JP2002153729A5 - - Google Patents
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- Publication number
- JP2002153729A5 JP2002153729A5 JP2000350855A JP2000350855A JP2002153729A5 JP 2002153729 A5 JP2002153729 A5 JP 2002153729A5 JP 2000350855 A JP2000350855 A JP 2000350855A JP 2000350855 A JP2000350855 A JP 2000350855A JP 2002153729 A5 JP2002153729 A5 JP 2002153729A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000350855A JP4558176B2 (ja) | 2000-11-17 | 2000-11-17 | ハロゲン含有ガス処理方法及び処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000350855A JP4558176B2 (ja) | 2000-11-17 | 2000-11-17 | ハロゲン含有ガス処理方法及び処理装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002153729A JP2002153729A (ja) | 2002-05-28 |
| JP2002153729A5 true JP2002153729A5 (de) | 2007-01-11 |
| JP4558176B2 JP4558176B2 (ja) | 2010-10-06 |
Family
ID=18824011
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000350855A Expired - Fee Related JP4558176B2 (ja) | 2000-11-17 | 2000-11-17 | ハロゲン含有ガス処理方法及び処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4558176B2 (de) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1913956A (zh) * | 2004-01-29 | 2007-02-14 | 大阳日酸株式会社 | 废气处理方法以及废气处理装置 |
| GB0416385D0 (en) * | 2004-07-22 | 2004-08-25 | Boc Group Plc | Gas abatement |
| JP2007021290A (ja) * | 2005-07-12 | 2007-02-01 | Taiyo Nippon Sanso Corp | 排ガスの処理方法および処理装置 |
| JP2012213720A (ja) * | 2011-03-31 | 2012-11-08 | Azbil Corp | ガス処理装置 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63291624A (ja) * | 1987-05-23 | 1988-11-29 | Showa Denko Kk | ガリウム・ヒ素ウェハ−のドライエッチング排ガスの処理方法 |
| JPH09206555A (ja) * | 1996-01-31 | 1997-08-12 | Takuma Co Ltd | 有機ハロゲン化合物の処理方法および処理装置 |
| JPH11156156A (ja) * | 1997-11-27 | 1999-06-15 | Seiko Epson Corp | ハロゲン系ガスの処理方法、処理装置および反応処理装置並びに半導体装置 |
| JP2000009037A (ja) * | 1998-06-18 | 2000-01-11 | Fujitsu Ltd | 排気装置及び排気方法 |
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2000
- 2000-11-17 JP JP2000350855A patent/JP4558176B2/ja not_active Expired - Fee Related