JP2002194456A - Method for manufacturing large-size thick-walled ceramics/metal composite material - Google Patents
Method for manufacturing large-size thick-walled ceramics/metal composite materialInfo
- Publication number
- JP2002194456A JP2002194456A JP2000387720A JP2000387720A JP2002194456A JP 2002194456 A JP2002194456 A JP 2002194456A JP 2000387720 A JP2000387720 A JP 2000387720A JP 2000387720 A JP2000387720 A JP 2000387720A JP 2002194456 A JP2002194456 A JP 2002194456A
- Authority
- JP
- Japan
- Prior art keywords
- preform
- composite material
- powder
- aluminum alloy
- thick
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/52—Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Powder Metallurgy (AREA)
- Manufacture Of Alloys Or Alloy Compounds (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、金属−セラミック
ス複合材料の製造方法に関し、特に大型肉厚の金属−セ
ラミックス複合材料の製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a metal-ceramic composite material, and more particularly to a method for producing a large-thick metal-ceramic composite material.
【０００２】[0002]
【従来の技術】最近、半導体製造装置等にセラミックス
粉末を強化材とし、アルミニウムまたはアルミニウム合
金をマトリックスとする金属−セラミックス複合材料が
使われ始めている。そして、その複合材料が、最近では
露光装置のテーブルのような大型で肉厚の部材にも使わ
れ始めている。この大型で肉厚の部材を作製するには、
通常、鋳造法で作製されている。しかし、この鋳造法で
は、セラミックス粉末の含有率を高くできないという問
題があった。2. Description of the Related Art Recently, metal-ceramic composite materials using a ceramic powder as a reinforcing material and aluminum or an aluminum alloy as a matrix have begun to be used in semiconductor manufacturing equipment and the like. Recently, the composite material has begun to be used for large and thick members such as a table of an exposure apparatus. To make this large, thick member,
Usually, it is produced by a casting method. However, this casting method has a problem that the content of the ceramic powder cannot be increased.
【０００３】それを解決したのが、米国ランクサイド社
が開発した非加圧金属浸透法（ＰｒｉｍｅｘTM）であ
る。これは、ＳｉＣやＡｌ2Ｏ3などのセラミックス粉末
で形成されたプリフォームにＭｇを含むアルミニウム合
金を接触させ、これをＮ2雰囲気炉中で７００〜９００
℃の温度に加熱して溶融したアルミニウム合金を浸透さ
せる方法である。この方法は、Ｍｇの化学反応を利用し
てセラミックス粉末と溶融金属との濡れ性を改善し、機
械的な加圧を行わなくてもプリフォーム中に浸透できる
という特徴があるので、加圧装置が不要なため、プリフ
ォームを大型肉厚に形成でき、それにアルミニウム合金
を浸透させれば、大型肉厚の複合材料を作製することが
できる。The solution to this problem is a non-pressurized metal infiltration method (Primex ™ ) developed by Rankside Company, USA. In this method, an aluminum alloy containing Mg is brought into contact with a preform formed of ceramic powder such as SiC or Al 2 O 3, and is brought into a furnace at 700 to 900 in a N 2 atmosphere furnace.
This is a method of infiltrating a molten aluminum alloy by heating to a temperature of ° C. This method is characterized in that the wettability between the ceramic powder and the molten metal is improved by utilizing the chemical reaction of Mg, and the method can penetrate into the preform without performing mechanical pressing. Since the preform is unnecessary, the preform can be formed to have a large thickness, and if an aluminum alloy is permeated into the preform, a composite material having a large thickness can be produced.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、この方
法では、大型肉厚のプリフォームを形成するには、例え
ばセディメントキャスト法などの湿式成形法で形成する
しかないため、アルミニウム合金の浸透を速めるための
Ｍｇ粉末をプリフォーム中に含ませることができないと
いう問題があった。そのため、アルミニウム合金の浸透
時間が長時間になるばかりでなく、大型で肉厚であるが
ために場合によっては未浸透部分が発生するという問題
もあった。However, in this method, since a large-sized preform can be formed only by a wet molding method such as a sediment casting method, the penetration of the aluminum alloy is accelerated. However, there is a problem that the Mg powder cannot be included in the preform. Therefore, there is a problem that not only does the permeation time of the aluminum alloy become long, but also the non-permeated portion is generated in some cases because of its large size and thickness.
【０００５】ここで、湿式成形法のうち一般的に用いら
れるセディメントキャスト法の概要を述べると、セラミ
ックス粉末にバインダー、消泡剤等を加え、これにさら
にイオン交換水を加え、その配合物をポットミルなどで
混合し、得られたスラリーを鋳型に流し込み、振動を印
加などして沈降成形する。得られた成形体を冷凍して脱
型し、脱型した成形体を焼成してプリフォームを形成す
る方法である。[0005] Here, an outline of the commonly used sediment casting method of the wet molding method is as follows. A binder, an antifoaming agent, etc. are added to ceramic powder, ion-exchanged water is further added thereto, and the compound is added. Are mixed in a pot mill or the like, and the obtained slurry is poured into a mold, and subjected to sedimentation molding by applying vibration or the like. This is a method in which the obtained molded body is frozen and demolded, and the demolded molded body is fired to form a preform.
【０００６】本発明は、上述した金属−セラミックス複
合材料の製造方法が有する課題に鑑みなされたものであ
って、その目的は、大型肉厚の複合材料であっても、ア
ルミニウム合金を未浸透部分を生じることなく、短時間
で浸透させることのできる金属−セラミックス複合材料
の製造方法を提供することにある。SUMMARY OF THE INVENTION The present invention has been made in view of the problems of the above-described method for producing a metal-ceramic composite material, and has an object to solve the problem that even if the composite material has a large thickness, the aluminum alloy is not partially impregnated. It is an object of the present invention to provide a method for producing a metal-ceramic composite material that can be permeated in a short time without causing the occurrence of cracks.
【０００７】[0007]
【課題を解決するための手段】本発明者等は、上記目的
を達成するため鋭意研究した結果、大型肉厚のプリフォ
ームを先ず湿式成形法で形成し、そのプリフォームに穴
を開け、その穴にＭｇ粉末を含むセラミックス粉末から
なるスラリーを流し込み一体化すれば、その一体化され
たプリフォームにアルミニウム合金を未浸透部分を生じ
ることなく、短時間で浸透させることができるとの知見
を得て本発明を完成するに至った。Means for Solving the Problems The inventors of the present invention have conducted intensive studies to achieve the above object, and as a result, a large-sized thick preform is first formed by a wet molding method, and a hole is formed in the preform. It has been found that if a slurry made of ceramic powder containing Mg powder is poured into the holes and integrated, the aluminum alloy can be permeated into the integrated preform in a short period of time without generating unimpregnated portions. Thus, the present invention has been completed.
【０００８】即ち、本発明は、（１）セラミックス粉末
からなる大型で肉厚のプリフォームを湿式成形法で形成
し、そのプリフォームに穴を開け、その穴に非水系のバ
インダーを溶媒としたＭｇ粉末を含むセラミックス粉末
からなるスラリーを流し込み、それを乾燥固化してプリ
フォームと一体化し、その一体化したプリフォームに窒
素雰囲気中で７００〜９００℃の温度で溶融したＭｇを
含むアルミニウム合金を非加圧で浸透させることを特徴
とする大型肉厚の金属−セラミックス複合材料の製造方
法（請求項１）とし、（２）プリフォームのセラミック
ス粉末の充填率が、３０〜８０体積％であることを特徴
とする請求項１記載の大型肉厚の金属−セラミックス複
合材料の製造方法（請求項２）とすることを要旨とす
る。以下さらに詳細に説明する。That is, the present invention provides (1) a large and thick preform made of ceramic powder formed by a wet molding method, a hole is formed in the preform, and a non-aqueous binder is used as a solvent in the hole. A slurry made of a ceramic powder containing Mg powder is poured, dried and solidified to be integrated with the preform, and an aluminum alloy containing Mg melted at a temperature of 700 to 900 ° C. in a nitrogen atmosphere in the integrated preform. A method for producing a large-thickness metal-ceramic composite material characterized by non-pressurized permeation (claim 1), wherein (2) the filling rate of ceramic powder of the preform is 30 to 80% by volume. The gist of the invention is to provide a method for producing a large-thick metal-ceramic composite material according to claim 1 (claim 2). This will be described in more detail below.
【０００９】上記で述べたように、大型で肉厚のプリフ
ォームを先ず湿式成形法で形成し、そのプリフォームに
穴を開け、その穴にＭｇと反応しない非水系のバインダ
ー、例えばエチルシリケートなどを溶媒として調整され
たＭｇ粉末を含むセラミックス粉末からなるスラリーを
流し込み、それを乾燥固化してプリフォームと一体化す
れば、その乾燥固化した部分が核となって、基体である
大型で肉厚のプリフォームにも溶融アルミニウム合金が
未浸透部分を発生することなく、短時間で浸透していく
ことになる。As described above, a large and thick preform is first formed by a wet molding method, a hole is formed in the preform, and a non-aqueous binder that does not react with Mg, such as ethyl silicate, is formed in the hole. Is poured into a slurry made of a ceramic powder containing Mg powder adjusted as a solvent, and then dried and solidified to be integrated with the preform, and the dried and solidified portion becomes a core, which is a large and thick base material. The molten aluminum alloy permeates the preform in a short time without generating unimpregnated portions.
【００１０】そのプリフォームのセラミックス粉末の充
填率としては、３０〜８０体積％が好ましく、３０体積
％より低いと高剛性が得られず、この複合材料が大型肉
厚が故に撓みが生じかねず、逆に８０体積％より高いと
高剛性にはなるが、制振性が悪くなるばかりでなく靭性
も悪くなる。The filling rate of the ceramic powder of the preform is preferably 30 to 80% by volume, and if it is lower than 30% by volume, high rigidity cannot be obtained, and the composite material may be bent due to its large thickness. On the other hand, if it is higher than 80% by volume, the rigidity becomes high, but not only the damping property but also the toughness deteriorates.
【００１１】[0011]
【発明の実施の形態】本発明の複合材料の製造方法をさ
らに詳しく述べると、セラミックス粉末としてＳｉＣ、
Ａｌ2Ｏ3、ＡｌＮなどのセラミックス粉末を用意し、こ
れにさらにＭｇ粉末を用意する。一方、浸透させるアル
ミニウム合金としてＭｇを含むアルミニウム合金のイン
ゴットも用意する。BEST MODE FOR CARRYING OUT THE INVENTION The method for producing a composite material of the present invention will be described in more detail.
A ceramic powder such as Al 2 O 3 or AlN is prepared, and an Mg powder is further prepared. On the other hand, an aluminum alloy ingot containing Mg is also prepared as the aluminum alloy to be permeated.
【００１２】用意したセラミックス粉末でセディメント
キャスト法などの湿式成形法により粉末充填率が３０〜
８０体積％の大型肉厚のプリフォームを形成し、これに
穴を開ける。穴を開ける方法としては、スラリーを流し
込む鋳型に穴を有する鋳型を用いることによりあらかじ
め穴を有するプリフォームを形成してもよいし、プリフ
ォームに機械加工などの後加工して穴を開けてもよい。The powder filling rate of the prepared ceramic powder is 30 to 30 by a wet molding method such as a sediment casting method.
A large thickness preform of 80% by volume is formed and holes are drilled. As a method of forming a hole, a preform having a hole may be formed in advance by using a mold having a hole in a mold into which a slurry is poured, or a hole may be formed by performing post-processing such as machining on the preform. Good.
【００１３】その穴の大きさとしては、基体である大型
肉厚のプリフォームに対して縦、横は１／４程度でよ
く、厚さは１／４程度以上から貫通までの間の厚さでよ
い。穴の大きさがそれより小さすぎると、未浸透部分が
生じかねず、それより大きすぎると、溶媒であるエチル
シリケートなどのバインダーが固化する際、プリフォー
ムに割れが生じて好ましくない。[0013] The size of the hole may be about 1/4 in length and width with respect to the large-sized preform serving as the base, and the thickness may be from about 1/4 or more up to the penetration. Is fine. If the size of the hole is too small, a non-penetrated portion may be formed. If the size is too large, the preform is cracked when a binder such as ethyl silicate as a solvent is solidified, which is not preferable.
【００１４】次いで、先に用意したＭｇ粉末をセラミッ
クス粉末に加え、それにエチルシリケートなどの非水系
バインダーを加えポットミルなどで混合し、得られたス
ラリーを穴に流し込み、それを乾燥固化して基体である
プリフォームと一体化する。この乾燥固化した乾燥物中
のセラミックス粉末の充填率もプリフォームと同様３０
〜８０体積％が好ましい。Ｍｇ粉末の加える量として
は、浸透させるアルミニウム合金中のＭｇの含有量との
兼ね合いもあるが、おおよそセラミックス粉末に対し４
質量％程度でよい。Next, the Mg powder prepared above is added to the ceramic powder, a non-aqueous binder such as ethyl silicate is added thereto, and the mixture is mixed by a pot mill or the like. The obtained slurry is poured into a hole, dried and solidified to form a substrate. Integrate with a preform. The filling rate of the ceramic powder in the dried and solidified product is 30% as in the case of the preform.
~ 80% by volume is preferred. The amount of the Mg powder to be added may have a trade-off with the content of Mg in the aluminum alloy to be infiltrated.
It may be about mass%.
【００１５】得られた一体化されたプリフォームの下面
に先に用意したアルミニウム合金のインゴットを置き、
それを窒素雰囲気中で７００〜９００℃の温度で熱処理
し、溶融したアルミニウム合金を非加圧で浸透させ、冷
却して複合材料を作製する。得られた複合材料を必要が
あれば機械加工で研削、研磨などしてテーブル等の製品
を作製する。An aluminum alloy ingot prepared previously is placed on the lower surface of the obtained integrated preform,
It is heat-treated at a temperature of 700 to 900 ° C. in a nitrogen atmosphere, and the molten aluminum alloy is infiltrated without pressure and cooled to produce a composite material. If necessary, the obtained composite material is ground or polished by machining to produce a product such as a table.
【００１６】以上の方法で金属−セラミックス複合材料
を作製すれば、大型で肉厚の複合材料を未浸透部分を生
じることなく、短時間で作製することができる。When a metal-ceramic composite material is manufactured by the above-described method, a large-sized and thick composite material can be manufactured in a short time without generating an unpermeated portion.
【００１７】[0017]
【実施例】以下本発明の実施例を比較例と共に具体的に
挙げ、本発明をより詳細に説明する。EXAMPLES Hereinafter, the present invention will be described in more detail by giving specific examples of the present invention together with comparative examples.
【００１８】（実施例） （１）大型肉厚の金属−セラミックス複合材料の作製 強化材として＃１８０（平均粒径６６μｍ）の市販Ｓｉ
Ｃ粉末７０質量部と＃５００（平均粒径２５μｍ）の市
販ＳｉＣ粉末３０質量部を用い、それにバインダーとし
てコロイダルシリカ液をシリカ固形分が２重量部となる
量を添加し、それに消泡剤としてフォーマスタＶＬ（サ
ンノブコ社製）を０．２重量部、イオン交換水を２４重
量部加え、ポットミルで１２時間混合した。(Example) (1) Production of large thickness metal-ceramic composite material Commercially available Si of # 180 (average particle size 66 μm) as a reinforcing material
Using 70 parts by mass of C powder and 30 parts by mass of commercially available SiC powder of # 500 (average particle size 25 μm), a colloidal silica liquid was added as a binder in an amount such that the silica solid content became 2 parts by weight, and a defoaming agent was added thereto. 0.2 parts by weight of Formaster VL (manufactured by Sannobuco) and 24 parts by weight of ion-exchanged water were added and mixed by a pot mill for 12 hours.
【００１９】得られたスラリーを中央上部に２００×２
００×３０ｍｍの穴が形成できる８００×８００×１０
０ｍｍの成形体が得られるゴム型に流し込み、それを２
４時間静置し、ＳｉＣ粉末を沈殿させ、上済み液を布な
どで除去した後、それを冷凍室に入れ、３０時間冷凍さ
せて脱型した。得られた成形体を１０００℃の温度で焼
成して穴を有するＳｉＣ粉末の充填率が７０体積％のプ
リフォームを形成した。The obtained slurry was placed in the upper center at 200 × 2
800 × 800 × 10 that can form a hole of 00 × 30 mm
Pour it into a rubber mold from which a 0 mm molded body can be obtained.
After leaving still for 4 hours to precipitate the SiC powder and removing the finished solution with a cloth or the like, it was put into a freezer, frozen for 30 hours and demolded. The obtained molded body was fired at a temperature of 1000 ° C. to form a preform having a filling rate of SiC powder having holes of 70% by volume.
【００２０】これとは別に、先のＳｉＣ粉末にＭｇ粉末
を３質量％加え、これに溶媒としてエチルシリケートを
添加して混合し、得られたスラリーを穴に流し込み、そ
れを静置して上済み液を布などで除去した後、それを１
００℃に加熱して乾燥固化し、基体であるプリフォーム
と一体化した。Separately, 3% by mass of Mg powder was added to the SiC powder, and ethyl silicate was added and mixed as a solvent, and the obtained slurry was poured into a hole, and the slurry was allowed to stand still. After removing the used liquid with a cloth,
The resultant was heated to 00 ° C., dried and solidified, and integrated with a preform as a substrate.
【００２１】得られた一体化されたプリフォームの下面
にＡｌ−１２Ｓｉ−３Ｍｇ組成のアルミニウム合金のイ
ンゴットを置き、それを窒素雰囲気中で８２５℃の温度
で熱処理し、溶融したアルミニウム合金を２４時間非加
圧浸透させた後、冷却して大型肉厚の複合材料を作製し
た。An aluminum alloy ingot having an Al-12Si-3Mg composition was placed on the lower surface of the obtained integrated preform and heat-treated at a temperature of 825 ° C. in a nitrogen atmosphere. After non-pressurized infiltration, it was cooled to produce a large-thick composite material.
【００２２】（２）評価 得られた複合材料を切断し、複合材料内部のアルミニウ
ム合金の浸透状態及び流し込んだスラリーとプリフォー
ムとの界面を目視で調べた。その結果、未浸透部は認め
られず、また界面も異常は認められなかった。このこと
は、大型肉厚の複合材料であっても、アルミニウム合金
を未浸透部分を生じることなく、短時間で浸透させるこ
とのできる金属−セラミックス複合材料とすることがで
きることを示している。(2) Evaluation The obtained composite material was cut, and the permeation state of the aluminum alloy in the composite material and the interface between the poured slurry and the preform were visually examined. As a result, no non-penetrated part was recognized, and no abnormality was recognized at the interface. This indicates that a metal-ceramic composite material capable of infiltrating an aluminum alloy in a short time without generating a non-impregnated portion can be obtained even with a large-sized thick composite material.
【００２３】（比較例）比較のために大型肉厚のプリフ
ォームとして、実施例と同じ大きさの穴を有さないプリ
フォーム、すなわちＭｇ粉末を含むセラミックス粉末か
らなるスラリーが流し込まれていないプリフォームとし
た他は、実施例と同様に複合材料を作製し、評価した。
その結果、３６時間浸透させても、複合材料内部には未
浸透部分がいくつか認められた。COMPARATIVE EXAMPLE For comparison, as a preform having a large wall thickness, a preform having no holes having the same size as that of the embodiment, that is, a preform in which a slurry made of ceramic powder containing Mg powder was not poured. Except for reforming, a composite material was prepared and evaluated in the same manner as in the example.
As a result, even after infiltration for 36 hours, some unpermeated portions were found inside the composite material.
【００２４】[0024]
【発明の効果】以上の通り、本発明の金属−セラミック
ス複合材料の製造方法であれば、大型肉厚の複合材料で
あっても、アルミニウム合金を未浸透部分を生じること
なく、短時間で浸透させることのできる金属−セラミッ
クス複合材料とすることができるようになった。このこ
とにより、露光装置のテーブルのような１ｍ程度の角
で、１０ｃｍ程度の厚さの大型で肉厚の部材でも、問題
なく提供できるようになった。As described above, according to the method for producing a metal-ceramic composite material of the present invention, even if the composite material has a large thickness, the aluminum alloy can be permeated in a short period of time without generating an unpermeated portion. Metal-ceramic composite materials that can be used. As a result, even a large and thick member having a corner of about 1 m and a thickness of about 10 cm, such as a table of an exposure apparatus, can be provided without any problem.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 小田野 直水 宮城県仙台市泉区明通３−７ セランクス 株式会社仙台工場 (72)発明者 樋口 毅 宮城県仙台市泉区明通３−７ セランクス 株式会社仙台工場 Ｆターム(参考） 4K018 AA13 BA11 DA11 FA35 KA70 4K020 AA22 AC02 BA02 BB22 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Naomizu Odano 3-7 Meido, Izumi-ku, Sendai, Miyagi Prefecture Sendai Plant Co., Ltd. (72) Inventor Takeshi Higuchi 3-7 Meido, Izumi-ku, Sendai, Miyagi Selangx Sendai Factory F-term (reference) 4K018 AA13 BA11 DA11 FA35 KA70 4K020 AA22 AC02 BA02 BB22
Claims (2)
プリフォームを湿式成形法で形成し、そのプリフォーム
に穴を開け、その穴に非水系のバインダーを溶媒とした
Ｍｇ粉末を含むセラミックス粉末からなるスラリーを流
し込み、それを乾燥固化してプリフォームと一体化し、
その一体化したプリフォームに窒素雰囲気中で７００〜
９００℃の温度で溶融したＭｇを含むアルミニウム合金
を非加圧で浸透させることを特徴とする大型肉厚の金属
−セラミックス複合材料の製造方法。1. A large and thick preform made of ceramic powder is formed by a wet molding method, a hole is formed in the preform, and the hole is formed from a ceramic powder containing Mg powder using a non-aqueous binder as a solvent. Pour the slurry, and solidify it by drying and integrating with the preform,
700 ~
A method for producing a large-thick metal-ceramic composite material, characterized by infiltrating an aluminum alloy containing Mg melted at a temperature of 900 ° C. without applying pressure.
率が、３０〜８０体積％であることを特徴とする請求項
１記載の大型肉厚の金属−セラミックス複合材料の製造
方法。2. The method for producing a large-thick metal-ceramic composite material according to claim 1, wherein the filling rate of the ceramic powder of the preform is 30 to 80% by volume.
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|---|---|---|---|
| JP2000387720A JP2002194456A (en) | 2000-12-20 | 2000-12-20 | Method for manufacturing large-size thick-walled ceramics/metal composite material |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000387720A JP2002194456A (en) | 2000-12-20 | 2000-12-20 | Method for manufacturing large-size thick-walled ceramics/metal composite material |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6829545B2 (en) | 2000-11-15 | 2004-12-07 | International Business Machines Corporation | Method of calculating capacity of intelligent battery, intelligent battery and portable electronic device |
| JP2009543947A (en) * | 2006-07-14 | 2009-12-10 | ダウ グローバル テクノロジーズ インコーポレイティド | IMPROVED COMPOSITE MATERIAL AND METHOD FOR PRODUCING THE COMPOSITE MATERIAL |
| JP2011137186A (en) * | 2009-12-25 | 2011-07-14 | Taiheiyo Cement Corp | Method for manufacturing metal-ceramics composite material |
| JP6984926B1 (en) * | 2021-04-19 | 2021-12-22 | アドバンスコンポジット株式会社 | Method for manufacturing metal-based composite material and method for manufacturing preform |
-
2000
- 2000-12-20 JP JP2000387720A patent/JP2002194456A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6829545B2 (en) | 2000-11-15 | 2004-12-07 | International Business Machines Corporation | Method of calculating capacity of intelligent battery, intelligent battery and portable electronic device |
| US6836096B2 (en) * | 2000-11-15 | 2004-12-28 | International Business Machines Corporation | Method of calculating capacity of intelligent battery, intelligent battery and portable electronic device |
| JP2009543947A (en) * | 2006-07-14 | 2009-12-10 | ダウ グローバル テクノロジーズ インコーポレイティド | IMPROVED COMPOSITE MATERIAL AND METHOD FOR PRODUCING THE COMPOSITE MATERIAL |
| JP2011137186A (en) * | 2009-12-25 | 2011-07-14 | Taiheiyo Cement Corp | Method for manufacturing metal-ceramics composite material |
| JP6984926B1 (en) * | 2021-04-19 | 2021-12-22 | アドバンスコンポジット株式会社 | Method for manufacturing metal-based composite material and method for manufacturing preform |
| WO2022224549A1 (en) * | 2021-04-19 | 2022-10-27 | アドバンスコンポジット株式会社 | Method for producing metal matrix composite material and method for manufacturing preform |
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