JP2001284237A5 - - Google Patents
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- Publication number
- JP2001284237A5 JP2001284237A5 JP2000099074A JP2000099074A JP2001284237A5 JP 2001284237 A5 JP2001284237 A5 JP 2001284237A5 JP 2000099074 A JP2000099074 A JP 2000099074A JP 2000099074 A JP2000099074 A JP 2000099074A JP 2001284237 A5 JP2001284237 A5 JP 2001284237A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000099074A JP2001284237A (ja) | 2000-03-31 | 2000-03-31 | 照明装置及びそれを用いた露光装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000099074A JP2001284237A (ja) | 2000-03-31 | 2000-03-31 | 照明装置及びそれを用いた露光装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001284237A JP2001284237A (ja) | 2001-10-12 |
| JP2001284237A5 true JP2001284237A5 (de) | 2007-05-17 |
Family
ID=18613472
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000099074A Withdrawn JP2001284237A (ja) | 2000-03-31 | 2000-03-31 | 照明装置及びそれを用いた露光装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001284237A (de) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3919419B2 (ja) | 2000-03-30 | 2007-05-23 | キヤノン株式会社 | 照明装置及びそれを有する露光装置 |
| JP4508708B2 (ja) * | 2004-04-12 | 2010-07-21 | キヤノン株式会社 | Ｅｕｖ光を用いた露光装置および露光方法 |
| JP2006005319A (ja) | 2004-06-21 | 2006-01-05 | Canon Inc | 照明光学系及び方法、露光装置及びデバイス製造方法 |
| JP5187636B2 (ja) * | 2009-01-16 | 2013-04-24 | 株式会社ニコン | 補正ユニット、照明光学系、露光装置、およびデバイス製造方法 |
| CN108333856B (zh) * | 2017-01-19 | 2023-07-07 | 奥比中光科技集团股份有限公司 | 光学投影装置及应用其的深度相机 |
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2000
- 2000-03-31 JP JP2000099074A patent/JP2001284237A/ja not_active Withdrawn