JP2002180155A - Method for producing large and thick metal-ceramic composite material - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for producing a metal-ceramic composite material by which, even in the case of a large and thick composite material, an aluminum alloy can be infiltrated therein in a short time without forming an uninfiltrated part. SOLUTION: In the method for producing a large and thick metal-ceramic composite material, a large and thick preform consisting of ceramic powder is formed by a wet forming method, and a hole is made in the preform. A preform consisting of Mg powder-containing ceramic powder formed by a dry press is burried and integrated into the hole, and an Mg-containing aluminum alloy melted at 700 to 900 deg.C in a nitrogen atmosphere is infiltrated into the integrated preform under no pressure.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a metal-ceramic composite material, and more particularly to a method for producing a large-thick metal-ceramic composite material.

[0002]

2. Description of the Related Art Recently, metal-ceramic composite materials using a ceramic powder as a reinforcing material and aluminum or an aluminum alloy as a matrix have begun to be used in semiconductor manufacturing equipment and the like. Recently, the composite material has begun to be used for large and thick members such as a table of an exposure apparatus. To make this large, thick member,
Usually, it is produced by a casting method. However, this casting method has a problem that the content of the ceramic powder cannot be increased.

The solution to this problem is a non-pressurized metal infiltration method (Primex ^™ ) developed by Rankside Company, USA. In this method, an aluminum alloy containing Mg is brought into contact with a preform formed of ceramic powder such as SiC or Al ₂ O _3, and is brought into a furnace at 700 to 900 in a N ₂ atmosphere furnace.
This is a method of infiltrating a molten aluminum alloy by heating to a temperature of ° C. This method is characterized in that the wettability between the ceramic powder and the molten metal is improved by utilizing the chemical reaction of Mg, and the method can penetrate into the preform without performing mechanical pressing. Since the preform is unnecessary, the preform can be formed to have a large thickness, and if an aluminum alloy is permeated into the preform, a composite material having a large thickness can be produced.

[0004]

However, in this method, since a large-sized preform can be formed only by a wet molding method such as a sediment casting method, the penetration of the aluminum alloy is accelerated. However, there is a problem that the Mg powder cannot be included in the preform. Therefore, there is a problem that not only does the permeation time of the aluminum alloy become long, but also the non-permeated portion is generated in some cases because of its large size and thickness.

[0005] Here, an outline of the commonly used sediment casting method of the wet molding method is as follows. A binder, an antifoaming agent, etc. are added to ceramic powder, ion-exchanged water is further added thereto, and the compound is added. Are mixed in a pot mill or the like, and the obtained slurry is poured into a mold, and subjected to sedimentation molding by applying vibration or the like. This is a method in which the obtained molded body is frozen and demolded, and the demolded molded body is fired to form a preform.

SUMMARY OF THE INVENTION The present invention has been made in view of the problems of the above-described method for producing a metal-ceramic composite material, and has an object to solve the problem that even if the composite material has a large thickness, the aluminum alloy is not partially impregnated. It is an object of the present invention to provide a method for producing a metal-ceramic composite material that can be permeated in a short time without causing the occurrence of cracks.

[0007]

Means for Solving the Problems The inventors of the present invention have conducted intensive studies to achieve the above object, and as a result, a large-sized thick preform is first formed by a wet molding method, and the preform is formed on the preform.
With the knowledge that if a preform made of ceramic powder containing g powder is embedded and integrated, the aluminum alloy can be permeated in a short time without causing uninfiltrated portions in the integrated preform. The present invention has been completed.

That is, the present invention provides (1) forming a large and thick preform made of ceramic powder by a wet molding method, making a hole in the preform, and forming an Mg powder formed by a dry press in the hole. A preform made of ceramic powder containing embedded and integrated, and an aluminum alloy containing Mg melted at a temperature of 700 to 900 ° C. in a nitrogen atmosphere is injected into the integrated preform without pressure. The large-sized meat according to claim 1, wherein a method of manufacturing a thick metal-ceramic composite material (Claim 1) is provided, wherein (2) a filling rate of the ceramic powder of the preform is 30 to 80% by volume. The gist of the present invention is to provide a method for producing a thick metal-ceramic composite material (claim 2). This will be described in more detail below.

As described above, a large and thick preform is first formed by a wet molding method, and a preform formed of a ceramic powder containing Mg powder is embedded in the preform. As a nucleus, the molten aluminum alloy penetrates in a short time into the large and thick preform serving as the base without generating unimpregnated portions.

The filling rate of the ceramic powder of the preform is preferably 30 to 80% by volume, and preferably 30 to 80% by volume for both the preform as the base and the preform to be embedded.
If it is lower, high rigidity cannot be obtained, and the composite material may bend due to its large thickness. Conversely, if it is higher than 80% by volume, high rigidity is obtained, but not only the vibration damping property is deteriorated but also the toughness is increased. Also gets worse.

[0011]

BEST MODE FOR CARRYING OUT THE INVENTION The method for producing a composite material of the present invention will be described in more detail.
A ceramic powder such as Al ₂ O ₃ or AlN is prepared, and an Mg powder is further prepared. On the other hand, an aluminum alloy ingot containing Mg is also prepared as the aluminum alloy to be permeated.

The powder filling rate of the prepared ceramic powder is 30 to 30 by a wet molding method such as a sediment casting method.
A large thickness preform of 80% by volume is formed and holes are drilled. As a method of forming a hole, a preform having a hole may be formed in advance by using a mold having a hole in a mold into which a slurry is poured, or a hole may be formed by performing post-processing such as machining on the preform. Good.

The size of the hole to be buried, that is, the size of the preform to be buried may be about 1/4 in length and width with respect to the large-sized preform as the base, and the thickness is about 1/4. The thickness from the above to the penetration may be sufficient. If the size of the preform is too small, a non-permeated portion may be generated, and if it is too large, it is difficult to form the preform by a dry method.

Next, the previously prepared Mg powder is added to the ceramic powder and dry-mixed by a pot mill or the like, and the obtained mixed powder is dry-pressed to form a preform in which the powder filling ratio is 30 to 80% by volume. The amount of the Mg powder to be added depends on the content of Mg in the aluminum alloy to be infiltrated, but may be about 4% by mass based on the ceramic powder. The formed preform is embedded in a hole of the preform as a base and integrated.

An aluminum alloy ingot prepared previously is placed on the lower surface of the obtained integrated preform,
It is heat-treated at a temperature of 700 to 900 ° C. in a nitrogen atmosphere, and the molten aluminum alloy is infiltrated without pressure and cooled to produce a composite material. If necessary, the obtained composite material is ground or polished by machining to produce a product such as a table.

When a metal-ceramic composite material is manufactured by the above-described method, a large-sized and thick composite material can be manufactured in a short time without generating an unpermeated portion.

[0017]

EXAMPLES Hereinafter, the present invention will be described in more detail by giving specific examples of the present invention together with comparative examples.

(Example) (1) Production of large thickness metal-ceramic composite material Commercially available Si of # 180 (average particle size 66 μm) as a reinforcing material
Using 70 parts by mass of C powder and 30 parts by mass of commercially available SiC powder of # 500 (average particle size 25 μm), a colloidal silica liquid was added as a binder in an amount such that the silica solid content became 2 parts by weight, and a defoaming agent was added thereto. 0.2 parts by weight of Formaster VL (manufactured by Sannobuco) and 24 parts by weight of ion-exchanged water were added and mixed by a pot mill for 12 hours.

The obtained slurry was placed in the upper center at 200 × 2
800 × 800 × 10 that can form a hole of 00 × 30 mm
Pour it into a rubber mold from which a 0 mm molded body can be obtained.
After leaving still for 4 hours to precipitate the SiC powder and removing the finished solution with a cloth or the like, it was put into a freezer, frozen for 30 hours and demolded. The obtained molded body was fired at a temperature of 1000 ° C. to form a preform having a filling rate of SiC powder having holes of 70% by volume.

Separately, 3% by mass of Mg powder is added to the above-mentioned SiC powder, and acryl is added as a binder and mixed, and the mixture is filled in a mold for obtaining a molded body of 200 × 200 × 30 mm. Press forming at a pressure of 15 kg / cm ² , debinding at a temperature of 350 and SiC
A preform having a powder filling rate of 55% by volume was formed.
The preform was machined so that the surface of the preform and the inner surface of the hole of the previous preform were easily inserted, and then the preform was embedded in the hole and integrated.

An aluminum alloy ingot having an Al-12Si-3Mg composition was placed on the lower surface of the obtained integrated preform and heat-treated at a temperature of 825 ° C. in a nitrogen atmosphere. After non-pressurized infiltration, it was cooled to produce a large-thick composite material.

(2) Evaluation The obtained composite material was cut, and the permeation state of the aluminum alloy inside the composite material and the interface of the embedded preform were visually inspected. As a result, no non-penetrated part was recognized, and no abnormality was recognized at the interface. This indicates that a metal-ceramic composite material capable of infiltrating an aluminum alloy in a short time without generating a non-impregnated portion can be obtained even with a large-sized thick composite material.

(Comparative Example) For comparison, as a large-sized thick preform, a preform having no hole having the same size as that of the embodiment, that is, a preform made of ceramic powder containing Mg powder is not embedded. Except for using a preform, a composite material was prepared and evaluated in the same manner as in the example. As a result, even after infiltration for 36 hours, some unpermeated portions were found inside the composite material.

[0024]

As described above, according to the method for producing a metal-ceramic composite material of the present invention, even if the composite material has a large thickness, the aluminum alloy can be permeated in a short period of time without generating an unpermeated portion. Metal-ceramic composite materials that can be used. As a result, even a large and thick member having a corner of about 1 m and a thickness of about 10 cm, such as a table of an exposure apparatus, can be provided without any problem.

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Naomizu Odano 3-7 Meido, Izumi-ku, Sendai, Miyagi Prefecture Sendai Plant Co., Ltd. (72) Inventor Takeshi Higuchi 3-7 Meido, Izumi-ku, Sendai, Miyagi Selangx Sendai Factory F-term (reference) 4G030 AA37 AA47 AA61 GA23 4K020 AA22 AC01 BA05 BB22

Claims (2)

[Claims] 1. A preform made of a ceramic powder containing a Mg powder formed by wet forming a large and thick preform made of ceramic powder by a wet molding method, making a hole in the preform, and making a dry press in the hole. Large-thickness metal-ceramic composite characterized in that an aluminum alloy containing Mg melted at a temperature of 700 to 900 ° C. in a nitrogen atmosphere is penetrated into the integrated preform without pressure. Material manufacturing method. 2. The method for producing a large-thick metal-ceramic composite material according to claim 1, wherein the filling rate of the ceramic powder of the preform is 30 to 80% by volume.