JP2006068900A - Manufacturing method of industrial component having through hole with high aspect ratio - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To accurately and straightly bore a narrow and fine through hole with a diameter of 100 μm or less and a high aspect ratio in a soft material. <P>SOLUTION: A method of punching a metal mold for boring a hole on a platelike material 3 by means of a punch 10 and a die 12 includes steps of: boring the hole on the material 3 by the punch 10; then raising the material 3 in tight contact with a stripper 11 without drawing the punch 10 from the hole; returning the punch 10 drawn up from the die 12 from the bottom of the hole so that it is slightly retreated; similarly boring a hole on a next platelike material 3 by the punch 10; thereafter raising the material 3 without drawing the punch 10 from the hole in tight contact with a lower part of the former material 3; and returning the punch 10 drawn up from the die 12 from the bottom of the hole of the raised material 3 so that it is slightly retreated. The above steps are repeated to laminate a plurality of punched platelike materials 3 in a machine having the punch 10 and the die 12. A component is manufactured by this method. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a method for manufacturing industrial parts having high-aspect-ratio through-hole portions at high density, and more specifically, when a soft material that is deformed by handling after punching is used. The present invention relates to a method for manufacturing an industrial part, in which a large number of high-aspect-ratio through-hole parts are formed with a high accuracy equivalent to that when a hole is made in a thin plate material.

  The common requirements for all industrially produced products are cheaper, lighter, and smaller, especially in industrial products with many electronic circuits. There is a remarkable development in technology. In the development of wiring boards, electronic components are mounted on the circuit board. Small through-holes are precisely and accurately manufactured so that higher-density circuits can be formed while ensuring high reliability in consideration of the cooling effect. Need to be. In addition, in the ink discharge part of an ink jet printer, it is required that a small through-hole part is opened with high precision more than the wiring board. Is indispensable.

  Recently, the density has increased, and it is necessary to open more small through holes in a certain area of the material substrate, and the through holes are inevitably small and deep, in other words, the diameter of the through holes. Is small and has a long axial length, that is, a high aspect ratio, and it is required to form these through holes with high accuracy. In general, the aspect ratio is the ratio of the diameter to the axial length when the through-hole is cylindrical. When the through-hole is not cylindrical, the aspect ratio is from the edge to the opposite edge. The ratio of the shortest distance to the axial length. Here, the shortest distance from the edge to the opposite edge is the shortest distance S shown in FIGS. 5 (a) and 5 (b). That is, the high aspect ratio through-hole portion refers to an elongated hole having a long axial length compared to the diameter or the shortest distance of the holes.

  One conventional method for opening many small through-holes in such a plate-shaped material is hole processing using a punching die. This is a method of punching a plate-like material having a predetermined thickness as an industrial part at once using a punch and a die. This method has a problem that a thick plate-like material is to be punched from the beginning, and a large clearance, which is a gap between the punch and the die, is required, and accuracy is poor. Also, when punching, a greater shearing force is applied than with thin plate-like materials, and when the density of through-holes is large, a large number of holes are required in the die. Cannot be tolerated, deforms due to insufficient rigidity, and further breaks.

  3 (a) and 3 (b) are diagrams showing through-hole opening by a punching die. As shown in FIG. 3A, when the plate-like material 13 in which the punch 10 is placed on the die 12 is punched out with a clearance 16 that is a gap between the punch 10 and the die 12, generally, the punch 10 and the die 10 are punched. Cracks 15 occur from each of the 12 edges 14. The crack 15 occurs in the range of the clearance 16, and the accuracy of the through hole portion varies in the range of the clearance 16. As a result, in general, in the through hole opening method using a punching die, the cross-sectional shape of the through hole of the plate-like material after punching is a taper that expands in the punching direction as shown in FIG. It becomes a shape.

  According to the basic machining (I) issued by the Nikkan Kogyo Shimbun, the clearance 16 required for the punching die is 4 to 12% of the plate thickness in the case of a thin plate, and 18 to 26 of the plate thickness in the case of a thick plate. %, Which increases as the plate thickness increases. That is, as described above, the accuracy of the through-hole portion decreases with a thick plate-like material. Accordingly, the diameter dimension on the outlet side in the punching direction varies, and it is not suitable for a method of opening a small through-hole portion having a high aspect ratio at a high density.

  As a method for improving the hole processing by this punching die, there is a method in which a thin plate-like material is to be punched, and after punching, the plate-like material is moved and stacked to obtain an industrial part having a predetermined thickness. In this method, since the thickness of the material to be punched at one time is thin, the accuracy of the hole in one plate-shaped material for each punching is good, and the shearing force by the punch and die is small, so the density is high. A hole can be opened. However, there is a problem that a jig for moving the plate-like material and a space for stacking are necessary, and the number of processes increases, so that the production efficiency is lowered and the cost is increased. Further, guide pins are required for accurate stacking, and there is a waste of drilling holes other than necessary holes in industrial parts. Furthermore, in the case of a soft material that is deformed after being punched out, the holes are displaced during the movement and stacking, and the accuracy of the through-holes is reduced when stacking into industrial parts having a predetermined thickness. A problem arises, and it is also not suitable for a method of opening small through holes having a high aspect ratio at high density.

  As a conventional method, there is a laser drilling process that does not use a punching die. This is processing using a laser beam, in which the beam light is condensed by a lens and applied to a target material. In this laser processing, there is a fundamental problem that the through hole is tapered toward the traveling direction of the beam light due to the condensing method itself, which is the basic principle, and the accuracy is poor at a high aspect ratio. .

  4 (a) and 4 (b) are diagrams showing through-hole opening by laser processing. As shown in FIG. 4A, in the laser processing machine, the parallel beam light 17 passes through the condensing lens 18 and is condensed and processed at a position of the focal length 20. The laser beam width 19 becomes wider as the focus is shifted, and the diameter of the through-hole portion to be processed becomes larger. Therefore, the larger the plate thickness of the plate-like material, the larger the diameter of the through-hole portion that opens to the beam light traveling direction entrance side when the hole processing on the beam light traveling direction exit side is performed. As a result, a narrowed tapered through hole as shown in FIG. 4B is formed.

  In addition, since thermal energy is used in laser processing, the plate-like material to be processed is deformed by the influence of this heat, and a deteriorated layer is formed, which causes another problem that the diameter of the through hole portion varies. . Even in this problem, a thicker plate-like material requires a larger amount of laser beam, that is, heat energy. Therefore, the thicker the plate-like material, the lower the accuracy of the through hole portion. Therefore, it cannot be said that laser processing is also suitable as a method for opening small through-hole portions having a high aspect ratio at high density.

  As described above, the mounting technology in the industrial field, centering on electronic parts, has become higher in density, and in industrial parts that require fine through holes to be opened at high density, There is a method to safely and more accurately form through-holes with a higher aspect ratio so that they do not break even when soft materials with dimensions or shapes that cause deformation are used after processing. Although required, no appropriate method has been proposed.

  The present invention has been made in view of the above problems, and its object is to solve the problems of the prior art, and even when a soft material with a possibility of deformation is used, the diameter is For example, a fine through-hole part that is as thin as 100 μm or less and whose axial length is equal to or greater than a certain ratio compared to the diameter is almost straight with high accuracy equivalent to the precision of opening a hole in a thin sheet of material. In order to provide an industrial component of a predetermined thickness having a large number of high-aspect-ratio small through-holes, and in the mounting technology for industrial components mainly electronic equipment, This is to contribute to higher density.

  As a result of various investigations regarding the hole processing means for the plate-shaped material by the punching die and the manufacturing process, the present inventors have found that the hole is formed in the plate-shaped material by the punch in the die punching method using the punch and the die. After the punch is opened, the plate-shaped material is brought into close contact with the stripper without lifting the punch from the hole, and the punch lifted up from the die is returned so that it is slightly pulled from the bottom of the hole, and the next plate-shaped material In the same way, after opening the hole with a punch, the punch is lifted by sticking it so as to overlap the lower part of the previous plate material without removing the punch from the hole, The material is pulled back slightly from the bottom of the hole. By repeating this, it has been found that the above object can be achieved by a manufacturing method in which a plurality of plate-like materials having holes are laminated in a punch and die apparatus.

  That is, according to the present invention, there is provided a manufacturing method of an industrial part having a high aspect ratio through-hole portion using a punch and a die, wherein the first hole portion is formed in the first plate-like material by the punch. A first step of opening, a second step of pulling the first plate-like material in close contact with the stripper without pulling out the punch from the first hole, and a first plate lifted by the tip of the punch A third step in which the punch is pulled up to the extent that it is slightly pulled from the bottom of the sheet-like material, a fourth step in which a second hole is formed in the second plate-like material by the punch, and a punch from the second hole. The fifth step of bringing the second plate-like material into close contact with the first plate-like material and pulling it up without removing it, and the tip of the punch slightly pulls in from the bottom of the second plate-like material pulled up Including the sixth step of lifting the punch to the extent, and then multiple sheets The sheet material, method of manufacturing an industrial component having through holes with a high aspect ratio, which comprises laminating by adhering the fourth step repeated the sixth step is provided.

  In the first step and the fourth step, it is preferable that a spacer is interposed between the die and the stripper when the hole is formed in the plate-like material by punching. The thickness of the spacer is the sum of the thickness of the plate-like material existing between the die and the stripper, in other words, the thickness of the plate-like material already laminated on the punch and the die on which the hole is to be opened. It is preferable that the thickness is approximately 5 to 15 μm thicker than the total thickness of the plate-like materials placed on the plate.

  After repeating the fourth to sixth steps and laminating the desired number of plate-like materials, that is, when the plate-like material is punched and removed from the punching die, the laminated plate-like materials It is preferable that the workpiece receiving jig is inserted on the die and the laminated plate-like material is transferred onto the workpiece receiving jig in a state where the workpiece is pulled up.

  In the method for manufacturing an industrial part having a through-hole portion having a high aspect ratio according to the present invention, the tip of the punch is the top of the first plate-like material pulled up between the second step and the third step. In the state of slightly protruding from the lower part, between the step of removing the first hole of the first plate-like material, and between the fifth step and the sixth step, the tip of the punch, It is preferable that the method includes a step of removing waste from the second hole of the second plate-shaped material in a state where the second plate-shaped material is slightly protruded from the lowermost portion. The scrap removal can be performed by, for example, an air blowing unit that removes residue with a flow of compressed air, or an adhesion unit that adheres to an adhesive medium to remove residue.

In the present invention, it is possible to make the accuracy of the diameter of the through hole formed in the industrial part equal to the accuracy of the diameter of the hole formed in one plate-shaped material.
In the present invention, the through-hole portion having a high aspect ratio in which the diameter of the through-hole portion or the ratio of the shortest distance between the edge and the opposite edge to the axial length is approximately 1: 1 to 1:15. A high-aspect-ratio through-hole portion that can be formed and has a ratio of the interval between the through-hole portion and the adjacent through-hole portion and the axial length of the through-hole portion is approximately 1: 1 to 1:15 Can also be formed. Furthermore, it is possible to form a high aspect ratio through hole portion having a diameter of 100 μm or less, and a high aspect ratio through hole portion in which the distance between the through hole portion and the adjacent through hole portion is 100 μm or less. It is possible to form.

  In the present invention, the laminated plate materials may be bonded using a plate material to which an adhesive has been applied in advance, and an adhesive sheet is provided between the plate material and the plate material. It may be sandwiched and bonded. Furthermore, holes that can be vacuum-sucked are previously formed in the plate-like material, and the plate-like materials may be brought into close contact with each other by vacuum suction and stacked.

  According to the present invention, even when a soft material that can be deformed is used, the diameter is as small as 100 μm or less, and the fine through-hole has a shaft length that is equal to or greater than a certain ratio compared to the diameter. The effect is that it is possible to manufacture industrial parts with a high density of through-holes with a small and high aspect ratio, with the same accuracy as that for opening holes in a thin plate-like material. Is demonstrated. This manufacturing method makes it possible to manufacture a desired wiring board, a liquid discharge nozzle, and the like, contributing to an improvement in mounting technology for industrial products, and providing a more compact and convenient product.

Hereinafter, embodiments of the method for producing an industrial part having a through-hole portion having a high aspect ratio according to the present invention will be described in detail, but the present invention is not construed as being limited thereto. Various changes, modifications, and improvements can be made based on the knowledge of those skilled in the art without departing from the scope of the present invention.
In addition, in this specification, although a through-hole part and a hole part point out the same hole open | released from one surface of the plate-shaped material which has thickness to the opposite surface, for example, it is only called a hole part. In the case, a hole to be opened in a laminated sheet material is shown.

  In the present invention, the punch itself is used as an axis to be overlapped like a guide pin in the conventional method, and a great feature is that thin plate-like materials are laminated in a punch and die manufacturing apparatus. Also, when pulling up the punch so that the hole in each thin plate material that is individually opened does not deform, stop the pulling when the tip of the punch is slightly pulled from the bottom of the pulled plate material. There are also features.

FIG. 10 shows an example of a punching method using a punch and a die according to a conventional method. As long as the punch 10 moves through the hole of the stripper 11, a certain clearance is required between the punch 10 and the hole of the stripper 11, and therefore, between the central axis of the punch 10 and the central axis of the hole of the stripper 11. There is always a gap.
Conventionally, as shown in FIG. 10, the directions and sizes of the deviations a1, a2, and a3 between the center axis of the punch 10 and the center axis of the hole of the stripper 11 change every time they are punched, and each plate The positions of the holes of the material were different. Therefore, even if these are laminated to form a through hole portion, the hole portion has not been highly accurate.

According to the feature of the present invention, by laminating the plate-like material around the punch, the plate-like material plays a role of holding and fixing the punch, so that each time the punch is punched, the center axis of the punch and the center axis of the stripper hole The direction and size of the deviation is not changed. That is, in the punched hole of the plate-like material that has been pulled up, a force is applied in the range of elastic deformation in the direction in which the punch is tightened from the outer periphery (radial direction), so that the punch can be held. Therefore, it is possible to open a hole with higher accuracy in the plate-like material.
FIG. 11 is an explanatory view showing an example of a method for manufacturing an industrial part having a through-hole portion having a high aspect ratio according to the present invention, and shows a state in which the stripper 11 is pulled up after punching out the three sheets of plate-like material 3. Represents. Even in the case where the through-hole portion is opened in the three sheets of plate-like material 3 as in this example, the center axis of each punch 10 and the center axis of the hole of the stripper 11 are different from each other in direction and size. , A5, a6, but since the plate-like material 3 is laminated with the punch 10 as an axis, the deviations a4, a5, a6 change in the holes of the three-sheet plate-like material 3 respectively. There is nothing. Accordingly, the through-hole portion formed by overlapping the three sheets of the plate-like material 3 becomes more accurate. Further, as shown in FIG. 11, since the plate-like material 3 supports the punch 10 around the front end portion of the punch 10, it also has a function of preventing buckling of the front end portion of the punch 10.

As described above, when an industrial part having a predetermined thickness is used, in the conventional method, the accuracy of the through-hole portion decreases as the thickness increases, but in the present invention, the softness deforms due to handling after punching. Even when this material is used, it is possible to form high-aspect-ratio through-hole portions at high density with high accuracy equivalent to the accuracy in forming holes in a thin plate-like material.
The high-density, high-aspect-ratio through-holes required for electronic circuit wiring boards, printer ink ejection parts, etc. are the following through-holes shown in FIGS. 2 (a) and 2 (b). .
FIG. 2 shows an industrial part having a high aspect ratio through hole according to the present invention. FIG. 2A shows an example of the industrial component 1 having the through-hole portion 2 having a high aspect ratio, and FIG. 2B is an enlarged view of a part thereof. In the industrial component 1, an elongated through-hole portion having a ratio of the through-hole diameter D and the through-hole axial length L in FIG. 2B of approximately 1: 1 to 1:15 is formed. Is preferred. Further, in the industrial part 1, through-hole portions are formed at a high density so that the ratio of the through-hole interval N and the through-hole axial length L is about 1: 1 to 1:15. Is required. Both the through-hole diameter D and the through-hole interval N are about several tens of μm. The industrial component 1 is required to have a large number of such small through holes of 100 μm or less accurately formed at intervals of 100 μm or less. It can be realized by a manufacturing method.

  The through-hole portion with high accuracy means that the through-hole diameter D is substantially constant in all sections of the through-hole axial length L. In other words, it is a hole that passes straight through the thickness of the plate-like material, and if the cross section of the through-hole portion 2 is a circle, the through-hole portion 2 is a substantially cylindrical hole. The cross-sectional shape of the through-hole portion 2 is not necessarily a circle. For example, the cross-section shown in FIG. If the through-hole portions 2 are formed at a high density when the accuracy of the through-hole portions is low, the through-hole interval N is eliminated and two or more through-hole portions 2 are combined, or the through-hole interval N is small. Although the strength is insufficient and deformation such as bending or breakage of the wall portion W between the through-hole portion 2 and the through-hole portion 2 occurs, the reliability as the industrial component 1 is significantly impaired. According to the method for manufacturing an industrial component having a through-hole portion having a high aspect ratio, such a problem does not occur because the component can be manufactured with high shape accuracy even if the wall portion W is thin.

The soft material having a dimension or shape that causes deformation due to handling after punching, which is a target in the method for manufacturing an industrial part having a through-hole portion having a high aspect ratio according to the present invention, has a Young's modulus of, for example, 3000 kgf / A soft material of less than mm ² , polyethylene (Young's modulus 310 kgf / mm ² ), polyimide (Young's modulus 430 kgf / mm ² ), reinforced plastic (Young's modulus 2500 kgf / mm ² ), green sheet (Young's modulus 4 kgf / mm ² ) Etc. Moreover, even if the material has a Young's modulus of 3000 kgf / mm ² or more, all materials having dimensions or shapes that cause deformation due to handling after punching, such as an extremely thin plate-like metal, are all subject of the present invention. Can be.

Below, an example of the manufacturing method of the industrial component which has a through-hole part with a high aspect ratio based on this invention is demonstrated.
First, schematic steps of the manufacturing method will be described with reference to FIGS. 1 (a) to 1 (e).
The punching machine includes a punch 10, a die 12, and a stripper 11 as main devices. The thin plate material 3 is placed on the die 12 one by one and punched with the punch 10. The material, size, and thickness of the thin plate material 3 are not particularly limited, but for example, a green sheet having a thickness of 40 μm can be used.

  FIG. 1A shows a state in which the first thin plate-like material 3 is placed on the die 12 in preparation for punching. Next, as shown in FIG. 1B, the plate-like material 3 is punched out with a punch 10 for the first sheet. After that, the punching preparation for the second sheet shown in FIG. 1 (c) is started. However, as in the conventional method, the punched sheet material 3 of the first sheet is moved to another place and laminated. Instead, it is brought into close contact with the stripper 11 while being inserted into the punch 10 and moved upward. As a method of bringing the plate-like material 3 into close contact with the stripper 11, vacuum suction 8 may be performed from an intake port penetrating the stripper 11 as shown in FIG. It may be adhered to the stripper 11 by applying an adhesive or the like.

  In order to prepare for punching the second sheet, as shown in FIG. 1C, the punch 10 and the stripper 11 are pulled up from the die 12, and at this time, the punch 10 is pulled up together with one sheet. It is preferable not to return to the center of the hole of the plate material 3 of the eye. It is important to stop the plate-like material 3 when it is slightly pulled in from the lowermost part. Here, slightly pulling in means that the state is always at least not protruding. When the punch 10 is returned to the center of the hole of the plate-like material 3 or completely stored in the stripper 11, the hole is deformed in the plate-like material 3 using a soft material, and the plate-like material 3 The accuracy of the holes when the material 3 is laminated to make the industrial part 1 is lowered.

  As described above, the punch 10 itself is used as a stacking axis of the thin plate-like material 3 like a guide pin of the conventional method, and the thin plate-like material is prevented by preventing the deformation of the hole formed by the punch 10 itself. Thus, a jig for moving the plate-like material 3 and a stacking space are not required while taking the means for laminating the layers, and the number of manufacturing steps can be further reduced. Therefore, it is possible to manufacture the industrial component 1 having high-aspect-ratio through-hole portions made with the same high accuracy as the holes to be opened in one thin plate-like material 3 at a lower cost.

FIG.1 (d) shows the punching process of the plate-shaped material 3 of the 2nd sheet | seat. Next, the punching preparation as shown in FIG. 1C is performed, and this is repeated to sequentially laminate a plurality of plate-like materials 3 in the punching machine.
As shown in FIG. 1 (e), when the plate-like material 3 is punched for all sheets and the lamination is completed, the laminated plate-like material 3 is released from the stripper 11 to complete the punching.

Next, from FIG. 15 (a) to FIG. 15 (f), from the punching preparation step (FIG. 1 (a)) of the first sheet material 3 described above, the second sheet material 3 is obtained. The details up to the punching preparation step (FIG. 1C), that is, the details of punching the first sheet will be described.
FIG. 15A shows a state in which the thin sheet material 3 of the first sheet is placed on the die 12 as in FIG. Next, as shown in FIG. 15 (b), the stripper 11 is lowered and applied to the plate-like material 3 on the die 12. At this time, the punch 10 still remains in the stripper 11. When the stripper 11 is lowered, it is not preferable to punch the plate-like material 3 with the punch 10 before the stripper 11 hits the plate-like material 3 on the die 12. When the stripper 11 is lowered, the stripper 11 has a function of holding the punch 10 and pressing the plate material 3, but if the plate material 3 is not pressed, the flatness of the plate material 3 is deteriorated. This is because the punching is unstable and the punching cannot be performed with high accuracy. Further, deformation other than shearing of the plate-like material 3 generated at the time of punching, specifically, warping can be prevented by pressing with the stripper 11. If it is not prevented, it cannot be punched with high accuracy.

  Thereafter, as shown in FIG. 15 (c), in a state where the stripper 11 hits the plate-like material 3 on the die 12, the plate-like material 3 is punched with the punch 10, and the punch 10 is put into the die 12. Then, as shown in FIG. 15 (d), with the stripper 11 applied to the plate-like material 3 on the die 12, only the punch 10 is first pulled slightly from the lowermost part of the plate-like material 3. It is preferable not to raise the stripper 11 at the same time as the punch 10 is drawn or before the punch 10 is drawn. The state surrounded by the stripper 11, the die 12 and the punch 10 is a state in which the punched shape of the plate-like material 3 is ensured with high accuracy. Therefore, it is more accurate to lift the punch 10 while maintaining this arrangement. It is because it is not necessary to drop.

  And as shown in FIG.15 (e), the stripper 11 is pulled up with the plate-shaped material 3 inserted in the punch 10, and punching of the 1st sheet | seat is completed. FIG. 15 (f) shows the second sheet preparation step as in FIG. 1 (c).

  Next, using FIG. 16 (a) to FIG. 16 (f), FIG. 17 (a) to FIG. 17 (f), FIG. 18 (a) to FIG. 18 (f), and FIG. A method for performing punching with high accuracy even when used will be described. 16 (a) to 16 (f), FIG. 17 (a) to FIG. 17 (f), and FIG. 18 (a) to FIG. It is process explanatory drawing which shows an example of the manufacturing method of the industrial component which has a through-hole part with an aspect ratio, and represents the method of punching through a spacer between die | dye and strippers.

As described above, the hole can be opened with higher accuracy by repeating the punching process while laminating the plate-like material with the hole on the punch, but the plate-like material is soft and deformed. If an easy material is used, the accuracy of the hole may be reduced.
At the time of punching, the stripper hits the plate-like material on the die before the punch opens the hole, the plate-like material is sandwiched between the stripper and the die, the plate-like material that has already been drilled and laminated on the stripper And a compressive force is applied to the plate-like material placed on the die from which the hole is to be opened. At this time, when a material that is easily deformed by this compressive force is used, the plate-like material laminated on the stripper is crushed and deformed, but the punch serving as the lamination axis is fixed. Displacement may occur, and the shape accuracy of the already opened hole may be reduced. On the other hand, since the plate-like material placed on the die is punched with a punch in a state where the stripper hits and is crushed, the positional accuracy of the hole and the amount of elastic deformation that occurs after punching are reduced. Shape accuracy may be reduced.

  16A to 16F, FIGS. 17A to 17F, and FIGS. 18A to 18 in order to make a more accurate hole in a soft plate material. As shown in (f), it is preferable to perform punching through a spacer between the die and the stripper. By using the spacer, it is possible to prevent the stripper from directly hitting the plate material and applying a compressive force to the plate material.

FIG. 16A to FIG. 16F are diagrams illustrating a manufacturing process using the extrapolation shim 6 as a spacer, for example.
FIG. 16A shows a state in which the first thin plate-like material 3 is placed on the die 12 in preparation for punching. On the die 12, an extrapolation shim 6 having a shape as shown in FIG. 20, for example, is also placed. The thickness of the extrapolation shim 6 is preferably about 5 to 15 μm thicker than the thickness of the plate-like material 3 on the die 12. Next, as shown in FIG. 16 (b), the first sheet of plate-like material 3 is punched out with a punch 10. At this time, the stripper 11 does not directly hit the plate-like material 3 but hits the extrapolation shim 6 slightly thicker than the thickness of the plate-like material 3. Therefore, even if the plate-like material 3 is an extremely soft material, it is not deformed at the time of punching, and the hole formed in the plate-like material 3 by punching becomes highly accurate. Thereafter, the punching preparation for the second sheet shown in FIG. 16C is started, and the punched sheet material 3 of the first sheet is in close contact with the stripper 11 and moved upward. An extrapolation shim 6 is placed on the die 12. The thickness of the extrapolated shim 6 is approximately 5 to 5 based on the total thickness of the plate-like material 3 that has already been punched and pulled up while being inserted into the punch 10 and the plate-like material 3 placed on the die 12 to be punched from now on. It is preferable to increase the thickness by 15 μm.

  FIG. 16D shows a punching process of the second sheet material 3. Similarly to FIG. 16B of the first sheet, the stripper 11 does not directly hit the plate-like material 3 but hits the extrapolation shim 6 to prevent the plate-like material 3 from being deformed. Similarly, the holes formed in the plate-like material 3 are highly accurate. Next, in FIG. 16E, preparation for punching the third sheet is started. Similarly, on the die 12, the total of the thickness of the plate-like material 3 that has already been punched and pulled up while being inserted into the punch 10, and the thickness of the plate-like material 3 placed on the die 12 to be punched from now, is preferably approximately An extrapolated shim 6 having a thickness of 5 to 15 μm is placed to prevent the stripper 11 from directly hitting the plate-like material 3 at the time of punching. By repeating this, a plurality of plate-like materials 3 are sequentially laminated in a punching machine. As shown in FIG. 16 (f), when the plate-like material 3 is punched for all sheets and lamination is completed, the laminated plate-like material 3 is separated from the stripper 11 to complete the punching.

  As described above, the thickness of the extrapolation shim 6 placed on the die 12 when the plate-like material 3 is punched with the punch 10 is the thickness of the plate-like material 3 existing between the die 12 and the stripper 11. In other words, the sum of the thickness of the plate-like material 3 already punched and pulled up while being inserted into the punch 10 and the thickness of the plate-like material 3 placed on the die 12 to be punched from now on is always about 5 to 15 μm. The reason for increasing the thickness is to prevent the stripper 11 from crushing the plate-like material 3 due to variations in the thickness of the plate-like material 3 and deformation of the stripper 11 and the die 12 that occur during punching. Even if the thickness of the extrapolation shim 6 is thinner than the total thickness of the plate-like material 3 pulled up while being inserted into the punch 10 and the plate-like material 3 placed on the die 12, If the difference is generally less than 5 μm, the stripper 11 may crush the plate-like material 3, which is not preferable. On the other hand, when the difference is thicker than about 15 μm, the bending of the plate-like material 3 cannot be sufficiently suppressed, which is not preferable.

  As long as the above-mentioned conditions are met, the number of stacked layers of the plate-like material 3 increases, and each time the necessary extrapolation shim 6 becomes thicker, it may be replaced with extrapolation shims with different thicknesses prepared for each, Also, extrapolation shims may be stacked.

  The spacer having the extrapolation shim 6 as an example is present between the die and the stripper at the time of punching, and can prevent the stripper from directly hitting the plate-like material and applying a compressive force to the plate-like material, The thickness may be approximately 5 to 15 μm thicker than the total thickness of the plate-like material that has been punched and pulled up while being inserted into the punch, and the plate-like material placed on the die to be punched. The shape is not limited.

  For example, in the case of the extrapolation shim 6 described above, a plurality of square bars or flat plates sandwiching the plate-like material 3 may be used, or thin cylinders or prisms placed at the four corners of the plate-like material 3 may be used. However, since it is easy to process into the same thickness (height) and it is easier to suppress the inclination of the die 12 and the stripper 11, a frame shape as shown in FIG. 20 is preferable.

As another example of the spacer, a manufacturing process using a lifting shim is shown in FIGS. 17 (a) to 17 (f).
The lift shim 5 shown in FIGS. 17A to 17F moves up and down in the die 12 to adjust the height protruding from the upper surface of the die 12, and when the punch 10 is punched, the die 12 and the stripper A space is formed between the stripper 11 and the stripper 11 directly hits the plate-like material 3 to prevent a compression force from being applied to the plate-like material 3.

  FIG. 17A shows a state in which the first thin plate material 3 is placed on the die 12 in preparation for punching. At this time, the elevating shim 5 is moved upward from the upper surface of the die 12 so as to protrude approximately 5 to 15 μm higher than the thickness of the plate-like material 3 on the die 12. Next, as shown in FIG. 17B, the first sheet of plate-like material 3 is punched out with a punch 10. At this time, the stripper 11 does not directly contact the plate-like material 3 but hits the lifting shim 5 slightly protruding from the thickness of the plate-like material 3. Therefore, even if the plate-like material 3 is an extremely soft material, it is not deformed at the time of punching, and the hole formed in the plate-like material 3 by punching becomes highly accurate. After that, the punching preparation for the second sheet shown in FIG. 17C is started, and the punched sheet material 3 of the first sheet is in close contact with the stripper 11 and moved upward. The height of the elevating shim 5 protruding from the upper surface of the die 12 is the thickness of the plate-like material 3 that has already been punched and pulled up while being inserted into the punch 10 and the thickness of the plate-like material 3 placed on the die 12 to be punched from now on. It is adjusted to protrude approximately 5 to 15 μm higher than the total.

  FIG. 17D shows a punching process of the second sheet-shaped material 3. Similarly to FIG. 17B of the first sheet, the stripper 11 does not directly hit the plate-like material 3 but hits the lifting shim 5 to prevent the plate-like material 3 from being deformed. Similarly, the holes formed in the plate-like material 3 are highly accurate. Next, in FIG. 17E, preparation for punching the third sheet is started. Similarly, the plate-like material 3 that has already been punched and pulled up while being inserted into the punch 10 and the thickness of the plate-like material 3 placed on the die 12 to be punched will protrude approximately 5 to 15 μm. The height of the lifting shim 5 protruding from the upper surface of the die 12 is adjusted to prevent the stripper 11 from directly hitting the plate-like material 3 at the time of punching. By repeating this, a plurality of plate-like materials 3 are sequentially laminated in a punching machine. As shown in FIG. 17 (f), when the plate-like material 3 is punched out for all sheets and the lamination is completed, the laminated plate-like material 3 is separated from the stripper 11 to complete the punching.

  As described above, the shape of the spacer is not limited. Accordingly, when this lifting shim 5 is used as a spacer, although not shown, the horizontal cross-sectional shape of the lifting shim 5 may be, for example, an elongated shape sandwiching the plate-like material 3. A circular shape or a rectangular shape placed outside the four corners may be used, or a frame shape surrounding the plate-like material 3 may be used.

The lifting shims used as the spacers are not limited to the lifting shims 5 that move up and down in the die 12 as shown in FIGS. 17 (a) to 17 (f), but are shown in FIGS. 18 (a) to 18 (f). As shown, it may be a lifting shim 4 that moves up and down in the stripper 11. The manufacturing process using the raising / lowering shim 4 is shown to Fig.18 (a)-FIG.18 (f).
The lift shim 4 shown in FIGS. 18 (a) to 18 (f) moves up and down in the stripper 11, adjusts the length protruding from the lower surface of the stripper 11, and dies 12 and strippers when punching the punch 10. A space is formed between the stripper 11 and the stripper 11 directly hits the plate-like material 3 to prevent a compression force from being applied to the plate-like material 3.
The role of the lifting shim 4 as a spacer and the details of the manufacturing process are the same as the manufacturing process using the lifting shim 5 shown in FIGS. 17A to 17F described above. Description of is omitted.

  In general, in a punching machine, the lower die with a die has a smaller number of parts than the upper die, and it is easy to secure a space for installing a lifting shim and a lifting mechanism for moving the shim up and down. Therefore, the lifting shim 5 is easier to adopt than the lifting shim 4. Further, when comparing the raising and lowering shims 4 and 5 with the extrapolation shim 6 shown in FIGS. 16A to 16F, it is required when the initial cost and the thickness of the plate material are changed. The extrapolation shim 6 is advantageous in remodeling costs, but the up-and-down shims 4 and 5 that can be automated are superior in that the processing speed is faster, the throughput is improved, and the cost of industrial parts to be manufactured is reduced. is there.

  An example of an elevating mechanism that moves the shim up and down is shown in FIG. FIG. 19 is an explanatory view showing an elevating mechanism 32 attached to an elevating shim 5 that moves up and down in the die 12. The rotary motion generated by the high-precision servomotor 33 is rotated by, for example, the servomotor 33. By a mechanism comprising a male screw 34 and a female screw 35 meshing with the male screw 34, it is possible to convert it into a linear motion and to move the elevating shim 5 up and down with high accuracy.

Next, with reference to FIG. 9A to FIG. 9C, a scrap removal process for preventing clogging of the hole formed in the plate-like material will be described.
FIG. 9A shows a preparatory state before punching in which the plate-like material 3 is placed on the die 12. Then, as shown in FIG. 9 (b), the plate-like material 3 is punched with a punch 10. At this time, a residue is generated from the hole of the plate-like material formed by punching. Most of the residue falls off into the counterbore portion 21 of the die, but a part of the residue adheres to the punch 10 and is pulled upward. If the residue pulled up above adheres to the plate-like material 3, it leads to a punched product defect. Therefore, as shown in FIG. 9C, the stripper 11 is pulled up together with the plate-shaped material 3, and the residue is removed in a state where the tip portion of the punch 10 slightly protrudes a7 from the lower surface of the pulled-up plate-shaped material 3. . Here, the state of slightly protruding means that the state is always at least not drawn.

  Since the punch 10 is not extracted in the hole of the plate-shaped material 3 formed by punching, the residue does not enter the hole of the plate-shaped material 3 and remains in the state of FIG. It is sufficient to remove the residue adhering to the die 12 or the punch 10 or the lower surface of the plate-like material 3. In addition to easy removal of residue, the residue does not remain in the hole of the plate-like material 3 and the yield is further improved.

  In the conventional manufacturing method, after the plate material is punched, it is not brought into close contact with the stripper and the plate material is not pulled up. Therefore, the lower side of the plate material remaining on the die, that is, the counterbore portion of the die. From the side, the residue is removed so as not to remain in the hole of the plate-like material by sucking in vacuum, blown by air pressure, or adhering to the adhesive medium.

  However, in the case of a punching machine with a large punch pitch in which the diameter of the punching tip portion of the punch 10 is large and the space between the punches can be widened as shown in FIG. Since there is sufficient space in the counterbore part 21, the above-mentioned scrap removal can be performed, but the punch 10 has a narrower punch tip diameter and a narrow punch-to-punch punching with a small punch pitch. With a processing machine, it has been difficult to remove the residue as described above.

  In recent years, a punching machine whose punching process is shown in FIG. 8 is often used while the density of through-holes is increasing. In such a punching machine, the diameter is particularly small at the tip portion a8 of the punch 10, and the length of the tip portion a8 is made as short as possible to prevent buckling of the tip portion a8. In order to remove the punching residue, the punch 10 needs to protrude into the counterbore part 21 of the die, so that the thickness b of the upper surface of the counterbore part 21 of the die is reduced and the strength of the die 12 is further reduced. . In addition, since the punch pitch is small, the shearing force of the punch 10 becomes larger, so the load on the die 12 becomes larger. Therefore, reinforcement of the die 12 such as providing ribs on the counterbore portion 21 of the die is performed for the purpose of improving the strength of the die 12, but such reinforcement complicates the structure of the die 12 and removes residue. Difficult to carry out work. As a result, residue removal becomes insufficient, residue is left in the hole of the plate-like material 3, and the yield is reduced.

In the present invention, since scrap removal can be performed from above the die 12, scrap removal can be easily performed without being affected by the structure of the die 12. Further, since the plate-like material 3 is not extracted from the punch until punching and lamination are completed, it is unlikely that debris enters the hole of the plate-like material 3.
The waste removing means in the present invention may be the same as the conventional method. What is necessary is just to select suitably, such as blow by the compressed air from which an installation becomes simpler, or adhesion by an adhesive medium.

Next, a method of removing the laminated plate material from the stripper will be described.
First, as shown in FIG. 1 (e), the method of removing the laminated plate-like material 3 from the stripper 11 is, for example, by stopping the vacuum suction that was pulling up the plate-like material 3 and performing the vacuum break 9 to remove the peeling material. The tool 7 may be mechanically removed. At this time, the plate-like material 3 removed from the punch 10 and the stripper 11 is not placed on the die 12 and then taken out. For example, a workpiece receiving jig is inserted on the die and the laminated plate-like material 3 is received by the workpiece. If it is transferred onto a jig and transferred to the next process, production efficiency is further improved, which is preferable. When the plate-like material is soft, deformation is less likely to occur, which is preferable.

  12 (a) to 12 (c) are explanatory diagrams of a process of transferring the laminated plate-like material onto the workpiece receiving jig, and punching and laminating the three-sheet plate-like material, and then punching And an example of removal from the stripper. When the stripper 11 is pulled up while the plate-like material 3 that has been punched and laminated as shown in FIG. 12A is in close contact, the workpiece receiving jig 23 is moved as shown in FIG. As shown in FIG. 12 (c), the plate material 3 and the punch 10 are pulled apart and the plate material 3 is pulled up by inserting it onto the die 12 and causing the stripper 11 to pull up the punch 10. The vacuum suction 8 is stopped, the vacuum break 9 is performed, the plate-like material 3 laminated mechanically from the stripper 11 with the peeling jig 7 is removed and transferred onto the workpiece receiving jig 23.

  When the plate-like material 3 is laminated to make the industrial part 1, it is necessary to bond the plate-like materials 3 to each other. The method is to apply an adhesive to the surface of each plate-like material 3 in advance. The adhesive sheet may be sandwiched between the plate-like material 3 and the plate-like material 3. When an adhesive sheet is used, the number of punching steps increases, and therefore it is preferable to use a plate-like material 3 whose surface has adhesiveness in advance.

Alternatively, holes that can be vacuum-sucked may be previously formed in the plate-shaped material, and the plate-shaped materials may be brought into close contact with each other by vacuum suction and stacked. FIG. 13A to FIG. 13F show installation examples of vacuum suction holes opened in the plate material when the plate material is laminated by vacuum suction.
FIG. 13A shows an example of a vacuum suction hole 24 arranged in the stripper 11, and FIG. 13B shows an example of a vacuum suction hole 24 arranged in the first sheet material 3. First, when stacked, the first sheet-like material 3 is vacuum-sucked and brought into close contact with the stripper 11 through a vacuum suction hole 24 that is shown in FIG. 13A and not shown in FIG. 13B. Next, for example, a vacuum suction hole 24 as shown in FIG. 13C is arranged in the second sheet-shaped material 3. Through the vacuum suction hole 24 which is shown in FIG. 13B and not shown in FIG. 13C, the second plate-like material 3 is vacuum-sucked and brought into close contact with the first sheet-like material 3. Similarly, FIG. 13D shows a vacuum suction hole 24 arranged in the third sheet of plate-like material 3, and FIG. 13E shows a vacuum suction arranged in the fourth sheet of plate-like material 3. The service hole 24 is shown. As shown in FIG. 13 (f), the vacuum suction hole 24 is not necessary for the last plate-like material 3 of the fifth sheet without the plate-like material to be laminated next.

The location for placing the vacuum suction holes is not limited, but the plate-like material is pulled up by suction force, so the vacuum suction holes are on the four sides of each plate-like material except for the last plate-like material that does not require a vacuum suction hole. It is preferable to arrange them evenly.
Normally, all vacuum suction is performed with a single vacuum device. In this case, except when vacuuming the last plate-like material, an open vacuum suction hole exists, so that Vacuum pressure does not hit. As a countermeasure against this, it is possible to secure the vacuum pressure by determining the place where vacuum suction is performed for each sheet and separating the piping lines and providing a control valve in the path. Even if it is formed, a suction force enough to pull up the plate-like material can be exhibited.

  As another method of laminating the plate-like material, a method is adopted in which the surface finish of the punch is roughened, the frictional force generated between the punch and the plate-like material is increased, and the plate-like material is held on the punch by this frictional force. It is also preferable to use it. As a result of the plate-like material being held by the punch, the plate-like materials that are sequentially punched are stacked in close contact with the stripper. Generally, the punched hole is elastically deformed so that the punch tightening direction, that is, the diameter of the hole becomes small due to internal stress generated in the punching process. In particular, the amount of deformation increases as the elasticity increases. Therefore, the plate-like material can be held on the punch only by roughening the surface finish of the punch.

  When a highly elastic material is used for the plate-like material, in order to hold the plate-like material on the punch more reliably, use a punch 30 having a bamboo-like step 31 on the surface as shown in FIG. Is also preferable. The plate-like material goes over the step portion 31 without being plastically deformed at the moment of being punched by the punch 30 and is laminated in order. If the step height H of the punch 30 is made equal to the thickness of the plate-like material, they can be stacked in close contact, and the plate-like material will not fall out of the punch 30 because it is caught by the step portion 31 by elastic deformation. .

As mentioned above, although the detail was demonstrated about the manufacturing method of the industrial component which has a through-hole part with a high aspect ratio, according to this invention, the following highly accurate punching process is implement | achieved.
For example, when a hole is opened in a green sheet having a thickness of 50 μm, which is a plate-like material, so that the diameter D of the through hole as an industrial part is 98 μm and the interval N between the through holes is 50 μm. The clearance between the punch and the die in the plate-like material may be about 2 μm as 4% of the plate thickness. At this time, the ratio of the hole diameter to the hole axial length, that is, the aspect ratio of one plate-like material is approximately 2: 1, and the ratio of the hole interval to the hole axial length is 1: 1. If an industrial part is obtained by laminating 12 sheets of this plate-like material, the thickness becomes 0.6 mm, and the ratio of the through hole diameter D and the through hole axial length L as an industrial part, that is, the aspect The ratio is approximately 1: 6, and the ratio between the through-hole interval N and the through-hole axial length L is 1:12. Such a through-hole portion having a high aspect ratio can be provided with a clearance in one plate-like material, in other words, with a precision within 4 μm as the through-hole portion diameter D.

Next, the present invention will be described with reference to examples to confirm the effects.
(Example)
Using a punch and die punching machine, a green sheet with a Young's modulus of 4 kgf / mm ² is used as a material, a through hole with a diameter of 80 μm and an axial length of 0.8 mm, and a distance between adjacent through holes of 70 μm. A wiring board formed to have the density as described above was produced.
At this time, the thickness of one green sheet was 40 μm, and 20 sheets were stacked with a punch as a stacking axis. When the diameter of the through-hole part of the obtained wiring board was measured, it was 80 micrometers on the surface side of the board | substrate, and was 80-83 micrometers on the back surface side of the board | substrate. Further, when the front and back surfaces of the substrate were observed with an optical microscope, no cracks or the like were observed.

(Comparative Example 1)
A wiring board was produced in the same manner as in the example except that the thickness of one green sheet was 0.8 mm and only one green sheet that was not laminated was used. When the diameter of the through-hole part of the obtained wiring board was measured, it was 80 micrometers on the surface side of the board | substrate, and was 115-130 micrometers on the back surface side of the board | substrate. When the front and back surfaces of the substrate were observed with an optical microscope, the distortion of the holes was confirmed, and through holes with cracks at the edges of the holes were observed.

(Comparative Example 2)
Using a laser processing machine, a green sheet having a Young's modulus of 4 kgf / mm ² was used as a material, and a wiring board having the same through-hole portion as in the example was produced. Only one green sheet was used as in Comparative Example 1, and the thickness was 0.8 mm. When the diameter of the through-hole part of the obtained wiring board was measured, it was 80 micrometers on the surface side of the board | substrate, and was 40-69 micrometers on the back surface side of the board | substrate. When the front and back surfaces of the substrate were observed with an optical microscope, hole distortion was confirmed, and the roundness decreased and burrs and chips were generated at the edge of the hole.

  As described above, according to the present invention, it is possible to manufacture an industrial part in which a small through-hole portion having a high aspect ratio is formed at a high density and with high accuracy that cannot be obtained by a conventional method without causing deformation or cracking. .

  As described above, according to the present invention, even when a soft material with a possibility of deformation is used, the diameter is extremely small as 100 μm or less, and the axial length is more than a certain ratio compared to the diameter. A method for manufacturing industrial parts in which fine through holes, that is, through holes having a small and high aspect ratio, are provided at high density with the same accuracy as that for opening a hole in a thin plate material. Can be provided. The manufacturing method that can manufacture industrial parts with through-holes with a high aspect ratio can be expected to improve the mounting technology of industrial products, making it possible to manufacture more compact and convenient products. It is a high degree method.

It is process explanatory drawing which shows an example of the manufacturing method of the industrial component which has a through-hole part with a high aspect ratio using a punch and die | dye based on this invention, Fig.1 (a) is a 1st sheet | seat on die | dye. FIG. 1B shows a first sheet punching process in which the first sheet is punched by punching, and FIG. 1C shows a second sheet preparing process. FIG. 1 (d) shows the second sheet punching process, and FIG. 1 (e) shows the completion of sheet punching after all the sheets have been punched and laminated, and the laminated plate material is released from the stripper. A process is shown. FIG. 2A is a perspective view showing an example of an industrial part having a high aspect ratio through-hole portion according to the present invention. FIG. FIG. 2B is an enlarged view of the through-hole portion having a high aspect ratio in FIG. It is a figure which shows the through-hole part opening by the punching die which concerns on the conventional method, FIG. 3 (a) is a schematic diagram which shows the generation | occurrence | production state of a crack, FIG.3 (b) is the plate-shaped material after punching. It is explanatory drawing which shows the cross-sectional shape of a through-hole part. FIG. 4 (a) is a schematic view showing a state of processing by a laser beam, and FIG. 4 (b) is a cross-sectional shape of the through-hole portion after laser processing. It is explanatory drawing which shows. FIG. 5 (a) is an illustration showing an example of the shortest distance of a through-hole part, and FIG. 5 (b) is an illustration showing an industrial part having a high-aspect ratio through-hole part according to the present invention. It is explanatory drawing which shows another example of the shortest distance of a hole. It is explanatory drawing which shows an example of the cross-sectional shape of the through-hole part with a high aspect ratio based on this invention. It is process explanatory drawing which shows an example of the punching method using the punch and die | dye concerning a conventional method. It is process explanatory drawing which shows another example of the punching method using the punch and die | dye concerning a conventional method. FIG. 9A is a process explanatory view showing an example of a method for manufacturing an industrial part having a high aspect ratio through-hole portion using a punch and a die according to the present invention, and FIG. 9 (b) shows a punching process for punching a plate-shaped material with a punch, and FIG. 9 (c) shows a scraping process for removing the scrap by pulling up the stripper together with the plate-shaped material. Indicates. It is explanatory drawing which shows an example of the punching method using the punch and die | dye concerning a conventional method. It is explanatory drawing which shows an example of the manufacturing method of the industrial component which has a high aspect ratio through-hole part using a punch and die | dye based on this invention. It is process explanatory drawing which shows an example of the manufacturing method of the industrial component which has a through-hole part with a high aspect ratio using a punch and die | dye based on this invention, Fig.12 (a) is desired all n (n = 3) A sheet punching completion step A in which the sheet-like material of the sheet is punched and stacked and the stripper is pulled up is shown. FIG. 12B shows the sheet punching completion in which the workpiece receiving jig is inserted on the die. Step B is shown, and FIG. 12C shows a sheet punching completion step C in which the laminated plate material is separated from the stripper and transferred onto the work receiving jig. It is explanatory drawing which shows an example of the manufacturing method of the industrial component which has a high aspect ratio through-hole part using a punch and die | dye based on this invention, Fig.13 (a) is for vacuum suction arrange | positioned at a stripper 13 (b) shows a vacuum suction hole arranged in the first sheet of plate material, and FIG. 13 (c) shows a vacuum suction hole arranged in the second sheet of plate material. FIG. 13 (d) shows a vacuum suction hole arranged in the third sheet of plate material, FIG. 13 (e) shows a vacuum suction hole arranged in the fourth sheet of plate material, FIG. 13 (f) shows a vacuum suction hole (no hole) arranged in the plate material of the fifth sheet (last). It is a side view which shows one Example of the punch used for the manufacturing method of the industrial component which has a through-hole part with a high aspect ratio which concerns on this invention. FIG. 15A is a detailed process explanatory view showing an example of a method for producing an industrial part having a high aspect ratio through-hole portion using a punch and a die according to the present invention, and FIG. FIG. 15 (b) shows the first sheet preparation process on which a thin plate-like material is placed, and FIG. 15 (b) shows the state where the stripper is lowered and applied to the plate-like material on the die in the first sheet punching process. 15 (c) shows a state in which the punch is punched into the die in the first sheet punching step, and FIG. 15 (d) shows the stripper applied to the plate-like material on the die in the first sheet punching step. Fig. 15 (e) shows a state in which the punch is pulled up slightly from the lowermost portion of the plate material, and Fig. 15 (e) shows a state in which the stripper is pulled up in the first sheet punching process. The 2nd sheet preparatory process is shown. It is process explanatory drawing which shows an example of the manufacturing method of the industrial component which has a through-hole part with a high aspect ratio using a punch and die | dye based on this invention, Fig.16 (a) is a 1st sheet | seat on die | dye. FIG. 16B shows a first sheet punching process in which the first sheet is punched by punching, and FIG. 16C shows a second sheet preparing process. 16 (d) shows the second sheet punching step, FIG. 16 (e) shows the third sheet preparation step, and FIG. 16 (f) shows the punching and lamination of all the sheets. The sheet punching completion process for releasing the laminated plate material from the stripper will be described. It is process explanatory drawing which shows an example of the manufacturing method of the industrial component which has a through-hole part with a high aspect ratio using a punch and die | dye based on this invention, Fig.17 (a) is a 1st sheet | seat on die | dye. FIG. 17B shows a first sheet punching process in which the first sheet is punched by punching, and FIG. 17C shows a second sheet preparing process. 17 (d) shows the second sheet punching process, FIG. 17 (e) shows the third sheet preparation process, and FIG. 17 (f) finishes punching and stacking of all sheets. The sheet punching completion process for releasing the laminated plate material from the stripper will be described. It is process explanatory drawing which shows an example of the manufacturing method of the industrial component which has a through-hole part with a high aspect ratio using a punch and die | dye based on this invention, Fig.18 (a) is a 1st sheet | seat on die | dye. FIG. 18B shows a first sheet punching process in which the first sheet is punched and FIG. 18C shows a second sheet preparing process. 18 (d) shows the second sheet punching step, FIG. 18 (e) shows the third sheet preparation step, and FIG. 18 (f) shows the punching and lamination of all the sheets. The sheet punching completion process for releasing the laminated plate material from the stripper will be described. It is sectional drawing which shows an example of the raising / lowering mechanism of the shim used as a spacer which concerns on this invention. It is a perspective view which shows the extrapolation shim used with the manufacturing method of the industrial components for which a process is shown by Fig.16 (a)-FIG.16 (f).

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Industrial part, 2 ... Through-hole part, 3 ... Plate-like material, 4 ... 5 Lifting shim, 6 ... Extrapolation shim, 7 ... Stripping jig | tool, 8 ... Vacuum suction, 9 ... Vacuum breakage, 10, 30 DESCRIPTION OF SYMBOLS ... Punch, 11 ... Stripper, 12 ... Die, 13 ... Plate-like material, 14 ... Edge, 15 ... Crack, 16 ... Clearance, 17 ... Parallel beam, 18 ... Condensing lens, 19 ... Laser beam width, 20 ... Focus Distance, 21 ... Counterbore part of die, 23 ... Work receiving jig, 24 ... Hole for vacuum suction, 31 ... Stepped part, 32 ... Lifting mechanism, 33 ... Servo motor, 34 ... Male screw, 35 ... Female screw, D ... Through hole Part diameter, H: Step height, L: Through hole axial length, N: Through hole interval, W: Wall part, S: Shortest distance.

Claims (13)

A method of manufacturing an industrial part having a high aspect ratio through-hole using a punch and a die,
A first step of opening a first hole in the first plate-like material by the punch;
A second step in which the first plate-shaped material is brought into close contact with a stripper and pulled out without removing the punch from the first hole;
A third step of pulling up the punch to such an extent that the tip of the punch is pulled slightly from the bottom of the first plate-like material pulled up;
A fourth step of opening a second hole in the second plate-like material by the punch;
A fifth step of pulling up the second plate-like material together with the first plate-like material in a state where the punch is not removed from the second hole portion;
A sixth step of pulling up the punch to the extent that the tip of the punch is pulled slightly from the bottom of the second plate-like material pulled up;
Thereafter, a method for producing an industrial part having a through hole with a high aspect ratio, wherein a plurality of plate-like materials are laminated by repeating the fourth to sixth steps.   In the first step and the fourth step, the high aspect ratio through-hole portion according to claim 1, wherein a spacer is interposed between the die and the stripper when the hole portion is opened in the plate-shaped material with a punch. A method for manufacturing industrial parts.   The industrial part having a high aspect ratio through-hole according to claim 2, wherein the thickness of the spacer is approximately 5 to 15 µm thicker than the total thickness of the plate-like materials existing between the die and the stripper. Production method. After repeating the fourth step to the sixth step and laminating a desired number of plate-like materials,
2. The method according to claim 1, further comprising a step of inserting a workpiece receiving jig onto a die and transferring the laminated plate-like material onto the workpiece receiving jig in a state where the laminated plate-like material is pulled up. The manufacturing method of the industrial component which has a through-hole part with the high aspect ratio of description. Between the second step and the third step, in the state where the tip of the punch slightly protrudes from the lowermost part of the pulled up first plate-like material, A step of removing waste from one hole,
And, between the fifth step and the sixth step, the second plate-like material is in a state where the tip of the punch slightly protrudes from the lowermost part of the raised second plate-like material. The method of manufacturing the industrial component which has a through-hole part with a high aspect ratio of Claim 1 including the process of removing the residue of said 2nd hole part.   The high-aspect-ratio through-hole portion according to claim 5, wherein the debris removal is performed by an air blowing unit that removes debris by a flow of compressed air, or by an adhesive unit that adheres to an adhesive medium and removes debris. A method for producing an industrial part having   The high-aspect-ratio through-hole according to claim 1, wherein the accuracy of the size of the through-hole portion opened in the industrial part is equivalent to the accuracy of the size of the hole portion opened in the sheet material. Of manufacturing industrial parts having parts.   The high aspect ratio according to any one of claims 1 to 7, wherein a ratio of the shortest distance between the diameter of the through-hole portion or the edge facing the edge and the axial length is approximately 1: 1 to 1:15. The manufacturing method of the industrial component which has a specific through-hole part.   The ratio between the interval between the through-hole portion and the adjacent through-hole portion and the axial length of the through-hole portion is approximately 1: 1 to 1:15, according to any one of claims 1 to 8. A method for producing industrial parts having through-holes with a high aspect ratio.   The diameter of the said through-hole part is 100 micrometers or less, The manufacturing method of the industrial components which have a high aspect-ratio through-hole part as described in any one of Claims 1-9.   The method for producing an industrial part having a high aspect ratio through-hole part according to any one of claims 1 to 10, wherein an interval between the through-hole part and an adjacent through-hole part is 100 µm or less.   The manufacturing method of the industrial component which has a high aspect-ratio through-hole part as described in any one of Claims 1-11 using the said plate-shaped material to which the adhesive agent is apply | coated previously.   The industry having a through-hole portion having a high aspect ratio according to any one of claims 1 to 11, further comprising a step of sandwiching an adhesive sheet between the first plate-like material and the second plate-like material. Method of manufacturing parts.

Images