JP2004061479A - X-ray foreign matter detector - Google Patents

X-ray foreign matter detector Download PDF

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Publication number
JP2004061479A
JP2004061479A JP2002252042A JP2002252042A JP2004061479A JP 2004061479 A JP2004061479 A JP 2004061479A JP 2002252042 A JP2002252042 A JP 2002252042A JP 2002252042 A JP2002252042 A JP 2002252042A JP 2004061479 A JP2004061479 A JP 2004061479A
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JP
Japan
Prior art keywords
ray
foreign matter
detector
generators
generator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002252042A
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Japanese (ja)
Inventor
Takeshi Goto
後藤 武
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elco Co Ltd
Original Assignee
Elco Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elco Co Ltd filed Critical Elco Co Ltd
Priority to JP2002252042A priority Critical patent/JP2004061479A/en
Publication of JP2004061479A publication Critical patent/JP2004061479A/en
Pending legal-status Critical Current

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Abstract

<P>PROBLEM TO BE SOLVED: To make a foreign matter detector highly precisely detectable a foreign matter in an object to be examined with a large width. <P>SOLUTION: In this detector, a plurality of X-ray generators, a plurality of X-ray detectors arranged in positions separated by a distance capable of obtaining an X-ray transmission quantity required for detecting the foreign matter, corresponding to the respective X-ray generators, and arranged to overlap respective inspection areas so as to examine all the areas for the inspected object, and a plurality of diaphragming devices or shielding plates to prevent the X-ray detector in the area other than the corresponding area from being irradiated with X-rays emitted from the X-ray generators, are arranged. <P>COPYRIGHT: (C)2004,JPO

Description

【0001】
【発明の属する技術分野】
本発明は、X線を利用して、各種の製品の中に混入している異物を自動的に発見する装置に関する。
【0002】
【従来の技術】
X線異物検出装置は、原材料や加工工程品や製品などの被検査物にX線発生器からX線を照射して、X線の透過量から被検査物中に金属等の異物が混入しているか否かを検出する装置である。
X線異物検出装置の検出部は図4に示す様に主にX線発生器101、搬送用ベルトコンベア102、X線発生器101のX線が、被検査物104を透過したX線量を検出する様に配置されたX線検出器103に分けられる。被検査物104は搬送用ベルトコンベア102により、X線発生器101のX線を照射されながら、X線検出器103の間を通過する。このとき得られるX線検出器103からのX線透視画像信号をもとに、製品中に混入した異物を検出する。
【0003】
【発明が解決しようとする課題】
しかしながら、従来のX線異物検出装置では、X線発生器101から照射されるX線の異物検出に使用できる範囲が、図5の有効照射角度Aで示す範囲に限られているので、図5に示すように、幅Wの広い被検査物104中の全領域の異物を検出するためは、X線発生器101の取り付け高さHを高くする必要があった。
一方、X線の照射強度は照射距離が大きくなると、急激に減衰する性質があり、従来の従来のX線異物検出装置では、X線発生器101の取り付け高さが高くなると、異物検出に必要なX線透過量を得ることが出来ず、十分な異物検出精度が得られないという問題があった。
【0004】本発明は、上記欠点を除くためになされたものであり、その目的とするところは、幅の広い被検査物に対して、従来のX線発生器でも、異物検出に必要なX線透過量を得ることができ、十分な異物検出精度を備えたX線異物検出装置を提供するところにある。
【0005】
【課題を解決するための手段】
上記の課題を解決するために、本発明のX線異物検出装置は、複数台のX線発生器と、そのおのおののX線発生器に対応して、異物検出に必要なX線透過量を得ることのできる距離だけ離れた位置に配置され、かつ、被検査物の全領域を検査できるように、それぞれの検査領域が重なり合う様に配置された複数台のX線検出器と、X線発生器から照射されるX線が他の領域のX線検出器に照射されないために設けられた複数台の絞り装置又は遮蔽板(以降絞り装置とは、遮蔽板も含むものとする)を配置した。
【0006】
【発明の実施の形態】
本発明のX線異物検出装置の第一実施形態を図面に示す実施例を参照して説明する。図1は、本発明によるX線異物検出装置の検出部を示す概略斜視図である。2台のX線発生器1、X線発生器2と、その各々のX線発生器1、X線発生器2に対向して、異物検出に必要なX線透過量を得ることのできる距離だけ離れた位置にX線検出器6、X線検出器7が配置されている。被検査物5はベルトコンベア(図示せず)により、図1中矢方向に搬送され、X線発生器1、X線発生器2とX線検出器6、X線検出器7の間を通過する。
X線発生器1、X線発生器2の下方には、X線発生器から照射されるX線が他の領域のX線検出器に照射されないために設けられた2台の絞り装置3、絞り装置4が配置されている。
【0007】また、X線発生器1とX線検出器6及びX線発生器2とX線検出器7の被検査物5の搬送方向に直交する方向の位置関係は、図2に示すように、被検査物5の全領域を検査できるように、それぞれの検査領域が重なり合う様に配置されている。
【0008】さらに、X線発生器1とX線検出器6及びX線発生器2とX線検出器7の被検査物5の搬送方向に平行な方向の位置関係は、図3に示すように、X線発生器から照射されるX線が他の領域のX線検出器に入射しない様に、それぞれ絞り装置3、絞り装置4によりX線の広がりが規制されており、所定の距離を離して配置されている。
【0009】
この実施形態によれば、幅の広い被検査物に対しても、X線発生器の取り付け高さを高くする必要がなく、異物検出に必要なX線透過量を得ることができるため、高精度なX線異物検出が可能となる。
【0010】
図1の実施形態では、X線発生器及びX線検出器がそれそれ2台であったが、他の実施形態として、X線発生器及びX線検出器がそれぞれ3台以上にすると、より幅の広い被検査物の高精度な異物検査が可能となる。
【0011】
【発明の効果】
以上説明したように、本発明によれば、複数台のX線発生器及びX線検出器を設置することにより、幅の広い被検査物に対しても、X線発生器の取り付け高さを高くすることなく、異物検出に必要なX線透過量を得ることができ、高精度のX線異物検出装置を提供できる。
【図面の簡単な説明】
【図1】本発明の一実施形態を示す斜視図である。
【図2】本発明のX線発生器及びX線検出器の位置関係を説明するための正面図である。
【図3】本発明のX線発生器及びX線検出器の位置関係を説明するための正面図である。
【図4】従来技術を示す斜視図である。
【図5】従来技術のX線発生器及びX線検出器の位置関係を説明するための正面図である。
【符号の説明】
1…X線発生器、2…X線発生器、3…絞り装置、4…絞り装置、5…被検査物、6…X線検出器、7…X線検出器
101…X線発生器、102…ベルトコンベア、103…X線検出器、104…、被検査物
[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an apparatus for automatically detecting foreign matter mixed in various products using X-rays.
[0002]
[Prior art]
The X-ray foreign matter detector irradiates X-rays from the X-ray generator to the inspection object such as raw materials, processing products, and products, and foreign matter such as metal enters the inspection object based on the amount of transmitted X-rays. It is a device that detects whether or not the device is operating.
As shown in FIG. 4, the detection unit of the X-ray foreign matter detection device mainly detects the X-ray amount transmitted from the X-ray generator 101, the conveyor belt conveyor 102, and the X-ray generator 101 through the inspection object 104. The X-ray detector 103 is arranged so as to perform The inspection object 104 passes between the X-ray detectors 103 while being irradiated with the X-rays of the X-ray generator 101 by the conveyor belt conveyor 102. Based on the X-ray fluoroscopic image signal from the X-ray detector 103 obtained at this time, a foreign substance mixed into the product is detected.
[0003]
[Problems to be solved by the invention]
However, in the conventional X-ray foreign matter detection device, the range that can be used for detecting foreign matter of X-rays emitted from the X-ray generator 101 is limited to the range indicated by the effective irradiation angle A in FIG. As shown in (1), in order to detect foreign substances in the entire region of the inspection object 104 having a wide width W, it is necessary to increase the mounting height H of the X-ray generator 101.
On the other hand, the irradiation intensity of X-rays has a property of rapidly attenuating as the irradiation distance increases, and in the conventional conventional X-ray foreign matter detection device, when the mounting height of the X-ray generator 101 is increased, it is necessary to detect foreign matter. Therefore, there is a problem that a sufficient amount of X-ray transmission cannot be obtained, and sufficient foreign matter detection accuracy cannot be obtained.
The present invention has been made to eliminate the above-mentioned disadvantages, and an object of the present invention is to apply a conventional X-ray generator to a wide inspection object by using a conventional X-ray generator. An object of the present invention is to provide an X-ray foreign matter detection device which can obtain a quantity of transmitted light and has sufficient foreign matter detection accuracy.
[0005]
[Means for Solving the Problems]
In order to solve the above-mentioned problems, an X-ray foreign matter detection device according to the present invention includes a plurality of X-ray generators and an X-ray transmission amount required for foreign matter detection corresponding to each of the X-ray generators. A plurality of X-ray detectors, which are arranged at positions distant from each other by a distance that can be obtained, and are arranged so that respective inspection regions overlap each other so that the entire region of the inspection object can be inspected; A plurality of aperture devices or shielding plates (hereinafter, the aperture devices include the shielding plates) provided to prevent the X-rays emitted from the device from being applied to the X-ray detectors in other regions.
[0006]
BEST MODE FOR CARRYING OUT THE INVENTION
A first embodiment of the X-ray foreign matter detection device of the present invention will be described with reference to examples shown in the drawings. FIG. 1 is a schematic perspective view showing a detection unit of the X-ray foreign matter detection device according to the present invention. Two X-ray generators 1 and X-ray generators 2 and a distance facing each of the X-ray generators 1 and 2 so that an X-ray transmission amount necessary for foreign object detection can be obtained. The X-ray detector 6 and the X-ray detector 7 are arranged at positions apart from each other. The test object 5 is conveyed by a belt conveyor (not shown) in the direction of the arrow in FIG. 1 and passes between the X-ray generator 1, the X-ray generator 2, the X-ray detector 6, and the X-ray detector 7. .
Below the X-ray generator 1 and the X-ray generator 2, two aperture devices 3 provided to prevent the X-rays emitted from the X-ray generator from being applied to the X-ray detectors in other regions. An aperture device 4 is provided.
FIG. 2 shows the positional relationship between the X-ray generator 1 and the X-ray detector 6 and between the X-ray generator 2 and the X-ray detector 7 in the direction perpendicular to the transport direction of the inspection object 5. In addition, the respective inspection areas are arranged so as to overlap each other so that the entire area of the inspection object 5 can be inspected.
Further, the positional relationship between the X-ray generator 1 and the X-ray detector 6 and between the X-ray generator 2 and the X-ray detector 7 in the direction parallel to the transport direction of the inspection object 5 is as shown in FIG. In order to prevent the X-rays emitted from the X-ray generator from being incident on the X-ray detectors in other regions, the spread of the X-rays is regulated by the stop devices 3 and 4, respectively. They are placed apart.
[0009]
According to this embodiment, it is not necessary to increase the mounting height of the X-ray generator even for a wide inspection object, and it is possible to obtain an X-ray transmission amount necessary for foreign object detection. Accurate X-ray foreign matter detection becomes possible.
[0010]
In the embodiment of FIG. 1, the number of X-ray generators and X-ray detectors is two each. However, as another embodiment, if the number of X-ray generators and X-ray detectors is three or more, respectively, It is possible to perform a high-precision foreign substance inspection of a wide inspection object.
[0011]
【The invention's effect】
As described above, according to the present invention, by installing a plurality of X-ray generators and X-ray detectors, the mounting height of the X-ray generator can be reduced even for a wide inspection object. An X-ray transmission amount required for foreign object detection can be obtained without increasing the height, and a highly accurate X-ray foreign object detection device can be provided.
[Brief description of the drawings]
FIG. 1 is a perspective view showing an embodiment of the present invention.
FIG. 2 is a front view for explaining a positional relationship between an X-ray generator and an X-ray detector according to the present invention.
FIG. 3 is a front view for explaining a positional relationship between an X-ray generator and an X-ray detector according to the present invention.
FIG. 4 is a perspective view showing a conventional technique.
FIG. 5 is a front view for explaining a positional relationship between a conventional X-ray generator and an X-ray detector.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... X-ray generator, 2 ... X-ray generator, 3 ... diaphragm apparatus, 4 ... diaphragm apparatus, 5 ... inspection object, 6 ... X-ray detector, 7 ... X-ray detector 101 ... X-ray generator, 102: Belt conveyor, 103: X-ray detector, 104: Inspection object

Claims (1)

複数台のX線発生器と、そのおのおののX線発生器に対応して、異物検出に必要なX線透過量を得ることのできる距離だけ離れた位置に配置され、かつ、被検査物の全領域を検査できるように、それぞれの検査領域が重なり合う様に配置された複数台のX線検出器と、X線発生器から照射されるX線が他の領域のX線検出器に照射されないために設けられた複数台の絞り装置または遮蔽板を有することを特徴とするX線異物検出装置。A plurality of X-ray generators and, corresponding to each of the X-ray generators, are arranged at positions separated by a distance capable of obtaining an X-ray transmission amount necessary for foreign substance detection, and A plurality of X-ray detectors arranged so that the inspection areas overlap each other so that the entire area can be inspected, and X-rays emitted from the X-ray generator are not irradiated to X-ray detectors in other areas X-ray foreign matter detection device having a plurality of aperture devices or shielding plates provided for the purpose.
JP2002252042A 2002-07-27 2002-07-27 X-ray foreign matter detector Pending JP2004061479A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008275451A (en) * 2007-04-27 2008-11-13 Anritsu Sanki System Co Ltd X-ray foreign matter detector
KR20150113819A (en) 2014-03-31 2015-10-08 가부시키가이샤 히다치 하이테크 사이언스 Inspection apparatus using x-ray penetration
DE102015112441A1 (en) 2014-08-11 2016-02-11 Hitachi High-Technologies Corporation X-ray inspection apparatus and foreign matter detection method
KR101874133B1 (en) 2012-02-21 2018-07-03 가부시키가이샤 히타치 하이테크 사이언스 Transmitted x-ray analysing apparatus

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10267867A (en) * 1997-03-25 1998-10-09 Hitachi Medical Corp X-ray inspection apparatus
JPH11500229A (en) * 1995-11-13 1999-01-06 アメリカ合衆国 Apparatus and method for automatic recognition of hidden objects using multiple energy computed tomography
JP2000135268A (en) * 1998-08-26 2000-05-16 Yuyama Seisakusho:Kk Tablet testing device
JP2000266695A (en) * 1999-03-16 2000-09-29 Shimadzu Corp Boiled egg inspecting device
JP2002148214A (en) * 2000-11-14 2002-05-22 Ishida Co Ltd X-ray inspecting apparatus
JP2002168802A (en) * 2000-11-30 2002-06-14 Anritsu Corp X-ray foreign matter detector

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11500229A (en) * 1995-11-13 1999-01-06 アメリカ合衆国 Apparatus and method for automatic recognition of hidden objects using multiple energy computed tomography
JPH10267867A (en) * 1997-03-25 1998-10-09 Hitachi Medical Corp X-ray inspection apparatus
JP2000135268A (en) * 1998-08-26 2000-05-16 Yuyama Seisakusho:Kk Tablet testing device
JP2000266695A (en) * 1999-03-16 2000-09-29 Shimadzu Corp Boiled egg inspecting device
JP2002148214A (en) * 2000-11-14 2002-05-22 Ishida Co Ltd X-ray inspecting apparatus
JP2002168802A (en) * 2000-11-30 2002-06-14 Anritsu Corp X-ray foreign matter detector

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008275451A (en) * 2007-04-27 2008-11-13 Anritsu Sanki System Co Ltd X-ray foreign matter detector
KR101874133B1 (en) 2012-02-21 2018-07-03 가부시키가이샤 히타치 하이테크 사이언스 Transmitted x-ray analysing apparatus
KR20150113819A (en) 2014-03-31 2015-10-08 가부시키가이샤 히다치 하이테크 사이언스 Inspection apparatus using x-ray penetration
US9863896B2 (en) 2014-03-31 2018-01-09 Hitachi High-Tech Science Corporation X-ray transmission inspection apparatus
DE102015112441A1 (en) 2014-08-11 2016-02-11 Hitachi High-Technologies Corporation X-ray inspection apparatus and foreign matter detection method

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