JP2002160195A - Method of manufacturing industrial component having piercing hole with high aspect ratio - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an industrial component having a piercing hole with a high aspect ratio and a predetermined thickness even when a soft material likely to be deformed is used. SOLUTION: In a die cutting method to make the opening to a plate material 3 using a punch 10 and a die 12, the plate material 3 is closely attached to a stripper 11 for lifting in a state that the punch 10 is not removed from the opening after the opening is made to the plate material 3 by the punch 10. The punch 10 lifted from the die 12 is returned from a bottom of the opening in a way that it is drawn slightly as well as the next plate material 3 for making the opening by the punch 10. Then the punch 10 is closely attached to a lower part of the previous plate material 3 in an overlapping way for lifting in a state that the punch 10 is not removed form the removed from the opening to return the punch 10 lifted from the die 12 from the bottom of the lifted plate material 3 in a way it is drawn slightly. By repeating the above processes, the manufacturing method to laminate several plate materials 3 with the opening is provided inside a device of the punch 10 and the die 12.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a method for manufacturing an industrial part having a high-aspect-ratio through-hole at a high density, and more particularly, to a method of using a soft material which is deformed by handling after punching. In the case, in the industrial part of a predetermined thickness, with high precision equivalent to the precision when drilling a hole in a thin plate-like material, to form a large number of high aspect ratio through-holes,
The present invention relates to a method for manufacturing an industrial part.

[0002]

2. Description of the Related Art The requirements common to all products manufactured industrially are cheaper, lighter and smaller, especially in industrial products equipped with a large number of electronic circuits. There are remarkable developments in packaging technology that support it. In the development of wiring boards on which electronic components are mounted, small through-holes are accurately and precisely manufactured so that higher-density circuits can be formed while ensuring high reliability in consideration of the cooling effect. Need to be. In addition, in the ink ejection part of an ink jet printer, it is required that a small through-hole is formed with higher precision than a wiring board. Is indispensable.

In recent years, the density has been further increased, and it is necessary to open more small through-holes in a certain area of a material substrate, and the through-holes are inevitably small and deep, in other words, through-holes. The diameter of the portion is small and the axial length is long, that is, the aspect ratio is high, and it is required to form these through-hole portions with high accuracy. Generally, the aspect ratio is
When the through hole is cylindrical, the ratio of its diameter to its axial length
When the through-hole is not cylindrical, it refers to the ratio of the shortest distance from the edge to the opposite edge on the opening surface of the through-hole and the axial length.
Here, the shortest distance from the edge to the opposing edge is shown in FIG.
5A shows the shortest distance S shown in FIG. 5B. That is, a high-aspect-ratio through-hole means an elongated hole having a longer axial length than the diameter or the shortest distance of the hole.

As one of the conventional methods for forming many small through holes in such a plate-like material, there is a hole processing using a punching die. This is a method in which a plate-like material having a predetermined thickness as an industrial part is punched at a time using a punch and a die. According to this method, a thick plate-shaped material is targeted for punching from the beginning, and a large clearance, which is a gap between a punch and a die, is required, and there is a problem that accuracy is poor.
In addition, when punching, a greater shearing force is applied than in the case of a thin plate-like material, and when the density of through-holes is large, especially the die requires many holes. However, there is also a problem that it cannot withstand, is deformed due to insufficient rigidity, and is further damaged.

FIGS. 3A and 3B are views showing through-hole openings formed by a punching die. As shown in FIG. 3 (a), a plate-like material 13 in which a punch 10 is placed on a die 12 is provided.
Is punched by providing a clearance 16 which is a gap between the punch 10 and the die 12.
A crack 15 is generated from each of the edges 14 of FIG. The cracks 15 occur in the range of the clearance 16, and the accuracy of the through-hole varies within the range of the clearance 16. As a result, in the through hole opening method generally using a punching die, the cross-sectional shape of the through hole of the sheet material after punching has a tapered shape that expands in the punching direction as shown in FIG. In a state.

[0006] The clearance 16 required for the punching die is
According to the basic machine tool (I) issued by Nikkan Kogyo Shimbun, 4-12% of the sheet thickness in the case of a thin plate, and 18% in the case of a thick plate.
２６26%, and becomes larger as the plate thickness becomes thicker. That is, as described above, the accuracy of the through-hole portion is reduced with a thick plate-shaped material. Therefore, the diameter of the exit side in the punching direction varies, which is not suitable for a method of densely opening small through holes having a high aspect ratio.

As a method of improving the hole processing by the punching die, a method in which a thin plate-like material is punched, and after the punching, the plate-like materials are moved and stacked to obtain an industrial part having a predetermined thickness. There is. In this method, since the thickness of the material to be punched at a time is small, the accuracy of the holes in one sheet of material at each punching is good, and the shearing force by the punch and the die can be small, so that the density can be increased. The hole can be opened. However, there is a problem that a jig for moving the plate material and a space for stacking are required, and the number of processes is increased, production efficiency is reduced, and the cost is high. In addition, guide pins are required for accurate stacking, and there is a waste that holes other than the necessary holes are formed in industrial parts. Furthermore,
In the case of a soft material that deforms after being punched, the holes will shift during the movement and stacking, and when stacked into industrial parts with a predetermined thickness, the accuracy of the through-holes will decrease. However, it is not suitable for a method of forming small through holes having a high aspect ratio at high density.

As a conventional method, there is a hole processing by a laser without using a punching die. This is processing by a laser beam, and is a method in which the light beam is condensed by a lens and applied to a target material. In this laser processing, the through hole becomes tapered in the traveling direction of the beam light due to the light collecting method itself, which is the basic principle,
There is a fundamental problem that accuracy is poor at a high aspect ratio.

FIGS. 4A and 4B are diagrams showing through-hole openings formed by laser processing. As shown in FIG. 4A, in the laser beam machine, the parallel beam light 17 passes through the condenser lens 18 and is condensed and processed at a focal distance 20. The laser beam width 19 increases as the focus deviates, and the diameter of the through hole to be processed increases. Therefore, the larger the thickness of the plate-like material, the larger the diameter of the through-hole that opens to the entrance side of the beam light in the direction of travel of the beam light when the hole is drilled on the exit side in the direction of travel of the light beam. as a result,
As shown in FIG. 4B, a tapered through-hole portion is formed.

[0010] In addition, since thermal energy is used in laser processing, a plate-like material to be processed is deformed by the influence of the heat, an altered layer is formed, and the diameter of the through-hole portion varies due to these. Problems arise. Even in this problem, since a thicker plate-like material requires a larger amount of laser beam, that is, heat energy, the accuracy of the through-hole decreases as the thickness of the plate-like material increases. Therefore, laser processing,
It cannot be said that this method is suitable as a method for densely opening small through holes having a high aspect ratio.

[0011]

As described above, the mounting technology in the industrial field, especially for electronic components, has been increasing in density, and it has been required to open finer through-holes at higher density. In the case of manufactured industrial parts, even if a soft material with dimensions or shapes that cause deformation due to handling after drilling, through holes with a higher aspect ratio can be safely protected so as not to be damaged. However, there has been a demand for a method of forming the film with higher precision, but no suitable method has been proposed.

The present invention has been made in view of the above problems, and has as its object to solve the problems of the prior art, in which a soft material that may be deformed is used. Also has a diameter of, for example, 100 μm
A fine through-hole with a shaft length longer than a certain ratio compared to the diameter, which is thinner than the following, is opened almost straight with high precision equivalent to the precision of drilling a hole in one thin plate-like material Thus, it is possible to provide an industrial component of a predetermined thickness having a large number of small holes having a high aspect ratio, and to further improve the mounting technology of the industrial component mainly for electronic devices. It is to contribute to density increase.

The inventors of the present invention have conducted various studies on a means for forming a hole in a plate-shaped material by a punching die and a manufacturing process. As a result, in a die punching method using a punch and a die, the plate-shaped material was punched. After opening a hole in the hole, the plate-like material is brought into close contact with the stripper without lifting the punch from the hole, lifted up, and the punch pulled up from the die is returned so as to be slightly pulled in from the lowermost portion of the hole, and Similarly, after punching a hole in the plate material, the punch is punched, and then the punch is pulled out of the hole without being pulled out from the hole so that the punch is brought into close contact with the lower portion of the previous plate material and lifted. The plate-shaped material is returned so as to be slightly drawn in from the lowermost portion of the hole. By repeating this, it was found that the above object can be achieved by a manufacturing method in which a plurality of plate-like materials having holes are stacked in a punch and die apparatus.

[0014]

That is, according to the present invention, there is provided a method for manufacturing an industrial component having a high aspect ratio through-hole portion using a punch and a die.
A first step of forming a first hole in the first plate-like material, and a second step of bringing the first plate-like material into close contact with the stripper and pulling up the punch without removing the punch from the first hole. And a third step of pulling up the punch so that the tip of the punch pulls in slightly from the lowermost portion of the first plate-like material pulled up, and punching a second hole in the second plate-like material. The fourth step, the fifth step of pulling up the second plate-shaped material in close contact with the first plate-shaped material without pulling the punch from the second hole, and the tip of the punch pulled up Including a sixth step of pulling up the punch so that it is slightly pulled in from the lowermost part of the second plate-like material, and thereafter, a plurality of plate-like materials are adhered by repeating the fourth step to the sixth step. Industry with high aspect ratio through-holes characterized by lamination Method for manufacturing a component is provided.

In the first step and the fourth step, it is preferable that a spacer is interposed between the die and the stripper when a hole is formed in the plate-like material by a punch. The thickness of the spacer is the sum of the thickness of the plate material existing between the die and the stripper, in other words, the thickness of the plate material already laminated on the punch and the thickness of the die on which the hole is to be opened. Approximately 5 to 15μ from the total thickness of the plate material placed on
It is preferably m thick.

[0016] The fourth to sixth steps are repeated,
After laminating a desired number of plate materials, that is, when the punching is completed and the plate material is removed from the punching die, the work receiving jig is placed in a state where the laminated plate material is pulled up. Is preferably inserted into a die, and the laminated plate material is transferred onto a work receiving jig.

In the method for manufacturing an industrial part having a high aspect ratio through-hole according to the present invention, between the second step and the third step, the tip of the punch is lifted from the first plate-shaped part. A step of scraping the first hole of the first plate-shaped material in a state in which the punch slightly protrudes from the lowermost part of the material, and between the fifth step and the sixth step, the tip of the punch It is preferable that the method includes a step of removing debris from the second hole of the second plate-like material in a state where the portion slightly protrudes from the lowermost portion of the pulled-up second plate-like material. Debris removal can be performed, for example, by air blowing means for removing the scum by the flow of compressed air, or by an adhesive means for removing the scum by attaching it to an adhesive medium.

In the present invention, it is possible to make the accuracy of the diameter of the through-hole formed in the industrial component equal to the accuracy of the diameter of the hole formed in one sheet-like material. Also, in the present invention, a high aspect ratio through-hole portion in which the ratio of the diameter of the through-hole portion or the shortest distance between the edge and the opposite edge to the axial length and the axial length is approximately 1: 1 to 1:15 is used. Can be formed,
A high aspect ratio through-hole can be formed in which the ratio between the distance between the through-hole and the adjacent through-hole and the axial length of the through-hole is approximately 1: 1 to 1:15. Furthermore, it is possible to form a high-aspect-ratio through-hole having a diameter of 100 μm or less, and the distance between the through-hole and an adjacent through-hole is 100 μm.
It is also possible to form the following high aspect ratio through-holes.

In the present invention, the plate materials to be laminated may be adhered to each other using a plate material to which an adhesive has been applied in advance, or between the plate materials.
The bonding may be performed with an adhesive sheet interposed therebetween. Further, a hole capable of vacuum suction may be formed in the plate material in advance, and the plate materials may be closely adhered to each other by vacuum suction to be laminated.

[0020]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the method for producing an industrial part having a high aspect ratio through-hole according to the present invention will be specifically described, but the present invention is not limited thereto. Various changes, modifications, and improvements may be made based on the knowledge of those skilled in the art without departing from the scope of the present invention. In this specification, the through-hole and the hole refer to, for example, the same hole that is opened from one surface of a plate-shaped material having a thickness to the opposite surface, but is simply referred to as a hole. In the case, it indicates a hole formed in one laminated plate material.

In the present invention, the punch itself is used as a shaft to be overlapped like a guide pin in the conventional method, and a major feature is that thin plate-like materials are stacked in a punch and die manufacturing apparatus. is there. Also, when pulling up the punch, stop the pulling up when the tip of the punch pulls in slightly from the bottom of the pulled up plate material so that the hole of each thin plate material opened individually is not deformed. There are also features.

FIG. 10 shows an example of a punching method using a punch and a die according to a conventional method. As long as the punch 10 moves through the hole of the stripper 11, a certain clearance is required between the punch 10 and the hole of the stripper 11.
Inevitably, there is a gap between the hole and the central axis of the hole. Conventionally, as shown in FIG. 10, the directions and sizes of the deviations a1, a2, and a3 between the central axis of the punch 10 and the central axis of the hole of the stripper 11 change every time punching is performed. The positions of the holes of the material were different. Therefore, even if these were laminated to form a through-hole, the hole did not become highly accurate.

According to a feature of the present invention, by laminating plate-like materials around the punch, the plate-like material serves to hold and fix the punch, so that each time punching is performed, the center axis of the punch and the hole of the stripper are removed. The direction and size of the deviation from the central axis of the lens do not change. That is, in the punched hole of the raised plate-like material, a force acts within a range of elastic deformation in a direction (radial direction) in which the punch is tightened from the outer periphery, so that the punch can be held. Therefore, it becomes possible to form a more accurate hole in the plate-shaped material. FIG. 11 is an explanatory view showing an example of a method for manufacturing an industrial component having a high-aspect-ratio through-hole according to the present invention. FIG. 11 shows a state where the stripper 11 is pulled up after punching out three sheets of the plate-like material 3. Represents. Even when a through-hole is formed in the three sheets of plate-like material 3 as in this example, the center axis of each punch 10 and the center axis of the hole of the stripper 11 are different from each other in the direction a4 in which the directions and sizes are different. ,
Although there are a5 and a6, the plate materials 3 are stacked around the punch 10, so that the gaps a4, a5, and a6 in the holes of the three sheets of the plate material 3 change. There is no. Therefore, the through-hole formed by overlapping the three sheets of the plate-shaped material 3 has higher precision.
Further, as shown in FIG. 11, since the plate-shaped material 3 supports the punch 10 around the tip of the punch 10, it also has a function of preventing buckling of the tip of the punch 10.

As described above, when an industrial part having a predetermined thickness is formed, the accuracy of the through hole decreases as the thickness increases in the conventional method. Even when using a deformable soft material, with the same high precision as that when drilling holes in a thin plate-like material,
Through holes having a high aspect ratio can be formed at high density. The high-density and high-aspect-ratio through-holes required in an electronic circuit wiring board, a printer ink ejection unit, and the like are the following through-holes shown in FIGS. 2A and 2B. . FIG. 2 shows an industrial part having a high aspect ratio through-hole according to the present invention. FIG. 2A shows an example of an industrial component 1 having a through-hole 2 with a high aspect ratio, and FIG. 2B is an enlarged view of a part thereof. In the industrial part 1, an elongated through-hole having a ratio of the through-hole diameter D to the through-hole axial length L in FIG. 2B of about 1: 1 to 1:15 is formed. Is preferred. Further, in the industrial part 1, the through-holes are formed at a high density such that the ratio between the through-hole interval N and the through-hole axial length L is also approximately 1: 1 to 1:15. Is required. Both the through-hole diameter D and the through-hole interval N are about several tens of μm. The industrial part 1 is required to have a large number of such small through-holes of 100 μm or less accurately formed at intervals of 100 μm or less. It can be realized by a manufacturing method.

The high-precision through-hole portion means a portion in which the diameter D of the through-hole portion is substantially constant in all sections of the axial length L of the through-hole portion. In other words, the hole is a hole that passes straight through the thickness of the plate-shaped material, and is a hole such that if the cross section of the through hole 2 is a circle, the through hole 2 is substantially a column. The cross-sectional shape of the through-hole 2 does not necessarily have to be a circle. For example, the cross-section may be an elongated ellipse as shown in FIG. If the through holes 2 are formed with high density when the accuracy of the through holes 2 is low, the gap N between the through holes 2 is eliminated and two or more through holes 2 are formed.
Coalescence, the gap N between the perforations is small, the strength is insufficient, and the wall W between the perforations 2 is bent or deformed or broken. However, according to the method for manufacturing an industrial part having a high aspect ratio through-hole according to the present invention, the part can be manufactured with high shape accuracy even if the wall W is thin. Such a problem does not occur.

The soft material having a size or shape that is deformed by handling after punching, which is a target in the method for manufacturing an industrial part having a high aspect ratio through-hole according to the present invention, includes, for example, a Young's modulus. Is 3000 kgf / mm ²
Soft material of less than polyethylene (Young's modulus 310
kgf / mm ² ), polyimide (Young's modulus 430 kgf)
/ Mm ² ), reinforced plastic (Young's modulus 2500 kg)
f / mm ² ), green sheet (Young's modulus 4 kgf / m
m ² ). The Young's modulus is 3000 kgf /
Even if the material has a size of ² mm or more, any material having a size or shape that can be deformed by handling after punching, such as an extremely thin plate-shaped metal, can be an object of the present invention.

Hereinafter, an example of a method for manufacturing an industrial component having a high-aspect-ratio through-hole according to the present invention will be described. First, schematic steps of the manufacturing method will be described with reference to FIGS. 1 (a) to 1 (e). The punching machine mainly includes a punch 10, a die 12, and a stripper 11. The thin plate-shaped material 3 is placed on the die 12, one by one, and punched by the punch 10. The material, size, and thickness of the thin plate-shaped material 3 are not particularly limited, but for example, a green sheet having a thickness of 40 μm can be used.

FIG. 1A shows a die 1 for preparing for punching.
2 shows a state in which a thin sheet material 3 of the first sheet is placed on 2. Next, as shown in FIG. 1B, the sheet material 3 is punched out of the first sheet by the punch 10. Then, FIG.
The preparation for punching the second sheet shown in Fig. 4 is started, but the punched sheet material 3 of the first sheet is not moved to another place and laminated as in the conventional method, but is inserted into the punch 10. While keeping it in close contact with the stripper 11, it moves upward. FIG. 1C shows a method of bringing the plate material 3 into close contact with the stripper 11.
Vacuum suction 8 may be performed from an air inlet penetrating the stripper 11 as shown in FIG. 3, or may be adhered to the stripper 11 by applying an adhesive to the surface of the sheet material 3 of the first sheet.

In order to prepare for the punching of the second sheet, as shown in FIG.
At this time, it is preferable that the punch 10 is not returned to the center of the hole of the plate material 3 of the first sheet that has been pulled up together. It is important to stop at a point where the plate-shaped material 3 is slightly drawn from the lowermost portion. Here, "slightly retracting" means to always at least make a state of not protruding. If the punch 10 is returned to the center of the hole of the plate-shaped material 3 or is completely stored in the stripper 11, the hole is deformed in the plate-shaped material 3 using a soft material. The accuracy of the holes when the material 3 is laminated to form the industrial part 1 is reduced.

As described above, the punch 10 itself is used as a laminating shaft of the thin plate-like material 3 like a guide pin of a conventional method, and the hole formed by the punch 10 itself is prevented from being deformed, so that the punch 10 is thin. A jig for moving the plate-like material 3 and a space for stacking the plate-like material 3 while using a means for laminating the plate-like materials are not required, and the number of manufacturing steps can be further reduced. Therefore, an industrial part 1 having a high-density through-hole having a high aspect ratio formed with the same high precision as the hole formed in one thin plate-shaped material 3 can be manufactured at lower cost.

FIG. 1D shows a second sheet-like material 3.
Shows the punching process. Next, a punching preparation as shown in FIG. 1C is performed, and this is repeated, and a plurality of plate-like materials 3 are sequentially laminated in a punching machine. As shown in FIG.
After the sheet material 3 is punched for all sheets and lamination is completed, the laminated plate material 3 is released from the stripper 11 to complete the punching.

Next, referring to FIGS. 15 (a) to 15 (f), the above-described step of preparing for punching the first sheet material 3 (FIG. 1 (a)) will be described. The details up to the punching preparation step (FIG. 1C) of the sheet material 3, that is, the details of the punching of the first sheet will be described. FIG. 15A shows the state shown in FIG.
7 shows a state in which the first sheet-like thin plate material 3 is placed on the die 12. Next, as shown in FIG. 15B, the stripper 11 is lowered and applied to the plate material 3 on the die 12. At this time, the punch 10 is still contained in the stripper 11. It is not preferable to punch the plate material 3 with the punch 10 before the stripper 11 hits the plate material 3 on the die 12 when the stripper 11 is lowered. When the stripper 11 is lowered, the stripper 11 holds the punch 10 and presses the plate-shaped material 3. However, if the plate-shaped material 3 is not pressed, the flatness of the plate-shaped material 3 deteriorates. In this case, the punching becomes unstable and cannot be performed with high accuracy. In addition, deformation other than shearing of the plate-like material 3 generated at the time of punching, specifically, warpage can be prevented by pressing the stripper 11 with the stripper 11. Unless prevented, punching cannot be performed with high precision.

Thereafter, as shown in FIG. 15C, in a state where the stripper 11 hits the plate material 3 on the die 12, the plate material 3 is punched by the punch 10 and the punch 10 is put into the die 12. . Then, as shown in FIG. 15 (d), first, only the punch 10 is pulled up slightly from the lowermost portion of the plate-shaped material 3 while the stripper 11 is kept in contact with the plate-shaped material 3 on the die 12. Punch 10
It is preferable not to pull up the stripper 11 at the same time as or after the punch 10 is pulled in. Stripper 11 and die 12, and punch 10
This is because the punched shape of the plate-shaped material 3 is secured with high precision in the state surrounded by, so that the precision is not reduced by pulling up the punch 10 while maintaining this arrangement.

Then, as shown in FIG. 15E, the stripper 1 is inserted while the plate material 3 is inserted into the punch 10.
Pull up 1 to finish punching the first sheet. FIG.
(F) shows the second sheet preparation step as in FIG. 1 (c).

Next, FIGS. 16A to 16F, FIGS. 17A to 17F, and FIGS. 18A to 18
(F) With reference to FIG. 20, a method for performing high-precision punching even when a material that is easily deformed is used will be described. 16 (a) to 16 (f) and FIGS. 17 (a) to 17
(F), FIGS. 18 (a) to 18 (f) are process descriptions showing an example of a method for manufacturing an industrial component having a high-aspect-ratio through-hole portion using a punch and a die according to the present invention. It is a figure and shows the method of punching via a spacer between a die and a stripper.

As described above, by repeating the punching process while laminating the plate-shaped material having the hole formed on the punch, the hole can be formed with higher accuracy. If you use a material that is easily deformed,
The accuracy of the hole may be reduced. At the time of punching, the stripper hits the plate-shaped material on the die before the punch makes a hole, and the plate-shaped material is sandwiched between the stripper and the die. , And a compressive force is applied to a plate-like material placed on a die from which a hole is to be made. At this time, if a material that is easily deformed by this compression force is used, the plate-like material laminated on the stripper is crushed and deformed,
Since the punch serving as the laminating axis is fixed, the punch is relatively displaced, and the shape accuracy of the already opened hole may be reduced. On the other hand, the plate material placed on the die is
Since the hole is opened by the punch in a state where the stripper hits and is crushed, the positional accuracy and the shape accuracy of the hole may be reduced by the shape return of the elastic deformation generated after the punching.

In order to form a more accurate hole in a soft plate-like material, FIGS.
7 (a) to FIG. 17 (f), FIGS. 18 (a) to 18 (f)
It is preferable to perform punching via a spacer between the die and the stripper as shown in FIG. With the interposition of the spacer, the stripper directly hits the plate-like material, and it is possible to prevent a compressive force from being applied to the plate-like material.

FIGS. 16A to 16F are diagrams showing a manufacturing process using the extrapolation shim 6 as a spacer, for example. FIG. 16A shows the die 12 in preparation for punching.
1 shows a state in which the thin sheet material 3 of the first sheet is placed. Further, on the die 12, for example, an extrapolation shim 6 having a shape as shown in FIG. The thickness of the extrapolated shim 6 is
Approximately 5 to 15 μm from the thickness of the plate material 3 on the die 12
Preferably, the thickness is large. Next, as shown in FIG. 16B, the plate-like material 3 of the first sheet is punched by the punch 10. At this time, the stripper 11 does not directly hit the plate material 3 but hits the extrapolated shim 6 which is slightly thicker than the thickness of the plate material 3. Therefore, even if the plate-shaped material 3 is an extremely soft material, it is not deformed at the time of punching, and the holes formed in the plate-shaped material 3 by punching have high precision.
Thereafter, preparation for punching of the second sheet shown in FIG. 16C is started, and the punched plate-like material 3 of the first sheet is kept in close contact with the stripper 11 and moved upward while being inserted into the punch 10. The extrapolated shim 6 is placed on the die 12. The thickness of the extrapolated shim 6 is generally 5 to 5 times from the sum of the thickness of the plate material 3 already punched out and pulled up while being inserted into the punch 10 and the thickness of the plate material 3 placed on the die 12 to be punched out. It is preferable to increase the thickness by 15 μm.

FIG. 16D shows a step of punching the second sheet-like plate material 3. Similarly to FIG. 16B of the first sheet, the stripper 11 does not directly hit the plate material 3 but hits the extrapolated shim 6 to prevent the plate material 3 from being deformed. Similarly, the holes formed in the plate-shaped material 3 have high precision. Next, preparation for punching the third sheet is started in FIG. The thickness of the plate material 3 which has been already punched out and pulled up while being inserted into the punch 10 and the thickness of the plate material 3 placed on the die 12 to be punched out are also preferably larger than that of the die 12. An extrapolated shim 6 having a thickness of 5 to 15 μm is placed, and at the time of punching, the stripper 11 is used.
Is prevented from directly hitting the plate material 3. By repeating this, a plurality of plate-like materials 3 are sequentially laminated in the punching machine. As shown in FIG. 16 (f), the sheet material 3 is punched out for all the sheets, and when lamination is completed, the laminated plate material 3 is released from the stripper 11 to complete the punching.

As described above, when the plate material 3 is punched by the punch 10, the thickness of the extrapolated shim 6 placed on the die 12 is adjusted by the thickness of the plate material 3 existing between the die 12 and the stripper 11. In other words, the plate material 3 that has been punched out and inserted into the punch 10 and pulled up
And the plate-like material 3 placed on the die 12 to be punched
The reason why the thickness is always about 5 to 15 μm more than the sum of the thicknesses of the sheet material 3 is that the sheet material 3 is not thickened due to the thickness variation of the sheet material 3 or the deformation of the stripper 11 and the die 12 generated at the time of punching. In order not to crush. Even if the thickness of the extrapolated shim 6 is smaller than the total thickness of the plate material 3 pulled up while being inserted into the punch 10 and the plate material 3 placed on the die 12, If the difference is less than about 5 μm, the stripper 11 may crush the plate material 3, which is not preferable. Conversely, the difference is roughly 1
If the thickness is more than 5 μm, the bending of the plate material 3 cannot be sufficiently suppressed, which is not preferable.

As long as the above conditions are satisfied, each time the number of layers of the plate-shaped material 3 increases and the required thickness of the extrapolated shim 6 increases, the extrapolated shims prepared with different thicknesses are replaced. Alternatively, extrapolated shims may be stacked.

The spacer, which is an example of the above-described extrapolated shim 6, exists between the die and the stripper at the time of punching, and can prevent the stripper from directly hitting the plate material and applying a compressive force to the plate material. The thickness may be about 5 to 15 μm thicker than the sum of the thickness of the plate material pulled up while being punched and inserted into the punch and the thickness of the plate material placed on the die to be punched. The shape of the spacer is not limited.

For example, in the case of the extrapolation shim 6 described above,
It may be a plurality of square bars or flat plates sandwiching the plate-shaped material 3, or may be a thin cylinder or a prism placed at the four corners of the plate-shaped material 3. However, since it is easy to work to the same thickness (height) and it is easier to suppress the inclination of the die 12 and the stripper 11, it is preferable to have a frame shape as shown in FIG.

As another example of the spacer, a manufacturing process using a lifting shim is shown in FIGS. 17 (a) to 17 (f).
The lifting shim 5 shown in FIGS. 17 (a) to 17 (f) moves up and down in the die 12 to adjust the height protruding from the upper surface of the die 12, so that when the punch 10 is punched, the die 12 and the stripper 11 and a stripper 1
1 directly hits the plate-shaped material 3 to prevent a compressive force from being applied to the plate-shaped material 3.

FIG. 17A shows a state where the thin sheet material 3 of the first sheet is placed on the die 12 in preparation for punching. At this time, the lifting shim 5 is moved from the upper surface of the die 12 to a thickness of about 5 to 15 times more than the thickness of the plate material 3 on the die 12.
Move upward to project μm higher. Next, FIG.
As shown in (b), the first sheet-like plate material 3 is punched out by a punch 10. At this time, the stripper 11 does not directly hit the plate material 3, but hits the lifting shim 5 slightly projecting from the thickness of the plate material 3. Therefore, even if the plate-shaped material 3 is an extremely soft material, it is not deformed at the time of punching, and the holes formed in the plate-shaped material 3 by punching have high precision. Thereafter, preparation for punching the second sheet shown in FIG. 17C is started, and the punched plate-like material 3 of the first sheet is kept in close contact with the stripper 11 while being inserted into the punch 10 and moves upward. The height of the lifting shim 5 protruding from the upper surface of the die 12 is determined by the thickness of the plate material 3 already punched out and pulled up while being inserted into the punch 10 and the thickness of the plate material 3 placed on the die 12 to be punched from now on. Approximately 5
Adjusted to protrude 15 μm higher.

FIG. 17D shows a step of punching the second sheet-like plate material 3. Similarly to FIG. 17B for the first sheet, the stripper 11 does not directly hit the plate material 3 but hits the lifting shim 5 to prevent the plate material 3 from being deformed. Similarly, the holes formed in the plate-shaped material 3 have high precision. Next, preparation for punching the third sheet is started in FIG. Similarly, the sheet material 3 which is already punched out and pulled up while being inserted into the punch 10 and the total thickness of the plate material 3 placed on the die 12 to be punched out are projected so as to be approximately 5 to 15 μm higher. The height of the lifting shim 5 protruding from the upper surface of the die 12 is adjusted to prevent the stripper 11 from directly hitting the plate material 3 at the time of punching. By repeating this, a plurality of plate-like materials 3 are
Laminate sequentially in a punching machine. As shown in FIG. 17 (f), the sheet material 3 is punched out for all the sheets, and when the lamination is completed, the sheet material 3 laminated by the stripper 11.
Is released to complete the punching.

As described above, the shape of the spacer is not limited. Therefore, when this lifting shim 5 is used as a spacer, although not shown, the horizontal cross-sectional shape of the lifting shim 5 may be, for example, an elongated shape sandwiching the plate material 3. It may be a circular shape or a square shape placed outside the four corners, or a frame shape surrounding the plate-shaped material 3.

The lifting shim used as a spacer is shown in FIG.
As shown in FIGS. 7 (a) to 17 (f), the invention is not limited to the lifting shim 5 which moves up and down in the die 12, and as shown in FIGS. 18 (a) to 18 (f), The lifting shim 4 that moves up and down may be used. The manufacturing process using the lifting shim 4 is shown in FIGS. The lifting shim 4 shown in FIGS. 18 (a) to 18 (f) moves up and down in the stripper 11 to adjust the length of the shim 4 projecting from the lower surface of the stripper 11, so that the die 12 and the stripper 11 to form a space,
The stripper 11 directly hits the plate material 3 to prevent a compressive force from being applied to the plate material 3. The role of the lifting shim 4 as a spacer and the details of the manufacturing process are described in detail in FIGS. 17 (a) to 17 (f).
Therefore, the description of the manufacturing process is omitted.

Generally, in a punching machine, a lower die having a die has a smaller number of parts than an upper die, and it is easy to secure a space for installing a lifting shim and a lifting mechanism for moving the shim up and down. In this regard, the lifting shim 5 is easier to employ than the lifting shim 4. Also, lifting shims 4,5
16 (a) to 16 (f), the initial cost and the remodeling cost required when the thickness of the plate-like material is changed are reduced. However, the liftable shims 4 and 5 which can be automated are advantageous in that the processing speed is faster, the throughput is improved, and the cost of the manufactured industrial parts is reduced.

FIG. 19 shows an example of an elevating mechanism for moving the shim up and down. FIG. 19 is an explanatory view showing the lifting mechanism 32 attached to the lifting shim 5 that moves up and down in the die 12. The rotating motion generated by the high-precision servo motor 33 is rotated by, for example, the servo motor 33. Male thread 3
By means of the mechanism consisting of the female screw 4 and the internal thread 35 meshing with it, it is possible to convert it into a linear motion and to move the lifting shim 5 up and down with high accuracy.

Next, referring to FIGS. 9A to 9C,
A debris removing process for preventing the clogging of the holes formed in the plate-shaped material with the debris will be described. FIG. 9A shows a preparation state before the punching in which the plate material 3 is placed on the die 12. And FIG.
As shown in (b), the plate material 3 is punched by the punch 10. At this time, scum is generated from the holes of the plate-like material formed by the punching. Most of the swarf falls into the counterbore part 21 of the die, but part of the scum adheres to the punch 10 and is lifted upward. If the scraps lifted upward adhere to the plate material 3, it leads to defective punched products. Therefore, as shown in FIG. 9 (c), the stripper 11 is pulled up together with the plate-like material 3, and the scum is removed in a state where the tip of the punch 10 slightly protrudes from the lower surface of the plate-like material 3 by a7. . Here, the state of slightly protruding indicates that the state is always at least not retracted.

Since the punch 10 is not removed from the hole of the plate material 3 formed by the punching, no waste remains in the hole of the plate material 3 and remains as shown in FIG. 9C. In this state, it suffices to remove scum adhering to the die 12, the punch 10, or the lower surface of the plate material 3. In addition to the easy removal of the waste, the waste does not enter the hole of the plate-shaped material 3 and remains, thereby further improving the yield.

In the conventional manufacturing method, the sheet material is not punched out and then pulled up in close contact with the stripper. Therefore, the lower side of the sheet material remaining on the die, ie, the die From the counterbore portion side, vacuum was blown, pneumatically blown, or adhered to an adhesive medium, etc., so that scum was removed so as not to remain in the hole of the plate-shaped material.

However, in the case of a punching machine with a large punch pitch, as shown in FIG. 7, the punching step portion of the punch 10 has a large diameter and a large gap can be provided between the punches. Has sufficient space in the counterbore portion 21 of the die, so that the above-mentioned scrap can be removed.
With a punching machine with a small punch pitch, where the diameter of the punching tip portion of No. 0 is smaller and the distance between the punches is narrower, it is difficult to remove the residue as described above.

In recent years, a punching machine whose punching step is shown in FIG. 8 is often used in recent years as the density of through-holes increases. In such a punching machine, the diameter of the tip portion a8 of the punch 10 is particularly small, and the length of the tip portion a8 is made as short as possible to prevent buckling of the tip portion a8. In order to remove the punch residue, the punch 10
Since it is necessary to protrude into the counterbore portion 21 of the die, the thickness b of the upper surface of the counterbore portion 21 of the die becomes thin, and the die 12
Has a lower strength. Also, since the punching pitch is small, the shearing force of the punch 10 is further increased.
The load on 2 will be greater. For this reason, the die 12 is reinforced by providing ribs on the counterbored portion 21 of the die for the purpose of improving the strength of the die 12, but such reinforcement complicates the structure of the die 12 and removes debris. Difficulty in performing work. As a result, debris removal becomes insufficient, and scum remains in the hole of the plate-shaped material 3, which leads to a decrease in yield.

In the present invention, since the scrap can be removed from the die 12, the scrap can be easily removed without being affected by the structure of the die 12. In addition, since the plate material 3 is not removed from the punch until the punching and lamination are completed, it is unlikely that chips enter the holes of the plate material 3. The scrap removing means in the present invention may be the same as the conventional method. Blowing with compressed air, which makes equipment simpler, or
Adhesion with an adhesive medium or the like may be appropriately selected.

Next, a method of removing the laminated plate material from the stripper will be described. First, as shown in FIG. 1 (e), a method of removing the laminated plate-like material 3 from the stripper 11 is, for example, to stop the vacuum suction from which the plate-like material 3 is pulled up, to perform a vacuum break 9, and to perform a peeling cure. What is necessary is just to remove mechanically with the tool 7. At this time, the plate material 3 removed from the punch 10 and the stripper 11 is not placed on the die 12 and then taken out, but, for example, a work receiving jig is inserted on the die and the laminated plate material 3 is received on the die. It is preferable to transfer the jig to a jig and transfer it to the next step because the production efficiency is further improved. If the plate-like material is soft, deformation is less likely to occur, which is preferable.

FIGS. 12A to 12C are explanatory views of a process of transferring the laminated plate material onto a work receiving jig. Three sheets of the plate material are punched and laminated. An example of later removal from the punch and stripper is shown.
As shown in FIG. 12A, when the stripper 11 is pulled up while keeping the plate material 3 that has been punched and laminated, the workpiece receiving jig 2 is pulled up as shown in FIG.
12 is inserted into the die 12, and as shown in FIG. 12C, the punch 10 is pulled up by the stripper 11, thereby separating the plate material 3 from the punch 10 and removing the plate material 3. The vacuum suction 8 that has been pulled up is stopped, and a vacuum break 9 is performed.
The laminated plate-like material 3 from the work receiving jig 2
3 may be transferred.

When laminating the plate-like materials 3 to form the industrial component 1, it is necessary to bond the plate-like materials 3 to each other. The method is to apply an adhesive to the surface of each plate-like material 3 in advance. The adhesive may be applied by coating, or an adhesive sheet may be interposed between the plate-like materials 3. The use of an adhesive sheet increases the number of punching steps. Therefore, it is preferable to use a plate material 3 having a surface having adhesiveness in advance.

Alternatively, a hole capable of vacuum suction may be formed in the plate material in advance, and the respective plate materials may be closely adhered and stacked by vacuum suction. FIGS. 13 (a) to 13 (f) show installation examples of vacuum suction holes formed in the plate material when the plate materials are stacked by vacuum suction. FIG. 13A shows an example of the vacuum suction holes 24 arranged on the stripper 11, and FIG. 13B shows an example of the vacuum suction holes 24 arranged on the first sheet material 3. First, when they are stacked, the first sheet material 3 is vacuum-sucked through the vacuum suction holes 24 shown in FIG. 13A and not shown in FIG. Next, for example, FIG.
The vacuum suction holes 24 as shown in FIG. 3C are arranged in the second sheet material 3. FIG.
The second sheet material 3 is vacuum-sucked through the vacuum suction hole 24 not shown in FIG. Similarly, FIG. 13D shows the vacuum suction holes 24 arranged in the third sheet material 3, and FIG.
(E) shows the vacuum suction hole 24 arranged in the fourth sheet-shaped material 3. As shown in FIG. 13 (f), the vacuum suction hole 24 is unnecessary in the last sheet material 3 of the fifth sheet having no sheet material to be laminated next.

The place where the vacuum suction holes are arranged is not limited. However, since the plate-like material is pulled up by the suction force, except for the last plate-like material in which the vacuum suction holes are unnecessary, the vacuum suction holes are each formed of a plate-like material. It is preferable to arrange evenly on the four sides of the material.
Also, usually all vacuum suction is performed by one vacuum device,
In this case, except for the last vacuum suction of the plate-shaped material, there is an open vacuum suction hole, so that no vacuum pressure is applied as it is. As a countermeasure, it is possible to secure the vacuum pressure by deciding the place for vacuum suction for each sheet, separating the piping line and providing a control valve in the path, etc. Even if it forms, the suction force of pulling up the plate-like material can be exerted.

As still another method of laminating the plate material, the surface finish of the punch is roughened, the friction force generated between the punch and the plate material is increased, and the plate material is held on the punch by the friction force. It is also preferable to use a method of performing the above.
As a result of the plate-like material being held by the punch, the plate-like materials punched out in sequence are stacked in close contact with the stripper. In general, a punched hole is elastically deformed in a direction of tightening a punch, that is, so as to reduce a diameter of the hole, due to an internal stress generated in a punching process. In particular, a material having higher elasticity has a larger deformation amount. Therefore, the plate material can be held on the punch only by roughening the surface finish of the punch.

When a material having high elasticity is used as the plate-like material, the bamboo-shaped step portion 31 is formed on the surface as shown in FIG. 14 in order to more reliably hold the plate-like material on the punch.
It is also preferable to use a punch 30 having At the moment when the plate material is punched by the punch 30, the plate material does not plastically deform and climbs over the step portion 31 and is sequentially laminated. If the step height H of the punch 30 is made equal to the thickness of the plate material, the punch 30 can be closely adhered and laminated, and the plate material does not fall off the punch 30 because it is caught on the step portion 31 by elastic deformation. .

The method of manufacturing an industrial component having a high-aspect-ratio through-hole has been described above in detail. According to the present invention, the following high-precision punching is realized.
The thickness 50 of the plate-like material is set so that the diameter D of the through-hole portion as an industrial part is 98 μm and the interval N between the through-hole portions is 50 μm.
For example, when a hole is formed in a green sheet having a thickness of μm, the clearance between a punch and a die in one sheet material may be about 2 μm as 4% of the plate thickness. At this time, the ratio of the hole diameter and the hole axial length in one sheet of material,
That is, the aspect ratio is approximately 2: 1 and the ratio between the hole interval and the hole axial length is 1: 1. When an industrial part is obtained by laminating 12 such plate-like materials, the thickness becomes 0.6 mm, and the ratio of the through-hole diameter D to the through-hole axial length L as an industrial part, that is, the aspect ratio The ratio is approximately 1: 6, and the ratio of the through hole interval N to the through hole axial length L is 1:12. Such a high-aspect-ratio through-hole portion is defined by a clearance in one sheet material, in other words, the through-hole portion diameter D is 4 μm.
It can be provided with the accuracy of the variation in the inside.

[0065]

EXAMPLES Next, the present invention will be described with reference to examples, and the effects thereof will be confirmed. (Example) Using a green sheet having a Young's modulus of 4 kgf / mm ² as a material by using a punching machine by a punch and die, a through-hole having a diameter of 80 μm and a shaft length of 0.8 mm was inserted into an adjacent through-hole. A wiring board formed so as to have a density of 70 μm was prepared. At this time, one green sheet was made to have a thickness of 40 μm, and 20 sheets were stacked by using a punch as a lamination axis. When the diameter of the through-hole portion of the obtained wiring board was measured, it was 80 μm on the front surface side of the substrate and 80 to 83 μm on the back surface side of the substrate. When the front and back surfaces of the substrate were observed with an optical microscope, no cracks or the like were observed.

Comparative Example 1 A wiring board was manufactured in the same manner as in the example except that the thickness of one green sheet was 0.8 mm and only one green sheet without lamination was used. When the diameter of the through-hole portion of the obtained wiring board was measured, it was 80 μm on the front side of the board and 115 to 115 μm on the back side of the board.
It was 130 μm. When observing the front and back surfaces of the substrate with an optical microscope, distortion of the holes was confirmed, and through holes having cracks at the edges of the holes were found in some places.

(Comparative Example 2) Using a laser beam machine,
Using a green sheet having a Young's modulus of 4 kgf / mm ² as a material, a wiring board having the same through-holes as in the example was produced. Only one green sheet was used in the same manner as in Comparative Example 1 and the thickness was 0.8 mm. When the diameter of the through-hole portion of the obtained wiring board was measured, 80 μm was found on the surface side of the board.
m, 40 to 69 μm on the back side of the substrate. Observation of the front and back surfaces of the substrate with an optical microscope confirmed that the holes were distorted, and that roundness was reduced and burrs and chips were formed at the edges of the holes.

As described above, according to the present invention, an industrial component in which a small through-hole having a high aspect ratio is formed at high density with high accuracy that cannot be obtained by the conventional method without deformation or cracking. Can be manufactured.

[0069]

As described above, according to the present invention, even when a soft material having a possibility of deformation is used, the diameter is extremely small and 100 μm or less, and the axial length is constant compared to the diameter. Fine through-holes having a length equal to or greater than the ratio, that is, small and high-aspect-ratio through-holes were provided at high density with the same precision as that of drilling holes in one thin plate-like material. Industrial parts can be manufactured. And, by the method of manufacturing an industrial part having a high aspect ratio through-hole portion, it becomes possible to manufacture a desired wiring board, a liquid discharge nozzle, and the like, which contributes to an improvement in a technology for mounting industrial products, An excellent effect is exhibited in that more compact and convenient products can be sent to the world.

[Brief description of the drawings]

FIG. 1 is a process explanatory view showing an example of a method for manufacturing an industrial part having a through hole with a high aspect ratio using a punch and a die according to the present invention, and FIG. FIG. 1B shows a first sheet punching step of punching the first sheet with a punch, and FIG. 1C shows a second sheet punching step of punching the first sheet with a thin plate-like material. FIG. 1 (d) shows a second sheet punching step, and FIG. 1 (e) shows a step of punching and stacking all sheets, and releasing the stacked sheet material from the stripper. 4 shows a sheet punching completion step.

FIG. 2 is a view showing an industrial part having a high aspect ratio through-hole according to the present invention, and FIG. 2 (a) is a perspective view showing an example of an industrial part having a high aspect ratio through-hole; so,
FIG. 2B is an enlarged view of a through-hole having a high aspect ratio in FIG. 2A.

FIGS. 3A and 3B are diagrams showing through-hole openings formed by a punching die according to a conventional method. FIG. 3A is a schematic diagram showing the state of occurrence of cracks, and FIG. It is explanatory drawing which shows the cross-sectional shape of the through-hole part of a plate-shaped material.

4A and 4B are diagrams showing through-hole portions opened by laser processing according to a conventional method. FIG. 4A is a schematic diagram showing a processing state by a laser beam, and FIG. 4B is a through-hole after laser processing. It is explanatory drawing which shows the cross-sectional shape of a part.

5A and 5B are diagrams showing an industrial part having a high aspect ratio through-hole according to the present invention, and FIG. 5A is an explanatory diagram showing an example of the shortest distance of the through-hole, and FIG. () Is an explanatory view showing another example of the shortest distance of the through-hole portion.

FIG. 6 is an explanatory view showing an example of a cross-sectional shape of a through-hole having a high aspect ratio according to the present invention.

FIG. 7 is a process explanatory view showing an example of a punching method using a punch and a die according to a conventional method.

FIG. 8 is a process explanatory view showing another example of a punching method using a punch and a die according to a conventional method.

FIG. 9 is a process explanatory diagram showing an example of a method for manufacturing an industrial component having a through-hole having a high aspect ratio using a punch and a die according to the present invention, and FIG. FIG. 9B shows a preparation step in which a thin plate-shaped material is placed, and FIG. 9B shows a punching step in which the plate-shaped material is punched out with a punch.
Shows a scrap removing step of removing the scrap by pulling up the stripper together with the plate-like material.

FIG. 10 is an explanatory view showing an example of a punching method using a punch and a die according to a conventional method.

FIG. 11 is an explanatory view showing one example of a method for manufacturing an industrial component having a through-hole with a high aspect ratio using a punch and a die according to the present invention.

FIG. 12 is a process explanatory view showing an example of a method for manufacturing an industrial component having a through-hole portion with a high aspect ratio using a punch and a die according to the present invention, and FIG. A sheet punching completion process A in which plate materials of all n (n = 3) sheets are punched and laminated, and the stripper is pulled up,
FIG. 12 (b) shows a sheet punching completion step B of inserting the work receiving jig onto the die, and FIG. 12 (c) releases the laminated plate material from the stripper and transfers it onto the work receiving jig. The sheet punching completion process C to be placed is shown.

FIG. 13 is an explanatory view showing an example of a method for manufacturing an industrial part having a high-aspect-ratio through-hole portion using a punch and a die according to the present invention, and FIG. FIG. 13B shows a hole for vacuum suction to be performed.
FIG. 13C shows a hole for vacuum suction arranged on the plate material of the second sheet, FIG. 13C shows a hole for vacuum suction arranged on the plate material of the second sheet, and FIG. FIG. 13 (e) shows a vacuum suction hole arranged on the fourth sheet material, and FIG. 13 (e) shows a vacuum suction hole arranged on the fourth sheet material.
3 (f) shows a vacuum suction hole (no hole) arranged on the fifth (last) plate material.

FIG. 14 is a side view showing one embodiment of a punch used in the method of manufacturing an industrial part having a high aspect ratio through-hole according to the present invention.

FIG. 15 is a detailed process explanatory view showing an example of a method for manufacturing an industrial component having a through-hole having a high aspect ratio using a punch and a die according to the present invention, and FIG.
FIG. 15B shows a first sheet preparation step in which the first sheet of the thin plate material is placed on the die, and FIG. 15B shows a state in which the stripper is lowered to the plate material on the die in the first sheet punching step. FIG. 15C shows a state in which a punch is punched into a die in a first sheet punching step, and FIG. 15D shows a state in which a stripper is attached to a plate on the die in the first sheet punching step. In the state where the punch is pulled up slightly from the lowermost part of the plate-like material while being pressed against the plate-like material,
FIG. 15E shows a state where the stripper is pulled up in the first sheet punching step, and FIG. 15F shows a second sheet preparation step.

FIG. 16 is a process explanatory view showing an example of a method for manufacturing an industrial component having a high-aspect-ratio through-hole portion using a punch and a die according to the present invention, and FIG. FIG. 16 (b) shows a first sheet punching step of punching the first sheet with a punch, and FIG. 16 (c) shows a second sheet punching step of punching the first sheet. FIG. 16D shows a second sheet punching step, FIG. 16E shows a third sheet preparing step, and FIG. 16F shows punching of all sheets. After finishing the lamination,
The sheet punching completion process of releasing the laminated plate material from the stripper is shown.

FIG. 17 is a process explanatory view showing an example of a method for manufacturing an industrial component having a high-aspect-ratio through-hole portion using a punch and a die according to the present invention, and FIG. FIG. 17B shows a first sheet punching step of punching the first sheet with a punch, and FIG. 17C shows a second sheet punching step of punching the first sheet with a thin plate-like material. 17 (d) shows a second sheet punching step, FIG. 17 (e) shows a third sheet preparing step, and FIG. 17 (f) shows punching of all sheets. After finishing the lamination,
The sheet punching completion process of releasing the laminated plate material from the stripper is shown.

FIG. 18 is a process explanatory diagram showing an example of a method for manufacturing an industrial component having a high-aspect-ratio through-hole portion using a punch and a die according to the present invention, and FIG. FIG. 18 (b) shows a first sheet punching step of punching the first sheet with a punch, and FIG. 18 (c) shows a second sheet punching step of punching the first sheet. FIG. 18D shows a second sheet punching step, FIG. 18E shows a third sheet preparing step, and FIG. 18F shows punching of all sheets. After finishing the lamination,
The sheet punching completion process of releasing the laminated plate material from the stripper is shown.

FIG. 19 is a cross-sectional view showing an example of a shim elevating mechanism used as a spacer according to the present invention.

FIG. 20 is a perspective view showing an extrapolation shim used in the method for manufacturing an industrial component whose steps are shown in FIGS. 16 (a) to 16 (f).

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Industrial parts, 2 ... Through-hole part, 3 ... Plate material, 4, 5 ...
Lifting shim, 6 extrapolating shim, 7 peeling jig, 8 vacuum suction, 9 vacuum break, 10, 30 punch, 11 stripper, 12 die, 13 plate material, 14 edge,
15: crack, 16: clearance, 17: parallel beam light, 18: condenser lens, 19: laser beam width, 20:
Focal length, 21: Counterbored part of die, 23: Workpiece receiving jig, 24: Vacuum suction hole, 31: Stepped part, 32: Lifting mechanism, 33: Servo motor, 34: Male screw, 35: Female screw, D: Penetration Hole diameter, H: height of step, L: axial length of through hole,
N: gap between through holes, W: wall, S: shortest distance.

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Kazumasa Kitamura 2-56, Suda-cho, Mizuho-ku, Nagoya, Aichi Prefecture Inside Nihon Insulators Co., Ltd. (72) Yoshinori Yamaguchi 2-56, Suda-cho, Mizuho-ku, Nagoya-shi, Aichi No. Japan Insulators Co., Ltd. F-term (reference) 3C060 AA11 BA01 BG01 BG17 BH01

Claims (13)

[Claims] 1. A method of manufacturing an industrial part having a high aspect ratio through-hole using a punch and a die, wherein the punch opens a first hole in a first plate-shaped material. One step, in a state where the punch is not extracted from the first hole,
A second step of bringing the first plate-shaped material into close contact with the stripper and pulling up the punch, so that the tip of the punch pulls in slightly from the lowermost portion of the first plate-shaped material pulled up; A third step, a fourth step of opening a second hole in a second plate-like material by the punch, and in a state in which the punch is not removed from the second hole,
A fifth step of pulling up the second plate-like material together with the first plate-like material; An industrial part having a high aspect ratio through-hole portion, comprising laminating a plurality of plate-like materials by repeating the fourth to sixth steps. Manufacturing method. 2. The high aspect ratio according to claim 1, wherein in the first step and the fourth step, a spacer is interposed between a die and a stripper when a hole is formed in the plate-like material with a punch. Of manufacturing an industrial part having a simple through-hole. 3. The thickness of the spacer is approximately 5 times greater than the sum of the thicknesses of the plate-like material existing between the die and the stripper.
The method for producing an industrial part having a high-aspect-ratio through-hole according to claim 2, wherein the thickness is from 15 to 15 μm. 4. After the desired number of plate materials are laminated by repeating the fourth to sixth steps, the work receiving jig is placed on the die while the laminated plate materials are being pulled up. 2. The method for manufacturing an industrial part having through holes having a high aspect ratio according to claim 1, comprising a step of inserting the laminated plate-like material onto the work receiving jig. 5. The method according to claim 5, wherein, between the second step and the third step, the tip of the punch slightly protrudes from the lowermost part of the first plate-like material pulled up, A step of removing the first hole of the plate-like material; and, between the fifth step and the sixth step, the tip of the punch is formed of the second plate-like material pulled up. And removing the second hole of the second plate-like material in a state where the second hole slightly protrudes from the lowermost portion. The method of manufacturing the part. 6. The high aspect according to claim 5, wherein said debris removal is performed by air blowing means for removing debris by a flow of compressed air, or by adhesive means for removing debris by adhering to an adhesive medium. A method for producing an industrial part having a comparatively through hole. 7. The height according to claim 1, wherein the dimensional accuracy of the through-hole formed in the industrial part is equivalent to the dimensional accuracy of the hole formed in one sheet of the plate-shaped material. A method for producing an industrial component having a through-hole having an aspect ratio. 8. The ratio of the diameter of the through hole or the shortest distance between the edge and the edge facing the hole to the axial length is approximately 1: 1 to 1:15.
The method for producing an industrial part having a high aspect ratio through-hole according to any one of claims 1 to 7. 9. The method according to claim 1, wherein a ratio between an interval between the through hole and an adjacent through hole and an axial length of the through hole is approximately 1: 1 to 1:15. A method for producing an industrial part having a high aspect ratio through-hole according to claim 1. 10. The method for producing an industrial part having a high aspect ratio through-hole according to claim 1, wherein the diameter of the through-hole is 100 μm or less. 11. The production of an industrial part having a high aspect ratio through-hole according to claim 1, wherein a distance between the through-hole and an adjacent through-hole is 100 μm or less. Method. 12. The method for manufacturing an industrial part having a high-aspect-ratio through-hole according to claim 1, wherein the plate-like material to which an adhesive is applied in advance is used. 13. The method according to claim 1, further comprising the step of sandwiching an adhesive sheet between the first plate-shaped material and the second plate-shaped material.
12. The method for producing an industrial component having a through-hole having a high aspect ratio according to any one of items 11 to 11.