JP2002168802A - X-ray foreign matter detector - Google Patents

X-ray foreign matter detector

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Publication number
JP2002168802A
JP2002168802A JP2000365459A JP2000365459A JP2002168802A JP 2002168802 A JP2002168802 A JP 2002168802A JP 2000365459 A JP2000365459 A JP 2000365459A JP 2000365459 A JP2000365459 A JP 2000365459A JP 2002168802 A JP2002168802 A JP 2002168802A
Authority
JP
Japan
Prior art keywords
ray
rays
inspection object
foreign matter
transport
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000365459A
Other languages
Japanese (ja)
Other versions
JP3715524B2 (en
Inventor
Takashi Abe
俊 阿部
Tomoyasu Otsuki
智保 大槻
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anritsu Corp
Original Assignee
Anritsu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Corp filed Critical Anritsu Corp
Priority to JP2000365459A priority Critical patent/JP3715524B2/en
Publication of JP2002168802A publication Critical patent/JP2002168802A/en
Application granted granted Critical
Publication of JP3715524B2 publication Critical patent/JP3715524B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To achieve a detection with a higher accuracy regardless of the shape and the arrangement of foreign matters. SOLUTION: This apparatus is provided with a plurality of X-ray generators 1a and 1b for performing an exposure to X rays in a plane, a plurality of X-ray sensors 2a and 2b formed linearly so as to individually receive X rays from the X-ray generators 1a and 1b and a conveying part 3 making a flat conveying surface 3a for conveying a specimen W between the X-ray generators 1a and 1b and the X-ray sensors 2a and 2b. The X-ray generators 1a and 1b and the X-ray sensors 2a and 2b are so arranged as to make the X rays in a plane orthogonal to each other in the direction A of conveying the specimen W on the conveying surface 3a while turned to be different angles to the conveying surface 3a. Therefore, a plurality of X rays in a plane get the specimen W being conveyed onto the conveying surface 3a exposed thereto from different directions to allow recognition of foreign matters by the X rays from any direction thereby enabling the detection of foreign matters with a higher accuracy regardless of the shape and the arrangement of the foreign matters.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、例えば生肉、魚、
加工食品、医薬などの各品種の被検査物に対し、X線を
曝射したときのX線の透過量から被検査物中の異物を検
出するX線異物検出装置に関する。
TECHNICAL FIELD The present invention relates to raw meat, fish,
The present invention relates to an X-ray foreign matter detection device that detects foreign matter in a test object from the amount of X-ray transmitted when X-rays are irradiated to the test object of each type, such as processed foods and pharmaceuticals.

【0002】[0002]

【従来の技術】従来より、例えば生肉、魚、加工食品、
医薬などの各品種の被検査物中(表面も含む)の異物
(金属,骨,ガラス,石,合成樹脂材等)を検出するた
めにX線異物検出装置が用いられている。この種のX線
異物検出装置は、装置本体の上側にX線発生器を取り付
け、且つ、装置本体におけるX線発生器の下側となる位
置にX線センサを取り付けている。これにより、X線発
生器から曝射されたX線をX線センサにて受けるように
している。また、装置本体には、曝射されたX線の間に
被検査物を通す搬送部が取り付けられている。搬送部
は、装置本体における搬送方向の前後となる位置にそれ
ぞれローラを配し、このローラの間にベルトを掛け回し
ている。ローラの何れかは、装置本体に取り付けられた
モータ等の駆動機が連結されて駆動される。ベルトは、
ローラの駆動により循環する。これにより、X線異物検
出装置は、ベルト上を搬送された被検査物にX線を曝射
し、この被検査物を透過した透過X線をX線センサにて
受けることで被検査物中に含まれる異物を検出する。
2. Description of the Related Art Conventionally, for example, raw meat, fish, processed food,
2. Description of the Related Art An X-ray foreign matter detection device is used to detect foreign matter (metal, bone, glass, stone, synthetic resin material, etc.) in an inspected object (including the surface) of each kind such as a medicine. In this type of X-ray foreign matter detection device, an X-ray generator is mounted on the upper side of the device main body, and an X-ray sensor is mounted on the device main body at a position below the X-ray generator. Thus, the X-rays emitted from the X-ray generator are received by the X-ray sensor. Further, the apparatus main body is provided with a transport unit for passing the inspection object between the irradiated X-rays. The transport section has rollers arranged at positions before and after in the transport direction in the apparatus main body, and a belt is looped between the rollers. One of the rollers is driven by a driving device such as a motor attached to the apparatus main body. The belt is
Circulates by driving the rollers. As a result, the X-ray foreign matter detection device emits X-rays to the inspection object conveyed on the belt, and receives transmitted X-rays transmitted through the inspection object by the X-ray sensor, thereby detecting the X-ray foreign matter. Detects foreign substances contained in.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、上述し
た従来のX線異物検出装置では、被検査物にある異物の
形状や配置によってはこれを検出し難いことがある。上
述したように、X線発生器からX線センサに上下方向に
X線が曝射されており、搬送部にて搬送される被検査物
にある異物が薄板状であったとする。この場合に、異物
が水平な配置にあって薄板面からX線が曝射すると、薄
い部分のX線の透過率が高いために異物として認識する
ことができない。また、同じ形状の異物であっても、曝
射されるx線に対して垂直な配置にあれば、X線の透過
率が低くなって異物として認識することが可能となる。
このように、異物があるにも係わらず異物がないと誤検
出されて、不良品となるべき被検査物が良品として流れ
てしまうという問題が生じる。
However, in the above-described conventional X-ray foreign substance detecting apparatus, it may be difficult to detect the foreign substance in the inspection object depending on the shape and arrangement of the foreign substance. As described above, it is assumed that X-rays are emitted from the X-ray generator to the X-ray sensor in the vertical direction, and that the foreign matter in the inspection object transported by the transport unit has a thin plate shape. In this case, when X-rays are emitted from the thin plate surface in a horizontal arrangement of the foreign matter, the thin portion cannot be recognized as a foreign matter due to high X-ray transmittance. Further, even if the foreign matters have the same shape, if they are arranged perpendicular to the x-rays to be irradiated, the transmittance of the X-rays becomes low, and the foreign matters can be recognized as foreign matters.
As described above, there is a problem in that despite the presence of foreign matter, the absence of foreign matter is erroneously detected, and the inspection object to be a defective product flows as a non-defective product.

【0004】そこで本発明は、上記課題を解消するため
に、異物の形状や配置に係わらず検出することができる
X線異物検出装置を提供することを目的としている。
Accordingly, an object of the present invention is to provide an X-ray foreign matter detection device capable of detecting foreign matter regardless of the shape and arrangement thereof.

【0005】[0005]

【課題を解決するための手段】上記目的を達成するため
本発明による請求項1に記載のX線異物検出装置は、被
検査物WにX線を曝射し、このX線の曝射に伴って前記
被検査物Wを透過するX線の透過量から前記被検査物W
中の異物の有無を検出するX線異物検出装置において、
X線を面状に曝射する複数のX線発生器1a,1bと、
前記各X線発生器1a,1bからのX線をそれぞれ受け
るようにライン状に形成された複数のX線センサ2a,
2bと、前記各X線発生器1a,1bと前記各X線セン
サ2a,2bとの間に前記被検査物Wを搬送させる平坦
状の搬送面3aをなす搬送部3と、を備え、前記各X線
発生器1a,1bが、前記面状の各X線を、前記搬送部
3の搬送面3a上にて前記被検査物Wの搬送方向Aに対
して直交させるように配され、且つ、前記搬送面3aに
向けて異なる角度をもたせるように配されていることを
特徴とする。
According to a first aspect of the present invention, there is provided an X-ray foreign matter detecting apparatus for irradiating an object to be inspected with X-rays. Accordingly, the inspection object W is determined based on the amount of X-rays transmitted through the inspection object W.
In an X-ray foreign matter detection device that detects the presence or absence of foreign matter in
A plurality of X-ray generators 1a and 1b for irradiating X-rays in a plane;
A plurality of X-ray sensors 2a, 2a, 2,
2b, and a transport unit 3 forming a flat transport surface 3a for transporting the inspection object W between each of the X-ray generators 1a and 1b and each of the X-ray sensors 2a and 2b. The X-ray generators 1a and 1b are arranged so that the planar X-rays are orthogonal to the transport direction A of the inspection object W on the transport surface 3a of the transport unit 3, and , Are arranged so as to have different angles toward the transport surface 3a.

【0006】請求項2に記載のX線異物検出装置は、請
求項1に記載のX線異物検出装置において、前記各X線
発生器1a,1bが、前記面状の各X線を前記搬送部3
にて搬送される被検査物Wに対して該被検査物内で交差
させるように配されていることを特徴とする。
According to a second aspect of the present invention, there is provided an X-ray foreign matter detecting apparatus according to the first aspect, wherein each of the X-ray generators 1a and 1b transports each of the planar X-rays. Part 3
Is arranged so as to intersect with the inspection object W conveyed in the inspection object.

【0007】請求項3に記載のX線異物検出装置は、請
求項2に記載のX線異物検出装置において、前記搬送面
3aからの前記各X線の交差位置の高さが可変とされて
いることを特徴とする。
According to a third aspect of the present invention, there is provided an X-ray foreign matter detecting apparatus according to the second aspect, wherein a height of an intersection of each of the X-rays from the transport surface is variable. It is characterized by being.

【0008】請求項4に記載のX線異物検出装置は、被
検査物WにX線を曝射し、このX線の曝射に伴って前記
被検査物Wを透過するX線の透過量から前記被検査物W
中の異物の有無を検出するX線異物検出装置において、
X線を面状に曝射する複数のX線発生器1a,1bと、
前記各X線発生器1a,1bからのX線をそれぞれ受け
るようにライン状に形成された複数のX線センサ2a,
2bと、前記各X線発生器1a,1bと前記各X線セン
サ2a,2bとの間に前記被検査物Wを搬送させる平坦
状の搬送面3aをなす搬送部3と、を備え、前記各X線
発生器1a,1bが、前記面状の各X線を、前記搬送部
3の搬送面3a上にて前記被検査物Wの搬送方向Aに対
して異なる角度をもたせるように配され、且つ、前記搬
送面3aに鉛直な基線Lに対して平行させるように配さ
れていることを特徴とする。
In the X-ray foreign matter detecting device according to the fourth aspect, X-rays are emitted to the inspection object W, and the amount of X-rays transmitted through the inspection object W with the X-ray irradiation From the inspection object W
In an X-ray foreign matter detection device that detects the presence or absence of foreign matter in
A plurality of X-ray generators 1a and 1b for irradiating X-rays in a plane;
A plurality of X-ray sensors 2a, 2a, 2,
2b, and a transport unit 3 forming a flat transport surface 3a for transporting the inspection object W between each of the X-ray generators 1a, 1b and each of the X-ray sensors 2a, 2b. The X-ray generators 1a and 1b are arranged so that the planar X-rays have different angles with respect to the transport direction A of the inspection object W on the transport surface 3a of the transport unit 3. In addition, they are arranged so as to be parallel to the base line L perpendicular to the transport surface 3a.

【0009】請求項5に記載のX線異物検出装置は、被
検査物WにX線を曝射し、このX線の曝射に伴って前記
被検査物Wを透過するX線の透過量から前記被検査物W
中の異物の有無を検出するX線異物検出装置において、
X線を面状に曝射する複数のX線発生器1a,1bと、
前記各X線発生器1a,1bからのX線をそれぞれ受け
るようにライン状に形成された複数のX線センサ2a,
2bと、前記各X線発生器1a,1bと前記各X線セン
サ2a,2bとの間に前記被検査物Wを搬送させる平坦
状の搬送面3aをなす搬送部3と、を備え、前記各X線
発生器1a,1bが、前記面状の各X線を、前記搬送部
3の搬送面3a上にて前記被検査物Wの搬送方向Aに対
して異なる角度をもたせるように配され、且つ、前記搬
送面3aに鉛直な基線Lに対して異なる角度をもたせる
ように配されていることを特徴とする。
According to a fifth aspect of the present invention, there is provided an X-ray foreign matter detection apparatus which irradiates an X-ray to the inspection object W and transmits the X-ray transmitted through the inspection object W with the X-ray irradiation. From the inspection object W
In an X-ray foreign matter detection device that detects the presence or absence of foreign matter in
A plurality of X-ray generators 1a and 1b for irradiating X-rays in a plane;
A plurality of X-ray sensors 2a, 2a, 2,
2b, and a transport unit 3 forming a flat transport surface 3a for transporting the inspection object W between each of the X-ray generators 1a and 1b and each of the X-ray sensors 2a and 2b. The X-ray generators 1a and 1b are arranged so that the planar X-rays have different angles with respect to the transport direction A of the inspection object W on the transport surface 3a of the transport unit 3. In addition, the transfer surface 3a is arranged so as to have a different angle with respect to a vertical base line L.

【0010】[0010]

【発明の実施の形態】以下、本発明の第一実施の形態を
図面を参照して具体的に説明する。図1は本発明のX線
異物検出装置の第一実施の形態を示す正面図、図2
(a)は前記X線異物検出装置の側面図、図2(b)は
前記X線異物検出装置の部分平面図である。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a first embodiment of the present invention will be specifically described with reference to the drawings. FIG. 1 is a front view showing a first embodiment of an X-ray foreign matter detection apparatus according to the present invention, and FIG.
2A is a side view of the X-ray foreign matter detection device, and FIG. 2B is a partial plan view of the X-ray foreign matter detection device.

【0011】図1および図2(a),(b)に示すよう
に、X線異物検出装置は、主に、X線を発生するX線発
生部1と、X線発生部1からのX線を受けるX線検出部
2と、X線発生部1からX線検出部2の間に被検査物W
を搬送する搬送部3とからなる。
As shown in FIGS. 1 and 2 (a) and 2 (b), the X-ray foreign matter detecting device mainly comprises an X-ray generating section 1 for generating X-rays, and an X-ray from the X-ray generating section 1. Object to be inspected W between the X-ray detector 2 and the X-ray detector 2 for receiving X-rays
And a transport unit 3 for transporting.

【0012】X線発生部1は、複数(本実施の形態では
二つ)のX線発生器1a,1bを備えている。各X線発
生器1a、1bは、それぞれX線を発生するX線管4,
4を有し、このX線管4,4の周囲を、遮蔽板にて覆う
ことにより、X線の漏洩を防ぐように構成されている。
遮蔽板は、鉛等の遮蔽材が内貼りされてなる。各X線発
生器1a,1bは、X線異物検出装置の本体をなす筐体
5の上部に配置され、それぞれX線曝射口6,6から下
方に向けてX線を曝射させる。このX線曝射口6,6に
は、図2(a)に示すように集束スリット7,7が設け
られている。これにより、X線発生器1a,1bによる
曝射されるX線は、X線管4,4から下方に広がる略円
錐状であるが、X線曝射口6,6の集束スリット7,7
を介して、図1および図2(a)に示すように、下方に
広がる面状として曝射される。また、X線発生部1で
は、X線を発生した際に生じる熱を冷却フィン(不図
示)にて放熱する。
The X-ray generator 1 has a plurality (two in this embodiment) of X-ray generators 1a and 1b. Each of the X-ray generators 1a and 1b includes an X-ray tube 4,
The X-ray tube 4 is covered with a shielding plate to prevent leakage of X-rays.
The shielding plate is formed by internally applying a shielding material such as lead. Each of the X-ray generators 1a and 1b is disposed on an upper portion of a housing 5 forming a main body of the X-ray foreign matter detection device, and emits X-rays downward from the X-ray emission ports 6 and 6, respectively. The X-ray irradiation ports 6 and 6 are provided with focusing slits 7 and 7 as shown in FIG. As a result, the X-rays emitted by the X-ray generators 1a and 1b have a substantially conical shape spreading downward from the X-ray tubes 4 and 4, but the focusing slits 7 and 7 of the X-ray emission ports 6 and 6 are provided.
1 and FIG. 2A, the light is exposed as a planar shape spreading downward. In the X-ray generation unit 1, heat generated when X-rays are generated is radiated by cooling fins (not shown).

【0013】X線検出部2は、複数(本実施の形態では
二つ)のX線センサ2a,2bを備えている。各X線セ
ンサ2a,2bは、X線異物検出装置の本体をなす筐体
5の下部にて、上記X線発生器1aから曝射された面状
のX線をX線センサ2aで受け、X線発生器1bから曝
射された面状のX線をX線センサ2bで受ける。
The X-ray detector 2 includes a plurality (two in this embodiment) of X-ray sensors 2a and 2b. Each of the X-ray sensors 2a and 2b receives planar X-rays emitted from the X-ray generator 1a by the X-ray sensor 2a at a lower portion of a housing 5 forming a main body of the X-ray foreign matter detection device. The X-ray sensor 2b receives planar X-rays emitted from the X-ray generator 1b.

【0014】各X線センサ2a,2bは、図示しない
が、ライン状に配列された複数のフォトダイオードと、
フォトダイオード上に設けられたシンチレータとを備え
たアレイ状のラインセンサが用いられる。この種の構成
では、被検査物Wに対してX線が曝射された時、被検査
物Wを透過してくるX線をシンチレータで受けて光に変
換する。シンチレータで変換された光は、フォトダイオ
ードによって受光される。各フォトダイオードは、受光
した光を電気信号に変換して出力する。このように、X
線センサ2a,2bはライン状に形成されている。ま
た、X線センサ2a,2bによるそれぞれの電気信号
は、制御手段13に入力される。
Although not shown, each of the X-ray sensors 2a and 2b has a plurality of photodiodes arranged in a line,
An array line sensor including a scintillator provided on a photodiode is used. In this type of configuration, when X-rays are emitted to the inspection object W, the X-rays transmitted through the inspection object W are received by the scintillator and converted into light. The light converted by the scintillator is received by the photodiode. Each photodiode converts the received light into an electric signal and outputs the electric signal. Thus, X
The line sensors 2a and 2b are formed in a line shape. Each electric signal from the X-ray sensors 2a and 2b is input to the control means 13.

【0015】各X線センサ2a,2bは、金属箱8内に
収容されている。金属箱8は、平坦に形成された上面8
aに、上記面状のX線を透過させるスリット(不図示)
を有している。これにより、各X線発生器1a,1bか
ら曝射された面状のX線を、金属箱8内に配置された各
X線センサ2a,2bに向けて透過する。
Each of the X-ray sensors 2a and 2b is housed in a metal box 8. The metal box 8 has a flat upper surface 8.
a is a slit (not shown) for transmitting the planar X-ray.
have. As a result, the planar X-rays emitted from the X-ray generators 1a and 1b are transmitted to the X-ray sensors 2a and 2b arranged in the metal box 8.

【0016】搬送部3は、X線発生部1(X線発生器1
a,1b)からX線検出部2(X線センサ2a,2b)
に向けて曝射されたX線に被検査物Wを通過させるもの
である。図1および図2(a),(b)に示すように、
搬送部3は、複数(本実施の形態では四本)のローラ9
に無端状の搬送ベルト10を張設してなる。また、搬送
部3を構成するローラ8及び搬送ベルト10は、X線検
出部2が収容された金属箱6に対して取り付けられてい
る。搬送部3は、不図示のモータユニットの駆動によ
り、何れかのローラ9が回転し、各ローラ9間に張設さ
れた搬送ベルト10を一方向(図1および図2(b)中
矢印A方向)に循環させる。また、搬送ベルト11は、
金属箱6の上面6aに沿って循環する。これにより、搬
送ベルト11の上に送られた被検査物Wは、金属箱6の
上面6aを搬送面3aとして支持され、搬送方向(矢印
A方向)に搬送されてX線発生部1(X線発生器1a,
1b)からX線検出部2(X線センサ2a,2b)に至
るX線の間を通過する。
The transport unit 3 includes an X-ray generator 1 (X-ray generator 1).
a, 1b) to X-ray detector 2 (X-ray sensors 2a, 2b)
The inspection object W is caused to pass the X-rays emitted toward the inspection object W. As shown in FIG. 1 and FIGS. 2A and 2B,
The transport unit 3 includes a plurality of (four in this embodiment) rollers 9
And an endless transport belt 10 is stretched. Further, the rollers 8 and the conveyor belt 10 constituting the conveyor 3 are attached to the metal box 6 in which the X-ray detector 2 is accommodated. The transport unit 3 rotates one of the rollers 9 by driving a motor unit (not shown), and moves the transport belt 10 stretched between the rollers 9 in one direction (arrow A in FIGS. 1 and 2B). Direction). The transport belt 11 is
Circulates along the upper surface 6a of the metal box 6. Thereby, the inspection object W sent on the transport belt 11 is supported by the upper surface 6a of the metal box 6 as the transport surface 3a, transported in the transport direction (the direction of the arrow A), and the X-ray generator 1 (X Line generator 1a,
It passes between X-rays from 1b) to the X-ray detector 2 (X-ray sensors 2a and 2b).

【0017】第一実施の形態でのX線異物検出装置は、
X線発生器1aからの面状のX線をX線センサ2aが受
け、X線発生器1bからの面状のX線をX線センサ2b
が受ける。そして、各X線発生器1a,1bおよび各X
線センサ2a,2bは、面状のX線を、搬送部3の搬送
面3a上にて、被検査物Wの搬送方向(矢印A方向)に
対して直交させるように配されている。即ち、図2
(b)に示すように、ライン状の各X線センサ2a,2
bが搬送方向(矢印A方向)を横切るようにそれぞれ直
交する配置となり、この各X線センサ2a,2bに向け
てX線発生器1a,1bが面状のX線を曝射する。さら
に、各X線発生器1a,1bおよび各X線センサ2a,
2bは、面状のX線を搬送面3aに対してそれぞれ異な
る角度をもたせるように配されている。即ち、図1に示
すように、X線発生器1aとX線センサ2aは、面状の
X線を、搬送面3aに対して右斜め下に向けて曝射し、
X線発生器1bとX線センサ2bは、面状のX線を、搬
送面3aに対して左斜め下に向けて曝射する。これによ
り、搬送面3aを搬送される被検査物Wには、異なる方
向から面状のX線が曝射される。
The X-ray foreign matter detection device according to the first embodiment
The X-ray sensor 2a receives planar X-rays from the X-ray generator 1a, and receives planar X-rays from the X-ray generator 1b.
Receive. Each X-ray generator 1a, 1b and each X-ray
The line sensors 2a and 2b are arranged so that the planar X-rays are orthogonal to the transport direction (the direction of the arrow A) of the inspection object W on the transport surface 3a of the transport unit 3. That is, FIG.
As shown in (b), each of the linear X-ray sensors 2a, 2a
The X-ray generators 1a and 1b emit planar X-rays toward the X-ray sensors 2a and 2b, respectively. Furthermore, each X-ray generator 1a, 1b and each X-ray sensor 2a,
2b is arranged so that the planar X-rays have different angles with respect to the transport surface 3a. That is, as shown in FIG. 1, the X-ray generator 1a and the X-ray sensor 2a radiate a planar X-ray obliquely downward and rightward to the transport surface 3a,
The X-ray generator 1b and the X-ray sensor 2b emit a planar X-ray obliquely downward and leftward to the transport surface 3a. Thus, the inspection object W transported on the transport surface 3a is irradiated with planar X-rays from different directions.

【0018】なお、図1および図2(a)に示すよう
に、X線検出部2を収容する金属箱8、及び金属箱8に
取り付けられた搬送部3の構成は、筐体5に配されたカ
バー11によってX線の漏洩を防ぐように覆われてい
る。また、カバー11には、両側方の各ローラ9,9お
よび、その上側にかけて開口して、被検査物Wを通過さ
せる開口部12が形成されている。
As shown in FIGS. 1 and 2A, the structure of a metal box 8 for accommodating the X-ray detection unit 2 and the transport unit 3 attached to the metal box 8 are arranged in a housing 5. Cover 11 so as to prevent leakage of X-rays. Further, the cover 11 is formed with the rollers 9 on both sides, and an opening 12 which is open to the upper side thereof and through which the inspection object W passes.

【0019】上述した構成のX線異物検出装置の第一実
施の形態では、被検査物Wが一方の開口部12から搬送
部3の搬送ベルト10上に搬入されると、搬送面3a上
での矢印A方向への搬送過程にて、被検査物WにX線発
生器1bからの面状のX線が曝射される。このX線の曝
射に伴って被検査物Wを透過してくるX線は、X線セン
サ2bによって検出される。次いで、被検査物Wが矢印
A方向に搬送されると、被検査物WにX線発生器1aか
らの面状のX線が曝射される。この曝射に伴って被検査
物Wを透過してくるX線は、X線センサ2aによって検
出される。
In the first embodiment of the X-ray foreign matter detecting device having the above-described configuration, when the inspection object W is carried into the carrying belt 10 of the carrying unit 3 from one of the openings 12, the object W is placed on the carrying surface 3a. During the transport process in the direction of arrow A, the inspection object W is irradiated with planar X-rays from the X-ray generator 1b. X-rays that pass through the inspection object W with the X-ray exposure are detected by the X-ray sensor 2b. Next, when the inspection object W is transported in the direction of arrow A, the inspection object W is irradiated with planar X-rays from the X-ray generator 1a. X-rays that pass through the inspection object W with this irradiation are detected by the X-ray sensor 2a.

【0020】制御手段13では、各X線センサ2a,2
bによって検出されたX線の透過量に応じた電気信号に
基づいて被検査物W中(表面も含む)に異物があるか否
かを判別し、この判別結果から良品(異物なし)又は不
良品(異物あり)を示す選別信号などを外部出力する。
そして、上記検査を終えた被検査物Wは、他方の開口部
12から搬出された後、制御手段13から出力される選
別信号に応じて良品と不良品とに選別される。
In the control means 13, each X-ray sensor 2a, 2
b, it is determined whether or not there is a foreign substance in the inspection object W (including the surface) based on an electric signal corresponding to the amount of transmitted X-rays. A selection signal indicating a good product (there is a foreign substance) is output to the outside.
After being inspected, the inspection object W is carried out of the other opening 12 and is sorted into a non-defective product and a defective product according to a selection signal output from the control unit 13.

【0021】ここで、被検査物Wにある異物の形状や配
置は様々で不特定である。特に、薄板状の異物は、その
薄板面からX線が曝射した場合にはX線の透過率が高く
異物として認識できない。しかしながら、上述したX線
異物検出装置では、X線発生器1aとX線センサ2a、
X線発生器1bとX線センサ2bによって、搬送面3a
上に搬送される被検査物Wに異なる方向から面状のX線
を曝射している。
Here, the shape and arrangement of the foreign matter on the inspection object W are various and unspecified. In particular, when a thin plate-shaped foreign substance is irradiated with X-rays from the thin plate surface, the transmittance of the X-ray is high and the foreign substance cannot be recognized as a foreign substance. However, in the above-described X-ray foreign matter detection device, the X-ray generator 1a and the X-ray sensor 2a,
The transport surface 3a is controlled by the X-ray generator 1b and the X-ray sensor 2b.
Planar X-rays are emitted from different directions to the inspection object W transported upward.

【0022】したがって、上記X線異物検出装置では、
薄板状の異物であって、一方のX線の透過率が高くて認
識できなくても、他方のX線の透過率が低いため認識す
ることが可能となるため、異物の形状や配置に係わら
ず、誤検出のない高精度の検出を行うことができる。
Therefore, in the above X-ray foreign matter detection device,
Even if it is a thin plate-like foreign material and one of the X-rays has a high transmittance and cannot be recognized, it can be recognized because the other X-ray has a low transmittance. Therefore, highly accurate detection without erroneous detection can be performed.

【0023】また、図1に示す第一実施の形態の例で
は、各X線が搬送面3aに至る以前に交差している。こ
のように構成することにより、各X線発生器1a,1b
同士、および各X線センサ2a,2b同士をそれぞれ被
検査物Wの搬送方向(矢印A方向)に近づけて配置する
ことが可能となる。これにより、複数のX線発生器1
a,1bおよび複数のX線センサ2a,2bを有したX
線異物検出装置での小型化を図ることができる。
In the example of the first embodiment shown in FIG. 1, each X-ray intersects before reaching the transport surface 3a. With this configuration, each of the X-ray generators 1a, 1b
And the X-ray sensors 2a and 2b can be arranged close to each other in the transport direction of the inspection object W (direction of arrow A). Thereby, the plurality of X-ray generators 1
X having a, 1b and a plurality of X-ray sensors 2a, 2b
It is possible to reduce the size of the wire foreign matter detection device.

【0024】ところで、第一実施の形態では、図3に示
すように、交差する各X線を、搬送部3の搬送面3a上
に搬送される被検査物Wに対して被検査物W内で交差さ
せることが可能である。各X線を、搬送面3a上に搬送
される被検査物Wに対して被検査物W内で交差させるに
は、各X線の交差位置を、搬送面3a上に搬送される被
検査物Wの高さの範囲内となるように設定すればよい。
この構成によれば、各X線が、搬送部3の搬送面3a上
に搬送される被検査物Wに対して同時に曝射される。し
たがって、各X線センサ2a,2bにより異物が略同時
に検出されるので、異物がどのような形状であって、ど
のような配置で被検査物Wにあるかの判断をすることが
可能となる。
By the way, in the first embodiment, as shown in FIG. 3, each intersecting X-ray is applied to the inspection object W conveyed on the conveyance surface 3a of the conveyance section 3 within the inspection object W. It is possible to intersect. In order for each X-ray to intersect with the inspection object W conveyed on the conveyance surface 3a in the inspection object W, the intersection position of each X-ray is determined by the inspection object conveyed on the conveyance surface 3a. What is necessary is just to set it so that it may be in the range of the height of W.
According to this configuration, each X-ray is simultaneously emitted to the inspection object W transported on the transport surface 3a of the transport unit 3. Therefore, the foreign matter is detected almost simultaneously by the X-ray sensors 2a and 2b, so that it is possible to determine the shape of the foreign matter and the arrangement of the foreign matter on the inspection object W. .

【0025】また、図3に示す構成において、搬送面3
aからの各X線の交差位置の高さを可変できるように、
各X線発生器1a,1bおよび各X線センサ2a,2b
を移動可能に構成してもよい。この場合、少なくともX
線発生器1aとX線センサ2a、あるいはX線発生器1
bとX線センサ2bの何れかの組が移動可能であればよ
い。これにより、被検査物Wの高さに応じて各X線の交
差位置が可変できる汎用性を有することが可能である。
さらに、被検査物Wの所望とする高さ位置に各X線の交
差位置を設定して、被検査物Wにおける所望の部位の異
物検出を略同時に行うことが可能である。
Further, in the configuration shown in FIG.
so that the height of the intersection position of each X-ray from a can be changed,
Each X-ray generator 1a, 1b and each X-ray sensor 2a, 2b
May be configured to be movable. In this case, at least X
X-ray generator 1a and X-ray sensor 2a or X-ray generator 1
It suffices if any pair of b and X-ray sensor 2b is movable. Thereby, it is possible to have versatility that the intersection position of each X-ray can be changed according to the height of the inspection object W.
Furthermore, it is possible to set a crossing position of each X-ray at a desired height position of the inspection object W, and to detect foreign substances at a desired portion of the inspection object W substantially simultaneously.

【0026】また、搬送面3a上に搬送される被検査物
Wに複数の方向から別々にX線を曝射させて異物を検出
する構成において、上述の如く異物がどのような形状で
あって、どのような配置で被検査物Wにあるかの判断を
する場合には、それぞれのX線による検出結果を記憶
し、各記憶データを被検査物Wの移動時間差分を遅延さ
せる処理が必要である。しかしながら、上記図3に示す
構成によれば、異物が略同時に検出されるので、各記憶
データを遅延させる処理が不要となる。
Further, in a configuration in which X-rays are separately irradiated from a plurality of directions to the inspection object W conveyed on the conveyance surface 3a to detect foreign matter, the foreign matter may have any shape as described above. In order to determine the arrangement in the inspection object W, it is necessary to store the detection results of the respective X-rays and to delay each stored data by the moving time difference of the inspection object W. It is. However, according to the configuration shown in FIG. 3, the foreign matter is detected almost simultaneously, so that the process of delaying each stored data becomes unnecessary.

【0027】また、搬送部3で搬送中の被検査物Wが搬
送面3aに対して動く可能性がある。特に円形を基にし
た形状は転がりやすくこの傾向にある。このように搬送
中に被検査物Wが動いた場合、上記の如く各X線による
検出結果の各記憶データを遅延させる処理を行う際に
は、異物がどのような形状であって、どのような配置で
被検査物Wにあるかの判断ができなくなる。しかしなが
ら、上記図3に示す構成によれば、異物が略同時に検出
されるので、搬送中に被検査物Wが動いても上記判断を
行うことが可能である。
Further, there is a possibility that the inspection object W being transported by the transport unit 3 moves with respect to the transport surface 3a. In particular, a shape based on a circle tends to roll easily and has this tendency. When the inspection object W moves during the transport as described above, when performing the process of delaying each storage data of the detection result by each X-ray as described above, the foreign matter has any shape and any shape. It is not possible to determine whether the object W is located on the inspection object W with a proper arrangement. However, according to the configuration shown in FIG. 3, the foreign matter is detected almost simultaneously, so that the above determination can be made even if the inspection object W moves during the transportation.

【0028】なお、上述した第一実施の形態でのX線異
物検出装置では、各面状のX線を、被検査物Wに対して
異なる方向で曝射させる構成として、面状のX線を搬送
面3aに対してそれぞれ異なる角度をもたせるようにし
ている。その一例として図1では、搬送面3aに対して
それぞれのX線を斜め方向に曝射するように構成されて
いるが、この限りではない。例えば、一方のX線を搬送
面3aに対して垂直方向に曝射し、他方のX線を搬送面
3aに対して斜め方向に曝射するように構成してもよ
い。
In the X-ray foreign matter detection apparatus according to the first embodiment described above, the planar X-rays are applied to the inspection object W in different directions. Have different angles with respect to the transport surface 3a. As an example, in FIG. 1, each X-ray is configured to be emitted obliquely to the transport surface 3 a, but the present invention is not limited to this. For example, one X-ray may be irradiated to the transport surface 3a in a vertical direction, and the other X-ray may be emitted to the transport surface 3a in an oblique direction.

【0029】以下、本発明の第二実施の形態を図面を参
照して具体的に説明する。図4は本発明のX線異物検出
装置の第二実施の形態を示す正面図、図5(a)は前記
X線異物検出装置の側面図、図5(b)は前記X線異物
検出装置の部分平面図である。
Hereinafter, a second embodiment of the present invention will be specifically described with reference to the drawings. FIG. 4 is a front view showing a second embodiment of the X-ray foreign matter detector of the present invention, FIG. 5A is a side view of the X-ray foreign matter detector, and FIG. 5B is the X-ray foreign matter detector. 3 is a partial plan view of FIG.

【0030】X線異物検出装置の第二実施の形態では、
X線発生部1、X線検出部2、搬送部3の構成につい
て、上述した第一実施の形態と同一であり、X線発生部
1のX線発生器1a,1bおよびX線検出部2のX線セ
ンサ2a,2bの配置について異なる。ゆえに、以下に
説明する第二実施の形態では、X線発生器1a,1bお
よびX線センサ2a,2bの配置について説明し、その
他の第一実施の形態と同一または同等部分には同一符号
を付して示し説明を省略する。
In the second embodiment of the X-ray foreign matter detector,
The configurations of the X-ray generation unit 1, the X-ray detection unit 2, and the transport unit 3 are the same as those of the first embodiment described above, and the X-ray generators 1a and 1b of the X-ray generation unit 1 and the X-ray detection unit 2 Of the X-ray sensors 2a and 2b are different. Therefore, in the second embodiment described below, the arrangement of the X-ray generators 1a and 1b and the X-ray sensors 2a and 2b will be described, and the same or similar parts as those in the first embodiment will be denoted by the same reference numerals. The description will be omitted.

【0031】第二実施の形態でのX線異物検出装置は、
X線発生器1aからの面状のX線をX線センサ2aが受
け、X線発生器1bからの面状のX線をX線センサ2b
が受ける。そして、各X線発生器1a,1bおよび各X
線センサ2a,2bは、面状のX線を、搬送部3の搬送
面3a上にて異なる角度もたせるように配されている。
即ち、図5(b)に示すように、ライン状の各X線セン
サ2a,2bが、搬送方向(矢印A方向)を横切るよう
に異なる角度で略ハ字状に配置され、この各X線センサ
2a,2bに向けてX線発生器1a,1bが面状のX線
を曝射する。さらに、各X線発生器1a,1bおよび各
X線センサ2a,2bは、面状のX線を搬送面3aに鉛
直な基線Lに対して平行となるように配されている。即
ち、図4に示すように、X線発生器1aとX線センサ2
aおよびX線発生器1bとX線センサ2bは、面状のX
線を搬送面3aに対して鉛直に曝射する。これにより、
搬送面3aを搬送される被検査物Wには、異なる方向か
ら面状のX線が曝射される。
The X-ray foreign matter detector according to the second embodiment is
The X-ray sensor 2a receives planar X-rays from the X-ray generator 1a, and receives planar X-rays from the X-ray generator 1b.
Receive. Each X-ray generator 1a, 1b and each X-ray
The line sensors 2a and 2b are arranged so that plane X-rays have different angles on the transfer surface 3a of the transfer unit 3.
That is, as shown in FIG. 5B, the linear X-ray sensors 2a and 2b are arranged in a substantially C-shape at different angles so as to cross the transport direction (the direction of arrow A). The X-ray generators 1a and 1b emit planar X-rays toward the sensors 2a and 2b. Further, each of the X-ray generators 1a and 1b and each of the X-ray sensors 2a and 2b are arranged so that planar X-rays are parallel to a base line L perpendicular to the transport surface 3a. That is, as shown in FIG. 4, the X-ray generator 1a and the X-ray sensor 2
a, X-ray generator 1b and X-ray sensor 2b
The line is irradiated vertically to the transport surface 3a. This allows
Planar X-rays are emitted from different directions to the inspection object W transported on the transport surface 3a.

【0032】上述した構成のX線異物検出装置の第二実
施の形態では、被検査物Wが一方の開口部12から搬送
部3の搬送ベルト10上に搬入されると、搬送面3a上
での矢印A方向への搬送過程にて、被検査物WにX線発
生器1aからの面状のX線が曝射される。このX線の曝
射に伴って被検査物Wを透過してくるX線は、X線セン
サ2aによって検出される。次いで、被検査物Wが矢印
A方向に搬送されると、被検査物WにX線発生器1bか
らの面状のX線が曝射される。この曝射に伴って被検査
物Wを透過してくるX線は、X線センサ2bによって検
出される。
In the second embodiment of the X-ray foreign substance detecting device having the above-described configuration, when the inspection object W is carried into the transport belt 10 of the transport section 3 from one of the openings 12, the inspection object W is placed on the transport surface 3a. During the transport process in the direction of arrow A, the inspection object W is irradiated with planar X-rays from the X-ray generator 1a. X-rays that pass through the inspection object W with the X-ray exposure are detected by the X-ray sensor 2a. Next, when the inspection object W is transported in the direction of the arrow A, the inspection object W is irradiated with planar X-rays from the X-ray generator 1b. X-rays that pass through the inspection object W with this irradiation are detected by the X-ray sensor 2b.

【0033】制御手段13では、各X線センサ2a,2
bによって検出されたX線の透過量に応じた電気信号に
基づいて被検査物W中(表面も含む)に異物があるか否
かを判別し、この判別結果から良品(異物なし)又は不
良品(異物あり)を示す選別信号などを外部出力する。
そして、上記検査を終えた被検査物Wは、他方の開口部
12から搬出された後、制御手段13から出力される選
別信号に応じて良品と不良品とに選別される。
In the control means 13, each of the X-ray sensors 2a, 2a
b, it is determined whether there is a foreign substance in the inspection object W (including the surface) based on the electric signal corresponding to the amount of transmitted X-rays, and based on the result of the determination, a non-defective product (no foreign substance) or a non-defective product is determined. A selection signal indicating a good product (there is a foreign substance) is output to the outside.
After being inspected, the inspection object W is carried out of the other opening 12 and is sorted into a non-defective product and a defective product according to a selection signal output from the control unit 13.

【0034】ここで、被検査物Wにある異物の形状や配
置は様々で不特定である。特に、薄板状の異物は、その
薄板面からX線が曝射した場合にはX線の透過率が高く
異物として認識できない。しかしながら、上述したX線
異物検出装置では、X線発生器1aとX線センサ2a、
X線発生器1bとX線センサ2bによって、搬送面3a
上に搬送される被検査物Wに異なる方向から面状のX線
を曝射している。
Here, the shape and arrangement of the foreign matter on the inspection object W are various and unspecified. In particular, when a thin plate-shaped foreign substance is irradiated with X-rays from the thin plate surface, the transmittance of the X-ray is high and the foreign substance cannot be recognized as a foreign substance. However, in the above-described X-ray foreign matter detection device, the X-ray generator 1a and the X-ray sensor 2a,
The transport surface 3a is controlled by the X-ray generator 1b and the X-ray sensor 2b.
Planar X-rays are emitted from different directions to the inspection object W transported upward.

【0035】したがって、上記X線異物検出装置では、
薄板状の異物であって、一方のX線の透過率が高くて認
識できなくても、他方のX線の透過率が低いため認識す
ることが可能となるため、異物の形状や配置に係わら
ず、誤検出のない高精度の検出を行うことができる。
Therefore, in the above X-ray foreign matter detection device,
Even if it is a thin plate-like foreign material and one of the X-rays has a high transmittance and cannot be recognized, it can be recognized because the other X-ray has a low transmittance. Therefore, highly accurate detection without erroneous detection can be performed.

【0036】以下、本発明の第三実施の形態を図面を参
照して具体的に説明する。図6は本発明のX線異物検出
装置の第三実施の形態を示す正面図、図7(a)は前記
X線異物検出装置の側面図、図7(b)は前記X線異物
検出装置の部分平面図である。
Hereinafter, a third embodiment of the present invention will be specifically described with reference to the drawings. FIG. 6 is a front view showing a third embodiment of the X-ray foreign matter detection device according to the present invention, FIG. 7 (a) is a side view of the X-ray foreign matter detection device, and FIG. 7 (b) is the X-ray foreign matter detection device. 3 is a partial plan view of FIG.

【0037】X線異物検出装置の第三実施の形態では、
X線発生部1、X線検出部2、搬送部3の構成につい
て、上述した第一実施の形態と同一であり、X線発生部
1のX線発生器1a,1bおよびX線検出部2のX線セ
ンサ2a,2bの配置について異なる。ゆえに、以下に
説明する第三実施の形態では、X線発生器1a,1bお
よびX線センサ2a,2bの配置について説明し、その
他の第一実施の形態と同一または同等部分には同一符号
を付して示し説明を省略する。
In the third embodiment of the X-ray foreign matter detector,
The configurations of the X-ray generation unit 1, the X-ray detection unit 2, and the transport unit 3 are the same as those of the first embodiment described above, and the X-ray generators 1a and 1b of the X-ray generation unit 1 and the X-ray detection unit 2 Of the X-ray sensors 2a and 2b are different. Therefore, in the third embodiment described below, the arrangement of the X-ray generators 1a and 1b and the X-ray sensors 2a and 2b will be described, and the same or equivalent parts as those in the first embodiment will be denoted by the same reference numerals. The description will be omitted.

【0038】第三実施の形態でのX線異物検出装置は、
X線発生器1aからの面状のX線をX線センサ2aが受
け、X線発生器1bからの面状のX線をX線センサ2b
が受ける。そして、各X線発生器1a,1bおよび各X
線センサ2a,2bは、面状のX線を、搬送部3の搬送
面3a上にて異なる角度もたせるように配されている。
即ち、図7(b)に示すように、ライン状の各X線セン
サ2a,2bが、搬送方向(矢印A方向)を横切るよう
に異なる角度で略ハ字状に配置され、この各X線センサ
2a,2bに向けてX線発生器1a,1bが面状のX線
を曝射する。さらに、各X線発生器1a,1bおよび各
X線センサ2a,2bは、面状のX線を搬送面3aに鉛
直な基線Lに対してそれぞれ異なる角度をもたせるよう
に配されている。即ち、図6に示すように、X線発生器
1aとX線センサ2aは、面状のX線を搬送面3aに対
して右斜め下に向けて曝射し、X線発生器1bとX線セ
ンサ2bは、面状のX線を、搬送面3aに対して左斜め
下に向けて曝射する。これにより、搬送面3aを搬送さ
れる被検査物Wには、異なる方向から面状のX線が曝射
される。
The X-ray foreign matter detector according to the third embodiment is
An X-ray sensor 2a receives planar X-rays from the X-ray generator 1a, and an X-ray sensor 2b receives planar X-rays from the X-ray generator 1b.
Receive. Each X-ray generator 1a, 1b and each X-ray
The line sensors 2a and 2b are arranged so that plane X-rays have different angles on the transfer surface 3a of the transfer unit 3.
That is, as shown in FIG. 7B, the line-shaped X-ray sensors 2a and 2b are arranged in a substantially C-shape at different angles so as to cross the transport direction (the direction of arrow A). The X-ray generators 1a and 1b emit planar X-rays toward the sensors 2a and 2b. Further, each of the X-ray generators 1a and 1b and each of the X-ray sensors 2a and 2b are arranged so that planar X-rays have different angles with respect to a base line L perpendicular to the transport surface 3a. That is, as shown in FIG. 6, the X-ray generator 1a and the X-ray sensor 2a emit planar X-rays obliquely downward to the right onto the transport surface 3a, and the X-ray generator 1b and the X-ray sensor 2a. The line sensor 2b emits a planar X-ray obliquely downward and leftward to the transport surface 3a. Thus, the inspection object W transported on the transport surface 3a is irradiated with planar X-rays from different directions.

【0039】上述した構成のX線異物検出装置の第三実
施の形態では、被検査物Wが一方の開口部12から搬送
部3の搬送ベルト10上に搬入されると、搬送面3a上
での矢印A方向への搬送過程にて、被検査物WにX線発
生器1bからの面状のX線が曝射される。このX線の曝
射に伴って被検査物Wを透過してくるX線は、X線セン
サ2bによって検出される。次いで、被検査物Wが矢印
A方向に搬送されると、被検査物WにX線発生器1aか
らの面状のX線が曝射される。この曝射に伴って被検査
物Wを透過してくるX線は、X線センサ2aによって検
出される。
In the third embodiment of the X-ray foreign substance detecting device having the above-described configuration, when the inspection object W is carried into the transport belt 10 of the transport section 3 through one of the openings 12, the inspection object W is placed on the transport surface 3a. During the transport process in the direction of arrow A, the inspection object W is irradiated with planar X-rays from the X-ray generator 1b. X-rays that pass through the inspection object W with the X-ray exposure are detected by the X-ray sensor 2b. Next, when the inspection object W is transported in the direction of arrow A, the inspection object W is irradiated with planar X-rays from the X-ray generator 1a. X-rays that pass through the inspection object W with this irradiation are detected by the X-ray sensor 2a.

【0040】制御手段13では、各X線センサ2a,2
bによって検出されたX線の透過量に応じた電気信号に
基づいて被検査物W中(表面も含む)に異物があるか否
かを判別し、この判別結果から良品(異物なし)又は不
良品(異物あり)を示す選別信号などを外部出力する。
そして、上記検査を終えた被検査物Wは、他方の開口部
12から搬出された後、制御手段13から出力される選
別信号に応じて良品と不良品とに選別される。
In the control means 13, each of the X-ray sensors 2a, 2
b, it is determined whether there is a foreign substance in the inspection object W (including the surface) based on the electric signal corresponding to the amount of transmitted X-rays, and based on the result of the determination, a non-defective product (no foreign substance) or a non-defective product is determined. A selection signal indicating a good product (there is a foreign substance) is output to the outside.
After being inspected, the inspection object W is carried out of the other opening 12 and is sorted into a non-defective product and a defective product according to a selection signal output from the control unit 13.

【0041】ここで、被検査物Wにある異物の形状や配
置は様々で不特定である。特に、薄板状の異物は、その
薄板面からX線が曝射した場合にはX線の透過率が高く
異物として認識できない。しかしながら、上述したX線
異物検出装置では、X線発生器1aとX線センサ2a、
X線発生器1bとX線センサ2bによって、搬送面3a
上に搬送される被検査物Wに異なる方向から面状のX線
を曝射している。
Here, the shape and arrangement of the foreign matter on the inspection object W are various and unspecified. In particular, when a thin plate-shaped foreign object is irradiated with X-rays from the thin plate surface, the transmittance of the X-ray is high and cannot be recognized as the foreign object. However, in the above-described X-ray foreign matter detection device, the X-ray generator 1a and the X-ray sensor 2a,
The transport surface 3a is controlled by the X-ray generator 1b and the X-ray sensor 2b.
Planar X-rays are emitted from different directions to the inspection object W transported upward.

【0042】したがって、上記X線異物検出装置では、
薄板状の異物であって、一方のX線の透過率が高くて認
識できなくても、他方のX線の透過率が低いため認識す
ることが可能となるため、異物の形状や配置に係わら
ず、誤検出のない高精度の検出を行うことができる。
Therefore, in the above X-ray foreign matter detector,
Even if it is a thin plate-like foreign material and one of the X-rays has a high transmittance and cannot be recognized, it can be recognized because the other X-ray has a low transmittance. Therefore, highly accurate detection without erroneous detection can be performed.

【0043】[0043]

【発明の効果】以上説明したように本発明によるX線異
物検出装置は、搬送面上に搬送される被検査物に異なる
方向から複数の面状のX線を曝射することにより、何れ
かの方向からのX線によって異物を認識することが可能
となるので、異物の形状や配置に係わらず高精度の異物
検出を行うことができる。
As described above, the X-ray foreign matter detection device according to the present invention emits a plurality of planar X-rays from different directions to the inspection object conveyed on the conveyance surface. X can be recognized by X-rays from the direction, so that highly accurate foreign object detection can be performed regardless of the shape and arrangement of the foreign objects.

【0044】被検査物に異なる方向から面状のX線を曝
射する構成としては、面状の各X線を、搬送面上にて被
検査物の搬送方向に対して直交するようにし、且つ、搬
送面に向けて異なる角度をもたせるように複数のX線発
生器およびX線センサを配する。この場合、面状の各X
線を、被検査物内で交差させることにより、異物が略同
時に検出されるので、その異物がどのような形状であっ
て、どのような配置で被検査物にあるかどうかの判断を
することができる。
As a configuration for irradiating the inspection object with planar X-rays from different directions, the planar X-rays are made to be orthogonal to the transport direction of the inspection object on the transport surface. Further, a plurality of X-ray generators and X-ray sensors are arranged so as to have different angles toward the transport surface. In this case, each planar X
Foreign matter is detected at almost the same time by intersecting the lines in the object to be inspected. Therefore, it is necessary to determine whether the foreign matter has a shape and an arrangement in the object to be inspected. Can be.

【0045】また、各X線を被検査物内で交差させた構
成とすれば、被検査物Wに複数の方向から別々にX線を
曝射させて異物を検出する構成と比較して、それぞれの
X線による検出結果の各記憶データを被検査物Wの移動
時間差分を遅延させる処理が不要となる。
Further, if the X-rays are crossed in the inspection object, the X-rays are separately irradiated from a plurality of directions to the inspection object W to detect foreign matter. The process of delaying the moving time difference of the inspection object W with respect to each storage data of the detection result by each X-ray becomes unnecessary.

【0046】また、各X線を被検査物内で交差させた構
成とすれば、被検査物Wに複数の方向から別々にX線を
曝射させて異物を検出する構成と比較して、搬送中に搬
送面に対し被検査物Wが動いても上記判断を行うことが
可能である。
Furthermore, if the X-rays are crossed in the inspection object, the X-rays are separately irradiated from a plurality of directions to the inspection object W to detect foreign matter. The above determination can be made even when the inspection object W moves with respect to the transport surface during the transport.

【0047】また、各X線を被検査物内で交差させた構
成において、搬送面からの各X線の交差位置の高さを可
変可能とすれば、被検査物の高さに応じた汎用性を有す
ることができるとともに、被検査物における所望の部位
の異物検出を略同時に行うことができる。
In a configuration in which each X-ray intersects within the inspection object, if the height of the intersection position of each X-ray from the transport surface can be changed, a general-purpose corresponding to the height of the inspection object can be used. In addition, foreign substances can be detected at a desired portion of the inspection object at substantially the same time.

【0048】また、面状の各X線を、搬送面上にて被検
査物の搬送方向に対して異なる角度をもたせるように
し、且つ、搬送面に鉛直な基線に対して平行させるよう
に各X線発生器および前記各X線センサを配してもよ
い。この場合にも、搬送面上に搬送される被検査物に異
なる方向から複数の面状のX線を曝射し、何れかの方向
からのX線によって異物を認識することが可能となるの
で、異物の形状や配置に係わらずその検出を行うことが
できる。
Further, each planar X-ray is made to have a different angle with respect to the transport direction of the object to be inspected on the transport surface, and each X-ray is made parallel to a base line perpendicular to the transport surface. An X-ray generator and each of the X-ray sensors may be provided. Also in this case, a plurality of planar X-rays are emitted from different directions to the object to be inspected conveyed on the conveying surface, and foreign matter can be recognized by the X-rays from any direction. In addition, the detection can be performed regardless of the shape and arrangement of the foreign matter.

【0049】また、面状の各X線を、搬送部の搬送面上
にて被検査物の搬送方向に対して異なる角度をもたせる
ようにし、且つ、搬送面に鉛直な基線に対して異なる角
度をもたせるように各X線発生器および前記各X線セン
サを配してもよい。この場合でも、搬送面上に搬送され
る被検査物に異なる方向から複数の面状のX線を曝射
し、何れかの方向からのX線によって異物を認識するこ
とが可能となるので、異物の形状や配置に係わらずその
検出を行うことができる。
Each of the planar X-rays has a different angle with respect to the transport direction of the object to be inspected on the transport surface of the transport section, and has a different angle with respect to the base line perpendicular to the transport surface. Each X-ray generator and each X-ray sensor may be arranged so as to provide the following. Even in this case, a plurality of planar X-rays are emitted from different directions to the object to be inspected conveyed on the conveying surface, and foreign matter can be recognized by the X-rays from any direction. The detection can be performed regardless of the shape and arrangement of the foreign matter.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明のX線異物検出装置の第一実施の形態を
示す正面図。
FIG. 1 is a front view showing a first embodiment of an X-ray foreign matter detection device of the present invention.

【図2】(a)前記X線異物検出装置の側面図。 (b)前記X線異物検出装置の部分平面図。FIG. 2A is a side view of the X-ray foreign matter detection device. (B) Partial plan view of the X-ray foreign matter detection device.

【図3】第一実施の形態における別の例を示す正面図。FIG. 3 is a front view showing another example of the first embodiment.

【図4】本発明のX線異物検出装置の第二実施の形態を
示す正面図。
FIG. 4 is a front view showing a second embodiment of the X-ray foreign matter detection device of the present invention.

【図5】(a)前記X線異物検出装置の側面図。 (b)前記X線異物検出装置の部分平面図。FIG. 5A is a side view of the X-ray foreign matter detection device. (B) Partial plan view of the X-ray foreign matter detection device.

【図6】本発明のX線異物検出装置の第三実施の形態を
示す正面図。
FIG. 6 is a front view showing a third embodiment of the X-ray foreign matter detection device of the present invention.

【図7】(a)前記X線異物検出装置の側面図。 (b)前記X線異物検出装置の部分平面図。FIG. 7A is a side view of the X-ray foreign matter detection device. (B) Partial plan view of the X-ray foreign matter detection device.

【符号の説明】[Explanation of symbols]

1a,1b…X線発生器、2a,2b…X線センサ、3
…搬送部、3a…搬送面、A…搬送方向、L…基線、W
…被検査物。
1a, 1b X-ray generator, 2a, 2b X-ray sensor, 3
... Conveying unit, 3a ... Conveying surface, A ... Conveying direction, L ... Base line, W
… Inspection object.

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 被検査物(W)にX線を曝射し、このX
線の曝射に伴って前記被検査物を透過するX線の透過量
から前記被検査物中の異物の有無を検出するX線異物検
出装置において、 X線を面状に曝射する複数のX線発生器(1a,1b)
と、 前記各X線発生器からのX線をそれぞれ受けるようにラ
イン状に形成された複数のX線センサ(2a,2b)
と、 前記各X線発生器と前記各X線センサとの間に前記被検
査物を搬送させる平坦状の搬送面(3a)をなす搬送部
(3)と、 を備え、前記各X線発生器が、前記面状の各X線を、前
記搬送部の搬送面上にて前記被検査物の搬送方向(A)
に対して直交させるように配され、且つ、前記搬送面に
向けて異なる角度をもたせるように配されていることを
特徴とするX線異物検出装置。
1. An object to be inspected (W) is irradiated with X-rays.
An X-ray foreign matter detection device that detects the presence or absence of foreign matter in the inspection object based on the amount of X-rays transmitted through the inspection object along with the irradiation of X-rays; X-ray generator (1a, 1b)
A plurality of X-ray sensors (2a, 2b) formed in a line so as to receive X-rays from each of the X-ray generators, respectively.
And a transport section (3) forming a flat transport surface (3a) for transporting the inspection object between each of the X-ray generators and each of the X-ray sensors. A detector for transferring each of the planar X-rays on a transport surface of the transport unit in a transport direction of the inspection object (A)
An X-ray foreign matter detection device, wherein the X-ray detection device is arranged so as to be orthogonal to the image forming apparatus, and is arranged to have a different angle toward the transport surface.
【請求項2】 前記各X線発生器(1a,1b)が、前
記面状の各X線を前記搬送部(3)にて搬送される被検
査物(W)に対して該被検査物内で交差させるように配
されていることを特徴とする請求項1に記載のX線異物
検出装置。
2. The inspection object (W) in which each of the X-ray generators (1a, 1b) conveys each of the planar X-rays by the conveyance section (3). The X-ray foreign matter detection device according to claim 1, wherein the X-ray foreign matter detection device is arranged to cross each other.
【請求項3】 前記搬送面(3a)からの前記各X線の
交差位置の高さが可変とされていることを特徴とする請
求項2に記載のX線異物検出装置。
3. The X-ray foreign matter detection device according to claim 2, wherein a height of an intersection position of each of the X-rays from the transport surface (3a) is variable.
【請求項4】 被検査物(W)にX線を曝射し、このX
線の曝射に伴って前記被検査物を透過するX線の透過量
から前記被検査物中の異物の有無を検出するX線異物検
出装置において、 X線を面状に曝射する複数のX線発生器(1a,1b)
と、 前記各X線発生器からのX線をそれぞれ受けるようにラ
イン状に形成された複数のX線センサ(2a,2b)
と、 前記各X線発生器と前記各X線センサとの間に前記被検
査物を搬送させる平坦状の搬送面(3a)をなす搬送部
(3)と、 を備え、前記各X線発生器が、前記面状の各X線を、前
記搬送部の搬送面上にて前記被検査物の搬送方向(A)
に対して異なる角度をもたせるように配され、且つ、前
記搬送面に鉛直な基線(L)に対して平行させるように
配されていることを特徴とするX線異物検出装置。
4. An object to be inspected (W) is irradiated with X-rays.
An X-ray foreign matter detection device that detects the presence or absence of foreign matter in the inspection object based on the amount of X-rays transmitted through the inspection object along with the irradiation of X-rays; X-ray generator (1a, 1b)
A plurality of X-ray sensors (2a, 2b) formed in a line so as to receive X-rays from each of the X-ray generators, respectively.
And a transport section (3) forming a flat transport surface (3a) for transporting the inspection object between each of the X-ray generators and each of the X-ray sensors. The apparatus converts each of the planar X-rays into a transport direction (A) of the inspection object on a transport surface of the transport unit.
An X-ray foreign matter detection device, wherein the X-ray foreign matter detection device is disposed so as to have a different angle with respect to the transfer surface, and is disposed so as to be parallel to the vertical base line (L) on the transfer surface.
【請求項5】 被検査物(W)にX線を曝射し、このX
線の曝射に伴って前記被検査物を透過するX線の透過量
から前記被検査物中の異物の有無を検出するX線異物検
出装置において、 X線を面状に曝射する複数のX線発生器(1a,1b)
と、 前記各X線発生器からのX線をそれぞれ受けるようにラ
イン状に形成された複数のX線センサ(2a,2b)
と、 前記各X線発生器と前記各X線センサとの間に前記被検
査物を搬送させる平坦状の搬送面(3a)をなす搬送部
(3)と、 を備え、前記各X線発生器が、前記面状の各X線を、前
記搬送部の搬送面上にて前記被検査物の搬送方向(A)
に対して異なる角度をもたせるように配され、且つ、前
記搬送面に鉛直な基線(L)に対して異なる角度をもた
せるように配されていることを特徴とするX線異物検出
装置。
5. An inspection object (W) is irradiated with X-rays,
An X-ray foreign matter detection device that detects the presence or absence of foreign matter in the inspection object based on the amount of X-rays transmitted through the inspection object along with the irradiation of X-rays; X-ray generator (1a, 1b)
A plurality of X-ray sensors (2a, 2b) formed in a line so as to receive X-rays from each of the X-ray generators, respectively.
And a transport section (3) forming a flat transport surface (3a) for transporting the inspection object between each of the X-ray generators and each of the X-ray sensors. The apparatus converts each of the planar X-rays into a transport direction (A) of the inspection object on a transport surface of the transport unit.
An X-ray foreign matter detection device, wherein the X-ray foreign matter detection device is arranged so as to have a different angle with respect to a vertical line (L) on the conveyance surface.
JP2000365459A 2000-11-30 2000-11-30 X-ray foreign object detection device Expired - Lifetime JP3715524B2 (en)

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