JP2002177844A - Apparatus and method for applying coating solution, and apparatus and method for manufacturing plasma display member - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an apparatus and method for applying a coating solution, capable of accurately and uniformly applying the coating solution to a base material in alignment with the stripe direction of the base material to enhance the productivity and quality of the base material, and an apparatus and method for manufacturing a plasma display panel member. SOLUTION: The apparatus for applying the coating solution is provided with a means for detecting the angle θ formed by the stripe direction of the base material and the arranging direction of coating solution discharge orifices 44 and a position control means for altering and controlling the position of the uneven base material on a table 6 or the position of a nozzle 20 so that the angle θsubstantially becomes a right angle. The coating method using the coating apparatus is disclosed. The apparatus and method for manufacturing the plasma display member using the coating apparatus and method are also disclosed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a plasma display panel (PDP), a liquid crystal color filter (LC)
M), which is used in the field of manufacturing optical filters, printed circuit boards, semiconductors, etc., especially in the PDP manufacturing process for applying a high-viscosity coating solution, in a non-contact manner with the surface of an object to be coated such as a glass substrate TECHNICAL FIELD The present invention relates to a coating liquid coating apparatus and a coating method for forming a thin film pattern while discharging a liquid.

[0002]

2. Description of the Related Art In recent years, displays have become increasingly diversified in their system. One of the things that are currently attracting attention is a plasma display that is larger, thinner and lighter than conventional cathode ray tubes. This causes a discharge in a discharge space formed between the front plate and the back plate, and this discharge generates ultraviolet rays having a wavelength of 147 nm as a center from the xenon gas, and the ultraviolet rays excite phosphors in the discharge space. This enables display. R (red),
Full-color display can be achieved by causing the driving circuit to emit light from discharge cells in which phosphors that emit green (G) and blue (B) light are separately applied.

[0003] In addition, recently developed A
A C-type plasma display is formed by laminating a front glass plate on which a display electrode / dielectric layer / protective layer is formed and a back glass plate on which an address electrode / dielectric layer / partition layer / phosphor layer are formed, and forming a stripe shape. He-Xe or Ne-X is formed in a discharge space partitioned by partition walls or grid-shaped partition walls composed of stripe-shaped vertical ribs and horizontal ribs perpendicular thereto.
e has a structure in which a mixed gas of e is sealed.

Each of the R, G, and B phosphor layers has an uneven portion formed by partition walls extending in one direction for each color formed on a back plate of a phosphor paste mainly composed of powdered phosphor particles. Alternatively, the concave portions of the concavo-convex portion formed in a lattice shape are filled in a stripe shape.

[0005] In order to manufacture such a structure with high productivity and high quality, it is important to apply phosphors in a predetermined pattern.

For example, Japanese Patent Application Laid-Open No. Hei 10-27543 discloses a method of applying a coating nozzle having one or a plurality of ejection holes to a space between partitions of a plasma display panel.

However, according to this method, the angle θ between the direction of the stripe and the arrangement direction of the ejection holes cannot be made substantially perpendicular at the time of coating. The envelopes at the start and end of the application are formed obliquely. Also, a nozzle that positions a base material on which a grid-shaped uneven portion formed of a strip-shaped uneven portion or a strip-shaped vertical rib and a transverse rib orthogonal thereto is formed on a table, and moves in a direction perpendicular to the table. In the case where the coating liquid is discharged and applied, since the positioning accuracy of the base material is limited, the application direction and the stripe direction of the base material are positioned so as to be substantially parallel, and fixed on a table. Is difficult. Furthermore, when the application direction and the direction of the stripe-shaped partition wall are largely displaced, the coating liquid may run on the top of the partition wall at the time of application, or may be applied to an adjacent groove where another color is to be applied. Could be done.

Further, Japanese Patent Application Laid-Open No. 52-134368,
JP-A-54-13250, JP-A-54-1325
No. 1 Publication and the like discloses a control device for preventing meandering or the like as a method of applying a predetermined phosphor to a concave portion between convex black matrices on the inner surface of a panel of a striped black matrix type color picture tube. It has been shown to use an improved nozzle arrangement having However, since a single nozzle is used, the method cannot be applied to a method of simultaneously applying to a plurality of uneven portions on the surface, and there is a problem that it takes time to apply using a single nozzle.

That is, according to the present invention, an uneven base having a plurality of stripe-shaped uneven portions or a lattice-shaped uneven portion formed by stripe-shaped vertical ribs and horizontal ribs orthogonal thereto is formed on the surface in one direction. This is based on the premise that a coating liquid is applied to a concave portion of a material with a nozzle having a plurality of openings (discharge holes) with high accuracy in a stripe shape.

In particular, with such a nozzle having a plurality of discharge holes, the direction of the concave portion (stripe direction) of the concave-convex substrate and the relative positional relationship with the concave portion are determined along the concave portion of the concave-convex substrate. As a technique for applying a coating liquid with high precision while maintaining the positional relationship, Japanese Patent Application Laid-Open No. H11-239751 discloses a method of detecting an angle between a stripe direction and an application direction and performing interpolation application. However, in this method, the angle between the nozzle hole arrangement direction and the stripe direction is not mentioned, and the processing accuracy of the nozzle holes and the nozzle attachment accuracy are poor, and the nozzle hole arrangement direction and the stripe direction are not perpendicular to each other. In the case where a single substrate is applied a plurality of times by using a nozzle, a step corresponding to the number of times of application occurs at each nozzle movement pitch at the application start and end positions.

Japanese Patent Application Laid-Open No. H11-204032 discloses a technique in which the interval between stripe-shaped concave portions on a substrate is detected, a nozzle having holes arranged at a constant pitch is used, and the nozzle itself is set at a desired angle. Although the method of applying by matching the pitch of the concave portion and the nozzle hole by rotating is described,
This method also detects the angle formed by the direction of the stripe and the nozzle hole arrangement direction, and does not control the position change of both at a right angle. Further, in this method, coating is performed at the coating start and end positions as in the case of the interpolation coating. Steps corresponding to the number of times are generated.

[0012]

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide an uneven base having a plurality of stripe-shaped uneven portions or lattice-shaped uneven portions formed in one direction on a surface thereof, such as a partition wall of a plasma display. When applying a predetermined coating liquid from a nozzle having a plurality of discharge holes to a concave portion of a material, the coating liquid is uniformly discharged from each discharge hole to surely apply the coating liquid to each concave portion. Easy and accurate along the existing direction, and can be applied uniformly, the application start position and the end position are formed on a straight line parallel to the end of the partition wall,
Provided are an apparatus and method for applying a coating liquid to an uneven substrate, and an apparatus and a method for manufacturing a plasma display, which can apply a coating liquid without protruding from a predetermined concave portion, thereby realizing high productivity and high quality. It is in.

[0013]

Means for Solving the Problems To solve the above problems, (1) The apparatus for applying a coating liquid to an uneven substrate according to the present invention comprises a plurality of stripe-shaped uneven portions or stripes on the surface in one direction. For fixing an uneven substrate on which a lattice-shaped uneven portion composed of a vertical rib and a horizontal rib orthogonal thereto is formed, and a pitch having a correlation with the uneven portion facing the uneven portion of the uneven substrate. A nozzle device having a plurality of coating liquid discharge holes arranged in a straight line, and located at a position facing the uneven portion of the uneven substrate, a coating liquid supply means for supplying a coating liquid to the nozzle device, A coating liquid coating apparatus comprising: a first moving unit that moves a table; and a second moving unit that relatively moves the nozzle device and the table in a direction perpendicular to a moving direction of the first moving unit. , The direction of the stripe and the coating Means for detecting an angle θ formed by the arrangement direction of the liquid ejection holes, and position control means for changing and controlling the position of the uneven substrate or the nozzle device on the table so that the angle θ is substantially a right angle. And a coating liquid coating device.

(2) The position control means has a rotation mechanism for rotating the nozzle device.

(3) Further, the position control means has a position fine adjustment mechanism for making one of the plurality of coating liquid discharge holes coincide with the rotation center of the nozzle device.

(4) The coating liquid application apparatus, wherein the position control means has a rotation mechanism for rotating the uneven substrate.

(5) The coating liquid coating apparatus is characterized in that the means for detecting the angle θ includes recognizing an alignment mark provided on the base material.

(6) Further, the present invention provides the above (1) to (5)
A plasma display member using the coating liquid application device according to any one of the above, and using a paste containing a phosphor powder that emits any of red, green, and blue as the coating liquid in the application device. Manufacturing apparatus.

(7) According to the present invention, there is provided an uneven surface having a plurality of stripe-shaped uneven portions or a grid-shaped uneven portion formed by a stripe-shaped vertical rib and a horizontal rib orthogonal to the surface in one direction. Substrate, the nozzle device having a plurality of coating liquid ejection holes arranged in a straight line at a pitch having a correlation with the uneven portion facing the uneven portion of the uneven substrate, and relatively moved at a right angle, A method of applying a coating liquid, which supplies the coating liquid to the nozzle device and discharges the coating liquid from the coating liquid discharge holes, and applies the coating liquid to the concave portions of the uneven substrate, wherein the direction of the stripe, The position of the uneven substrate or the nozzle device is changed and controlled so that the angle θ between the arrangement direction of the coating liquid discharge holes and the arrangement direction of the coating liquid discharge holes are substantially perpendicular, and the coating direction is parallel to the direction of the stripe. While relatively moving the substrate and the nozzle device A coating liquid method of applying, characterized in that the coating.

(8) A method of applying a coating liquid, wherein the change control is performed by rotating the nozzle device.

(9) A method of applying a coating liquid, wherein the change control is performed by rotating the uneven substrate.

(10) A method of applying a coating liquid, wherein detecting the angle θ includes recognizing an alignment mark provided on the base material.

(11) In the present invention, the method for applying the coating liquid is used, wherein the coating liquid in the coating method is
This is a method for manufacturing a plasma display member using a paste containing a phosphor powder that emits any one of red, green, and blue colors.

By using the above-described apparatus and method, the angle θ between the direction of the stripe and the arrangement direction of the coating liquid discharge holes of the nozzle device having a plurality of coating liquid discharge holes is detected, and the angle θ is substantially determined. By controlling the position of the substrate or the nozzle device so as to be at right angles to the angle, the angle between the arrangement direction of the ejection holes and the direction of the stripe of the uneven substrate is kept at a right angle, and the nozzle opening along the stripe is maintained. The part is moved relatively accurately. Therefore, even during the application, the predetermined application accuracy and the application state are always maintained, and high-precision application can be performed only on the concave portions of the uneven substrate, so that the application start position and the end position are formed in a straight line, and the A desired high-quality coated substrate can be obtained without protruding.

[0025]

DESCRIPTION OF THE PREFERRED EMBODIMENTS (Applying Apparatus and Application Method for Coating Liquid of the Present Invention) Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.

First, before describing the configuration for detecting the angle θ and the configuration of the position control means for changing and controlling the position of the nozzle device, which are the main components of the present invention, the overall configuration of the coating liquid coating apparatus according to the present invention will be described. In particular, an example of the entire configuration of an apparatus for applying a coating liquid to an uneven substrate (for example, for a plasma display panel member) will be described.

FIG. 1 is an overall perspective view of a coating apparatus according to an embodiment of the present invention, and FIG. 2 is a table 6 and a nozzle 20 of FIG.
FIG. 3 is a schematic diagram of the surroundings, and FIG. 3 is a schematic diagram of a position control unit that controls the change of the position of the nozzle 20.

First, the overall configuration of the coating liquid coating apparatus will be described. FIG. 1 shows an example of a coating apparatus applied to manufacture of a plasma display panel according to the present invention. This device has a base 2. A pair of guide groove rails 8 is provided on the base 2, and a table 6 is arranged on the guide groove rails 8. A plurality of suction holes 7 are formed on the upper surface of the table 6 so that the substrate 4 having the surface formed with stripes in one direction at a constant pitch can be fixed to the upper surface of the table 6 by vacuum suction. Is provided. The base material 4 is moved up and down on the table 6 by lift pins (not shown). Further, the table 6 is moved X on the guide groove rail 8 through the slide legs 9.
It is reciprocable in the axial direction.

Between the pair of guide groove rails 8, a feed screw 10 constituting a feed screw mechanism shown in FIG.
Nut-shaped connector 11 fixed to the lower surface of table 6
Extends through it. Both ends of the feed screw 10 are rotatably supported by bearings 12, and one end of the feed screw 10 is connected to an AC servomotor 16 via a universal joint 14.

As shown in FIG. 1, above the table 6, a nozzle 20 for discharging the coating liquid is moved to a lifting mechanism 30 and a width direction moving mechanism 36 via a position fine adjustment mechanism 21 including a rotation mechanism of the nozzle 20. Connected. The elevating mechanism 30 includes an elevating bracket 28 that can be moved up and down, and is attached to a pair of guide rods inside the casing of the elevating mechanism 30 so as to be able to move up and down. In this casing, a feed screw (not shown) formed of a ball screw is also rotatably disposed between the guide rods.
It is connected to the lifting bracket 28 via a nut-type connector. An AC servo motor (not shown) is connected to the upper end of the feed screw.
The elevation bracket 28 can be arbitrarily moved up and down by rotation of the servomotor.

Further, the elevating mechanism 30 is moved by a width-direction moving mechanism 36 via a Y-axis moving bracket 32 (actuator).
It is connected to the. The width-direction moving mechanism 36 moves the Y-axis moving bracket 32 so as to reciprocate in the width direction of the nozzle 20, that is, in the Y-axis direction. A guide rod, a feed screw, a nut-type connector, an AC servomotor, and the like necessary for the operation are arranged in the casing in the same manner as the lifting mechanism 30. Width direction moving mechanism 36
Are fixed on the base 2 by the columns 34.

With these configurations, the nozzle 20 can be freely moved in the Z-axis and Y-axis directions.

The nozzle 20 extends horizontally in the direction orthogonal to the reciprocating direction of the table 6, that is, in the Y-axis direction.
As shown in FIG. 3, the holder 22 in the nozzle position control mechanism for directly holding the holder is rotatably supported in the position change control means 25 in the surface facing the base material 4 and in the vertical plane. It can be freely rotated in the direction of the arrow in the figure.

Above the holder 22, there is a horizontal bar 24. At both ends of the horizontal bar 24, an electromagnetically actuated linear actuator 26 is mounted. The linear actuator 26 has telescopic rods 29 protruding from the lower surface of the horizontal bar 24, and the telescopic rods 29 contact both ends of the holder 22 to regulate the rotation angle of the holder 22. Can be set arbitrarily.

Still referring to FIG. 1, an inverted L-shaped sensor support 38 is fixed to the upper surface of the base 2, and the tip (the height) of the convex portion of the base material 4 on the table 6 is provided at the tip. )
Is mounted. Next to the height sensor 40, a camera 72 for detecting the position of the uneven portion of the base member 4 is attached to the column 70.
As shown in FIG. 2, the camera 72 is electrically connected to the image processing device 74, and can quantitatively determine a change in the position of the uneven portion.

Further, at one end of the table 6, a sensor 66 for detecting the vertical position of the lower end surface (discharge hole surface) of the nozzle 20 having the discharge hole 44 with respect to the table 6 via the sensor bracket 64 and the nozzle 20. Coating liquid discharge hole 44
Is mounted. The camera 82 is also electrically connected to the image processing device 74, and the position of the coating liquid discharge hole of the nozzle 20 can be quantitatively determined in the X and Y directions.

Since the camera 72 and the camera 82 are fixed at a fixed distance, the relative distance between the position of the coating liquid discharge hole of the nozzle 20 and the position of the predetermined concave portion can be obtained. Camera 7
In the case where 2, 82 are configured to move, means for measuring how much they have moved with respect to the reference position, for example, a linear scale, an encoder, and the like are required, and thereby, in the same manner as described above. The relative distance between the position of the coating liquid discharge hole and the position of the predetermined concave portion can be obtained.

Here, means for detecting the angle θ between the direction of the stripes of the uneven substrate and the direction of arrangement of the nozzle holes, and position control means for changing the position of the nozzle 20 so that the angle θ is substantially perpendicular. 3 and FIG. 4 show an embodiment of the present invention.

The angle θ is the angle θ 1 between the direction of movement of the table on which the substrate 4 is placed (X direction) and the direction of the substrate stripe, the direction of nozzle movement (Y direction), and the The angle θ2 between the arrangement direction, the angle 90 ° between the table moving direction and the direction in which the nozzle moves, and the above three angles are calculated.

The base material 4 has alignment marks 100 printed on the four corners of the base material on its surface, and the positional relationship between the direction of the stripes of the concave and convex portions of the base material and the alignment marks is always constant. The direction of the stripe of the substrate uneven portion is formed in a direction perpendicular to a straight line connecting two alignment marks in the longitudinal direction of the base material or in a direction parallel to a straight line connecting two alignment marks in the short direction of the base material. ing. Therefore, alignment mark 2 on the substrate
By detecting the position of each point, it is possible to detect the stripe direction. Specifically, the first alignment mark of the base material is positioned below the camera 72 that detects the position of the concave and convex portions of the base material 4 in the sucked state by performing positioning on the table 6. The table 6 is moved so as to be positioned, and the position coordinates of the first alignment mark are detected by a signal from the sensor 68 for detecting the moving position of the table 6 and image processing. Next, the table 6 is moved so that the second alignment mark is positioned below the camera 72, and the position coordinates of the second alignment mark are similarly detected. From the position coordinates of the two alignment marks, the angle θ1 between the table moving direction (X direction) and the direction of the stripe of the substrate 4 is calculated.

Alternatively, the end of the stripe-shaped concave portion on the base material 4 positioned on the table 6 is projected, the position coordinates of the endmost concave portion are detected by image processing, and then the table 6 is moved in the X direction. Alternatively, the position coordinate of the opposite end of the same recess as the position coordinate previously detected may be detected, and the two coordinates may be calculated to determine the angle θ1 between the stripe direction and the table movement direction.

Next, the Y-axis is operated so that a plurality of coating liquid discharge holes at both ends are positioned on the camera 82 installed at one end of the table 6. First, the X and Y axes are operated so that the right end of the coating liquid application hole is positioned above the camera 82, and the position coordinates of the right end discharge hole are detected. Next, the X and Y axes are operated so that the left end hole is positioned above the camera 82, and the position coordinates of the left end hole are detected. From the position coordinates of both end holes, an angle θ2 formed by the arrangement direction of the coating liquid ejection holes and the nozzle movement direction (Y axis) is detected.

By calculating three angles (eg, θ = 90 ° + θ1 + θ2) between θ1 and θ2, the nozzle moving direction, and the table moving direction obtained above (θ = 90 ° + θ1 + θ2), the direction of the stripe and the arrangement direction of the discharge holes are determined. Can be detected.

After the angle θ between the stripe direction of the base material and the arrangement direction of the coating liquid discharge holes is detected, the position of the nozzle device is changed to a position change control means 2 so that the angle θ becomes substantially a right angle.
5 to control the change. The change control unit 25 uses an actuator 23 (for example, a direct drive motor) used for a rotation mechanism and rotates the actuator until the angle θ becomes substantially a right angle based on a signal output from an encoder of the actuator 23. .

Furthermore, if the center axis of the rotation mechanism is made to coincide with the center point of the nozzle device, the angle θ2 can be detected by detecting the center position of the nozzle device and the position of the nozzle end hole on one side. Therefore, the camera 82 is moved to a position coordinate that coincides with the rotation mechanism center axis determined in advance,
Thereafter, the center of rotation and the center of the nozzle device can be easily matched by the position fine adjustment mechanism 21. There is no problem in use as long as the position fine adjustment mechanism 21 can operate in the X and Y directions. As described above, the angle θ between the stripe direction of the base material 4 and the arrangement direction of the coating liquid discharge holes can be detected. In advance, for example, immediately after the nozzle is attached, the arrangement direction of the coating liquid ejection holes is rotated to a position parallel to the nozzle moving direction,
A method of storing the position may be used. That is, after detecting the angle θ2 between the coating liquid ejection hole and the nozzle moving direction by the camera 82 installed on the table, the actuator 23 is controlled to rotate until the angle θ2 = 0 °. As a result, only the angle θ1 between the stripe direction of the substrate 4 and the table moving direction needs to be detected.

The general controller 60 shown in FIG. 2 includes a motor controller 62, an electric input of the height sensor 40, and the like.
All control information such as information from the image processing device 74 of the camera 72 is electrically connected, and controls the entire sequence control. The general controller 60 may be a computer, a sequencer, or any controller having a control function.

The motor controller 62 includes the AC servomotor 16 for driving the table 6 and the lifting mechanism 30.
And each actuator 7 of the width direction moving mechanism 36
6, 78 (for example, an AC servomotor), an actuator 23 for changing and controlling the position of the nozzle device, a signal from a position sensor 68 for detecting the moving position of the table 6, and Y and Z for detecting the operating position of the nozzle 20. A signal from a linear sensor (not shown) of each axis, an encoder (not shown) of the actuator 23, and the like are input.
Instead of using the position sensor 68, an encoder may be incorporated in the AC servomotor 16 and the position of the table 6 may be detected based on a pulse signal output from the encoder. The motor controller 62 is controlled under the control of the general controller 60 as described above. For example, based on information from the image processing device 74 of the camera 82, the overall controller 60 determines the Y-direction position for aligning the coating liquid ejection hole of the nozzle 20 with the recess of the predetermined partition wall, and the inclination angle of the recess stripe direction with respect to the X direction. θ1
Calculates the position of the nozzle 20 in the Y direction when the base material is moved in the X direction for coating, and sends a command to the motor controller 62 so that the operation can be realized. In the overall configuration, the height sensor 4
As 0, any non-contact measurement type such as a non-contact measurement type using a laser, an ultrasonic wave, or the like, a contact measurement type using a dial gauge, a differential transformer, or the like may be used. .

Further, the detecting means for detecting the relative position of the discharge hole 44 of the application nozzle corresponding to the concave portion may be constituted by an image processing apparatus using a camera for separately detecting the concave portion and the discharge hole of the base material. Good.

Next, the basic operation of the coating method using this coating apparatus will be described. In particular, the basic operation of the coating method for rotating the nozzle will be described.

First, as a preparatory operation, the table 6 and the nozzle 20 are moved, and the nozzle device is moved right above the camera 82 so that the center axis of the rotating mechanism, which is known in advance, coincides with the center of the visual field of the camera 82. Then, the position is adjusted by the position fine adjustment mechanism 21 so that the center of the camera field of view coincides with the center of the nozzle device, and the coordinates of the center position of the nozzle device are obtained by image processing. Next, the table 6 and the nozzle 20 are moved to the position of the Y-axis coordinate Ya, and the ejection hole 44 of the nozzle 20 is moved.
Is positioned right above the camera 82. Then, the position coordinates of the end of the ejection hole 44 are obtained by image processing. The angle θ2 between the arrangement direction of the coating liquid ejection holes and the Y-axis movement direction is obtained by calculating the obtained coordinates, and is stored in the overall controller 60. This operation only needs to be performed once when the nozzle 20 is attached to the holder 22. Further, a position change amount lc from the camera reference point is obtained from the Y-axis coordinate Ya and the position coordinates of the end of the ejection hole 44 obtained above. When the calculation of the angle θ2 and the calculation of the position change amount lc are completed, the table 6, the nozzle 20
Respectively return to the origin.

Next, when the origins of the respective operating parts in the coating apparatus are returned, the table 6 and the nozzle 20 are moved to the X axis and the Y axis, respectively.
Move to the preparation position of the axis and Z axis. At this time, a predetermined amount of the coating liquid is already stored in the nozzle 20, and the coating liquid control valve 4
8, 54 and the compressed air control valve 99 are kept closed. Then, lift pins (not shown) rise on the surface of the table 6, and the base material 4, whose partitions are formed in a stripe pattern at a constant pitch, is placed on the lift pins from a loader (not shown).

Next, the lift pins are lowered to place the substrate 4 on the upper surface of the table 6, and after the positioning on the table 6 is performed by an alignment device (not shown), the substrate 2 is sucked.

Next, the table 6 is moved until the partition (the top of the convex portion) of the base material 4 comes just below the camera 72 and the height sensor 40, and stops. The position of the camera 72 is adjusted in advance so as to project the vicinity of the end of the partition on the base material 4 positioned on the table 6, and the position of the endmost concave portion is detected by image processing, and the position from the camera reference point is detected. Change l
Find a. On the other hand, the length lb between the reference point of the camera 72 and the ejection hole 44 located at the end of the nozzle 20 fixed to the holder 22 when located at the predetermined Y-axis coordinate position Ya is measured at the time of advance adjustment. Then, as information, the whole controller 60
When the position change amount la of the partition wall concave portion from the camera reference point is transmitted from the image processing device 74, the discharge hole 44 located at the end of the nozzle 20 is positioned at the right end of the concave portion at the partition wall end portion. The upper Y-axis coordinate value Yc is calculated (for example, Yc
= Ya + (lc + lb-la)), the nozzle 20 is moved to that position. The camera 72 can have the same function even when attached to the nozzle 20 or the holder 22.

Next, the substrate 4 starts to move in the X direction so that the application start portion is directly below the discharge hole 44 of the nozzle 20, but the detection of the position of the concave portion by the camera 72 is continued. Usually, since the partition wall concave portion is straight, if the position coordinates of both ends of the partition wall concave portion are detected, the angle θ1 formed between the table moving direction and the stripe direction can be detected. Alternatively, the angle θ1 can be similarly detected by detecting the alignment mark 100 printed on the substrate with the camera 72 and performing image processing.

From the detected angles θ1 and θ2 and the angle 90 ° between the nozzle moving direction and the table moving direction, the angle θ between the stripe direction and the arrangement direction of the coating liquid discharge holes is detected, and θ = 90 °. The actuator 23 is operated in advance.

During this time, the height sensor 40 detects the vertical position of the top of the partition wall of the base material 4 and calculates the height of the top of the partition wall of the base material 4 from the difference in position from the upper surface of the table 6. At this height, the nozzle 20 discharge hole given beforehand ~
By adding the gap value between the tops of the partition walls of the base material 4, the nozzle 20
Is calculated on the Z-axis linear sensor, and the nozzle is moved to that position. Thereby, the table 6
Even if the top position of the partition wall above changes for each substrate, the gap between the coating liquid discharge hole of the nozzle 20 important for coating and the top portion of the partition wall on the substrate can always be kept constant.

Next, the operation is started by directing the table 6 toward the nozzle 20, and the speed is increased to a predetermined coating speed before the coating start position of the base material 4 reaches just below the discharge hole 44 of the nozzle 20. deep. The distance between the operation start position of the table 6 and the application start position must be sufficiently ensured that the speed can be increased to the application speed.

Further, the application start position of the substrate 4 is
A position sensor 68 for detecting the position of the table 6 is disposed immediately below the discharge hole 44 of the above. When the table 6 reaches this position, the compressed air control valve 99 is driven to the open state to reduce the pressure. The compressed air previously adjusted to a predetermined pressure by the valve 84 is supplied to the nozzle 20. The pressurized air supplied to the nozzle 20 is introduced into the space 43 and applies pressure to the liquid surface of the coating liquid reservoir 77, so that the coating liquid 42 is discharged from the discharge holes 44. The position where the supply of the coating liquid 42 is started can be adjusted by changing the installation location of the position sensor 68. By connecting an encoder to a motor or a feed screw or attaching a linear sensor to the table instead of the position sensor 68, the same can be achieved even if the values of the encoder or the linear sensor are detected.

In the application, the application end position of the substrate 4 is
The process is performed until the position immediately below the 0 discharge hole 44 is reached. In other words, since the base material 4 is always placed at a predetermined position on the table 6, the application end position of the base material 4 is 5 mm before (a), for example, immediately below the discharge hole 44 of the nozzle 20, or
(B) The position sensor and its encoder value are set in advance at the position of the table 6 corresponding to the position just below, and when the table 6 comes to the position corresponding to (a), the general controller 60 sends the compressed air control valve. A drive command to close 99 is issued, the supply of compressed air is stopped, coating is performed to the position of (b), and then, when the table 6 comes to the position corresponding to (b), the nozzle 20 is raised and completely removed. Coating liquid 42
Swiftly. When the coating liquid 42 is a liquid having a relatively high viscosity, it is difficult to stop the coating liquid discharge from the nozzle 20 discharge hole instantaneously by simply stopping the supply of the compressed air. Therefore, when the supply of the compressed air is stopped and the pressure of the space 43 in the nozzle 20 is set to the atmospheric pressure at the same time, the discharge of the coating liquid from the discharge hole 44 can be stopped in a short time. It is desirable to provide such a function, or to provide an air release valve between the compressed air control valve 82 and the nozzle 20.

The table 6 continues to operate even after passing the coating end position, and stops when it reaches the end position. At this time, if there is still a portion to be applied, the nozzle needs to be moved by the application width L (nozzle pitch × the number of holes) to the next start position where application is to be performed. As formed on the line, the coordinates of the second application start position are (X, Y) from the coordinates of the first application start / end position.
Then, both the nozzle 20 and the table 6 are moved so as to be shifted by (Lsin θ2, Lcos θ2) (FIG. 6). Hereinafter, coating is performed in the same procedure except that the table 6 is moved in the opposite direction. Further, in the second and subsequent times, the angle θ1 formed by the stripe direction of the partition wall concave portion and the table moving direction is the same as that in the first time, so that the second and subsequent times may be performed while maintaining the position controlled for the first time. . 1
If the application is performed in the same moving direction of the table 6 as the first application, (X, Y) = (Ls) from the coordinates of the first application start position.
in θ2, Lcos θ2) so that the coordinates of the nozzle 20 and the table 6 are set to be the coordinates of the second application start position.
May be moved and coating may be performed in the same manner.

When the coating process is completed, the table 6 is moved to a place where the substrate 4 is transferred by the unloader and stopped, and after releasing the suction of the substrate 4 and releasing the substrate 4 to the atmosphere, the lift pins are lifted to raise the base. The material 4 is separated from the surface of the table 6 and lifted.

At this time, the lower surface of the substrate 4 is held by an unloader (not shown), and the substrate 4 is transported to the next step. When the substrate 4 is delivered to the unloader, the table 6 lowers the lift pins and returns to the original position.

Further, in the above embodiment, an application example in which the base material moves in the X-axis direction and the nozzle moves in the Y-axis and Z-axis directions has been described, but the nozzle 20 and the base material 4 are relatively moved. The table and the nozzle may be moved in any combination as long as the structure and the form can be moved three-dimensionally.

For example, in the above embodiment, the application is performed by moving the table, and the movement of the unevenness in the pitch direction is performed by moving the nozzle.
The movement of the unevenness in the pitch direction may be performed by moving the table.

Although the embodiment for the uneven base material on which the stripe-shaped uneven portions are formed has been described, the grid-shaped uneven portions formed by the stripe-shaped vertical ribs and the horizontal ribs orthogonal thereto are formed. This embodiment can be similarly applied to an uneven substrate.

Further, the case where one kind of coating liquid is applied has been described in detail. However, the present invention can be applied to the case where phosphors of three colors such as red, blue and green are applied simultaneously.

As coating conditions which can be further used, the coating speed is preferably 0.1 to 10 m / min, more preferably 0.5 to 10 m / min.
8 m / min.

The apparatus and method for applying a coating liquid of the present invention can be preferably applied to a phosphor coating step in a member for a plasma display panel.

(Plasma Display of the Present Invention and Method of Manufacturing Members Thereof) A method of manufacturing a plasma display panel member of the present invention will be described in accordance with a PDP manufacturing procedure.

(Back Plate) As the substrate used for the back plate which is the member for the plasma display panel of the present invention, general soda lime glass, glass obtained by annealing soda lime glass, or high strain point glass (for example,
"PD-200" manufactured by Asahi Glass Co., Ltd.) or the like can be used. As the size of the glass substrate, glass having a thickness of 1 to 5 mm can be preferably used.

First, an address electrode is formed on a glass substrate. A thin film pattern for forming an electrode can be formed by using a conductive metal powder such as Au, Ni, Ag, Pd, Pt, Al, and Cr and a paste containing a photosensitive organic component as a main component.

Next, a dielectric layer is preferably formed so as to cover the electrodes.

Next, a partition is formed on the dielectric layer or on the substrate on which the electrodes are formed. The height of the partition is 80 μm
２００200 μm is suitable. By setting the thickness to 80 μm or more, it is possible to prevent the phosphor and the scan electrode from coming too close to each other, and to suppress the deterioration of the phosphor due to discharge. Further, by setting the thickness to 200 μm or less, it is possible to prevent the distance between the discharge at the scan electrode and the phosphor from being too large, and to obtain a sufficient luminance.
The pitch (P) of the partition walls is often 100 μm ≦ P ≦ 500 μm.

The partition walls are generally formed by patterning a glass paste composed of inorganic fine particles and an organic binder into the shape of the partition walls, and then baking the glass paste at 400 to 600 ° C. to form the partition walls. As a method of patterning a partition using a glass paste, it can be formed by a method such as a screen printing method, a sand blast method, a photosensitive paste method, a photo embedding method, and a mold transfer method. The photosensitive paste method is excellent in terms of high definition and simple process.

After the partition walls are formed, a phosphor layer emitting light of each color of RGB is formed according to the embodiment of the coating apparatus and the coating method of the present invention. By applying a phosphor paste containing a phosphor powder, an organic binder and an organic solvent as main components between predetermined partition walls, a phosphor layer can be formed. The viscosity of the phosphor paste by the nozzle coating method is preferably 1 to 100 Pa · s.

The substrate on which the phosphor layer has been formed may be used as required.
By baking at 400 to 550 ° C., a back plate can be produced as the member for a plasma display of the present invention.

(Front Plate) Next, a front plate for a plasma display can be manufactured by forming a transparent electrode, a bus electrode, a dielectric, and a protective film (MgO) on a substrate in a predetermined pattern. A color filter layer may be formed in a portion corresponding to the RGB phosphor layers formed on the rear substrate. Further, a black stripe may be formed to improve the contrast.

(Assembly of PDP) The back plate and the front plate thus obtained are sealed, and the space formed between the substrates of both members is evacuated, and a discharge gas composed of helium, neon, xenon, or the like is discharged. After sealing, the plasma display of the present invention can be manufactured by mounting a drive circuit.

[0079]

The present invention will be specifically described below with reference to examples. However, the present invention is not limited to this. In addition,
The concentration (%) in the examples is% by weight unless otherwise specified.

Using a photosensitive silver paste, 1600 address electrodes having a line width of 60 μm and a pitch of 220 μm were formed on a glass substrate (PD200 manufactured by Asahi Glass Co., Ltd.). Next, 50% by weight of glass powder, titanium oxide 15
%, 20% of ethyl cellulose, and 15% of a solvent, and then fired to form a dielectric layer. Further, a pitch of 220 μm and a height of 1 μm are formed on the dielectric layer by a photosensitive paste method so that an electrode is arranged at the center between the partition walls.
961 partitions having a size of 50 μm and a width of 60 μm were formed. As described above, 30 substrates on which address electrodes, dielectric layers, and partition walls were formed were prepared.

39 g of phosphor powder, 8 g of binder polymer (ethyl cellulose), solvent (terpineol)
A phosphor paste composed of 53 g was prepared. The phosphor powder is red: (Y, Gd, Eu) BO3 (cumulative average particle size 2.7 μm, specific surface area 3.1 m2 / cm3), green: (Z
n, Mn) 2SiO4 (cumulative average particle size 3.6 μm, specific surface area 2.5 m2 / cm3), blue: (Ba, Eu) Mg
Al10O17 (cumulative average particle diameter 3.7 μm, specific surface area 2.3 m 2 / cm 3) was used. Each component of the organic component was dissolved in water while heating at 60 ° C., and then a phosphor powder was added and kneaded with a kneader to prepare a paste. The viscosity was 35 Pa · s.

The paste prepared as described above was applied in stripes on 30 glass substrates on which partition walls and the like were formed.

The coating liquid application apparatus of the present invention uses an application apparatus as shown in FIGS. 1 and 2 as an overall view, and an application nozzle section as shown in FIGS. 3 and 5, and applies a phosphor paste between partition walls. Was. First, a red phosphor paste was applied between predetermined partition walls. The coating nozzle is installed on the nozzle position adjustment mechanism, and the distance between the coating nozzle tip surface and the upper end of the partition is 100 μm
Set to Then, the angle between the arrangement direction of the coating liquid discharge holes and the stripe direction of the partition wall concave portions was detected, and the nozzle position was changed and controlled so that both were perpendicular. Then, the air pressure (discharge pressure) is adjusted to 0.4 MPa by a pressure reducing valve, and the traveling is performed while maintaining the positions of the application nozzle holes and the concave portions of the partition walls. Was applied. Thereafter, at the position where one application (16 coatings) is completed, the nozzle is set to 10.56 in the direction perpendicular to the partition wall direction.
mm. After that, the application nozzle was run in the direction opposite to the first application, and the other control was performed between the partition walls in the same manner as the first application. This was repeated 20 times, and 320 were applied to predetermined positions of the red phosphor. After completion of the coating, the coating was dried at 80 ° C. for 40 minutes with the coated surface facing upward. Next, 320 blue phosphor pastes were similarly applied between the adjacent partitions coated with the red phosphor and dried. Further, 320 green phosphor pastes were similarly applied between the adjacent partitions coated with the blue phosphor and dried. The application and drying of the phosphor paste of each color described above were performed on 30 substrates. And 5
It was baked at 00 ° C. for 30 minutes to obtain 30 back plates as members for a plasma display panel of the present invention.

Observation of the phosphor application start position and the end position showed that the phosphor layers of each color were located on a straight line parallel to the end of the partition wall at both the start and end positions for each of the 30 back plates. The phosphor could be formed, and the phosphor was not protruded from the step or the recess at each nozzle pitch, which was conventionally observed.

Further, after the obtained back plate was combined with the front plate, sealing and gas sealing were performed, and a driving circuit was connected to manufacture 30 plasma display panels. Regardless of the type of plasma display panel, there is no step in the coating start and end positions, and there is no deterioration in quality such as panel emission defects such as mixed color emission due to the protrusion of the phosphor, and the plasma display panel has good display characteristics and stability. was gotten.

[0086]

As described above in detail, according to the coating liquid coating apparatus and the coating method of the present invention, it is possible to control the angle between the nozzle hole arrangement direction and the stripe direction to be changed to a right angle. Therefore, it becomes easy to align the coating start and end positions on a single substrate in a straight line.

Further, since the angle between the direction of the stripe and the X-axis movement direction can be detected, the movement of the nozzle in the Y direction when the base material is moved in the X direction for coating is calculated.
The phosphor can be applied without protruding from the recess.

Further, by using the above-mentioned apparatus, a coating method capable of increasing the productivity and the quality of the coated substrate can be obtained.

Further, according to the method for manufacturing a member for a plasma display panel and the plasma display of the present invention, since the coating apparatus and the coating method for the coating liquid are used, a high-quality plasma display panel can be stably produced for a long period of time. As a result, it is possible to produce at high productivity and at low cost.

[Brief description of the drawings]

FIG. 1 is an overall perspective view of a coating liquid application device according to an embodiment of the present invention.

FIG. 2 is a schematic diagram showing a configuration around a table 6 and a nozzle 20 of the apparatus shown in FIG.

FIG. 3 is a schematic diagram of a position control unit that controls change of the position of the nozzle 20 shown in FIG. 1;

FIG. 4 is a schematic diagram when the position is changed using FIG. 3;

FIG. 5 is an enlarged plan view of the nozzle 20 in the apparatus of FIG. 1 as viewed from below.

FIG. 6 is a schematic diagram when the nozzle 20 and the table 6 are relatively moved.

[Explanation of symbols]

 2: Base 4: Base 6: Table 7: Suction hole 8: Guide groove rail 9: Sliding leg 10: Feed screw 11: Connector 12: Bearing 14: Universal joint 16: AC servo motor 20: Nozzle 21: Fine position Adjusting mechanism 22: Holder 23: Actuator 24: Horizontal bar 25: Position change control means 26: Linear actuator 28: Elevating bracket 29: Telescopic rod 30: Elevating mechanism 32: Y-axis moving bracket 34: Strut 36: Width direction moving mechanism 38 : Sensor support 40: height sensor 42: coating liquid 43: space part 44: discharge hole 46: coating liquid supply hose 47: filter 48: coating liquid control valve 50: compressed air source 54: compressed air control valve 56: coating liquid tank 58 : Supply device controller 60: Overall controller 62: Motor controller 64: Sensor bracket 6: Sensor 68: Position Sensor 70: Support 72: Camera 74: Image Processing Device 76: Actuator 77: Coating Liquid Pool 78: Actuator 81: Compressed Air Supply Hose 82: Camera 84: Pressure Reducing Valve 86: Compressed Air Source 98: Rotation Center Axis 99: Compressed air control valve 100: Alignment mark

──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) H01J 9/227 H01J 9/227 E 11/02 11/02 B F term (Reference) 4D075 AC04 AC09 AC93 CB38 DA06 DB14 DC22 EA05 EC11 4F041 AA05 AA16 AB01 BA05 BA13 BA34 4F042 AA07 BA08 BA10 CB02 5C028 FF16 5C040 FA01 GG09 MA22 MA23 MA24

Claims (11)

[Claims] 1. A table for fixing an uneven base material having a plurality of stripe-shaped uneven portions or a grid-shaped uneven portion composed of stripe-shaped vertical ribs and horizontal ribs perpendicular to the surface formed in one direction on the surface. And, having a plurality of coating liquid discharge holes arranged in a straight line at a pitch having a correlation with the uneven portion of the uneven substrate facing the uneven portion, the position facing the uneven portion of the uneven substrate A nozzle device, a coating liquid supply unit for supplying a coating liquid to the nozzle device, a first moving unit for moving the table, and a moving direction of the nozzle device and the table by the first moving unit. A coating liquid coating apparatus provided with a second moving unit that relatively moves in a direction perpendicular to the coating liquid, wherein a means for detecting an angle θ between the direction of the stripe and the arrangement direction of the coating liquid discharge holes; Will be at right angles And a position control means for changing and controlling the position of the uneven substrate or the nozzle device on the table. 2. The coating liquid application apparatus according to claim 1, wherein said position control means has a rotation mechanism for rotating said nozzle device. 3. The apparatus according to claim 2, wherein said position control means has a position fine adjustment mechanism for making one of said plurality of coating liquid discharge holes coincide with a rotation center of said nozzle device.
3. The coating liquid coating apparatus according to claim 1. 4. The coating liquid application apparatus according to claim 1, wherein said position control means has a rotation mechanism for rotating said uneven base material. 5. The coating liquid according to claim 1, wherein the means for detecting the angle θ includes recognizing an alignment mark provided on the base material. Coating device. 6. A phosphor powder which emits any one of red, green and blue colors as the coating liquid in the coating apparatus for coating liquid according to claim 1. An apparatus for manufacturing a plasma display member, comprising using a paste containing: 7. An uneven base material having a plurality of stripe-shaped uneven portions or a grid-shaped uneven portion formed by stripe-shaped vertical ribs and horizontal ribs orthogonal to the surface formed on the surface in one direction; A nozzle device having a plurality of coating liquid ejection holes arranged in a straight line at a pitch having a correlation with the uneven portion of the substrate facing the uneven portion of the base material, and relatively moved at a right angle, and the nozzle device A method for applying a coating liquid by supplying the coating liquid and discharging the coating liquid from the coating liquid discharge holes, and applying the coating liquid to the concave portions of the uneven substrate, wherein the direction of the stripe and the coating liquid discharge holes The angle θ between the arrangement direction is detected, and the position of the uneven substrate or the nozzle device is controlled to be changed so that the angle θ is substantially a right angle, and the application direction is parallel to the direction of the vertical rib. While moving the substrate and the nozzle device relative to A method for applying a coating liquid, which comprises applying a cloth. 8. The method according to claim 7, wherein the change control is performed by rotating the nozzle device.
The method for applying the coating liquid described in the above. 9. The method according to claim 7, wherein the change control is performed by rotating the uneven substrate. 10. The method according to claim 7, wherein detecting the angle θ includes recognizing an alignment mark provided on the substrate. . 11. A phosphor powder which emits a red, green or blue color as the coating liquid in the coating method according to claim 7. A method for producing a plasma display member using a paste containing: