JP2000111501A - Fluoroscope - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain two fluoroscopy images with different directions with a simple configuration. SOLUTION: This fluoroscope is provided with a rotary sample stand 5 for rotating a specimen 4 along a circular arc, one radiation source 1 for applying a transmissible radiation to the specimen 4 being rotated by the rotary sample stand 5, two radiation detectors 3a and 3b that are arranged to detect radiation through the specimen 4 after being emitted from the radiation source 1 at two rotary measurement positions, and a data-processing means for creating each fluoroscopy image based on data being detected by each of the radiation detectors 3a and 3b, thus obtaining two fluoroscopy images with different fluoroscopy angles exceeding the arrangement angle between the radiation detectors 3a and 3b for the radiation source 1.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluoroscopic examination apparatus for examining the inside of a subject being transported, and more particularly to a fluoroscopic examination apparatus capable of obtaining two fluoroscopic images having largely different directions with a simple configuration. Things.

[0002]

2. Description of the Related Art In general, in a nondestructive inspection apparatus, for example, a fluoroscopic inspection apparatus, when a fluoroscopic image of a test object on a transport line is obtained by X-rays, the structure or defect of the test object is determined in a fluoroscopic view from one direction. Since it may not be possible in some cases, it is necessary to see through from different directions.

FIGS. 9 (a) and 9 (b) are schematic diagrams each showing a configuration example of a conventional fluoroscopic inspection apparatus of this type.
That is, as shown in FIG. 9A, one is a radiation detector on the extension of each of two X-ray beams 2a and 2b forming an angle γ irradiated by the X-ray tube 1 as a radiation source. The two X-ray detectors 3a and 3b are arranged, and the fluoroscopic images of the subject 4 being conveyed in the direction of the arrow shown in the figure are acquired by the two X-ray detectors 3a and 3b, respectively, so that the directions differ by an angle γ. A fluoroscopic image is obtained.

The other is, as shown in FIG. 9 (b), with respect to the subject 4 being conveyed in the direction of the arrow shown in FIG.
A plurality of sets (two sets in the figure) of the X-ray tubes 1a and 1b and the X-ray detectors 3a and 3b are respectively arranged in different directions so as to obtain fluoroscopic images from different directions.

[0005]

When the subject 4 is inspected from different directions as described above, first, in the fluoroscopy apparatus shown in FIG. 9A, the X-ray beams 2a and 2b are used. The larger the angle γ is, the more advantageous, but it is difficult to realize the X-ray tube 1 that generates radiation at a wide angle and satisfies the technical requirements suitable for imaging such as the focal size and the radiation intensity distribution. It is difficult to widen the angle γ.

Further, in the fluoroscopic examination apparatus as shown in FIG. 9B, a plurality of sets of X-ray tubes 1a and 1b and X-ray detectors 3a and 3b must be prepared. Since the control is complicated, it is disadvantageous in terms of cost. An object of the present invention is to provide a fluoroscopic inspection apparatus capable of obtaining two fluoroscopic images having largely different directions with a simple configuration.

[0007]

According to a first aspect of the present invention, there is provided a fluoroscopic inspection apparatus for inspecting the inside of a subject being transported, wherein the subject is rotated along an arc. A sample stage, and one radiation source that irradiates the subject rotating with the rotating sample stage with penetrating radiation;
The radiation emitted by the radiation source and transmitted through the subject is
Two radiation detectors arranged to detect at two measurement positions of the rotation of the subject, respectively, and data processing means for creating a fluoroscopic image based on data detected by each radiation detector. In addition, two perspective images having different perspective angles exceeding the arrangement angle between the respective radiation detectors with respect to the radiation source are created.

Therefore, in the fluoroscopic examination apparatus according to the first aspect of the present invention, since the subject rotates and changes its direction along the arc while moving from the first measurement position to the second measurement position, two objects are used. From the data detected by the radiation detectors, it is possible to obtain two perspective images having mutually different perspective angles exceeding the arrangement angle between each radiation detector with respect to the radiation source.

According to the second aspect of the present invention, there is provided a rotating sample stage for rotating an object along an arc, one radiation source for irradiating the object rotating with the rotating sample stage with a penetrating radiation, At each of two measurement positions, which are the intersections of an arc and a substantially plane parallel to the rotation axis of the subject passing through the radiation source, two measurement positions are arranged to detect radiation emitted by the radiation source and transmitted through the subject. The apparatus includes a radiation detector and data processing means for creating perspective images based on data detected by the respective radiation detectors, and creates two perspective images having mutually different perspective angles.

Therefore, in the fluoroscopic examination apparatus according to the second aspect of the present invention, the subject is transmitted through each of two measurement positions which are the intersections of the arc and the substantially plane parallel to the rotation axis of the subject through the radiation source. By creating perspective images from data detected by two radiation detectors arranged to detect radiation, two perspective images of the subject can be obtained from different directions.

Further, according to the third aspect of the present invention, a rotating sample stage for rotating the subject along an arc, and a subject which is on a substantially circular arc surface and which is rotating by the rotating sample stage, irradiates a transmissive radiation to the subject. At each of two measurement positions, which are the intersection of a substantially straight line and a circular arc passing through the radiation source and along a circular arc plane, are arranged to detect radiation irradiated by the radiation source and transmitted through the subject One radiation detector, and data processing means for creating respective perspective images based on data detected at the two measurement positions by the radiation detector, creating two perspective images having different perspective angles from each other I am trying to do it.

Therefore, in the fluoroscopic examination apparatus according to the third aspect of the present invention, the object is transmitted through each of the two measurement positions which are the intersections of the substantially straight line and the arc along the arc surface of the object through the radiation source. By creating fluoroscopic images from data detected at two measurement positions by one radiation detector arranged to detect radiation, two radiations of the subject can be detected from different directions at one radiation detector. Three perspective images can be obtained.

[0013] On the other hand, in the invention of claim 4, the above-mentioned claim 1 is provided.
Alternatively, in the fluoroscopic examination apparatus according to claim 2, when the object is at one of the measurement positions, data transmitted through the object detected by the corresponding one of the radiation detectors is transmitted by the other radiation detector at the same time. Correction means for correcting the output fluctuation of the radiation source by using the data which does not pass through the subject detected in the data processing means is added to the data processing means.

Therefore, in the fluoroscopic examination apparatus according to the fourth aspect of the invention, both the one radiation detector for detecting the radiation transmitted through the subject and the other radiation detector for detecting the radiation not transmitted through the subject are provided. By performing data detection at the same time and performing calculations as pre-processing between the data acquired by the two radiation detectors at the same time, it is possible to correct fluctuations in radiation emitted by the radiation source.

[0015] According to the invention of claim 5, the above-mentioned claim 1 is provided.
In the fluoroscopic inspection apparatus according to any one of claims 3 to 3, the data processing means may binarize each of the two fluoroscopic images, and perform addition between the binarized images to reduce the data amount. I have to.

Therefore, in the fluoroscopic inspection apparatus according to the fifth aspect of the present invention, each of the two fluoroscopic images is binarized.
By adding the binarized image data for each radiation detector, it is possible to reduce the number of images of the image data to be subjected to the pass / fail judgment, so that the processing can be sped up.

According to a sixth aspect of the present invention, in the fluoroscopic examination apparatus according to the first aspect of the present invention, a moving mechanism for moving the radiation source in the direction of the center of rotation of the subject or a direction in which the respective radiation detectors are brought closer to each other. Or a moving mechanism for moving each radiation detector in a direction approaching the radiation source so as to make the difference between the fluoroscopic angles of the two fluoroscopic images variable.

Therefore, in the fluoroscopic examination apparatus according to the sixth aspect of the present invention, the radiation source is moved in the direction of the center of rotation of the subject, the two radiation detectors are moved in the direction of approaching each other, or the two By moving the radiation detector in a direction approaching the radiation source, it is possible to adjust the perspective angle difference between two fluoroscopic images for examining the subject.

According to a seventh aspect of the present invention, in the fluoroscopic inspection apparatus according to the second or third aspect,
A moving mechanism for moving the radiation source or the radiation detector in a direction along the rotation plane of the subject is added so that the difference between the fluoroscopic angles of the two fluoroscopic images is made variable.

Therefore, in the fluoroscopic examination apparatus according to the seventh aspect of the present invention, the two radiographic images for inspecting the subject are moved by moving the radiation source or the radiation detector in the direction along the rotation plane of the subject. The adjustment of the perspective angle difference between them can be performed.

On the other hand, according to the invention of claim 8, the above-mentioned claim 1 is provided.
Alternatively, in the fluoroscopic inspection apparatus according to the second aspect of the present invention, a shutter is provided between the radiation source and the two measurement positions and alternately blocks two radiation beams emitted in the directions of the respective radiation detectors. When one radiation detector detects one radiation beam, it does not detect the scattered radiation of the other radiation beam.

Therefore, in the fluoroscopic inspection apparatus according to the eighth aspect of the invention, the shutter is rotated in accordance with the rotation of the subject so that the radiation transmitted through the window of the shutter is irradiated on the subject, that is, the radiation is alternated. , And by alternately detecting the radiation beam with the two radiation detectors, the scattered radiation generated by the other radiation beam being scattered by the rotating sample table is not incident on the two radiation detectors. It is possible to prevent a decrease in the S / N ratio of the image data.

According to the ninth aspect of the present invention, the first aspect of the present invention is provided.
In the fluoroscopic inspection apparatus according to any one of claims 8 to 10, the radiation detector detects radiation with one-dimensional resolution.

Therefore, in the fluoroscopic examination apparatus according to the ninth aspect of the present invention, the radiation detector detects radiation with one-dimensional resolution, thereby continuously (without stopping) the subject. ) By rotating, a two-dimensional perspective image can be obtained.

[0025]

Embodiments of the present invention will be described below in detail with reference to the drawings. (First Embodiment) FIG. 1 is a front view and a side view showing a configuration example of a mechanical section in a fluoroscopic inspection apparatus according to the present embodiment, and FIG. 2 is a block diagram showing a system configuration example in the fluoroscopic inspection apparatus. 9 are denoted by the same reference numerals.

In FIG. 1, a rotating sample table 5 is a disk-shaped table formed of an X-ray transparent material, on which an object 4 is mounted, and which is driven by a motor (not shown). 4 is rotated clockwise along an arc.

One X-ray tube 1, which is a radiation source,
Two X-ray beams 2a and 2b, which are penetrating radiations at a fan angle θ ₀ , are disposed diagonally above the rotating sample stage 5 and are irradiated by the rotating sample stage 5 toward the rotating subject 4. Has become.

Further, the two X-ray detectors 3a and 3b, which are radiation detectors, are positioned below the rotating sample stage 5 so that the X-ray tube 1 is located at the apex and at an angle α, ie, the subject 4
X-ray beams 2a, 2a, which are arranged so as to be detected at two measurement positions of the rotation of
b is detected.

The X-ray detectors 3a and 3b detect X-rays with one-dimensional resolution in the fan direction. The subject 4 is simultaneously moved to the testing position of the two X-ray detectors 3a and 3b by a handling device (not shown) at a location other than the testing position on the rotating sample table 5.
Loading on the rotating sample stage 5
Unloading from the rotating sample table 5 is performed.

Although not shown, the entire mechanism is covered with an X-ray shield, and an opening for loading and unloading the subject 4 has a maze shape so that scattered X-rays do not leak. Shielded.

On the other hand, in FIG.
a and 11b convert the data of the subject 4 acquired by the two X-ray detectors 3a and 3b into digital data.
Further, the control unit 12 has a function of rotating the rotary sample stage 5 and a function of irradiating the X-ray tube 1 with two X-ray beams 2a and 2b based on a control signal from the data processing unit 6.

Further, the data processing section 6 includes a central processing circuit (CPU) 13, an input / output (IO) section, a data memory, an interface (I / F) section, and a pre-processing section 15.
And the image processing unit 16 are connected to each other by a control bus (CB).

The data processing unit 6 performs an imaging process based on the data of the subject 4 detected by the two X-ray detectors 3a and 3b while rotating the rotating sample stage 5,
Two perspective images of the subject 4 having different perspective angles exceeding the arrangement angle between the two X-ray detectors 3a and 3b with respect to the X-ray tube 1 are created.

Next, the operation of the fluoroscopic inspection apparatus of the present embodiment configured as described above will be described. The subject 4 put into the rotating sample stage 5 rotates around the rotation axis of the rotating sample stage 5 with the rotation of the rotating sample stage 5 by a handling device (not shown). When the subject 4 reaches the inspection position, one X-ray detector 3a detects the X-ray transmitted through the subject 4.

Next, the subject 4 is connected to the other X-ray detector 3b.
To the inspection position. As in the previous case, the X-ray detector 3b having the subject 4 at the inspection position detects the X-ray transmitted through the subject 4.

The subject 4 after the inspection continues to rotate and reaches the unloading position, and is handled by a handling device (not shown).
Unloading from the rotating sample stage 5 is performed. The data of the subject 4 acquired by the two X-ray detectors 3a and 3b are converted into digital data by the data collection units 11a and 11b, respectively, and then input to the data processing unit 6, where the image processing is performed. .

FIG. 3 is a diagram showing an X-ray fluoroscopic geometric arrangement according to the first embodiment. In the inspection of the subject 4 described above, if an angle between the two inspection positions of the two X-ray detectors 3a and 3b with respect to the rotation axis of the rotating sample table 5 is β, the first X-ray detector 3a The subject 4 at the examination position;
The subject 4 at the later inspection position of the X-ray detector 3b differs in direction by an angle β with respect to the rotation axis of the rotating sample stage 5.

Since the inspection positions of the two X-ray detectors 3a and 3b are different from each other in the direction of the X-ray tube 1 by α, as a result, the direction of the subject 4 with respect to the X-ray beams 2a and 2b Is θ (θ = α + β) as shown in FIG.
Only different.

Therefore, in the present fluoroscopic examination apparatus, two fluoroscopic images of the subject 4 can be obtained at fluoroscopic angles different in the angle θ. In the first embodiment, three or more X-ray detectors may be arranged to obtain fluoroscopic images from three or more different directions.

As described above, with the fluoroscopic inspection apparatus according to the present embodiment, it is possible to obtain two fluoroscopic images having largely different directions with a simple configuration. (Modification 1 of the first embodiment) That is, the fluoroscopy apparatus of the present embodiment has the same system configuration as that of the first embodiment, and is used when the subject 4 is at one of the measurement positions. An X-ray is obtained by using data transmitted through the subject 4 detected by the corresponding one X-ray detector 3a and data not transmitted through the subject 4 detected at the same time by the other X-ray detector 3b. A correction function for correcting the output fluctuation of the tube 1 is added to the data processing unit 6.

In the fluoroscopic inspection apparatus of the present modification configured as described above, when data is detected by the X-ray detector 3a, the X-ray detector 3a having the subject 4 at the inspection position and the subject 4 The X-ray detectors 3b, which are not present, perform data detection simultaneously.

As shown in FIG. 5, the X-ray tube 1 irradiates X-rays by performing a calculation as pre-processing between the data acquired by the two X-ray detectors 3a and 3b at the same time. Can be corrected.

In this case, as the operation, division or subtraction (after logarithmic conversion) is performed. As the latter data, data averaged within the normal fan angle θ ₀ is used. As described above, in the fluoroscopic inspection apparatus of this modification, in addition to the effects of the first embodiment described above, it is possible to correct the fluctuation of the X-ray emitted by the X-ray tube 1.

(Modification 2 of First Embodiment) That is, the fluoroscopic inspection apparatus of the present embodiment has the same system configuration as that of the first embodiment, as shown in FIG.
The data 61 obtained by the two X-ray detectors 3a and 3b is
Preprocessing 62 and binarization 64 are performed for each of the X-ray detectors 3a and 3b, and the binarized images 65a and 65b for the X-ray detectors 3a and 3b are added. The processing 68 is used to judge the quality of the subject 4.

Here, the binarization 64 to the determination processing 68 are performed by the image processing unit 16. In the fluoroscopic inspection apparatus of the present modification configured as described above, the binarized X-ray detector 3
By adding the image data 65a and 65b for each of a and 3b, it is possible to reduce the number of images of the image data to be subjected to pass / fail determination, and to speed up the processing.

As described above, in the fluoroscopic inspection apparatus according to this modification, in addition to the effects of the above-described first embodiment, it is possible to increase the processing speed. (Modification 3 of the first embodiment) That is, as shown in FIG. 7A, the fluoroscopic inspection apparatus of the present embodiment is different from the X-ray tube 1 in the system configuration of the first embodiment. As shown in FIG. 7B, an X-ray shutter 7 formed of a material that blocks X-rays and provided with a window 8 that transmits X-rays is arranged between the rotating sample stage 5 and X-ray. The X-ray transmitted through the window 8 of the line shutter 7 is rotated in accordance with the rotation of the rotating sample stage 5 so that the subject 4 on the rotating sample stage 5 is irradiated, that is, two X-ray beams 2a and 2b. Are alternately irradiated, and X-rays are alternately detected by the two X-ray detectors 3a and 3b.

In the fluoroscopic inspection apparatus of the present modification configured as described above, the two X-ray detectors 3a and 3b are provided with scattered X-rays generated by the other X-ray beam being scattered by the rotating sample stage 5 or the like. Is not incident, so that a decrease in the S / N ratio of the image data can be prevented.

As described above, in the fluoroscopic inspection apparatus of this modification, in addition to the effects of the first embodiment, it is possible to prevent the S / N ratio of the image data from lowering. (Fourth Modification of First Embodiment) That is, the fluoroscopic inspection apparatus of the present embodiment moves the X-ray tube 1 in the direction of the rotating sample stage 5 to the system configuration of the first embodiment. A moving mechanism is provided.

In the fluoroscopic inspection apparatus of the present modified example configured as described above, the X-ray tube 1 is moved closer to or away from the rotating sample table 5 so that the X-ray tube 1 is moved between two fluoroscopic images for inspecting the subject 4. The angle α can be adjusted.

Further, the fluoroscopic inspection apparatus of the present embodiment is different from the system configuration of the first embodiment in that the two X-ray detectors 3a and 3b are arranged in the direction in which the distance between the X-ray detectors 3a and 3b is changed. There is provided a moving mechanism for moving in a direction away from or closer to 1.

In the fluoroscopic inspection apparatus of the present modification configured as described above, the distance between the two X-ray detectors 3a and 3b is changed, and the X-ray detector 3a and 3b are moved away from or closer to the X-ray tube 1 together. The angles α and β between two fluoroscopic images for examining the specimen 4 can be adjusted.

Further, the angle β can be adjusted by changing the distance between the mounting position of the subject 4 and the rotation axis within a range where the subject 4 does not protrude from the X-ray beam 2. As described above, in the fluoroscopic inspection apparatus of the present modification, in addition to the effects of the first embodiment described above, it is possible to adjust the fluoroscopic angle difference θ between the fluoroscopic images for inspecting the subject 4. Become.

(Second Embodiment) FIG. 8A is a front view and a side view showing an example of the structure of a mechanical section in a fluoroscopic inspection apparatus according to the present embodiment, and is the same element as FIGS. 1 and 2. Are denoted by the same reference numerals.

In FIG. 8A, the rotating sample stage 5
It is a disk-shaped table formed of a linearly transparent material, on which the subject 4 is placed, and the subject 4 is rotated clockwise along an arc by a motor (not shown). ing.

One X-ray tube 1, which is a radiation source,
Two fan-shaped X-ray beams 2 a, which are arranged obliquely above the rotating sample table 5 and are rotated by the rotating sample table 5 toward the subject 4 rotating in a substantially plane parallel to the rotation axis of the rotating sample table 5.
2b is irradiated.

Further, the two X-ray detectors 3a and 3b, which are radiation detectors, transmit the subject 4 which has reached near two intersections between the X-ray beams 2a and 2b and the edge of the rotating sample stage 5. They are arranged at positions where the X-ray beams 2a and 2b are detected.

The X-ray detectors 3a and 3b detect X-rays with one-dimensional resolution in the fan direction. The subject 4 is simultaneously moved to the testing position of the two X-ray detectors 3a and 3b by a handling device (not shown) at a location other than the testing position on the rotating sample table 5.
Loading on the rotating sample stage 5
Unloading from the rotating sample table 5 is performed.

Although not shown, the entire mechanism is covered with an X-ray shield, and an opening for loading and unloading the subject 4 is formed in a maze so that scattered X-rays do not leak. Shielded.

Next, the operation of the fluoroscopic inspection apparatus of the present embodiment configured as described above will be described. The subject 4 put into the rotating sample stage 5 rotates around the rotation axis of the rotating sample stage 5 with the rotation of the rotating sample stage 5 by a handling device (not shown).

Next, when the subject 4 reaches near the intersection of the X-ray beam 2a, which is the inspection position, and the edge of the rotating sample stage 5, the X-ray detector 3a detects the X-rays transmitted through the subject 4. Is detected.

Next, the subject 4 is connected to the other X-ray detector 3b.
Reaches the vicinity of the intersection of the X-ray beam 2b at the inspection position and the edge of the rotating sample stage 5. As before, X-ray detector 3
“b” detects X-rays transmitted through the subject 4.

After the test, the subject 4 continues to rotate and reaches the carry-out position.
Unloading from the rotating sample stage 5 is performed. As shown in FIG. 8C, in the above-described examination of the subject 4, two X
The inspection positions of the line detectors 3a and 3b are different from each other.
Let δ be the angle formed with respect to the rotation axis of the object 4 at the inspection position of the first X-ray detector 3a and the X-ray detector 3b
Is different from the X-ray beams 2a and 2b by the angle δ.

Therefore, in the present fluoroscopic examination apparatus, two fluoroscopic images of the subject 4 can be obtained from different directions of the angle δ. In the second embodiment, the angle δ can be changed by moving the X-ray tube 1 and / or the X-ray detectors 3 a and 3 b or both in the direction along the surface of the rotating sample stage 5. It can also be done.

As described above, even with the fluoroscopic inspection apparatus according to the present embodiment, it is possible to obtain two fluoroscopic images having largely different directions with a simple configuration. (Third Embodiment) FIG. 8B is a front view and a side view showing a configuration example of a mechanism section in a fluoroscopic inspection apparatus according to the present embodiment, and the same elements as those in FIGS. 1 and 2 are the same. The reference numerals are attached.

In FIG. 8B, the rotating sample stage 5
It is a disk-shaped table formed of a linearly transparent material, on which the subject 4 is placed, and the subject 4 is rotated clockwise along an arc by a motor (not shown). ing.

One X-ray tube 1, which is a radiation source,
A fan-shaped X-ray beam arranged on the same plane as the upper surface of the rotating sample stage 5 and substantially parallel to the rotation axis of the rotating sample stage 5 in a substantially horizontal direction toward the subject 4 being rotated by the rotating sample stage 5 2
Is illuminated.

Further, one X-ray detector 3, which is a radiation detector, is arranged to detect the X-ray beam 2,
An X-ray transmitted through the subject 4 is detected near two substantially intersections between the line beam 2 and the edge of the rotating sample stage 5. As a result, one X-ray detector 3 has two inspection positions.

The X-ray detector 3 detects X-rays with one-dimensional resolution in the fan direction.
The subject 4 is placed on the rotating sample table 5 by a handling device (not shown) at a place other than the testing position on the rotating sample table 5 at a mounting interval such that the subject 4 does not come to the two testing positions at the same time. , And unloading from the rotating sample table 5 are performed.

Although not shown, the entire mechanism is covered with an X-ray shield, and the opening for loading and unloading the subject 4 is formed in a maze so that scattered X-rays do not leak. Shielded.

Next, the operation of the fluoroscopic inspection apparatus of the present embodiment configured as described above will be described. The subject 4 put into the rotating sample stage 5 rotates around the rotation axis of the rotating sample stage 5 with the rotation of the rotating sample stage 5 by a handling device (not shown). When the X-ray detector 3 reaches the first inspection position, the X-ray detector 3
Detect lines.

Next, the subject 4 continues to rotate, reaches the second inspection position, and similarly detects X-rays transmitted through the subject 4. The subject 4 after the inspection continues to rotate, and when it reaches the unloading position, the handling device unloads the sample 4 from the rotating sample table 5.

As shown in FIG. 8 (c), in the above-described inspection of the subject 4, if an angle between the two inspection positions with respect to the rotation axis of the rotating sample table 5 is δ, the first inspection position The subject 4 differs from the subject 4 at the later inspection position by the angle δ with respect to the X-ray beam 2.

Therefore, in the present fluoroscopic inspection apparatus, two fluoroscopic images of the subject 4 can be obtained from one direction of the angle δ by one X-ray detector 3. In the third embodiment, the X-ray tube 1 and / or the X-ray detector 3 or both are moved in the direction along the surface of the rotating sample table 5 to provide the second embodiment. As in the embodiment, the angle δ can be made variable.

As described above, even with the fluoroscopic inspection apparatus of the present embodiment, it is possible to obtain two fluoroscopic images having largely different directions with a simple configuration. (Other Embodiments) (a) In each of the first to third embodiments, a fan-shaped X-ray beam 2 having one-dimensional resolution is used as the X-ray detector 3 as a radiation detector. Although a detector for detection is used, the present invention is not limited to this, and an X-ray detector for detecting radiation with two-dimensional resolution and a cone-shaped X-ray beam may be used. In this case, it is preferable that the rotation of the rotating sample table 5 be a step rotation, and a fluoroscopic image is obtained while the subject is stationary, since a good image can be obtained.

As a result, similarly to the first to third embodiments, it is possible to obtain two perspective images having largely different directions with a simple configuration. (B) In each of the first to third embodiments, transmissive radiation such as γ-ray may be used instead of the X-ray beam. Further, when inspecting a transparent body such as a plastic bottle for dirt or the like, it is possible to use penetrating radiation such as light.

[0076]

As described above, according to the fluoroscopic inspection apparatus of the present invention, it is possible to obtain two fluoroscopic images having largely different directions with a simple configuration.

[Brief description of the drawings]

FIG. 1 is a front view and a side view showing a first embodiment of a fluoroscopic inspection apparatus according to the present invention.

FIG. 2 is a block diagram showing a first embodiment of a fluoroscopic inspection apparatus according to the present invention.

FIG. 3 is a diagram showing an X-ray fluoroscopic geometric arrangement in the first embodiment of the fluoroscopic inspection apparatus according to the present invention.

FIG. 4 is a diagram showing an X-ray fluoroscopic arrangement in the first embodiment of the fluoroscopic inspection apparatus according to the present invention.

FIG. 5 is a block diagram for explaining a data correction process in a first modification of the first embodiment of the fluoroscopic inspection apparatus according to the present invention;

FIG. 6 is a view for explaining an image addition process in a second modification of the first embodiment of the fluoroscopic inspection apparatus according to the present invention.

FIG. 7 is a schematic diagram showing a configuration example of a third modification of the first embodiment of the fluoroscopic inspection apparatus according to the present invention;

FIG. 8 is a front view, a side view, and a projection angle explanatory view showing second and third embodiments of the fluoroscopic inspection apparatus according to the present invention.

FIG. 9 is a schematic diagram showing a configuration example of a conventional fluoroscopic inspection apparatus.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... X-ray tube, 2a, 2b ... X-ray beam, 3a, 3b ... X-ray detector, 4 ... Subject, 5 ... Rotating sample stand, 6 ... Data processing part, 11a, 11b ... Data collection part, 12 ... Control unit, 13: Central processing circuit (CPU), 15: Preprocessing unit, 16: Image processing unit

 ────────────────────────────────────────────────── ─── Continued on the front page F term (reference) 2G001 AA01 AA02 AA10 BA11 CA01 CA02 DA02 DA03 DA06 DA07 DA08 DA09 FA06 GA05 GA13 HA07 JA04 JA08 PA01 SA01 SA13 5B047 AA30 AB10 BA01 5B057 BA03 BA19 CA11

Claims (9)

[Claims] In a fluoroscopic inspection apparatus for inspecting the inside of a subject during transportation, a rotating sample stage for rotating the subject along an arc, and a transparent object for rotating the subject by the rotating sample stage. One radiation source for irradiating the radiation, and two radiation detections arranged to detect the radiation irradiated by the radiation source and transmitted through the subject at two measurement positions of the rotation of the subject, respectively. Device, and data processing means for creating a perspective image based on the data detected by each of the radiation detectors, wherein each of the radiation detectors is different from each other beyond an arrangement angle between each of the radiation detectors with respect to the radiation source. A fluoroscopic inspection apparatus characterized in that two fluoroscopic images having fluoroscopic angles are created. 2. A fluoroscopy inspection apparatus for inspecting the inside of a subject being transported, wherein: a rotating sample stage for rotating the subject along an arc; One radiation source to irradiate the radiation, at each of two measurement positions that are substantially intersections of the arc and a substantially plane parallel to the rotation axis of the subject passing through the radiation source,
Two radiation detectors arranged to detect the radiation radiated by the radiation source and transmitted through the subject; and forming fluoroscopic images based on data detected by the respective radiation detectors. A fluoroscopic examination apparatus comprising: a data processing unit; and two perspective images having mutually different perspective angles are created. 3. A fluoroscopic inspection apparatus for inspecting the inside of an object being transported, comprising: a rotating sample stage for rotating the object along an arc; and a rotating sample stage substantially on the arc surface, the rotating sample stage being rotated by the rotating sample stage. One radiation source that irradiates the subject with transmissive radiation, and at each of two measurement positions that are approximately intersections of the arc and the substantially straight line along the arc surface passing through the radiation source, the radiation source One radiation detector arranged to detect the radiation that has been irradiated and transmitted through the subject, and creates fluoroscopic images based on data detected at the two measurement positions by the radiation detector, respectively. And a data processing unit for generating two perspective images having different perspective angles from each other. 4. The fluoroscopy apparatus according to claim 1 or 2, wherein when the subject is at one of the measurement positions, the subject has transmitted the subject detected by the corresponding one of the radiation detectors. Data, using data that does not pass through the subject detected at the same time by the other radiation detector, and adding correction means for correcting output fluctuation of the radiation source to the data processing means. Characteristic fluoroscopic inspection equipment. 5. The method according to claim 1, wherein
In the fluoroscopic inspection apparatus described in the paragraph, as the data processing means, each of the two perspective images is binarized, and an addition is performed between the binarized images to reduce a data amount. Fluoroscopy inspection device. 6. The fluoroscopic examination apparatus according to claim 1, wherein a moving mechanism for moving the radiation source in a direction of a center of rotation of the subject, or a moving mechanism for moving the radiation detectors toward each other. A moving mechanism, or a moving mechanism for moving each of the radiation detectors in a direction approaching the radiation source, wherein a difference between the perspective angles of the two perspective images is made variable. Inspection equipment. 7. The fluoroscopy apparatus according to claim 2 or 3, further comprising a moving mechanism for moving the radiation source or the radiation detector in a direction along a rotation plane of the subject. A fluoroscopic inspection apparatus, wherein a difference between fluoroscopic angles of the two fluoroscopic images is made variable. 8. The fluoroscopy apparatus according to claim 1, wherein the apparatus is disposed between the radiation source and the two measurement positions.
A shutter for alternately blocking two radiation beams emitted in the directions of the respective radiation detectors is added, and when one of the radiation detectors detects one of the radiation beams, the scattering of the other radiation beam is performed. A fluoroscopic inspection apparatus characterized in that radiation is not detected. 9. The method according to claim 1, wherein
The fluoroscopy apparatus according to claim 1, wherein the radiation detector detects radiation with one-dimensional resolution.