JPH11228262A - Metal-ceramic composite material and its production - Google Patents

Abstract

PROBLEM TO BE SOLVED: To produce a metal-ceramic composite material capable of improving the heat resistance of not only an Mg free composite material but also an Mg-containing composite material. SOLUTION: This metal-ceramic composite material comprises a ceramic powder composed of SiC, Al2 O3 or an AlN powder and a metal composed of an aluminum alloy containing Ti, Cr or Mn. The method for producing the metal-ceramic composite material comprises making the aluminum alloy containing the Ti, Cr or Mn permeate into a preform composed of the ceramic powder or the ceramic powder filled in a frame mold.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a metal-ceramic composite material in which a metal is combined with a reinforcing material and a method for producing the same, and more particularly to a metal-ceramic composite material having improved heat resistance and a method for producing the same.

[0002]

2. Description of the Related Art A ceramic-metal composite material reinforced with ceramic fibers or particles has both characteristics of ceramic and metal. For example, this composite material has high rigidity, low thermal expansion property, abrasion resistance, etc. It has the excellent properties of ceramics and the excellent properties of metals such as ductility, high toughness, and high thermal conductivity. As described above, since it has both the characteristics of ceramics and metal, which have been considered difficult, it has been drawing attention as a next-generation material from industries such as mechanical device manufacturers.

As a method for producing this composite material, particularly a composite material using aluminum as a matrix as a metal, methods such as powder metallurgy, high pressure casting, and vacuum casting have been conventionally known. However, all of these methods are not capable of increasing the content of ceramics as a reinforcing material, require a large-sized pressurizing device, are difficult to form near nets, and are extremely expensive. It was not satisfactory.

Accordingly, recently, a non-pressurized metal infiltration method developed by Rankside Company of the United States has attracted particular attention as a manufacturing method for solving the above problem. This method uses SiC or A
An aluminum ingot containing Mg is brought into contact with a preform formed of a ceramic powder such as l ₂ O ₃ ,
This is a method in which the preform is impregnated with a molten aluminum alloy by heating the same to 700 to 900 ° C. in an N ₂ atmosphere. This is an excellent method in which the preform can be impregnated with metal without applying pressure by improving the wettability of the molten metal to the ceramic powder by utilizing the chemical reaction between Mg and N _2. .

Further, according to this method, the content of ceramics can be varied as wide as 30 to 85 vol% and a high range, and the preform formed by this method has a high degree of freedom in its shape. It is also possible to make quite complex shapes with near nets. As described above, this method does not require a pressurizing device, can increase the content of ceramics, and enables near-net molding. Therefore, this method is an excellent method that solves the above-described problem. .

[0006]

However, the composite material produced by this method has a problem in that it has poor heat resistance. One is that the melting point of Al-Mg based alloy containing Mg is low because Mg has a eutectic point of 450 ° C at 35.0%, and this alloy is Al-5Mg.
Is about 570 ° C. for Al-10Mg, and about 500 ° C. for Al-10Mg. Therefore, the temperature that can be used without causing deformation varies depending on the load but is about 450-500 ° C. at the maximum, and the melting point is 67 ° C.
That is, the temperature is 100 ° C. or more lower than that of Al which is about 0 ° C.

Secondly, the vapor pressure is extremely low and it is easy to volatilize. Therefore, it is difficult to achieve a high degree of vacuum at a temperature of 400 ° C. or more, and when returning to normal pressure. Mg that has volatilized is solidified and generated as dust. Third, when the ceramic powder is SiC, Al and SiC react to form aluminum carbide (Al ₄ C ₃ ), and this Al ₄ C ₃ easily reacts with moisture in the air at room temperature. To become aluminum hydroxide,
Significantly degrading the physical properties of the composite material,
In order to prevent this, Si must be contained in the aluminum metal. And, in the Al-Si system, Si
Has a eutectic point of 577 ° C. at 11.6%, the melting point is further lowered, and the melting point of Al-5Mg-12Si is 450%.
It was only about ° C.

In order to improve the heat resistance, the inventors have responded by reducing the content of Si and Mg in the aluminum alloy as much as possible. However, when the amount of Mg is reduced, there is a problem that the permeation time of the metal becomes longer, and when the permeation time becomes longer, there is also a problem that pores and unpermeated portions are easily generated in the composite material.

The present invention has been made in view of the above-mentioned problems of the ceramic-metal composite material, and has as its object to provide a metal-ceramic composite material capable of improving heat resistance and a method for producing the same. Is also to provide.

[0010]

Means for Solving the Problems The inventors of the present invention have conducted intensive studies to achieve the above object, and as a result, it has been found that if Ti, Cr or Mn is contained in an aluminum alloy as a matrix, heat resistance can be improved. The present inventors have found that a metal-ceramic composite material that can be obtained can be obtained, and have completed the present invention.

That is, the present invention provides (1) a metal-ceramic composite material in which a ceramic powder is impregnated with a metal, wherein the ceramic powder is made of SiC, Al ₂ O ₃ or A
1N powder, wherein the metal is an aluminum alloy containing Ti, Cr or Mn.
A ceramic composite material (claim 1); and (2)
Aluminum alloy, Ti, Cr or Mn 0.5 ~
2. A method for producing a metal-ceramic composite material according to claim 1, wherein the metal-ceramic composite material is an aluminum alloy containing 20% by weight (claim 2). First, a ceramic powder is prepared, a preform is formed from the ceramic powder, and a Mg-containing metal powder such as Mg or Al-Mg or Mg ₂ Si is thinly spread on the upper surface of the preform. A method for producing a metal-ceramic composite material, comprising: mounting an aluminum alloy containing Ti, Cr or Mn, and then infiltrating the preform with a temperature of 700 to 1000 ° C (Claim 3). And (4)
In a method for producing a metal-ceramic composite material in which a metal is infiltrated into a ceramic powder, first, a ceramic powder mixed with an impregnating accelerator is prepared, the ceramic powder is filled in a mold, and Mg is contained on the ceramic powder. After placing an aluminum alloy containing Ti, Cr or Mn on the ceramic powder,
A method for producing a metal-ceramic composite material characterized by infiltrating at a temperature of 00 to 1000 ° C. (Claim 4), and (5) A method for producing a metal-ceramic composite material wherein metal is penetrated into ceramic powder. First, after preparing a ceramic powder and forming a preform with the ceramic powder, or after filling the ceramic powder in a mold, containing Mg on the preform or the ceramic powder, and Ti, C
After placing an aluminum alloy containing r or Mn, 700-1000
A method for producing a metal-ceramic composite material characterized by infiltrating an aluminum alloy at a temperature of ° C. (Claim 5). The gist of the invention is to provide a method for producing a metal-ceramic composite material according to claims 3, 4 or 5, characterized in that it is an aluminum alloy containing 20% by weight. This will be described in more detail below.

The ceramic powder in the composite material is made of SiC, Al ₂ O ₃ or AlN powder,
As the metal that has penetrated the ceramic powder, T
A metal-ceramic composite material made of an aluminum alloy containing i, Cr or Mn (claim 1). Ceramic powder of SiC, Al ₂ O ₃ or Al
The reason for using N powder is that these powders easily penetrate into the metal. In addition, the infiltrated metal is Ti, Cr or M
The reason why the aluminum alloy containing n is that Ti, Cr or Mn does not form a eutectic point with Al and has a higher melting point than Al, so that when these metals are added, the melting point is always higher than that of Al and the heat resistance is improved. It depends. This is the same even when a large amount of Mg that lowers the heat resistance is contained. If the content of Mg is the same, the heat resistance is always improved.

[0013] The content of Ti, Cr or Mn is 0.5 to 20% by weight in the aluminum alloy. If the content of Ti, Cr or Mn is less than 0.5% by weight, the effect of improving heat resistance is small, and if the content is more than 20% by weight, the metal penetration rate becomes slow, which is not industrially suitable. Since the effects of these metals are almost the same, they may be appropriately selected and used in consideration of required physical characteristics or economics.

As a method for producing the composite material, when an aluminum alloy containing no Mg is used as a metal to be infiltrated, first, a ceramic powder is prepared, and a preform is formed from the ceramic powder. Spread a thin layer of Mg-containing metal powder such as Mg or Al-Mg, Mg ₂ Si on the top surface, and
After the aluminum alloy containing r or Mn is placed, the aluminum alloy is infiltrated into the preform at a temperature of 700 to 1000 ° C. to provide a method for producing a metal-ceramic composite material.

In this manufacturing method, the metal is infiltrated by laying a metal powder containing Mg between the formed preform and the metal to be infiltrated. Metal does not penetrate the preform. The average particle size of the metal powder is 1 to 300 μm
If it is finer than 1 μm, it reacts with moisture in the atmosphere and becomes Mg (OH) ₂ , which is not preferable.
If it is coarser than m, mixing becomes uneven and a portion where penetration does not proceed is generated. The amount of the metal powder to be laid on the upper surface of the preform is, in order to improve heat resistance, M
It is necessary that the g content be 1% or less. As a method of laying it, it is desirable to sprinkle as uniformly as possible using a sieve or the like. If the amount is insufficient and cannot be evenly distributed, an increased amount may be used by sufficiently mixing with a ceramic powder such as Al ₂ O ₃ .

As another manufacturing method when an aluminum alloy containing no Mg is used, first, a ceramic powder mixed with an impregnation promoter is prepared, the ceramic powder is filled in a mold, and the ceramic powder is placed on the ceramic powder. A method of manufacturing a metal-ceramic composite material, comprising: mounting an aluminum alloy containing Ti, Cr or Mn without containing Mg, and then infiltrating the ceramic powder with the aluminum alloy at a temperature of 700 to 1000 ° C. 4).

In this manufacturing method, a ceramic powder as a reinforcing material is mixed with an impregnating accelerator made of a metal powder containing Mg and filled in a mold. Similarly, the molten metal does not penetrate into the ceramic powder. The average particle size of the metal powder is preferably 1 to 300 μm, as described above. It is necessary to adjust the amount so that the Mg content in the total aluminum alloy is 1% or less.

On the other hand, when using an aluminum alloy containing Mg as the metal to be infiltrated, first prepare a ceramic powder and form a preform with the ceramic powder, or after filling the ceramic powder into a mold. Placing an Mg alloy on the preform or the ceramic powder and an aluminum alloy containing Ti, Cr or Mn, and then infiltrating the preform or the ceramic powder with the aluminum alloy at a temperature of 700 to 1000 ° C. (Claim 5).

In this manufacturing method, since the metal to be impregnated contains Mg, it is not necessary to spread a metal powder containing Mg on the upper surface of the preform, or a ceramic powder to be filled in the mold is filled with the impregnation-promoting material. It does not need to be mixed and can be manufactured in a conventional manner except that the aluminum alloy to be infiltrated contains Ti, Cr or Mn.
And although the heat resistance is inferior to the composite material produced by the method of infiltrating an aluminum alloy containing no Mg, there is an advantage that the permeation time is much shorter.

[0020]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The production method of the present invention will be described in more detail. First, SiC, Al ₂ O ₃ or A
Prepare 1N powder. When producing a preform, an inorganic binder is added to these powders, and if necessary, an organic binder is added and mixed. Any mixing method may be used as long as it can be uniformly mixed.

The resulting mixture is shaped. The molding method is
There are sedimentation molding, injection molding, CIP molding and the like, but any method may be used. In short, any method can be used as long as it can maintain the form of the preform to penetrate the metal under no pressure and does not hinder the penetration. The obtained molded body is 9
It is fired at a temperature of 00 to 1100 ° C. to form a preform. When infiltrating an aluminum alloy containing no Mg, 1 to 300 μm
When a metal powder containing Mg having an average particle size of is sprinkled using a sieve or the like and spread thinly, and an aluminum alloy containing Ti, Cr or Mn is placed thereon, or an aluminum alloy containing Mg is infiltrated. After placing an aluminum alloy containing Ti, Cr or Mn as it is without laying metal powder on the preform, infiltrate the aluminum alloy at a temperature of 700 to 1000 ° C. in a nitrogen stream without pressure, Cool to make composite material.

On the other hand, when filling the mold with an aluminum alloy not containing Mg, a metal powder containing Mg having an average particle diameter of 1 to 300 μm, which is an impregnation accelerator, is added to the ceramic powder. And dry-mixing, and after filling the mixed powder into a mold, or
When infiltrating an aluminum alloy containing, the ceramic powder is directly filled in the mold, and then the metal is infiltrated into the filled ceramic powder from above the mold in the same manner as in the case of the preform described above. As a material used for the mold, a material that has poor wettability with a molten metal such as graphoil and inhibits permeation is preferable, and demolding after permeation becomes easy.

When a metal-ceramic composite material is produced by the above method, a metal-ceramic composite material having improved heat resistance can be obtained.

[0024]

EXAMPLES Hereinafter, the present invention will be described in more detail by giving specific examples of the present invention.

Example 1 (1) Formation of Preform A silica-coated AlN powder (manufactured by Dow Chemical Company) having an average particle size of 16 μm was used as a reinforcing material, and a colloidal silica liquid was used as a binder and the silica solid content was used as a binder. Was added in an amount of 2 parts by weight with respect to 100 parts by weight of the ceramic powder, 30 parts by weight of ion-exchanged water was further added, and the mixture was mixed for 16 hours in a pot mill without a medium.
The obtained slurry was poured into a silicone rubber mold from which a molded body having a size of 80 × 80 × 20 mm was obtained, subjected to sediment casting (sedimentation molding), and cooled to −30 ° C. to obtain a frozen product. The obtained frozen product was baked at 700 ° C. for 5 hours to form four preform plates.

(2) Preparation of Composite Material 200 g of powder obtained by mixing Al ₂ O ₃ powder and Mg powder 150 μm under at a weight ratio of 9: 1 on the upper surface of the preform.
Is spread thinly by using a sieve, and further, a 1 / 2-fold amount of pure Al, Al-5Ti composition, Al-5Cr composition, Al-5
A plate having an Mn composition was placed on each preform plate, and allowed to infiltrate at 875 ° C. in a nitrogen atmosphere without pressure for 45 hours, and then cooled to produce a metal-ceramic composite material.

(3) Evaluation A test piece of 80 × 20 × 4 mm was cut out from the obtained composite material, and the test piece was kept at 620 ° C. for 2 hours in the atmosphere. It was visually observed. As a result, it was observed that the molten alloy in the form of spherical droplets adhered to the surface of the test piece impregnated with pure Al, whereas the test piece impregnated with the aluminum alloy containing Ti, Cr or Mn was completely molten. There was no evidence of this. This means that A
This indicates that when Ti, Cr or Mn is included in l, heat resistance is improved as compared with Al.

Example 2 (1) Formation of Preform Commercially available # 180 (average particle size 66 μm) Si as a reinforcing material
To 70 parts by weight of C powder and 30 parts by weight of commercially available SiC powder of # 800 (average particle size: 14 μm), a colloidal silica liquid was added as a binder in an amount such that the silica solid content was 2 parts by weight with respect to 100 parts by weight of ceramic powder. Then, 0.2 parts by weight of FORMASTER VL (manufactured by Sannobuco) as an antifoaming agent was added thereto, and 24 parts by weight of ion-exchanged water was further added thereto, followed by mixing in a pot mill without a medium for 12 hours. The obtained slurry was poured into a silicone rubber mold from which a molded body having a size of 80 × 80 × 20 mm was obtained, subjected to sediment casting (sedimentation molding), and cooled to −30 ° C. to obtain a frozen product. The obtained frozen product was fired at 1050 ° C. for 3 hours to form four preform plates.

(2) Preparation of Composite Material A commercially available AC8B composition (Al-Si
-Cu-Ni-Mg-based) and 3% by weight of Mg (hereinafter abbreviated as AC8B-3Mg), and 1% by weight of Ti, Cr or Mn added thereto.
After placing each in a 0-fold amount and infiltrating non-pressure at a temperature of 825 ° C. for 24 hours in a nitrogen atmosphere, it was cooled to prepare a metal-ceramic composite material.

(3) Evaluation A test piece having a length of 80 × width 20 × 4 mm in thickness was cut out from the obtained composite material, and the test piece was placed in an electric furnace set at a temperature of 550 ° C. in the atmosphere to obtain a test piece. After holding for a time, the surface was visually observed. As a result, in the test piece in which AC8B-3Mg was infiltrated, it was observed that a molten alloy in the form of spherical droplets adhered to the surface, but Ti and Cr were added to AC8B-3Mg.
Alternatively, there was no evidence of melting at all in the test piece impregnated with the alloy containing Mn. This shows that when Ti, Cr or Mn is contained in the aluminum alloy, the heat resistance is improved as compared with the case where the same amount of Mg is contained.

[0031]

As described above, the metal-ceramic composite material of the present invention can be a metal-ceramic composite material which can improve heat resistance even if it contains Mg, not to mention containing Mg. It became so. This makes it possible to greatly improve the low heat resistance, which has been a drawback in the past. Particularly, those using AlN powder as the reinforcing material have heat resistance higher than 600 ° C., light weight, and high rigidity. There is no other material that can withstand such a high temperature while having the above, and a wide range of applications can be expected mainly for members of semiconductor manufacturing equipment.

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Mutsumi Hayashi 560 Omaki, Urawa-shi, Saitama (72) Inventor Heishiro Takahashi 314-1 Matsudo-Shinda, Matsudo-shi, Chiba (72) Inventor Takeshi Higuchi Tokyo Higashi-Kurume, Tokyo 1-3-9 Hikawadai, City (72) Inventor Tomiwa Koyama 1-3-1-805, Ukima, Kita-ku, Tokyo

Claims (6)

[Claims] 1. A metal-ceramic composite material having a ceramic powder impregnated with a metal, wherein the ceramic powder is made of SiC, Al ₂ O ₃ or AlN powder, and the metal is an aluminum alloy containing Ti, Cr or Mn. A metal-ceramic composite material, comprising: 2. The metal-ceramic composite material according to claim 1, wherein the aluminum alloy is an aluminum alloy containing 0.5 to 20% by weight of Ti, Cr or Mn. 3. A method for producing a metal-ceramic composite material in which a metal is infiltrated into a ceramic powder. First, a ceramic powder is prepared, a preform is formed from the ceramic powder, and Mg or Al— A thin layer of Mg-containing metal powder such as Mg, Mg ₂ Si or the like is placed thereon, and an aluminum alloy containing no Ti, Cr or Mn without Mg is placed thereon. Then, the aluminum alloy is placed on the preform at a temperature of 700 to 1000 ° C. A method for producing a metal-ceramic composite material, characterized by infiltrating. 4. A method for producing a metal-ceramic composite material in which a metal is impregnated into a ceramic powder, first, a ceramic powder mixed with an impregnation promoter is prepared, and the ceramic powder is filled in a mold. A method for producing a metal-ceramic composite material, comprising: mounting an aluminum alloy containing Ti, Cr, or Mn without containing Mg thereon, and then infiltrating the ceramic powder with a temperature of 700 to 1000 ° C. 5. A method for producing a metal-ceramic composite material in which a metal is infiltrated into a ceramic powder. First, a ceramic powder is prepared and a preform is formed from the ceramic powder, or the ceramic powder is filled in a mold. After that, Mg is contained on the preform or ceramic powder, and Ti, Cr or M
metal on the preform or ceramic powder at a temperature of 700 to 1000 ° C. after placing an aluminum alloy containing n.
Manufacturing method of ceramic composite material. 6. The method for producing a metal-ceramic composite material according to claim 3, wherein the aluminum alloy is an aluminum alloy containing 0.5 to 20% by weight of Ti, Cr or Mn.