JPH11157965A - Metal-ceramic composite material and its production - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain the subject composite material, in particular reduced in the Mg content of the metal component therein, and to provide a method for producing the composite material, in view of such problems that conventional metal-ceramic composite materials, because of their high Mg content, have been poor in heat resistance and could not have been used in vacuum equipment. SOLUTION: This metal-ceramic composite material is such one that the ceramic powder consists of SiO, Al2 O3 or AlN powder with a powder packing rate of 20-80 vol.% and average particle size of 1-150 μm, and the metal consists of Al-Si-based or Al-Cr-based metal or Al each containing <=1 wt.% Mg. The other objective method for producing the above composite material comprises infiltrating a preform laid with Mg-contg. metallic powder between the preform and a metal to be infiltrated, or ceramic powder containing Mg-contg. metallic powder and packed in a formwork, with the metal such as Al-Si-based or Al-Cr- based metal or Al >=99% in purity.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a metal-ceramic composite material in which a metal is combined with a reinforcing material and a method for producing the same, and more particularly to a metal-ceramic composite material in which Mg in the metal is reduced and a method for producing the same.

[0002]

2. Description of the Related Art A ceramic-metal composite material reinforced with ceramic fibers or particles has both characteristics of ceramic and metal. For example, this composite material has high rigidity, low thermal expansion property, abrasion resistance, etc. It has the excellent properties of ceramics and the excellent properties of metals such as ductility, high toughness, and high thermal conductivity. As described above, since it has both the characteristics of ceramics and metal, which have been considered difficult, it has been drawing attention as a next-generation material from industries such as mechanical device manufacturers.

As a method for producing this composite material, particularly a composite material using aluminum as a matrix as a metal, methods such as powder metallurgy, high pressure casting, and vacuum casting have been conventionally known. However, all of these methods are not capable of increasing the content of ceramics as a reinforcing material, require a large-sized pressurizing device, are difficult to form near nets, and are extremely expensive. It was not satisfactory.

Accordingly, recently, a non-pressurized metal infiltration method developed by Rankside Company of the United States has attracted particular attention as a manufacturing method for solving the above problem. This method uses SiC or A
An aluminum ingot containing Mg is brought into contact with a preform formed of a ceramic powder such as l ₂ O ₃ ,
This is a method in which the molten aluminum alloy is heated to 700 to 900 ° C. in an N ₂ atmosphere to penetrate the preform. This volatilized Mg in the alloy, magnesium nitride on the surface of the react with N ₂ ceramic powder is generated _{(N 2 + 3Mg → Mg 3} N 2), the Mg ₃ N ₂ is Al
(Mg ₃ N ₂ + 2Al → 2AlN + 3)
Therefore, the molten aluminum alloy permeates the preform without applying pressure. The aluminum nitride (AlN) produced by this reaction is deposited as a thin layer on the ceramic surface, and Mg dissolves into the aluminum alloy. As the Mg concentration increases, the penetration rate of the aluminum alloy into the preform increases. , Works to shorten the permeation time.

Further, according to this method, the content of ceramics can be varied as wide as 30 to 85 vol% and a high range, and the preform formed by this method has a high degree of freedom in its shape. It is also possible to make quite complex shapes with near nets. As described above, this method does not require a pressurizing device, can increase the content of ceramics, and enables near-net molding. Therefore, this method is an excellent method that solves the above-described problem. .

[0006]

However, the composite material produced by this method has a problem in that it has poor heat resistance. This is because the Al-Mg based alloy (5
000 series) is generally called hydronarium, and among aluminum alloys, ultra super duralumin (Al-Zn-
Mg, 7000 series), duralumin (Al-Cu, 20
It has the highest strength next to (00 series) and does not contain heavy metals, so it is often used in semiconductor and liquid crystal manufacturing equipment.
There are many devices used in a high-temperature and high-vacuum environment (for example, 500 ° C. and 10 ⁻⁵ Pa or less), such as a susceptor used for CVD in these devices. There were two problems regarding the heat resistance described. One is that an Al-Mg based alloy containing Mg has a low melting point.
Since the temperature is about 500 ° C. for Al-10Mg, the temperature that can be used without causing deformation varies depending on the load, but is a maximum of about 450 to 500 ° C., and is 100 ° C. higher than that of Al having a melting point of about 670 ° C. The above is also low, and although it can be used in the above-mentioned device with Al alone, it cannot be used with this composite material.

Second, the vapor pressure is extremely low,
Since it is easy to volatilize, it is difficult to achieve a high degree of vacuum at a temperature of 400 ° C. or more, and when returned to normal pressure, the volatilized Mg solidifies and is generated as dust. It was very difficult to use the above-mentioned vacuum apparatus. It is conceivable to use the generated dust after cleaning it, but this also requires considerable time and effort to remove the dust, and it is also difficult to use the dust.

[0008] The present invention has been made in view of the above-mentioned problems of the composite material of ceramics and metal, and has as its object to provide a metal having a low Mg content and excellent heat resistance.
An object of the present invention is to provide a ceramic composite material and a method for producing the same.

[0009]

Means for Solving the Problems The present inventors have conducted intensive studies to achieve the above object, and as a result, spread a metal powder containing Mg between a formed preform and a metal to be infiltrated, and put the preform on the preform. If the metal is infiltrated, or if the ceramic powder containing the metal powder containing Mg is filled in the mold and the metal is infiltrated into the ceramic powder,
The inventors have found that a metal-ceramic composite material that can completely infiltrate without pressure even with Al metal containing no Mg can be obtained, and have completed the present invention.

That is, the present invention provides (1) a metal-ceramic composite material in which a metal as a base material has been impregnated into ceramic powder, wherein the ceramic powder is 20 to 80 vol.
% Powder having an average particle size of 1 to 150 μm
consisting of iC, Al ₂ O ₃ or AlN powder, wherein the metal is
A metal-ceramic composite material comprising Al-Si, Al-Cr or Al containing 1% or less of Mg (claim 1); and (2) a preform using ceramic powder as a reinforcing material. In a method for producing a metal-ceramic composite material formed and penetrating a metal serving as a base material into the preform, the method for forming the preform includes SiC, Al ₂ having an average particle size of 1 to 150 μm.
O ₃ or AlN powder, molded by adding an inorganic binder, a method of firing, and impregnating process of the metal, Mg or Al-Mg having an average particle size of 1~300μm on the preforms that form , Mg ₂ Si and other Mg-containing metal powders are spread thinly, and Al-Si-based, Al-C
After placing r metal or Al metal with purity of 99% or more, 7
A method for producing a metal-ceramic composite material (Claim 2), which is a method of infiltrating at a temperature of 00 to 1000 ° C., and (3) the ceramic powder forming the preform is 1 to 100 μm. SiC having an average particle diameter, the Al ₂ O ₃ or AlN powder, claims the same kind of powder having an average particle size 5 to 15 times the those powders wherein the 50 wt% or less added mixture powder A method for producing a metal-ceramic composite material according to claim 2 (claim 3), and (4) a method for infiltrating a metal,
M having an average particle diameter of 1 to 300 μm on an Al—Si system, an Al—Cr system, or an Al metal having a purity of 99% or more.
g or Al-Mg, spread thin Mg-containing metal powder such as Mg ₂ Si, after placing a preform formed thereon, claims, characterized in that a method of penetration at a temperature of 700 to 1000 ° C. The method for producing a metal-ceramic composite material according to claim 2 or 3, wherein (5) a metal-ceramic which is filled with a ceramic powder in a mold and a metal as a base material is impregnated into the ceramic powder. the method of manufacturing a composite material, the method of filling the ceramic powder, SiC having an average particle diameter of 1-150 [mu] m, the Al ₂ O ₃ or AlN powder, 1 to 300 [mu] m
Mg or Al-Mg, Mg ₂ Si having an average particle size of
Etc., and adding the Mg-containing metal powder into a mold.
-Si-based, Al-Cr-based or Al with a purity of 99% or more
The gist of the invention is to provide a method for producing a metal-ceramic composite material, characterized in that a metal is infiltrated at a temperature of 700 to 1000 ° C. This will be described in more detail below.

The ceramic powder in the composite material is made of SiC, Al ₂ O ₃ or AlN powder having an average particle size of 1 to 150 μm and having a powder filling rate of 20 to 80 vol%, and is impregnated into the ceramic powder. Al-Si system containing 1% or less of Mg, Al-C
A metal-ceramic composite material made of r-based or Al (claim 1). The powder filling rate of the ceramic powder is preferably 20 to 80 vol%, and 20 vol%.
If it is lower, the rigidity of the produced composite material is lowered, which is not preferable. If it is more than 80 vol%, the voids in the preform are narrow, and it is not preferable because metal penetration becomes difficult.
Further, the ceramic powder is made of SiC, Al ₂ O ₃ or Al.
The reason for using N powder is that these powders easily penetrate into the metal. Furthermore, the average particle size of these powders is 1 to 150
If it is smaller than 1 μm, penetration of aluminum becomes difficult, and if it is coarser than 150 μm, it becomes difficult to form a preform.

On the other hand, Al-Si based, Al-Cr based or Al containing 1% or less of the infiltrated metal is as follows.
Even metals that do not contain Mg can penetrate non-pressurized ceramic powder filled in a preform or formwork,
As a result, the content of Mg in the metal can be reduced to 1% or less. The reason why it can penetrate under non-pressure has not been elucidated yet, but probably by laying a metal powder containing Mg on the preform in advance or by including it in the ceramic powder, the Mg allows the aluminum metal to penetrate. Sometimes reacts with nitrogen in a nitrogen atmosphere to produce nitrides of Mg, which improve the wettability of metal to ceramic powder and act as impregnation promoters, allowing penetration even without pressure I think that the. This makes it possible to produce a metal-ceramic composite material with reduced Mg.

As a method for producing the composite material, when a preform is formed, first, the preform is made 1 to 1
SiC, Al ₂ O ₃ or A having an average particle size of 50 μm
An inorganic binder is added to the 1N powder, and the mixture is molded and fired.
Mg or Al-Mg, M having an average particle size of 00 μm
g ₂ Si or other thin metal powder containing Mg
l-Si type, Al-Cr type or A having a purity of 99% or more
(1) A method for producing a metal-ceramic composite material in which metal is placed and then infiltrated at a temperature of 700 to 1000 ° C. (Claim 2).

In this manufacturing method, a metal powder containing Mg is laid between a formed preform and a metal to be infiltrated to penetrate the metal. Are not penetrated into the preform.
The average particle size of the metal powder is preferably 1 to 300 μm, and if it is smaller than 1 μm, it reacts with moisture in the atmosphere and becomes Mg (OH) ₂ , which is not preferable.
If it is coarser than m, mixing is not uniform, and a portion where penetration does not proceed is not preferable. Further, the amount of the metal powder to be spread on the preform needs to be adjusted so that the Mg content in all metals is 1% or less in order to improve heat resistance. Furthermore, as a method of spreading, it is desirable to sprinkle as uniformly as possible using a sieve or the like. If the amount is not enough and cannot be spread evenly,
₂ O ₃ or the like is thoroughly mixed with the ceramic powder may be used after increased.

In the above-mentioned manufacturing method, since the content of Mg is set to 1% or less in order to improve the heat resistance, the permeation time of the metal becomes long, and the productivity is extremely deteriorated. As a method to improve this, ceramic powder for forming a preform is used.
A powder having an average particle size of 1 to 100 μm is mixed with 50 of the same type of powder having an average particle size of 5 to 15 times the powder.
The powder was added and mixed in an amount of not more than weight% (claim 3). This method reduces the metal penetration time by adding a coarser powder. This, needless to say, increases the voids in the preform, so that the path of metal penetration is widened and the penetration time is reduced.

The reason why the fineness of the powder to be added is 5 to 15 times the original fineness in terms of the average particle size is that if it is finer than 5 times, an improvement effect cannot be expected in reducing the metal permeation time. If it is more than twice, the coarse grains serve as a starting point of the defect, and significantly reduce its mechanical properties, especially its mechanical strength. As for the mixing ratio of this coarse powder, the larger the mixing ratio, the more the penetration rate is greatly improved.
If the amount is too large, the mechanical properties of the composite material may be degraded. Therefore, the amount is preferably 50% by weight or less. Thereby, productivity can be improved as compared with the case where coarse powder is not added.

Further, as another method for shortening the metal permeation time, a metal permeation method is an Al-Si system, an Al-Cr
On a system or Al metal having a purity of 99% or more, 1 to 30
Mg or Al-Mg having an average particle size of 0 μm, Mg
_{A method in which} a Mg-containing metal powder such as 2Si is spread thinly, a preform formed thereon is placed thereon, and then permeated at a temperature of 700 to 1000 ° C. (Claim 4). When the metal is penetrated by the so-called upward method of penetrating from the bottom to the top, the permeation time is shorter than that of the downward method of penetrating the metal from the top to the bottom. The reason is that in the case of the downward direction, the escape of the gas (mainly N ₂ gas) remaining in the preform disappears and the pressure rises, thereby resisting further permeation. In the upward direction, the upper surface of the preform is open. It seems that the gas escapes easily and does not resist permeation. Thereby, productivity can be improved as compared with the downward method. In addition, further improvement can be expected by adding the coarse powder and infiltrating the metal with the upward method.

On the other hand, when the mold is filled with ceramic powder, SiC having an average particle size of 1 to 150 μm,
Al ₂ O ₃ or AlN powder, Mg or Mg such as Al-Mg, Mg ₂ Si, etc. having an average particle size of 1 to 300 μm.
It is assumed that the method is to add the contained metal powder and fill it into a mold.
Al-Cr or Al metal having a purity of 99% or more
Metal to be infiltrated at a temperature of 00 to 1000 ° C.
A method for producing a ceramic composite material is provided.

In this manufacturing method, the above-mentioned metal powder containing Mg is mixed and filled in the ceramic powder as a reinforcing material. If the metal powder containing Mg is not contained in the ceramic powder, the molten metal is converted into the ceramic powder. Not penetrated. The average particle size of the metal powder is preferably 1 to 300 μm as described above. It is necessary to adjust the amount so that the Mg content in all metals is 1% or less.

The metal to be infiltrated into the ceramic powder in the preform or the mold is made of Al-Si, Al-C
The reason for using r metals or Al metals having a purity of 99% or more is that these metals have excellent heat resistance. These Mg
By using a metal containing no, heat resistance is improved as compared with the conventional case, and it can be used for a vacuum device such as a semiconductor.

[0021]

More particularly the manufacturing method of the embodiment of the present invention, SiC having an average particle size of 1~150μm first as reinforcement, providing a Al ₂ O ₃ or AlN powder. In order to shorten the permeation time, a powder is prepared by mixing a powder having an average particle diameter of 1 to 100 μm and a powder of the same kind having an average particle diameter of 5 to 15 times the powder. When producing a preform, an inorganic binder is added to these powders, and if necessary, an organic binder is added and mixed. Any mixing method may be used as long as it can be uniformly mixed.

The resulting mixture is shaped. The molding method is
There are sedimentation molding, injection molding, CIP molding and the like, but any method may be used. In short, any method can be used as long as it can maintain the form of the preform to penetrate the metal under no pressure and does not hinder the penetration. As an example, the sedimentation molding is described. For example, a binder such as ammonium silicate is added to the above-mentioned ceramic powder and metal powder in an amount of 3 to 10% by weight, ion exchange water is 20 to 40% by weight, and an antifoaming agent if necessary. , And wet-mix with a pot mill. A small amount of medium may be added to increase the mixing efficiency.However, in this case, the particle size distribution of the ceramic powder may be changed and the powder filling rate may not be as intended. The mixing is preferably performed within 10 hours, at which the crushing of the powder does not proceed. The mixed slurry is cast and formed while vibrating. The mold is usually a silicone rubber mold, but may be a mold of plastic, aluminum, or the like, and is not particularly limited. During the settling of the particles after casting, vibration is applied as much as possible to improve the filling. It is frozen and demolded to obtain a molded body.

The obtained molded body is fired at a temperature of 900 to 1100 ° C. to form a preform. In the case of a downward word, the metal is infiltrated, and a metal powder containing Mg having an average particle diameter of 1 to 300 μm is sprinkled on a top surface of the formed preform using a sieve or the like, and thinly spread thereon. After placing an Al-Si system, an Al-Cr system, or an Al metal having a purity of 99% or more, in the upward case, Mg or Al- having an average particle size of 1 to 300 µm is placed on the Al metal. A thin layer of Mg-containing metal powder such as Mg, Mg ₂ Si, etc. is spread, and the formed preform is placed thereon. Then, the molten metal is melted at a temperature of 700 to 1000 ° C. in a nitrogen stream without pressurization, and the molten metal is pressed. After infiltrating until it has completely penetrated the reform, it is cooled at 50 to 300 ° C./hr to produce a composite material.

On the other hand, when filling in a mold, the above-mentioned ceramic powder has a mean particle size of 1 to 300 μm.
g of metal powder is added and mixed dry. The mixed powder is filled in a mold, and metal is infiltrated into the filled ceramic powder from above the mold in the same manner as in the case of the preform. As a material used for the mold, a material that has poor wettability with a molten metal such as graphoil and inhibits permeation is preferable, and the mold release after permeation becomes easy.

When the metal-ceramic composite material is manufactured by the above method, the content of Mg is reduced to 1% or less.
A metal-ceramic composite material having excellent heat resistance can be obtained.

[0026]

EXAMPLES Hereinafter, the present invention will be described in more detail with reference to Examples of the present invention and Comparative Examples.

Example 1 (1) Formation of Preform A silica-coated AlN powder having an average particle diameter of 16 μm (manufactured by Dow Chemical Company) was used as a reinforcing material, and a colloidal silica liquid was used as a binder and the silica solid content was used as a binder. Was added in an amount of 2 parts by weight with respect to 100 parts by weight of the ceramic powder, 30 parts by weight of ion-exchanged water was further added, and the mixture was mixed for 16 hours in a pot mill without a medium.
The obtained slurry was poured into a silicon-rubber mold from which a molded body of 200 × 200 × 20 mm was obtained, sediment cast (sedimentation molding) was performed, and cooled to −30 ° C. to obtain a frozen product. The obtained frozen product was fired at 700 ° C. for 5 hours to form a preform.

(2) Preparation of Composite Material 200 g of powder obtained by mixing Al ₂ O ₃ powder and Mg powder 150 μm under at a weight ratio of 9: 1 on the upper surface of the preform.
Is spread thinly using a sieve, and an aluminum plate (purity: 99%) three times as large as the preform is placed thereon, and is allowed to infiltrate in a nitrogen atmosphere at 850 ° C. for 90 hours under non-pressure, and then gradually cooled. Thus, a metal-ceramic composite material was produced.

(3) Evaluation The bulk density of the obtained composite material was measured by the Archimedes method.
The powder filling rate was determined. As a result, it was 70 vol%. Further, the obtained composite material was cut, and the cut surface was visually observed to check the state of penetration of the metal. As a result, the metal was completely penetrated without defects. Further, a test piece having a length of 40 × width 4 × thickness of 3 mm was cut out from the obtained composite material, and a 4-point bending stress of 16 MPa was applied to the test piece.
The temperature was increased to 700 ° C. at a rate of 5 ° C./min, and the creep characteristics were measured. As a result, it hardly creeped.

Example 2 (1) Filling of Ceramic Powder Silica-coated AlN powder having an average particle diameter of 16 μm (manufactured by Dow Chemical Co.) was used as a reinforcing material, and 100 parts by weight of the powder was under 150 μm as an impregnation promoting material. Of Al-Mg (4: 6 by weight) was added and dry-mixed in a pot mill without a medium for 16 hours. The obtained mixed powder was tapping-filled into a 200 × 200 × 20 mm Grafoil mold.

(2) Preparation of Composite Material An aluminum plate (purity: 99%) of the same amount as the ceramic powder was placed from above the mold, and placed at 825 ° C. in a nitrogen atmosphere.
After the non-pressurized infiltration for 4 hours, the mixture was gradually cooled to produce a metal-ceramic composite material.

(3) Evaluation The bulk density of the obtained composite material was measured by the Archimedes method.
The powder filling rate was determined. As a result, it was 50 vol%. Further, the obtained composite material was cut, and the cut surface was visually observed to check the state of penetration of the metal. As a result, the metal was completely penetrated without defects. Further, a test piece having a length of 40 × width 4 × thickness of 3 mm was cut out from the obtained composite material, and a 4-point bending stress of 16 MPa was applied to the test piece.
The temperature was increased to 700 ° C. at a rate of 5 ° C./min, and the creep characteristics were measured. As a result, it hardly creeped.

Example 3 (1) Formation of Preform Commercially available Al having # 320 (average particle size: 40 μm) as a reinforcing material
_{Using 2} O ₃ powder, a colloidal silica liquid as a binder was added thereto in such an amount that the silica solid content became 2 parts by weight with respect to 100 parts by weight of the ceramic powder, and further, 30 parts by weight of ion-exchanged water was added, and a medium was added. Mix for 16 hours with no pot mill. The obtained slurry is 200 × 200
Pour into a silicone-rubber mold from which a molded body of × 20 mm is obtained and perform sediment casting (sedimentation molding).
After cooling to 30 ° C., a frozen product was obtained. 70 of the obtained frozen product
The preform was formed by firing at 0 ° C. for 5 hours.

(2) Preparation of Composite Material 200 g of powder obtained by mixing Al ₂ O ₃ powder and Mg powder 150 μm under at a weight ratio of 9: 1 on the upper surface of the preform.
Is spread thinly using a sieve, and an aluminum plate (purity: 99%) three times as large as the preform is placed thereon, and is allowed to infiltrate in a nitrogen atmosphere at 825 ° C. for 72 hours under non-pressure, and then gradually cooled. Thus, a metal-ceramic composite material was produced.

(3) Evaluation The bulk density of the obtained composite material was measured by the Archimedes method.
The powder filling rate was determined. As a result, it was 65 vol%. Further, the obtained composite material was cut, and the cut surface was visually observed to check the state of penetration of the metal. As a result, the metal was completely penetrated without defects. Further, a test piece having a length of 40 × width 4 × thickness of 3 mm was cut out from the obtained composite material, and a 4-point bending stress of 16 MPa was applied to the test piece.
The temperature was raised to 900 ° C. at a rate of 5 ° C./min, and the creep characteristics were measured. As a result, it hardly creeped.

Example 4 A preform was formed in the same manner as in Example 1, and a metal was impregnated into the preform by an upward method to produce a composite material. Specifically, an aluminum plate (purity 99%) of 1.2 times the amount of the preform was put on an aluminum plate.
200 g of powder obtained by mixing ₂ O ₃ powder and 150 μm-under Mg powder at a weight ratio of 9: 1 is thinly spread using a sieve,
Place the preform on top of it and place in a nitrogen atmosphere for 8 hours.
After non-pressurized infiltration at a temperature of 50 ° C. for 50 hours, the resultant was gradually cooled to produce a metal-ceramic composite material.

The bulk density of the obtained composite material was measured by the Archimedes method to determine the powder filling rate. As a result, 70vo
1%. Further, the obtained composite material was cut, and the cut surface was visually observed to check the state of penetration of the metal. As a result, the metal was completely penetrated without defects. This indicates that when the metal is infiltrated by the upward method, the infiltration time is considerably shortened as compared with Example 1 which is the downward method.

Example 5 A silica-coated AlN powder having an average particle size of 16 μm (manufactured by Dow Chemical Co.) was mixed with silica-coated AlN powder having an average particle size of 16 μm (manufactured by Dow Chemical Company) as a reinforcing material.
A preform was formed in the same manner as in Example 4 except that the powder mixed with 0% by weight was used and the permeation time of the metal was set to 36 hours, to produce a composite material.

The bulk density of the obtained composite material was measured by the Archimedes method to determine the powder filling rate. As a result, 65vo
1%. Further, the obtained composite material was cut, and the cut surface was visually observed to check the state of penetration of the metal. As a result, the metal was completely penetrated without defects. This indicates that if the preform is formed by mixing the coarse powder and the metal is impregnated into the preform by the upward method, the permeation time is further reduced as compared with Example 4.

(Comparative Example 1) As a comparison, an aluminum plate having an Al-5Mg composition was placed on the preform of Example 1, metal was permeated in the same manner as in Example 1, and a composite material was prepared and evaluated. As a result, although the metal was completely penetrated, it started to creep from around 450 ° C. in the measurement of the creep characteristics, and 540 ° C.
Broke. This indicates that when the Mg content exceeds 1%, the heat resistance is greatly reduced.

[0041]

According to the metal-ceramic composite material of the present invention, a metal-ceramic composite material in which the content of Mg is reduced to 1% or less can be obtained.
This makes it possible to greatly improve the low heat resistance, which has been a drawback in the past, and furthermore, since the content of Mg metal that evaporates at a low temperature is small, it can be used in vacuum devices such as semiconductors. And the scope of industrial use has been greatly expanded. In particular, metals using AlN powder as a reinforcing material
Ceramic composite materials are also excellent in thermal conductivity and fluorine gas plasma resistance, and are therefore expected to exhibit excellent properties in the pre-process of semiconductor manufacturing. In addition, since the permeation time of the metal can be considerably shortened, the productivity can be improved.

──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. ⁶ Identification code FI C22C 29/12 C22C 29/12 Z 29/16 29/16 H (72) Inventor Mutsumi Hayashi 560 Omaki, Uraki City, Saitama Prefecture Inventor Heishiro Takahashi 314-1 Matsudo Nitta, Matsudo-shi, Chiba (72) Inventor Takeshi Higuchi 1-3-9 Hikawadai, Higashi-Kurume-shi, Tokyo (72) Inventor Tomiwa, Koyama 1-3, Ukima, Kita-ku, Tokyo -1-805

Claims (5)

[Claims] 1. A metal-ceramic composite material having a ceramic powder impregnated with a metal, wherein the ceramic powder has a powder filling factor of 20 to 80 vol% and an average particle diameter of 1 to 150 μm, SiC, Al ₂ O ₃ or Al-Si comprising AlN powder, wherein the metal contains 1% or less of Mg
A metal-ceramic composite material comprising an Al-Cr system or Al. 2. A method for producing a metal-ceramic composite material in which a preform is formed by using ceramic powder as a reinforcing material and a metal as a base material is permeated into the preform, the method for forming the preform is 1 to 150 μm. Is a method in which an inorganic binder is added to SiC, Al ₂ O ₃ or AlN powder having an average particle size of, and the mixture is baked. The method for infiltrating the metal is 1 to 300 μm on the formed preform. Mg or Al with average particle size
-Mg, laying thin Mg-containing metal powder such as Mg ₂ Si,
On top of this, an Al-Si-based, Al-Cr-based or
% Of Al metal, followed by infiltration at a temperature of 700 to 1000 ° C. 3. The ceramic powder for forming a preform is made of SiC, Al having an average particle size of 1 to 100 μm.
_3. The metal-ceramic composite according to claim 2, wherein the powder is obtained by adding 50% by weight or less of the same kind of powder having an average particle diameter of 5 to 15 times the powder to ₂ O3 or AlN powder. Material manufacturing method. 4. A method for infiltrating a metal, the method comprising the steps of:
-On a Cr-based or Al metal having a purity of 99% or more,
Mg or Al-M having an average particle size of ~ 300 µm
g, a thin layer of Mg-containing metal powder such as Mg ₂ Si, and the preform formed thereon is placed thereon.
The method for producing a metal-ceramic composite material according to claim 2 or 3, wherein the method is permeation at a temperature of 0 ° C. 5. A method of filling a ceramic powder into a mold and impregnating a metal as a base material into the ceramic powder.
In the method for producing a ceramic composite material, the method of filling the ceramic powder is performed by adding SiC, Al ₂ O _3, or AlN powder having an average particle size of 1 to 150 μm to 1 to 300 μm.
Mg or Al-Mg, Mg ₂ having an average particle size of μm
It is assumed that the method is to add a Mg-containing metal powder such as Si and fill it into a mold, and to fill the filled ceramic powder with Al-Si-based, Al-Cr-based or Al metal having a purity of 99% or more by 700 to A method for producing a metal-ceramic composite material, comprising infiltrating at a temperature of 1000 ° C.