JP2002178323A - Ceramic green sheet processing apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a ceramic green sheet processing apparatus extremely useful for applying two or more processings to a ceramic green sheet at the same time. SOLUTION: The polarizing direction of beam incident on respective polarizing half mirrors 3a-3c is operated by rotating the 1/2 wavelength plates 2a-2c, which are respectively provided to three beam splitting parts Da-Dc constituting a beam splitting means, centering around a beam incident axis to change the reflectivities and transmissivities in the respective polarizing half mirrors 3a-3c to finely adjust the energy intensities of four split beams LBa-LBd and the energy intensities of the split beams LBa-LBd can be allowed to coincide with each other by this fine adjustment. Further, since polarized laser beam wherein the presence place of the position vector of an electric field has an area is used as laser beam LB to be divided, the adjustment of energy intensities can be accurately performed in a minute unit as compared with a case setting laser beam of linear, circular or oval polarization to a splitting object.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a ceramic for splitting a laser beam emitted from a laser oscillating means into two or more beams and simultaneously processing two or more ceramic green sheets by using the split beams. The present invention relates to a green sheet processing device.

[0002]

2. Related Background Art As a method of dividing a processing laser beam into two or more, a prism division method and a half mirror division method are known.

In the former prism splitting method, beam splitting is performed by partially refracting an incident beam in a different direction. In the latter half mirror splitting method, a part of the incident beam is transmitted and the other part is reflected. Performs beam splitting.

[0004]

In the former prism splitting method, which splits an incident beam into areas, the ratio of the energy intensity of the split beam depends on the energy intensity distribution of the incident beam. Therefore, it is extremely difficult to obtain a split beam having a predetermined ratio of energy intensity, as well as to obtain a split beam having the same energy intensity.

In the latter half-mirror splitting method, since the incident beam is split using polarized light, the energy intensity distribution of the incident beam does not matter as in the prism splitting method. However, the ratio of the energy intensity of the split beam is determined to a specific ratio by the reflectance and the transmittance of the half mirror, and there is an influence of the tolerance of the reflectance and the transmittance. It is difficult to obtain a split beam.

In order to simultaneously perform two or more processes on a special member such as a ceramic green sheet, it is possible to obtain a divided beam having the same energy intensity, as well as a divided beam having a predetermined ratio of energy intensity. Must be devised so that can be obtained arbitrarily.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a ceramic green sheet processing apparatus which is extremely useful when performing two or more processings on a ceramic green sheet simultaneously. It is in.

[0008]

To achieve the above object, the present invention comprises a laser oscillating means and a beam splitting means for splitting a laser beam emitted from the laser oscillating means into two or more beams. A ceramic green sheet processing apparatus for simultaneously performing two or more processes on a ceramic green sheet using two or more split beams obtained by a splitting unit, wherein the laser oscillation unit determines whether the position of an electric field position vector exists. A half-wave plate rotatable about a beam incident axis;
Its main feature is that it comprises at least one beam splitting section having a polarizing half mirror for splitting a laser beam transmitted through a half-wave plate into two beams.

According to this processing apparatus, the half-wave plate provided in the beam splitting unit is rotated about the beam incident axis to control the polarization direction of the beam incident on the polarization half mirror, thereby obtaining the polarization. The energy intensity of the split beam can be arbitrarily adjusted by changing the reflectance and the transmittance of the half mirror. In addition, as a laser beam to be divided, a polarized laser beam having an area where the position vector of the electric field exists has an area.
The adjustment of the energy intensity can be accurately performed in minute units as compared with a case where a linearly polarized light, a circularly polarized light, or an elliptically polarized laser beam is to be split.

The above and other objects, constitutional features, and operational effects of the present invention will become apparent from the following description and the accompanying drawings.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows an embodiment of the present invention. In the drawing, reference numeral 1 denotes a laser oscillator, LB denotes a laser beam, Da to Dc denote a beam splitting unit, and 2a to 2c denote 1s.
/ 2 wavelength plate, 3a-3c are polarization half mirrors, 4a-4
c is a total reflection mirror, 5a to 5d are condenser lenses, 6a to 6
d is an optical fiber, 7a to 7d are objective lenses, LBa to
LBd is a split beam, 8 is a variable attenuator,
9a to 9d are apertures, 10 is a rotating drum, and GS is a ceramic green sheet (hereinafter simply referred to as a green sheet).

The laser oscillator 1 is a green sheet GS
A laser beam LB having an output sufficient for performing processing such as formation of a through hole can be emitted. This laser oscillator 1
Is preferably a normal pulse oscillation, and 1064
It is composed of a YAG laser capable of outputting a fundamental wave or a harmonic wave of nm, but a known laser oscillator such as a CO ₂ laser or an excimer laser may be used. The laser beam LB emitted from the front mirror of the laser oscillator 1 is different from linearly polarized light, circularly polarized light, or elliptically polarized light, and is a polarized laser beam having an area where the position vector of the electric field exists. Such a randomly polarized laser beam LB can be obtained when there is no optical member for performing polarization operation in the resonator, but the laser beam emitted from the excited laser rod is arranged around the laser rod. It can be positively obtained by reflecting the light from a mirror to increase the amount of excitation, or by exciting the laser rod with a large number of excitation lamps to increase the amount of excitation.

The three beam splitting units Da to Dc constitute beam splitting means in the present apparatus. Among the three beam splitters Da to Dc, the first beam splitter Da is disposed after the laser oscillator 1, and the second beam splitter Db and the third beam splitter Dc are the first beam splitter. It is arranged after Da. As can be seen from the figure, the first beam splitting unit Da includes a first half-wave plate 2a, a first polarization half mirror 3a and a first total reflection mirror 4a,
The beam splitting unit Db includes a second half-wave plate 2b, a second polarization half mirror 3b, and a second total reflection mirror 4b, and the third beam splitting unit Dc includes a third half-wave plate. 2c
And the third polarization half mirror 3c and the third total reflection mirror 4
c.

The half-wave plates 2a to 2c provided in each of the beam splitters Da to Dc are arranged so that their normal lines coincide with or become parallel to the beam incident axis. It is configured to be able to rotate about an axis. Each of the half-wave plates 2a to 2c has a function of shifting the phase of the incident beam by 180 degrees, and a function of arbitrarily controlling the polarization direction of the incident beam by rotating the beam about the beam incident axis.

The polarization half mirrors 3a to 3c provided in each of the beam splitters Da to Dc are arranged such that the normal line has a 45-degree inclination with respect to the beam incident axis. Each of the polarization half mirrors 3a to 3c has a specific polarization direction such as S-polarized light or P-polarized light, and has a function of transmitting a part of the incident beam and reflecting the other part.

Further, the total reflection mirrors 4a to 4c provided in each of the beam splitting units Da to Dc are arranged such that the normal line has a 45-degree inclination with respect to the beam incident axis. Each of the total reflection mirrors 4a to 4c has a function of reflecting the entire incident beam.

The first of the four condenser lenses 5a to 5d
Is disposed after the total reflection mirror 4b of the second beam splitting unit Db, and the second condensing lens 5b is disposed after the polarization half mirror 3b of the second beam splitting unit Db. The third condenser lens 5c is disposed downstream of the polarization half mirror 3c of the third beam splitter Dc, and the fourth condenser lens 5d is disposed downstream of the total reflection mirror 4c of the third beam splitter Dc. Have been. Each condenser lens 5a
5d has a function of condensing each of the four split beams obtained by the above-described beam splitting means and making the condensed split beams respectively enter the four optical fibers 6a to 6d arranged at the subsequent stage. Further, the four condenser lenses 5a to 5d are arranged such that the distance L between the center of each of the condenser lenses and the emission end (front mirror) of the laser oscillator 1 is constant.

Of the four optical fibers 6a to 6d, the proximal end of the first optical fiber 6a is disposed downstream of the first condenser lens 5a, and the proximal end of the second optical fiber 6b is the second optical fiber 6b.
The third optical fiber 6c has a proximal end disposed downstream of the third condenser lens 5c, and a proximal end of the fourth optical fiber 6d disposed downstream of the fourth condenser lens 5d. It is arranged at the latter stage. Each optical fiber 6a
6d have a length of about several meters, and serve to transmit each of the incident split beams to an arbitrary position.
Although each of the optical fibers 6a to 6d has basically the same length, there is no problem in beam transmission even if the length is slightly different.

The four objective lenses 7a to 7d are arranged outside the rotary drum 10 so as to be arranged in parallel with the rotation axis of the rotary drum 10 and at equal intervals with the outer peripheral surface of the rotary drum 10. Have been. Four objective lenses 7
a to 7d, the first objective lens 7a
The end of the optical fiber 6a is arranged, the end of the second optical fiber 6b is arranged before the second objective lens 7b, and the end of the third optical fiber 6c is arranged before the third objective lens 7c. An end of the fourth optical fiber 6d is arranged in front of the fourth objective lens 7d. Each of the objective lenses 7a to 7d has a function of condensing the divided booms emitted from the four optical fibers 6a to 6d, respectively, and irradiating the condensed divided beam to a green sheet GS disposed at a subsequent stage. .

The variable attenuator 8 is used as a means for adjusting the beam energy, and the apertures 9a to 9a are arranged in front of the four condenser lenses 5a to 5d.
9d is used as a means for shaping an incident beam and selecting an area.

The rotary drum 10 is formed in a cylindrical shape from a metal such as stainless steel, and is rotatably disposed on a slide table (not shown). The rotary drum 10 can be rotated in a predetermined direction by a rotary drive source (not shown). Incidentally, the slide table supporting the rotary drum can be moved linearly in a direction parallel to the rotation axis of the rotary drum 10 by a linear drive source (not shown). Further, a large number of suction holes are formed on the outer peripheral surface of the rotating drum 10, and the green sheet GS is attached to the outer peripheral surface of the rotating drum 10 by negative pressure acting on the suction holes.

The green sheet GS is a laminated electronic component,
For example, it is used when manufacturing a multilayer chip inductor or the like, and has predetermined vertical and horizontal dimensions and thickness dimensions. Incidentally, this green sheet GS is prepared by applying a slurry prepared by mixing a ceramic powder for a part, a binder, a solvent, and the like to a band-shaped base film at a predetermined thickness and drying the band-like material. It can be obtained by punching out a predetermined size and removing it, or by punching out only a green sheet and removing it by a predetermined size. Depending on the size of the green sheet GS, one or more green sheets GS are attached to the outer peripheral surface of the rotating drum 10.

As shown in FIG. 1, the laser beam LB emitted from the laser oscillator 1 is transmitted through a variable attenuator 8 to a first half of a first beam splitter Da.
The beam incident on the wave plate 2a and having its phase changed by the first half-wave plate 2a is
a. Part of the beam incident on the first polarization half mirror 3a is transmitted through the first polarization half mirror 3a and guided to the second beam splitting unit Db. The other part of the beam that has entered the first polarization half mirror 3a is reflected by the first polarization half mirror 3a, further reflected by the first total reflection mirror 4a, and guided to the third beam splitter Dc. I will

The beam guided from the first beam splitter Da to the second beam splitter Db is applied to the second half-wave plate 2b.
And the phase of which is changed by the second half-wave plate 2a is incident on the second polarization half mirror 3b. Part of the beam incident on the second polarization half mirror 3b is reflected by the second polarization half mirror 3b,
The aperture 9a is reflected by the second total reflection mirror 4b.
Through the first condenser lens 5a. Also, the second
The other part of the beam incident on the polarization half mirror 3b is the second
Through the polarization half mirror 3b, and is guided to the second condenser lens 5b via the aperture 9b.

On the other hand, the beam guided from the first beam splitter Da to the third beam splitter Dc is incident on the third half-wave plate 2c, and the phase is shifted by the third half-wave plate 2c. Is changed into the third polarization half mirror 3c. Part of the beam incident on the third polarization half mirror 3c is transmitted through the third polarization half mirror 3c and guided to the third condenser lens 5c via the aperture 9c. The other part of the beam that has entered the third polarization half mirror 3c is reflected by the third polarization half mirror 3c, further reflected by the third total reflection mirror 4c, and transmitted through the aperture 9d to the fourth collector. The light is guided to the optical lens 5d.

As described above, the laser beam LB emitted from the laser oscillator 1 is divided into four beams. The split beam incident on the first condenser lens 5a is condensed by the first condenser lens 5a, then enters the base end of the first optical fiber 6a, and is incident on the second condenser lens 5b. Is incident on the base end of the second optical fiber 6b after being condensed by the second condenser lens 5b, and is incident on the third condenser lens 5c.
Is split by the third condenser lens 5c and then enters the base end of the third optical fiber 6c.
The divided beam incident on the condensing lens 5d is condensed by the fourth condensing lens 5d and then incident on the base end of the fourth optical fiber 6d.

The split beam that has entered the base end of the first optical fiber 6a is transmitted through the first optical fiber 6a and is incident on the first objective lens 7a.
The split beam incident on the base end of b is transmitted through the second optical fiber 6b and is incident on the second objective lens 7b,
The split beam incident on the proximal end of the third optical fiber 6c is transmitted through the third optical fiber 6c and is incident on the third objective lens 7c, and the split beam incident on the proximal end of the fourth optical fiber 6d is The light is transmitted through the fourth optical fiber 6d and enters the fourth objective lens 7d.

The split beam incident on the first objective lens 7a is condensed by the first objective lens 7a and then irradiated onto the green sheet GS. The split beam incident on the second objective lens 7b is output from the second objective lens 7b. After being condensed by the lens 7b, the green sheet GS is irradiated onto the green sheet GS, and the split beam incident on the third objective lens 7c is condensed by the third objective lens 7c, and then irradiated onto the green sheet GS, and the fourth object The split beam that has entered the lens 7d is condensed by the fourth objective lens 7d, and is then applied to the green sheet GS.

The green sheet GS on the outer peripheral surface of the rotary drum 10 is thus divided into four divided beams LBa to LB.
d is irradiated simultaneously, and thereby the green sheet GS
For this purpose, four processes, for example, processes such as formation of a through hole and formation of a concave portion are simultaneously performed.

When the green sheet GS is intermittently irradiated with the four divided beams LBa to LBd while rotating the rotating drum 10 at a constant speed in a predetermined direction, the green sheets GS are aligned with rows of through holes and concave portions in the drum rotating direction. And if the rotary drum 10 is moved a predetermined distance in a direction parallel to the rotation axis immediately before the rotary drum 10 makes one rotation, the processing trajectory by the four divided beams LBa to LBd can be easily formed. Can be changed to Further, while rotating the rotating drum 10 at a constant speed in a predetermined direction and linearly moving the rotating drum 10 at a constant speed in a direction parallel to the rotation axis, four divided beams LBa are applied to the green sheet GS.
If LBd is intermittently irradiated, four rows of through holes and concave portions can be spirally formed in the green sheet GS.

In order to perform the same four processes on the green sheet GS using the four divided beams LBa to LBd, the energy intensity ratio of the four divided beams LBa to LBd applied to the green sheet GS is determined. 1:
It must be 1: 1: 1.

When the ratio of the energy intensities of the four split beams LBa to LBd is 1: 1: 1: 1, basically, the first polarization half mirror 3a, the second polarization half mirror 3b, and the As the third polarization half mirror 3c, one having a reflectance: transmittance = 1: 1 is used. However, since the reflectance and the transmittance include a tolerance, the ratio between the energy intensities of the reflected beam and the transmitted beam is not necessarily 1 :.
It does not become 1.

In such a case, the four objective lenses 7
A laser beam LB is emitted from the laser oscillator 1 in a state where an appropriate sensor capable of measuring the energy intensity is arranged at the subsequent stage of a to 7d, and four divided beams LBa to LBd
Measuring the actual energy intensity of the first half
An operation of appropriately rotating the wave plate 2a, the second half-wave plate 2b, and the third half-wave plate 2c about the beam incident axis is performed. Each of the three polarization half mirrors 3a to 3c has a unique reflectance and transmittance, but the polarization direction of the beam incident on each of the polarization half mirrors 3a to 3c is changed to a half-wave plate 2a to 3 By operating with 2c, the reflectance and transmittance of each of the polarization half mirrors 3a to 3c can be changed, and the energy intensity of each of the split beams LBa to LBd can be finely adjusted based on this change. Of course, if each of the polarization half mirrors 3a to 3c is configured to be rotatable so that the angle can be changed, fine adjustment of the energy intensity can be similarly performed by rotating the polarization half mirrors 3a to 3c. .

When the linearly polarized laser beam LB is divided, the polarization plane has a specific phase.
The operation of the polarization direction in the half-wave plates 2a to 2c may be biased or limited. For this reason, each polarization half mirror 3
In order to change the reflectance and transmittance in a to 3c in minute units, it is important to use a polarized laser beam having an area where the position vector of the electric field exists as the laser beam LB.

When the energy intensity of the four divided beams LBa to LBd is finely adjusted by rotating each of the half-wave plates 2a to 2c, first, the first divided beam LBa and the second divided beam LBb are The sum of the energy intensities, the third split beam LBc and the fourth split beam L
Bd is compared with the sum of the energy intensities, and when there is a difference between the two, the first half-wave plate 2a is appropriately rotated about the beam incident axis to obtain the first split beam LB.
a and the sum of the energy intensities of the second split beam LBb;
The sum of the energy intensities of the third split beam LBc and the fourth split beam LBd is matched. Next, the energy intensity of the first split beam LBa and the second split beam LBb
And if there is a difference between the two, the second half-wave plate 2b is appropriately rotated about the beam incident axis, and the energy intensity of the first split beam LBa is compared with the energy intensity of the first split beam LBa. The energy intensity of the two split beams LBb is matched. The energy intensity of the third split beam LBc is compared with the energy intensity of the fourth split beam LBd.
By appropriately rotating the two-wavelength plate 2c about the beam incident axis, the energy intensity of the third split beam LBc and the fourth
And the energy intensity of the divided beam LBd.

As described above, according to the above-described apparatus, the half-wave plates 2a to 2c provided in the three beam splitters Da to Dc constituting the beam splitter are rotated around the beam incident axis. Polarization half mirrors 3a-3
By manipulating the polarization direction of the beam incident on c, the reflectance and transmittance of each of the polarization half mirrors 3a to 3c are changed to finely adjust the energy intensity of the four split beams LBa to LBd. Split beam LBa
To LBd.
When each of the polarization half mirrors 3a to 3c is rotatable so that an angle change or the like can be performed, fine adjustment of the energy intensity is similarly performed by rotating the polarization half mirrors 3a to 3c, and each division is performed. Beam LBa-LB
d can have the same energy intensity.

The laser beam LB to be divided is
Since the position of the electric field position vector uses a polarized laser beam having an area, compared with the case where the linearly, circularly, or elliptically polarized laser beam LB is to be divided, the energy intensity The adjustment can be performed accurately in minute units.

Further, since the distance L between the center of each of the condenser lenses 5a to 5d and the emission end (front mirror) of the laser oscillator 1 is fixed, the distance between each of the condenser lenses 5a to 5d and the green sheet GS is set. Can be easily made the same, and a mechanism for adjusting the distance from the green sheet GS for each of the condenser lenses 5a to 5d is not required, and the apparatus can be simplified. In this case, it is preferable that the diameter of the beam incident on each of the condenser lenses 5a to 5d is made uniform by the apertures 9a to 9d arranged in front of the condenser lenses 5a to 5d.

In the above description, the laser beam LB emitted from the laser oscillator 1 is divided into four beams. However, by increasing or decreasing the number of the beam splitters Da to Dc, the number of beam splits can be appropriately adjusted. Can be increased or decreased.

Also, the beam splitters LBa to LBd having the same energy intensity have been exemplified. However, the polarization half mirrors 3a to 3c provided in the beam splitters Da to Dc are illustrated.
By changing the reflectivity and transmittance of the polarization half mirror c, the energy intensity of the divided beams can be arbitrarily changed. In the above-described apparatus, the ratio of the energy intensities of the four divided beams is, for example, 1: 1: 1: 2
Or 1: 1: 2: 2 or 1: 2: 3: 4.

Further, a mask is provided in front of the four objective lenses 7a to 7d to define the beam irradiation shape.
A mask may be provided downstream of the three objective lenses 7a to 7d to regulate the energy of the beam applied to the green sheet GS.

Further, each of the objective lenses 7a to 7d is configured to be rotatable so that the angle can be changed or the like so that fine adjustment of the irradiation position can be performed, or each of the objective lenses 7a to 7d can be linearly moved in the optical axis direction. And fine adjustment of the irradiation shape may be performed.

Further, the half-wavelength plates 2a to 2d are arranged so that the optical path lengths from the emission end (front mirror) of the laser oscillator 1 to each of the condenser lenses 5a to 5d are equal.
2c and the positions of the polarization half mirrors 3a to 3c are changed, the diameters of the incident beams to the respective condenser lenses 5a to 5d are made equal, and the divided beams are respectively transmitted to the respective optical fibers 6 under the same conditions.
a to 6d. In this case, the aperture 9
a to 9d are not necessarily required.

Further, a dust collecting mechanism such as an air blow may be provided outside the rotary drum 10 in order to prevent processing dust, dust and the like from adhering to the green sheet GS and peripheral devices during processing.

In addition, while the intended processing is performed by irradiating the split beam toward the green sheet provided on the outer peripheral surface of the rotary drum, the green sheet is provided on a XY table or other movable table. The same operation and effect as described above can be obtained even when the split beam is irradiated to the green sheet.

Hereinafter, another embodiment applicable to the above-described apparatus will be described.

FIG. 2 shows the polarization half mirrors 3a to 3a.
3C shows a method of changing the energy intensity of the reflected beam. The polarization half mirror shown in FIG. 2 is configured by forming a thin film CF having a predetermined thickness d for preventing generation of scattered light on a surface on the beam incident side of the mirror substrate MS. Incidentally, the mirror substrate MS has BK-7 (borosilicate crown glass (refractive index = 1.5).
2)) and the like, and the thin film CF is made of MgF
₂ (refractive index = 1.38-1.40), CaF ₂ (refractive index = 1.23-1.46), MgO (refractive index = 1.74)
And a material such as ZnS (refractive index = 2.3).

In the polarization half mirror having such a thin film CF, when the beam is incident at an incident angle θ, the light reflected on the surface of the thin film CF and the light reflected on the surface of the mirror substrate MS are thick lines. Has an optical path difference OPD as shown in FIG. The optical path difference OPD is OPD = 2d (n1) when the air refractive index is 1, the refractive index of the thin film CF is n1, the thickness of the thin film CF is d, and the refractive index of the mirror substrate MS is n2.
²⁻ sin ² θ) ^1/2 . Thin film CF
N1 and the refractive index n2 of the mirror substrate MS are n1 ≦
When the optical path difference OPD is n2, the reflected light intensity is maximum when the optical path difference OPD is an integral multiple of the beam wavelength λ, and the reflective intensity is minimum when the optical path difference OPD is (integer + 1/2). Further, when the refractive index n1 of the thin film CF and the refractive index n2 of the mirror substrate MS have a relationship of n1 ≧ n2, the reflected light intensity becomes minimum when the optical path difference OPD is an integral multiple of the beam wavelength λ,
The reflection intensity becomes maximum when the value is (integer +1/2) times. That is, the energy intensity of the reflected beam can be changed by increasing or decreasing the optical path difference OPD by changing the beam incident angle θ to the polarization half mirror.

The beam incident angle θ to each of the polarization half mirrors 3a to 3c can be changed by tilting the half-wave plates 2a to 2c disposed at the front stage, so that the half-wavelength If the plates 2a to 2c are configured to be tilted by manual operation, the half-wave plates 2a to 2c
By performing the operation of tilting 2c, the energy intensity of the reflected beam and the transmitted beam can be arbitrarily changed.

FIG. 3 shows a method of arranging the objective lens so that the distance between the objective lens and the outer peripheral surface of the rotary drum 10 is different. If the lens diameter LR (including the outer diameter of the lens holder) of the objective lenses 7a to 7d is close to the processing pitch PP, or if LR ≧ PP, the objective lens 7a
To 7d are difficult to arrange so that the opposing intervals with the outer peripheral surface of the rotating drum 10 are equal.

In such a case, the objective lenses 7a to 7a
d may be arranged alternately at two opposing intervals WD1 and WD2, and the refracting element 11 may be disposed after the objective lenses 7b and 7d having a large opposing interval WD2. Incidentally, the refraction element 11 can be made of a transparent material having a higher refractive index than air, such as glass.
In this way, the facing distance W between the objective lenses 7a and 7c
Even when D1 and the facing distance WD2 between the objective lenses 7b and 7d are different, the processing size by the divided beam can be made the same. In addition, since it is possible to arrange the four objective lenses 7a to 7d at a narrow pitch, it is extremely effective when increasing the number of beam splits and the number of objective lenses.

[0052]

As described in detail above, according to the present invention,
An extremely useful processing apparatus can be provided when performing two or more processes on a ceramic green sheet at the same time.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of an apparatus showing an embodiment of the present invention.

FIG. 2 is a diagram showing a method of changing the energy intensity of a reflected beam in a polarizing half mirror.

FIG. 3 is a diagram showing a method in a case where an objective lens is arranged so that a facing distance with an outer peripheral surface of a rotating drum is different.

[Explanation of symbols]

1: laser oscillator, LB: laser beam, Da to D
c: beam splitting unit, 2a to 2c: 1/2 wavelength plate, 3a to
3c: polarization half mirror, 4a-4c: total reflection mirror,
5a to 5d: condenser lens, 6a to 6d: optical fiber,
7a to 7d: objective lens, LBa to LBd: split beam, 8: variable attenuator, 9a to 9d: aperture, 10: rotating drum, GS: ceramic green sheet.

──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) H05K 3/00 B28B 11/00 Z (72) Inventor Hiroshi Takahashi 6-16-20 Ueno, Taito-ku, Tokyo Taiyo Denki Co., Ltd. (72) Inventor Kan Yamanaka 6-16-20 Ueno, Taito-ku, Tokyo Taiyo Denki Co., Ltd. (72) Satoshi Takakuwa 6-16-20 Ueno, Taito-ku, Tokyo Taiyo Invitation (72) Inventor Mitsuo Ueno 6-16-20 Ueno, Taito-ku, Tokyo Taiyo Denki Co., Ltd. (72) Inventor Masakazu Sugawara 6-16-20 Ueno, Taito-ku, Tokyo Taiyo Denki Stock In-house F term (reference) 4E068 CB05 CB10 CD03 CD12 CE08 DA09 4G055 AA08 BA74 BA83 BB14 5F072 AB01 JJ20 SS06 SS10 YY06

Claims (5)

[Claims] 1. A laser oscillating means comprising: a laser oscillating means; and a beam splitting means for splitting a laser beam emitted from the laser oscillating means into two or more beams, using two or more split beams obtained by the beam splitting means. An apparatus for processing a ceramic green sheet, wherein two or more processings are simultaneously performed on the ceramic green sheet, wherein the laser oscillation unit can emit a polarized laser beam having an area where the position vector of the electric field is present, The splitting means includes at least one beam splitting unit having a half-wave plate rotatable about a beam incident axis and a polarizing half mirror for splitting a laser beam transmitted through the half-wave plate into two beams. An apparatus for processing a ceramic green sheet. 2. The beam splitting means includes a half-wave plate rotatable about a beam incident axis, and a polarizing half mirror for splitting a laser beam transmitted through the half-wave plate into two beams. The apparatus for processing a ceramic green sheet according to claim 1, wherein two or more beam splitting sections are continuously provided, and the beam splitting means can output at least three or more split beams. 3. The ceramic green sheet processing apparatus according to claim 1, wherein the polarization half mirror is configured to be rotatable. 4. A condensing lens, into which the split beam obtained by the beam splitting means is incident, corresponding to the number of split beams, wherein each condensing lens has a distance between the center thereof and the emission end of the laser oscillation means. The ceramic green sheet processing apparatus according to any one of claims 1 to 3, wherein the processing apparatus is arranged so as to be constant. 5. An objective lens for irradiating a split beam to a ceramic green sheet is provided corresponding to the number of split beams, and a split beam emitted from the collective lens is provided between the collective lens and the objective lens. The apparatus for processing a ceramic green sheet according to claim 4, wherein an optical fiber for transmitting a beam to an objective lens is interposed.