brazing material was 35% of the average particle diameter of the diamond abrasive grains. After that, it was further buried by nickel plating to 70% of the average particle size to complete the CMP conditioner. After conditioning the pad using this CMP conditioner, the silicon wafer with the oxide film was subjected to CMP processing. The processed silicon wafer had good flatness and no scratch was observed. Further, when individual diamond abrasive grains were observed with an optical microscope, no dropping or cracking of the abrasive grains was observed. Example 2 A spectacle lens centering diamond wheel having dimensions of 100D-20T-20H was produced. The pitch of the wheel rotation direction is 2.0m on the working surface of the SUS304 wheel base.
m, diamond abrasive grains having a grain size of # 80 were temporarily fixed at the intersections of a rectangular lattice having a pitch of 0.9 mm in the wheel thickness direction using an adhesive [Cemedine Co., Ltd., industrial Cemedine]. The Cu-Ag-Ti-based brazing filler metal powder is filled between the temporarily fixed diamond abrasive grains, fixed with a 30% graphite outer die from the outer periphery, and held in a vacuum furnace at 1,050 ° C. for 15 minutes. The diamond abrasive grains were fixed. At this time, the embedding amount of the brazing material was 30% of the average particle diameter of the diamond abrasive grains. After that, it was further embedded by nickel plating up to 60% of the average particle size. Observation of the abrasive grain surface of this wheel with an optical microscope showed that no individual diamond abrasive grains were dropped or cracked.
【００１０】[0010]
【発明の効果】本発明の超砥粒工具は、超砥粒が台金に
強力に保持され、しかも超砥粒に割れや欠けが発生しに
くい。本発明方法によれば、このような超砥粒工具を容
易に製造することができる。According to the superabrasive tool of the present invention, the superabrasive is strongly held by the base metal, and the superabrasive is less likely to crack or chip. According to the method of the present invention, such a superabrasive tool can be easily manufactured.
【図１】図１は、本発明の超砥粒工具の一態様の模式的
説明図である。FIG. 1 is a schematic explanatory view of one embodiment of a superabrasive tool of the present invention.
１ 台金 ２ 超砥粒 ３ ロウ付け層 ４ メッキ層 1 Base metal 2 Super abrasive 3 Brazing layer 4 Plating layer
Claims (2)
砥粒工具であって、超砥粒を固定する層が、台金の作用
面に接するロウ付け層及びロウ付け層を覆うメッキ層の
２層からなることを特徴とする超砥粒工具。1. A superabrasive tool in which superabrasive grains are fixed in a single layer on a working surface of a base metal, wherein a layer for fixing the superabrasive grains is a brazing layer and a brazing in contact with the working surface of the base metal. A superabrasive tool comprising two layers of plating layers covering the layers.
定したのち、メッキにより超砥粒を埋め込むことを特徴
とする超砥粒工具の製造方法。2. A method for manufacturing a superabrasive tool, comprising: after superabrasives are fixed to a working surface of a base metal by brazing, and then embedding the superabrasives by plating.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001001224A JP2002205272A (en) | 2001-01-09 | 2001-01-09 | Super abrasive grain tool and its manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001001224A JP2002205272A (en) | 2001-01-09 | 2001-01-09 | Super abrasive grain tool and its manufacturing method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2002205272A true JP2002205272A (en) | 2002-07-23 |
Family
ID=18869880
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001001224A Pending JP2002205272A (en) | 2001-01-09 | 2001-01-09 | Super abrasive grain tool and its manufacturing method |
Country Status (1)
| Country | Link |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006116692A (en) * | 2004-09-22 | 2006-05-11 | Mitsubishi Materials Corp | Cmp conditioner |
| JP2007167997A (en) * | 2005-12-20 | 2007-07-05 | Toyoda Van Moppes Ltd | Truing tool |
| JP2007537890A (en) * | 2004-05-18 | 2007-12-27 | サンーゴバン アブレイシブズ，インコーポレイティド | Brazed diamond dressing tool |
| WO2011055692A1 (en) | 2009-11-05 | 2011-05-12 | 株式会社中村超硬 | Super-abrasive grain fixed type wire saw, and method of manufacturing super-abrasive grain fixed type wire saw |
| JP2012081525A (en) * | 2010-10-06 | 2012-04-26 | Nakamura Choko:Kk | Super-abrasive grain fixed type wire saw |
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| US9862041B2 (en) | 2009-08-14 | 2018-01-09 | Saint-Gobain Abrasives, Inc. | Abrasive articles including abrasive particles bonded to an elongated body |
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| US9248583B2 (en) | 2010-12-30 | 2016-02-02 | Saint-Gobain Abrasives, Inc. | Abrasive article and method of forming |
| US9375826B2 (en) | 2011-09-16 | 2016-06-28 | Saint-Gobain Abrasives, Inc. | Abrasive article and method of forming |
| US9211634B2 (en) | 2011-09-29 | 2015-12-15 | Saint-Gobain Abrasives, Inc. | Abrasive articles including abrasive particles bonded to an elongated substrate body having a barrier layer, and methods of forming thereof |
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| US9409243B2 (en) | 2013-04-19 | 2016-08-09 | Saint-Gobain Abrasives, Inc. | Abrasive article and method of forming |
| US20210008669A1 (en) * | 2014-07-02 | 2021-01-14 | Raytheon Technologies Corporation | Abrasive Preforms and Manufacture and Use Methods |
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| JP2016078130A (en) * | 2014-10-10 | 2016-05-16 | 株式会社アイゼン | Conditioner for pad and its manufacturing method |
| US9878382B2 (en) | 2015-06-29 | 2018-01-30 | Saint-Gobain Abrasives, Inc. | Abrasive article and method of forming |
| US10137514B2 (en) | 2015-06-29 | 2018-11-27 | Saint-Gobain Abrasives, Inc. | Abrasive article and method of forming |
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