JP2002166147A - Ozone water production apparatus - Google Patents
Ozone water production apparatusInfo
- Publication number
- JP2002166147A JP2002166147A JP2000368752A JP2000368752A JP2002166147A JP 2002166147 A JP2002166147 A JP 2002166147A JP 2000368752 A JP2000368752 A JP 2000368752A JP 2000368752 A JP2000368752 A JP 2000368752A JP 2002166147 A JP2002166147 A JP 2002166147A
- Authority
- JP
- Japan
- Prior art keywords
- ozone
- water
- ozone water
- path
- containing gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Reciprocating Pumps (AREA)
- Degasification And Air Bubble Elimination (AREA)
- Treatment Of Water By Oxidation Or Reduction (AREA)
- Filtration Of Liquid (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、オゾン水製造装置
に関し、より詳しくは、不純物含有量が少なくかつ高濃
度のオゾン水を必要とする半導体分野において特に有用
であるオゾン水製造装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for producing ozone water, and more particularly to an apparatus for producing ozone water which is particularly useful in the field of semiconductors which require a high concentration of ozone water with a low impurity content.
【０００２】[0002]
【従来の技術】電解法、放電法などの方法により製造し
たオゾンを被処理水と接触させて、オゾン水乃至オゾン
溶解水を製造する技術は、公知であり、半導体製造など
の種々の分野で広く利用されている。2. Description of the Related Art A technique for producing ozone water or ozone-dissolved water by contacting ozone produced by a method such as an electrolytic method or a discharge method with water to be treated is known, and is known in various fields such as semiconductor production. Widely used.
【０００３】例えば、特開平10-225696号公報は、エゼ
クタを用いて被処理水とオゾンとの混合水を形成し、こ
の混合水を加圧ポンプによる加圧下にオリフィスアトマ
イザから溶解槽内に噴射してオゾンガスを微細気泡とし
た後、溶解槽内の内槽に滞留させる加圧式オゾン処理装
置を開示している。この装置によれば、被処理水による
微細気泡オゾンの吸収率が高くなり、かつ未溶解のオゾ
ン気泡を含むオゾン混合水が内槽から溢流する際に、未
溶解ガスが容易に分離するという効果が得られるとされ
ている。しかしながら、この装置は、(a)オゾン溶解槽
を加圧状態に保持するための空気配管および溶解槽内部
に内槽を配設する必要があるので、設備費が高くなる、
(b)オゾン気泡と被処理水との混合がなお不十分であ
る、(c)生成オゾン水中のオゾン濃度が低い(オゾン濃度
の上限=40ppm程度)などの点において、さらに改善の余
地がある。[0003] For example, Japanese Patent Application Laid-Open No. 10-225696 discloses that a mixed water of water to be treated and ozone is formed using an ejector, and the mixed water is injected from an orifice atomizer into a melting tank under pressure by a pressure pump. It discloses a pressurized ozone treatment apparatus in which ozone gas is converted into fine bubbles and then retained in an inner tank in a dissolving tank. According to this device, the absorption rate of the fine bubble ozone by the water to be treated is increased, and the undissolved gas is easily separated when the ozone mixed water containing the undissolved ozone bubbles overflows from the inner tank. It is said that the effect can be obtained. However, this device requires (a) an air pipe for maintaining the ozone dissolving tank in a pressurized state and an inner tank inside the dissolving tank, so that the equipment cost increases.
There is still room for improvement in that (b) the mixing of the ozone bubbles and the water to be treated is still insufficient, and (c) the ozone concentration in the generated ozone water is low (the upper limit of the ozone concentration = about 40 ppm). .
【０００４】特開平6-64904号公報は、加圧オゾン溶解
槽を含む水循環路を備えた加圧オゾン水製造装置であっ
て、一軸偏心ネジポンプ（回転容積ポンプ）の回転によ
り水を循環送液しつつ、オゾナイザで生成したオゾンガ
スを原水供給管路に吸い込み、原水にオゾンガスを気泡
懸濁させた状態で加圧オゾン溶解槽内に押し込み導入し
て、加圧オゾン水を製造する装置を開示している。しか
しながら、この装置は、オゾン吸収効率が低く、また短
時間内に高濃度のオゾン水を得ることができないという
問題点を有する。Japanese Patent Application Laid-Open No. 6-64904 discloses a pressurized ozone water producing apparatus provided with a water circulation path including a pressurized ozone dissolving tank, in which water is circulated by rotating a uniaxial eccentric screw pump (rotary displacement pump). A device for producing pressurized ozone water by sucking ozone gas generated by an ozonizer into a raw water supply pipe, pushing the ozone gas into a pressurized ozone dissolving tank in a state in which ozone gas is suspended in raw water, and introducing the ozone gas into the tank ing. However, this device has a problem that the ozone absorption efficiency is low and a high-concentration ozone water cannot be obtained in a short time.
【０００５】一般に、水に対する溶存オゾン濃度は、オ
ゾン含有ガス中のオゾンガス分圧に比例するので、オゾ
ンガス分圧を高めておくことにより、高濃度のオゾン水
を製造することも試みられている。例えば、オゾン吸着
能を有するシリカゲルを吸着剤として使用するPSA法に
より、低オゾン濃度のオゾン含有ガスから高オゾン濃度
の脱着ガスを得る方法がある。しかしながら、この方法
は、大型の吸脱着装置を必要とするので、経済性に劣る
という問題点がある。In general, the concentration of dissolved ozone in water is proportional to the partial pressure of ozone gas in the ozone-containing gas. Therefore, attempts have been made to produce high-concentration ozone water by increasing the partial pressure of ozone gas. For example, there is a method of obtaining a high-ozone-concentration desorbed gas from a low-ozone-concentration ozone-containing gas by a PSA method using silica gel having an ozone adsorption capacity as an adsorbent. However, since this method requires a large-sized adsorption / desorption device, there is a problem that economic efficiency is poor.
【０００６】さらに、オゾン含有ガスをコンプレッサー
により加圧圧縮して、オゾン分圧を高める手法がある。
しかしながら、この手法は、高濃度のオゾンガスに耐え
る特殊なコンプレッサーを必要とするので、やはり経済
性の点で、大きな問題がある。Further, there is a method of increasing the partial pressure of ozone by compressing the ozone-containing gas under pressure by a compressor.
However, this method requires a special compressor that can withstand a high concentration of ozone gas, and thus has a serious problem in terms of economy.
【０００７】[0007]
【発明が解決しようとする課題】従って、本発明は、複
雑乃至大型の装置を必要とすることなく、高濃度のオゾ
ン水を低コストで製造することができる装置を提供する
ことを主な目的とする。SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide an apparatus capable of producing high-concentration ozone water at low cost without requiring a complicated or large-sized apparatus. And
【０００８】[0008]
【課題を解決するための手段】本発明者は、上記のよう
な技術の現状を考慮しつつ研究を重ねた結果、ポンプに
より加圧を行う水循環経路内において、加圧状態の超純
水(被処理水)を利用してエゼクタによりオゾン含有ガス
を超純水中に吹き込み、得られたオゾン溶解超純水とオ
ゾン含有ガス気泡とからなる混合体を液体サイクロン方
式の気泡分離容器に導入する場合には、エゼクタと液体
サイクロンとの相乗的効果により、高濃度のオゾン水が
得られること、気泡分離後の循環水は、気泡を含まない
ので、エゼクタの吸引効果の低下、ポンプ内でのキャビ
テーション発生などの装置運転上の阻害要因も抑制でき
ることなどを見出した。The inventor of the present invention has conducted various studies in consideration of the current state of the art as described above. As a result, in a water circulation path in which a pump pressurizes water, the pressurized ultrapure water ( Ozone-containing gas is blown into ultrapure water by an ejector using the (processed water), and a mixture of the obtained ozone-dissolved ultrapure water and ozone-containing gas bubbles is introduced into a liquid cyclone type bubble separation vessel. In this case, the synergistic effect of the ejector and the hydrocyclone can provide a high-concentration ozone water, and the circulating water after bubble separation does not contain bubbles. It has been found that factors that hinder the operation of the device, such as the occurrence of cavitation, can be suppressed.
【０００９】すなわち、本発明は、下記のオゾン水製造
装置を提供するものである： １．超純水とオゾン含有ガスとを接触させてオゾン水を
製造するための装置であって、超純水を循環経路に供給
するための超純水給水経路と、超純水を循環経路内で加
圧流動させるための加圧装置と、加圧超純水の圧力を利
用してオゾン含有ガスを超純水中に導入するためのエゼ
クタと、超純水とオゾン含有ガスとからなる混合体から
気泡を分離するための液体サイクロンを備えた気泡分離
容器と、分離された気泡の排出経路と、オゾン水の取り
出し経路とを備えたことを特徴とするオゾン水製造装
置。 ２．オゾン含有ガス、超純水とオゾン含有ガスとからな
る混合体およびオゾン水と接触する構成要素の接触部
が、非金属材料により構成されている上記項１に記載の
オゾン水製造装置。 ３．超純水の加圧をフッ素樹脂製のべローズポンプによ
り行う上記項１に記載のオゾン水製造装置。 ４．べローズポンプの下流側にフッ素樹脂製のフィルタ
ーを備えた上記項３に記載のオゾン水製造装置。 ５．オゾン水の取り出し経路にヒーターを備えた上記項
１に記載のオゾン水製造装置。 ６．オゾン水の取り出し経路にヒーターを備えた分岐路
を設け、分岐オゾン水をヒーターにより加熱した後、非
加熱状態のオゾン水に合流させる上記項１に記載のオゾ
ン水製造装置。 ７．分離された気泡に由来するガスの排出経路にオゾン
分解器を接続した上記項１に記載のオゾン水製造装置。That is, the present invention provides the following ozone water producing apparatus: An apparatus for producing ozone water by contacting ultrapure water and an ozone-containing gas, wherein an ultrapure water supply path for supplying ultrapure water to a circulation path, and an ultrapure water in the circulation path. A pressurizing device for flowing under pressure, an ejector for introducing ozone-containing gas into ultrapure water using the pressure of pressurized ultrapure water, and a mixture of ultrapure water and ozone-containing gas An ozone water producing apparatus comprising: a bubble separation container provided with a liquid cyclone for separating bubbles from water; a discharge path for separated bubbles; and a path for extracting ozone water. 2. 2. The ozone water producing apparatus according to the above item 1, wherein a contact portion of the ozone-containing gas, a mixture of ultrapure water and the ozone-containing gas, and a component that comes into contact with the ozone water is made of a nonmetallic material. 3. Item 2. The ozone water producing apparatus according to item 1, wherein the pressurization of the ultrapure water is performed by a bellows pump made of a fluororesin. 4. Item 4. The apparatus for producing ozone water according to item 3, wherein a filter made of a fluororesin is provided downstream of the bellows pump. 5. Item 2. The ozone water producing apparatus according to item 1, wherein a heater is provided in a path for taking out ozone water. 6. Item 2. The ozone water producing apparatus according to the above item 1, wherein a branch path provided with a heater is provided in the ozone water extraction path, and after the branch ozone water is heated by the heater, the ozone water is merged with the ozone water in a non-heated state. 7. 2. The ozone water producing apparatus according to the above item 1, wherein an ozone decomposer is connected to a discharge path of a gas derived from the separated bubbles.
【００１０】[0010]
【発明の実施の形態】以下、図面を参照しつつ、本発明
をさらに詳細に説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in more detail with reference to the drawings.
【００１１】図１は、本発明によるオゾン水製造装置の
概要を示すフロー図である。本発明装置は、水循環部、
水循環部に接続された超純水供給部およびオゾン含有ガ
ス供給部、オゾン水取り出し部ならびに排気ガス処理部
を主要構成要素としている。FIG. 1 is a flowchart showing an outline of an ozone water producing apparatus according to the present invention. The device of the present invention includes a water circulation unit,
The main components are an ultrapure water supply unit, an ozone-containing gas supply unit, an ozone water extraction unit, and an exhaust gas treatment unit connected to the water circulation unit.
【００１２】水循環部１は、水循環管路５、ベローズポ
ンプ７、フィルター９、エゼクタ１１および液体サイク
ロンを内部に配設した気泡分離容器１３(以下「液体サ
イクロン方式の気泡分離容器」という)を備えている。
フィルター９は、液体と接触するベローズポンプ、サイ
クロン、エゼクタなどで発生するパーティクルを除去す
るために、設けられる。フィルター９の設置個所は、特
に制限されないが、パーティクルの累積による圧損を回
避するために、ベローズポンプ７の下流側に設けること
が好ましい。The water circulating unit 1 includes a water circulating pipe 5, a bellows pump 7, a filter 9, an ejector 11, and a bubble separation container 13 (hereinafter referred to as a "liquid cyclone type bubble separation container") in which a cyclone is disposed. ing.
The filter 9 is provided to remove particles generated by a bellows pump, a cyclone, an ejector, and the like that come into contact with the liquid. The installation location of the filter 9 is not particularly limited, but is preferably provided downstream of the bellows pump 7 in order to avoid pressure loss due to accumulation of particles.
【００１３】先ず、本発明装置のスタートアップに際し
ては、水循環部１に接続された超純水供給部３から超純
水を水循環部１の水循環管路内に供給し、ベローズポン
プ７により加圧して、水循環部全体に超純水を充填す
る。First, when starting up the apparatus of the present invention, ultrapure water is supplied from the ultrapure water supply unit 3 connected to the water circulation unit 1 into the water circulation line of the water circulation unit 1 and pressurized by the bellows pump 7. Then, the entire water circulation section is filled with ultrapure water.
【００１４】次いで、オゾン含有ガス供給部１７からオ
ゾン含有ガスの供給を開始すると、加圧超純水は、エゼ
クタ１１からオゾン含有ガスを吸引して、超純水とオゾ
ン含有ガスとの混合体が形成される。この場合、各流体
の圧力は、エゼクタ入り口の超純水の圧力＞エゼクタ出
口の混合体の圧力＞オゾン含有ガスの圧力という関係に
ある。Next, when the supply of the ozone-containing gas from the ozone-containing gas supply unit 17 is started, the pressurized ultrapure water sucks the ozone-containing gas from the ejector 11 and mixes the ozone-containing gas with the ultrapure water. Is formed. In this case, the pressure of each fluid is in the relationship of the pressure of ultrapure water at the inlet of the ejector> the pressure of the mixture at the outlet of the ejector> the pressure of the ozone-containing gas.
【００１５】次いで、超純水とオゾン含有ガスとの混合
体(オゾンを溶解する超純水と溶解されなかったオゾン
含有ガスの気泡とからなる混合体)は、液体サイクロン
方式の気泡分離容器１３に送給される。液体サイクロン
において分離された気泡(残余のオゾン含有ガス)は、気
泡分離容器１３の上部から、圧力調整弁１９を備えた排
気経路２１を経て、公知の排気ガス処理装置２３に送ら
れ、触媒分解によるオゾン分解などの常法に従って処理
される。Next, a mixture of ultrapure water and an ozone-containing gas (a mixture of ultrapure water for dissolving ozone and bubbles of an undissolved ozone-containing gas) is supplied to a liquid cyclone type bubble separation vessel 13. Sent to Bubbles (residual ozone-containing gas) separated in the hydrocyclone are sent from the upper part of the bubble separation vessel 13 to a known exhaust gas treatment device 23 through an exhaust path 21 provided with a pressure regulating valve 19, and are subjected to catalytic decomposition. It is processed according to a conventional method such as ozonolysis.
【００１６】本発明においては、気泡分離手段として液
体サイクロン方式の気泡分離容器１３を使用することに
より、気泡の分離が極めて効果的に行われるので、ベロ
ーズポンプ７におけるキャビテーションが防止される。
さらに、液体サイクロンの攪拌力により、超純水へのオ
ゾンガスの溶解が促進されるので、高濃度のオゾン溶解
超純水が形成される。In the present invention, the use of the liquid cyclone type air bubble separation container 13 as the air bubble separation means allows the air bubbles to be separated very effectively, thereby preventing cavitation in the bellows pump 7.
Furthermore, the dissolution of the ozone gas in the ultrapure water is promoted by the stirring force of the liquid cyclone, so that high-concentration ozone-dissolved ultrapure water is formed.
【００１７】得られたオゾンを溶解する超純水(オゾン
水)の一部は、必要に応じて、オゾン水取り出し経路２
５を経て、系外に取り出され、使用される。A part of the obtained ultrapure water (ozone water) for dissolving ozone may be supplied to an ozone water extraction path 2 if necessary.
After passing through 5, it is taken out of the system and used.
【００１８】超純水に対するオゾン溶解操作は、オゾン
濃度を高めるために、室温よりも低い温度で行うことが
有利であるので、図示はしないが、水循環管路に冷却器
を設けておくことが、好ましい。冷却器の使用により、
低温で得られたオゾン水を室温で使用する場合には、オ
ゾン水取り出し経路２５を主流路２７と支流路２９とに
分岐し、支流路２９にヒーター３１を設けて、支流オゾ
ン水の加熱を行った後、主流オゾン水と支流オゾン水と
を合流させても良い。或いは、図示はしないが、単一の
オゾン水取り出し経路にヒーターを設けて、必要な場合
に加熱を行っても良い。The operation of dissolving ozone in ultrapure water is advantageously performed at a temperature lower than room temperature in order to increase the ozone concentration. Therefore, although not shown, a cooler may be provided in the water circulation line. ,preferable. By using a cooler,
When using ozone water obtained at a low temperature at room temperature, the ozone water take-out path 25 is branched into a main flow path 27 and a branch flow path 29, and a heater 31 is provided in the branch flow path 29 to heat the branch flow ozone water. After performing, the mainstream ozone water and the tributary ozone water may be combined. Alternatively, although not shown, a heater may be provided in a single ozone water extraction path, and heating may be performed when necessary.
【００１９】その後のオゾン水製造操作は、オゾン水取
り出し量に相当する超純水を追加供給しつつ、上記と同
様にして継続することができる。The subsequent operation for producing ozone water can be continued in the same manner as described above, while additionally supplying ultrapure water corresponding to the amount of ozone water taken out.
【００２０】本発明装置においては、オゾン含有ガス、
超純水とオゾン含有ガスとの混合体およびオゾン水と接
触する構成要素の少なくとも接触部を非金属材料により
構成することを必須とする。これは、耐食性に優れた特
殊な金属材料を使用したとしても、金属の溶出を十分に
防ぐことができないため、半導体製造などに使用する清
浄なオゾン水を得ることができないからである。In the apparatus of the present invention, an ozone-containing gas,
It is essential that at least the contact portions of the mixture of the ultrapure water and the ozone-containing gas and the components that come into contact with the ozone water be made of a nonmetallic material. This is because even if a special metal material having excellent corrosion resistance is used, elution of the metal cannot be sufficiently prevented, so that clean ozone water used for semiconductor production or the like cannot be obtained.
【００２１】特に、超純水加圧用のポンプとして渦巻き
式ポンプ、タービンポンプなどの金属製ポンプを使用す
る場合には、上記の金属の溶出に加えて、回転部からの
摩耗成分の混入なども防止することができない。従っ
て、本発明装置においては、超純水加圧をオゾンに対す
る耐性に優れた樹脂製ポンプ、より好ましくはテトラフ
ルオロエチレン/ヘキサフルオロプロピレン共重合体(FE
P)、ポリテトラフルオロエチレン(PTFE)などのフッ素樹
脂製ポンプを使用する。In particular, when a metal pump such as a centrifugal pump or a turbine pump is used as a pump for pressurizing ultrapure water, in addition to the elution of the above-mentioned metal, mixing of abrasion components from the rotating part may occur. It cannot be prevented. Therefore, in the apparatus of the present invention, the pressure of ultrapure water is adjusted to a resin pump excellent in resistance to ozone, more preferably a tetrafluoroethylene / hexafluoropropylene copolymer (FE
Use a pump made of fluororesin such as P) or polytetrafluoroethylene (PTFE).
【００２２】また、同様の理由により、液の流路を構成
する各種管類、エゼクタ、液体サイクロン、気泡分離容
器、サイクロンなどの構成要素も、FEP、PTFEなどのフ
ッ素樹脂により構成するか、或いはこれら各要素の基材
(ステンレススチールなどの金属)の表面をFEP、PTFEな
どのフッ素樹脂で被覆して、基材をオゾンによる浸食か
ら保護する。For the same reason, components such as various pipes, ejectors, liquid cyclones, bubble separation containers, and cyclones that constitute a liquid flow path are also made of a fluorine resin such as FEP or PTFE, or The base material of each of these elements
The surface of (a metal such as stainless steel) is coated with a fluorine resin such as FEP or PTFE to protect the base material from erosion by ozone.
【００２３】さらに、ヒーター３１の接液部は、オゾン
に対する耐性に優れた石英により形成することが望まし
い。Further, the liquid contact portion of the heater 31 is desirably formed of quartz having excellent resistance to ozone.
【００２４】[0024]
【発明の効果】本発明によれば、以下の様な顕著な効果
が達成される。According to the present invention, the following remarkable effects are achieved.
【００２５】電解法オゾン発生装置で得られる標準的な
オゾン含有ガス(例えば、ガス圧0.1Mpa・G、オゾン濃度
200g/l)を用いて、水温=常温における最大溶存オゾン濃
度150mg/l程度(水温=50℃で最大50mg/l程度)にも達する
超高濃度オゾン水を製造することができる。このオゾン
濃度は、従来同様のオゾン含有ガスを使用して製造され
ているオゾン水中のオゾン濃度の3〜4倍程度である。A standard ozone-containing gas obtained with an electrolytic ozone generator (for example, gas pressure 0.1 Mpa · G, ozone concentration
(200 g / l), it is possible to produce ultra-high-concentration ozone water that reaches a maximum dissolved ozone concentration of about 150 mg / l at water temperature = normal temperature (up to about 50 mg / l at water temperature = 50 ° C.). This ozone concentration is about 3 to 4 times the ozone concentration in ozone water produced using the same ozone-containing gas as before.
【００２６】得られた高濃度オゾン水は、製造装置の構
成材料に由来する不純物含有量が極めて少ない。The obtained high-concentration ozone water has an extremely low impurity content derived from the constituent materials of the manufacturing apparatus.
【００２７】しかも、この様な高濃度かつ高品質のオゾ
ン水を簡単な構成の装置により安価に製造することがで
きる。In addition, such high-concentration and high-quality ozone water can be produced at low cost by using a simple apparatus.
【００２８】従って、本発明は、不純物含有量ができる
だけ少なくかつオゾン濃度が高いオゾン水を必要とする
半導体製造分野において、特に有用である。Therefore, the present invention is particularly useful in the field of semiconductor manufacturing which requires ozone water having as low an impurity content as possible and having a high ozone concentration.
【００２９】さらに、本発明は、高濃度オゾン水を使用
するその他の技術分野においても、有用である。Further, the present invention is useful in other technical fields using high-concentration ozone water.
【００３０】[0030]
【実施例】以下に実施例を示し、本発明の特徴とすると
ころをより一層明確にする。 実施例１ 図１にフローに従って、オゾン水の製造を行った。EXAMPLES Examples are shown below to further clarify the features of the present invention. Example 1 Ozone water was produced according to the flow shown in FIG.
【００３１】水循環部１は、サイクロンを内部に設置し
た気泡分離容器１３(内径95mm×高さ300mmのFEP製)、FE
P製水循環管路５(内径22mm)、FEP製のベローズポンプ
７、FEP製のフィルターおよびFEP製のエゼクタ１１が備
えられている。The water circulating unit 1 includes a bubble separation container 13 (made of FEP having an inner diameter of 95 mm and a height of 300 mm) having a cyclone installed therein,
A P water circulation line 5 (inner diameter 22 mm), a bellows pump 7 made of FEP, a filter made of FEP, and an ejector 11 made of FEP are provided.
【００３２】ベローズポンプ７により超純水供給部３か
ら吸引した超純水(0.45Mpa・G)を循環させつつ、オゾン
含有ガス供給部１７からのオゾン含有ガス(0.1Mpa・G；
オゾン濃度200g/Nm3；吸引量5Nl/min)をエゼクタ１１か
ら超純水中に吹き込んで、オゾン含有ガス/超純水混合
体(0.3Mpa・G)を形成させた。次いで、オゾン含有ガス/
超純水混合体を気泡分離容器１３(圧力調整弁１９によ
り0.3Mpa・Gに維持されている)に送り、液体サイクロン
により、超純水へのオゾンの溶解を促進するとともに、
混合体中の気泡を分離した。水循環部１内を循環するオ
ゾン水中の溶存濃度は、180〜200mg/lで平衡状態に達し
た。While circulating the ultrapure water (0.45 Mpa · G) sucked from the ultrapure water supply unit 3 by the bellows pump 7, the ozone-containing gas (0.1 Mpa · G;
An ozone concentration of 200 g / Nm 3 ; a suction amount of 5 Nl / min) was blown into the ultrapure water from the ejector 11 to form an ozone-containing gas / ultrapure water mixture (0.3 Mpa · G). Next, ozone-containing gas /
The ultrapure water mixture is sent to the bubble separation vessel 13 (maintained at 0.3 Mpa · G by the pressure regulating valve 19), and the dissolution of ozone in the ultrapure water is promoted by the liquid cyclone,
Bubbles in the mixture were separated. The dissolved concentration in the ozone water circulating in the water circulation unit 1 reached an equilibrium state at 180 to 200 mg / l.
【００３３】オゾン水取り出し経路２５のオゾン水取り
出し弁を開放して、流量5 l/minで約20℃のオゾン水を
連続的に取り出したところ、溶存オゾン濃度は、120〜1
50mg/lであった。このオゾン水をヒーター３１により45
℃で加熱した結果、溶存オゾン濃度45ppmのオゾン水が
得られた。When the ozone water extraction valve of the ozone water extraction path 25 is opened and ozone water of about 20 ° C. is continuously extracted at a flow rate of 5 l / min, the dissolved ozone concentration becomes 120 to 1
It was 50 mg / l. The ozone water is heated by the heater 31 to 45
As a result of heating at ℃, ozone water having a dissolved ozone concentration of 45 ppm was obtained.
【００３４】一方、液体サイクロンにより分離された気
泡から形成されたオゾン含有ガスは、排気経路２１に設
けられた圧力調整弁１９を経て、排気ガス処理装置２３
に送られ、触媒分解によるオゾン分解処理に供された。On the other hand, the ozone-containing gas formed from the bubbles separated by the liquid cyclone passes through a pressure control valve 19 provided in the exhaust path 21 and passes through an exhaust gas treatment device 23.
And subjected to ozonolysis treatment by catalytic decomposition.
【図１】オゾン水製造措置の概要を示すフロー図であ
る。FIG. 1 is a flowchart showing an outline of ozone water production measures.
１ 水循環部 ３ 超純水供給部 ５ 水循環管路 ７ ベローズポンプ ９ フィルター １１ エゼクタ １３ 液体サイクロン方式の気泡分離容器 １７ オゾン含有ガス供給部 １９ 圧力調整弁 ２１ 排気経路 ２３ 排気ガス処理装置 ２５ オゾン水取り出し経路 ２７ 主流路 ２９ 支流路 ３１ ヒーター DESCRIPTION OF SYMBOLS 1 Water circulation part 3 Ultrapure water supply part 5 Water circulation line 7 Bellows pump 9 Filter 11 Ejector 13 Liquid cyclone type bubble separation container 17 Ozone-containing gas supply part 19 Pressure control valve 21 Exhaust path 23 Exhaust gas treatment device 25 Ozone water extraction Path 27 Main flow path 29 Branch flow path 31 Heater
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 ＦＩ テーマコート゛(参考） Ｆ０４Ｂ 43/08 Ｂ０１Ｄ 35/02 Ｍ Ｆターム(参考） 3H077 AA02 BB10 CC03 EE37 4D011 AA05 AC01 AC05 AC06 AD03 4D050 AA01 BB02 BD03 BD04 BD06 CA03 CA15 4D064 AA03 BB08 4G035 AA02 AE13 AE15 AE17 ──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 7 Identification code FI Theme coat ゛ (Reference) F04B 43/08 B01D 35/02 MF Term (Reference) 3H077 AA02 BB10 CC03 EE37 4D011 AA05 AC01 AC05 AC06 AD03 4D050 AA01 BB02 BD03 BD04 BD06 CA03 CA15 4D064 AA03 BB08 4G035 AA02 AE13 AE15 AE17
Claims (7)
ゾン水を製造するための装置であって、超純水を循環経
路に供給するための超純水給水経路と、超純水を循環経
路内で加圧流動させるための加圧装置と、加圧超純水の
圧力を利用してオゾン含有ガスを超純水中に導入するた
めのエゼクタと、超純水とオゾン含有ガスとからなる混
合体から気泡を分離するための液体サイクロンを備えた
気泡分離容器と、分離された気泡の排出経路と、オゾン
水の取り出し経路とを備えたことを特徴とするオゾン水
製造装置。An apparatus for producing ozone water by bringing ultrapure water into contact with an ozone-containing gas, comprising: an ultrapure water supply path for supplying ultrapure water to a circulation path; A pressurizing device for flowing pressurized water in the circulation path, an ejector for introducing ozone-containing gas into ultrapure water using the pressure of pressurized ultrapure water, and ultrapure water and ozone-containing gas. An ozone water producing apparatus, comprising: a bubble separation container provided with a liquid cyclone for separating bubbles from a mixture consisting of: a discharge path for separated bubbles, and a path for taking out ozone water.
とからなる混合体およびオゾン水と接触する構成要素の
接触部が、非金属材料により構成されている請求項１に
記載のオゾン水製造装置。2. The ozone water according to claim 1, wherein a contact portion of the ozone-containing gas, a mixture of ultrapure water and the ozone-containing gas, and a component contacting the ozone water are formed of a nonmetallic material. manufacturing device.
ンプにより行う請求項１に記載のオゾン水製造装置。3. The apparatus for producing ozone water according to claim 1, wherein the pressurization of the ultrapure water is performed by a bellows pump made of a fluororesin.
フィルターを備えた請求項３に記載のオゾン水製造装
置。4. The apparatus for producing ozone water according to claim 3, wherein a filter made of fluororesin is provided downstream of the bellows pump.
た請求項１に記載のオゾン水製造装置。5. The ozone water producing apparatus according to claim 1, wherein a heater is provided in a path for taking out the ozone water.
た分岐路を設け、分岐オゾン水をヒーターにより加熱し
た後、非加熱状態のオゾン水に合流させる請求項１に記
載のオゾン水製造装置。6. The ozone water producing apparatus according to claim 1, wherein a branch path provided with a heater is provided in the ozone water take-out path, and after the branch ozone water is heated by the heater, the ozone water is combined with the unheated ozone water.
にオゾン分解器を接続した請求項１に記載のオゾン水製
造装置。7. The apparatus for producing ozone water according to claim 1, wherein an ozone decomposer is connected to a discharge path of a gas derived from the separated bubbles.
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| JP2000368752A JP4019245B2 (en) | 2000-12-04 | 2000-12-04 | Ozone water production equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000368752A JP4019245B2 (en) | 2000-12-04 | 2000-12-04 | Ozone water production equipment |
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|---|---|
| JP2002166147A true JP2002166147A (en) | 2002-06-11 |
| JP4019245B2 JP4019245B2 (en) | 2007-12-12 |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007325981A (en) * | 2006-06-06 | 2007-12-20 | Chlorine Eng Corp Ltd | Circulation-type apparatus for preparing ozone water and method for operating the same |
| WO2009031591A1 (en) * | 2007-09-03 | 2009-03-12 | Sharp Kabushiki Kaisha | Ozone water production apparatus |
| JP2009112979A (en) * | 2007-11-08 | 2009-05-28 | Nomura Micro Sci Co Ltd | Apparatus and method for producing ozone water |
| JP2010155754A (en) * | 2008-12-26 | 2010-07-15 | Nomura Micro Sci Co Ltd | Apparatus and method of manufacturing ozone water |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007325981A (en) * | 2006-06-06 | 2007-12-20 | Chlorine Eng Corp Ltd | Circulation-type apparatus for preparing ozone water and method for operating the same |
| WO2009031591A1 (en) * | 2007-09-03 | 2009-03-12 | Sharp Kabushiki Kaisha | Ozone water production apparatus |
| JP2009056442A (en) * | 2007-09-03 | 2009-03-19 | Sharp Corp | Ozone water production apparatus |
| KR101191469B1 (en) * | 2007-09-03 | 2012-10-15 | 샤프 가부시키가이샤 | Ozone water production apparatus |
| TWI511781B (en) * | 2007-09-03 | 2015-12-11 | Sharp Kk | Ozone water making device |
| JP2009112979A (en) * | 2007-11-08 | 2009-05-28 | Nomura Micro Sci Co Ltd | Apparatus and method for producing ozone water |
| JP2010155754A (en) * | 2008-12-26 | 2010-07-15 | Nomura Micro Sci Co Ltd | Apparatus and method of manufacturing ozone water |
| JP2013146714A (en) * | 2012-01-23 | 2013-08-01 | Idec Corp | Microscopic bubble generation device |
| JP2014087752A (en) * | 2012-10-30 | 2014-05-15 | Toray Eng Co Ltd | Microreactor system, method of producing compound using the same, and method of producing alkenyl phosphorus compound |
| JP2017000931A (en) * | 2015-06-08 | 2017-01-05 | 栗田工業株式会社 | Method and device for manufacturing gas-dissolved water |
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