JP2002148291A - Measuring instrument for characteristic impedance - Google Patents

Measuring instrument for characteristic impedance

Info

Publication number
JP2002148291A
JP2002148291A JP2000345556A JP2000345556A JP2002148291A JP 2002148291 A JP2002148291 A JP 2002148291A JP 2000345556 A JP2000345556 A JP 2000345556A JP 2000345556 A JP2000345556 A JP 2000345556A JP 2002148291 A JP2002148291 A JP 2002148291A
Authority
JP
Japan
Prior art keywords
signal
characteristic impedance
measurement
ground
pin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000345556A
Other languages
Japanese (ja)
Inventor
Nobumasa Goto
伸方 後藤
Shinobu Kato
忍 加藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ibiden Co Ltd
Original Assignee
Ibiden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibiden Co Ltd filed Critical Ibiden Co Ltd
Priority to JP2000345556A priority Critical patent/JP2002148291A/en
Publication of JP2002148291A publication Critical patent/JP2002148291A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To provide a characteristic impedance measuring instrument which can efficiently take a measurement, while surely performing electrostatic discharging. SOLUTION: This characteristic impedance measuring instrument 1 has a TDR meter 2, which sends an electric signal to a printed wiring board 5 and receives the signal to measures characteristic impedance and also displays the measurement result and a probe 4, which is electrically connected to the TDR meter 2 via a cable 3. The probe 4 has signal pins 41, which are made to abut against signal measurement pad 51 of the printed wiring board 5 and a ground pin 42, which is made to abut against a grounding measurement pad 52. The ground pin 42 is connected to a ground line 32 of a cable 3. The signal pin 41 has a switching means 43 for switching between connections with the signal line 31 and a ground line 32 of the cable 3.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【技術分野】本発明は,プリント配線板の特性インピー
ダンスを測定するための特性インピーダンス測定機に関
する。
TECHNICAL FIELD The present invention relates to a characteristic impedance measuring instrument for measuring the characteristic impedance of a printed wiring board.

【0002】[0002]

【従来技術】従来より,プリント配線板の特性インピー
ダンスを測定するために,図5に示すような特性インピ
ーダンス測定機9が用いられている。該特性インピーダ
ンス測定機9は,TDRメータ92と,該TDRメータ
92に電気的に接続されたプローブ94とを有する。
2. Description of the Related Art Conventionally, a characteristic impedance measuring machine 9 as shown in FIG. 5 has been used to measure the characteristic impedance of a printed wiring board. The characteristic impedance measuring instrument 9 has a TDR meter 92 and a probe 94 electrically connected to the TDR meter 92.

【0003】上記TDRメータ92は,プリント配線板
5に電気信号を発信し受信して特性インピーダンスを測
定すると共に測定結果を表示する。また,上記プローブ
94は,信号ピン941と接地ピン942とを有してい
る。また,上記プローブ94は,上記TDRメータ92
にケーブル93によって接続されている。
The TDR meter 92 transmits and receives an electric signal to and from the printed wiring board 5, measures the characteristic impedance, and displays the measurement result. The probe 94 has a signal pin 941 and a ground pin 942. The probe 94 is connected to the TDR meter 92.
Are connected by a cable 93.

【0004】上記特性インピーダンス測定機9により上
記プリント配線板5の特性インピーダンスを測定するに
当っては,上記プローブ94の信号ピン941と接地ピ
ン942とを,上記プリント配線板5に設けた信号用測
定パッド51及び接地用測定パッド52に接触させて,
上記電気信号を上記プリント配線板5と上記TDRメー
タ92との間で授受させる。
When the characteristic impedance of the printed wiring board 5 is measured by the characteristic impedance measuring device 9, the signal pins 941 and the ground pins 942 of the probe 94 are connected to the signal pins provided on the printed wiring board 5. By contacting the measuring pad 51 and the grounding measuring pad 52,
The electric signal is transmitted and received between the printed wiring board 5 and the TDR meter 92.

【0005】[0005]

【解決しようとする課題】しかしながら,上記従来の特
性インピーダンス測定機9には以下の問題がある。即
ち,上記信号用測定パッド51には,静電気が帯電する
ことがある。信号用測定パッド51が帯電した状態で,
上記特性インピーダンス測定機9の信号ピン941を上
記信号用測定パッド51に接触させて測定を行おうとす
ると,帯電した静電気が信号ピン941を介して上記T
DRメータ92に流れ込む。
However, the conventional characteristic impedance measuring instrument 9 has the following problems. That is, the signal measurement pad 51 may be charged with static electricity. With the signal measurement pad 51 charged,
When the signal pin 941 of the characteristic impedance measuring machine 9 is brought into contact with the signal measuring pad 51 to perform measurement, the charged static electricity is transferred to the signal pin 941 through the T pin.
It flows into the DR meter 92.

【0006】一方,上記TDRメータ92は耐電圧性が
低いため,上記静電気の流れ込みにより不具合を生ずる
おそれがある。そこで,測定毎に導電ブラシ等を用い
て,上記信号用測定パッド51の徐電を行う必要があ
る。そのため,測定効率が低く,また,必ずしも確実に
徐電を行うことができるとはいえないという問題があ
る。
On the other hand, since the TDR meter 92 has low withstand voltage, there is a possibility that a problem may occur due to the inflow of the static electricity. Therefore, it is necessary to gradually charge the signal measuring pad 51 using a conductive brush or the like for each measurement. For this reason, there is a problem that the measurement efficiency is low and that it is not always possible to reliably perform the charging.

【0007】本発明は,かかる従来の問題点に鑑みてな
されたもので,確実に徐電を行いつつ効率よく測定する
ことができる特性インピーダンス測定機を提供しようと
するものである。
The present invention has been made in view of the above-mentioned conventional problems, and an object of the present invention is to provide a characteristic impedance measuring instrument capable of efficiently measuring a voltage while reliably reducing a charge.

【0008】[0008]

【課題の解決手段】請求項1に記載の発明は,プリント
配線板に電気信号を発信し受信して特性インピーダンス
を測定すると共に測定結果を表示するTDRメータと,
該TDRメータにケーブルを介して電気的に接続された
プローブとを有する特性インピーダンス測定機におい
て,上記プローブは,上記プリント配線板における信号
層と電気的に接続された信号用測定パッドに当接させる
信号ピンと,上記プリント配線板における接地層と電気
的に接続された接地用測定パッドに当接させる接地ピン
とを有し,該接地ピンは,上記TDRメータの接地端子
と接続された上記ケーブルの接地線に接続されており,
かつ,上記信号ピンは,上記TDRメータの信号端子と
接続された上記ケーブルの信号線との接続と,上記接地
線との接続とを切り換える切換え手段を有することを特
徴とする特性インピーダンス測定機にある。
According to a first aspect of the present invention, there is provided a TDR meter which transmits and receives an electric signal to a printed wiring board, measures a characteristic impedance, and displays a measurement result;
In a characteristic impedance measuring instrument having a probe electrically connected to the TDR meter via a cable, the probe is brought into contact with a signal measurement pad electrically connected to a signal layer on the printed wiring board. A signal pin; and a ground pin for contacting a grounding measurement pad electrically connected to a ground layer of the printed wiring board, wherein the ground pin is connected to a ground terminal of the TDR meter. Connected to the wire
The signal pin has a switching means for switching between connection to a signal line of the cable connected to a signal terminal of the TDR meter and connection to the ground line. is there.

【0009】本発明において最も注目すべきことは,上
記信号ピンが,上記信号線との接続と上記接地線との接
続とを切り換える切換え手段を有することである。該切
換え手段としては,例えばリレースイッチを用いること
ができる。
Most notably, in the present invention, the signal pin has switching means for switching between connection with the signal line and connection with the ground line. As the switching means, for example, a relay switch can be used.

【0010】次に,本発明の作用効果につき説明する。
上記特性インピーダンス測定機を用いてプリント配線板
の特性インピーダンスを測定するに当っては,上記プロ
ーブにおける信号ピンをプリント配線板の信号用測定パ
ッドに当接させ,上記接地ピンをプリント配線板の接地
用測定パッドに当接させる。このとき,上記信号ピンは
上記接地線に接続してある。これにより,信号用測定パ
ッドに帯電していた静電気を,信号ピン及び接地線を介
して徐電する。
Next, the operation and effect of the present invention will be described.
In measuring the characteristic impedance of the printed wiring board using the characteristic impedance measuring instrument, the signal pin of the probe is brought into contact with the signal measurement pad of the printed wiring board, and the ground pin is connected to the ground of the printed wiring board. Contact with the measuring pad. At this time, the signal pin is connected to the ground line. As a result, the static electricity charged on the signal measurement pad is gradually reduced via the signal pin and the ground line.

【0011】そして,上記切換え手段により上記信号ピ
ンを上記信号線に接続させて,上記TDRメータとプリ
ント配線板との間に,上記信号ピンを介して電気信号の
授受を行う。
Then, the signal pins are connected to the signal lines by the switching means, and electric signals are transmitted and received between the TDR meter and the printed wiring board via the signal pins.

【0012】このように,本発明の特性インピーダンス
測定機は,上記切換え手段を有するために,測定を行う
前に,上記信号ピンを接地線に接続しておくことができ
る。これにより,特性インピーダンスの測定前には,上
記信号用測定パッドに帯電した静電気を上記信号ピン及
び接地線を介して確実に徐電することができる。また,
特性インピーダンスを測定する際には,上記切換え手段
により上記信号ピンの接続を上記信号線に切換えること
によって,容易に測定を開始することができる。それ
故,効率よく特性インピーダンスを測定することができ
る。
As described above, since the characteristic impedance measuring apparatus of the present invention has the switching means, the signal pin can be connected to the ground line before the measurement is performed. Thereby, before the measurement of the characteristic impedance, the static electricity charged on the signal measuring pad can be reliably discharged through the signal pin and the ground line. Also,
When measuring the characteristic impedance, the measurement can be easily started by switching the connection of the signal pin to the signal line by the switching means. Therefore, the characteristic impedance can be measured efficiently.

【0013】以上のごとく,本発明によれば,確実に徐
電を行いつつ効率よく測定することができる特性インピ
ーダンス測定機を提供することができる。
As described above, according to the present invention, it is possible to provide a characteristic impedance measuring instrument capable of performing an efficient measurement while reliably performing charging.

【0014】[0014]

【発明の実施の形態】実施形態例1 本発明の実施形態例にかかる特性インピーダンス測定機
につき,図1〜図3を用いて説明する。本例の特性イン
ピーダンス測定機1は,図1に示すごとく,プリント配
線板5に電気信号を発信し受信して特性インピーダンス
を測定すると共に測定結果を表示するTDRメータ2
と,該TDRメータ2にケーブル3を介して電気的に接
続されたプローブ4とを有する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS First Embodiment A characteristic impedance measuring instrument according to an embodiment of the present invention will be described with reference to FIGS. As shown in FIG. 1, a characteristic impedance measuring instrument 1 of the present embodiment transmits and receives an electric signal to and from a printed wiring board 5, measures a characteristic impedance, and displays a measurement result.
And a probe 4 electrically connected to the TDR meter 2 via a cable 3.

【0015】上記プローブ2は,図2に示すごとく,上
記プリント配線板5における信号層53と電気的に接続
された信号用測定パッド51に当接させる信号ピン41
と,上記プリント配線板5における接地層54と電気的
に接続された接地用測定パッド52に当接させる接地ピ
ン42とを有する。
As shown in FIG. 2, the probe 2 has a signal pin 41 to be brought into contact with a signal measuring pad 51 electrically connected to a signal layer 53 of the printed wiring board 5.
And a ground pin 42 that comes into contact with a ground measurement pad 52 that is electrically connected to a ground layer 54 of the printed wiring board 5.

【0016】上記ケーブル3は,上記TDRメータ2の
接地端子と接続された接地線32と,上記TDRメータ
2の信号端子と接続された信号線31とを有する。上記
接地ピン42は,上記ケーブル3の接地線32に接続さ
れている。一方,上記信号ピン41は,図2,図3に示
すごとく,上記ケーブル3の信号線31との接続と,上
記接地線32との接続とを切り換える切換え手段43を
有する。該切換え手段43としては,リレースイッチを
用いている。
The cable 3 has a ground line 32 connected to a ground terminal of the TDR meter 2 and a signal line 31 connected to a signal terminal of the TDR meter 2. The ground pin 42 is connected to the ground line 32 of the cable 3. On the other hand, as shown in FIGS. 2 and 3, the signal pin 41 has switching means 43 for switching between connection to the signal line 31 of the cable 3 and connection to the ground line 32. As the switching means 43, a relay switch is used.

【0017】次に,本例の作用効果につき説明する。上
記特性インピーダンス測定機1を用いてプリント配線板
5の特性インピーダンスを測定するに当っては,上記プ
ローブ4における信号ピン41をプリント配線板5の信
号用測定パッド51に当接させ,上記接地ピン42をプ
リント配線板5の接地用測定パッド52に当接させる。
このとき,図3(B)に示すごとく,上記信号ピン41
は上記接地線32に接続してある。これにより,信号用
測定パッド51に帯電していた静電気を,信号ピン41
及び接地線32を介して徐電する。
Next, the operation and effect of this embodiment will be described. When measuring the characteristic impedance of the printed wiring board 5 using the characteristic impedance measuring instrument 1, the signal pins 41 of the probe 4 are brought into contact with the signal measurement pads 51 of the printed wiring board 5, and the ground pins are measured. 42 is brought into contact with the grounding measurement pad 52 of the printed wiring board 5.
At this time, as shown in FIG.
Are connected to the ground line 32. As a result, the static electricity charged on the signal measuring pad 51 is transferred to the signal pin 41.
Then, the electric charge is gradually reduced via the ground line 32.

【0018】そして,図3(A)に示すごとく,上記切
換え手段43が信号ピン41を上記信号線31に接続さ
せて,上記TDRメータ2とプリント配線板5との間
で,信号ピン41を介して電気信号の授受を行う。上記
特性インピーダンスの測定後は,図3(B)に示すごと
く,上記切換え手段43により,上記信号ピン41と信
号線31との接続を解除し,上記信号ピン41を上記接
地線32に接続する。これにより,次に測定を行う信号
用測定パッド51に帯電した静電気を,上記信号ピン4
1及び上記接地線32を介して徐電できる状態にする。
Then, as shown in FIG. 3A, the switching means 43 connects the signal pin 41 to the signal line 31, and connects the signal pin 41 between the TDR meter 2 and the printed wiring board 5. Transmission and reception of electrical signals via After the measurement of the characteristic impedance, as shown in FIG. 3B, the connection between the signal pin 41 and the signal line 31 is released by the switching means 43, and the signal pin 41 is connected to the ground line 32. . As a result, the static electricity charged on the signal measurement pad 51 to be measured next is transferred to the signal pin 4.
1 and a state in which the electricity can be gradually reduced through the ground line 32.

【0019】このように,本例の特性インピーダンス測
定機1は,上記切換え手段43を有するために,測定を
行う前に,上記信号ピン41を接地線32に接続してお
くことができる。これにより,特性インピーダンスの測
定前には,上記信号用測定パッド51に帯電した静電気
を上記信号ピン41及び接地線32を介して確実に徐電
することができる。また,特性インピーダンスを測定す
る際には,上記切換え手段43により上記信号ピン41
の接続を上記信号線31に切換えることによって,容易
に測定を開始することができる。それ故,効率よく特性
インピーダンスを測定することができる。
As described above, since the characteristic impedance measuring apparatus 1 of the present embodiment has the switching means 43, the signal pin 41 can be connected to the ground line 32 before the measurement is performed. Accordingly, before the measurement of the characteristic impedance, the static electricity charged on the signal measuring pad 51 can be reliably discharged through the signal pin 41 and the ground line 32. When the characteristic impedance is measured, the switching means 43 causes the signal pin 41 to be measured.
By switching the connection to the signal line 31, the measurement can be easily started. Therefore, the characteristic impedance can be measured efficiently.

【0020】実施形態例2 本例は,図4に示すごとく,信号ピン41及び接地ピン
42を,プローブ40の本体44に対して伸縮可能に設
けた特性インピーダンス測定機の例である。上記信号ピ
ン41及び接地ピン42は,測定前においては,図4
(A)に示すごとく伸長した状態にある。このとき,上
記信号ピン41は,接地線32に接続された状態とな
る。
Embodiment 2 As shown in FIG. 4, this embodiment is an example of a characteristic impedance measuring instrument in which a signal pin 41 and a ground pin 42 are provided so as to be extendable and retractable with respect to a main body 44 of a probe 40. Before the signal pin 41 and the ground pin 42 are measured,
It is in an extended state as shown in FIG. At this time, the signal pins 41 are connected to the ground line 32.

【0021】また,上記信号ピン41及び接地ピン42
は,図4(B)に示すごとく,測定時においてプリント
配線板5の信号用測定パッド51及び接地用測定パッド
52に当接し押し付けられることにより,縮退した状態
となる。これにより,上記信号ピン41は,接地線32
との接続が解除されると共に信号線31と接続される。
その他は,実施形態例1と同様である。
The signal pin 41 and the ground pin 42
4B, as shown in FIG. 4 (B), is brought into a contracted state by abutting against the signal measuring pad 51 and the grounding measuring pad 52 of the printed wiring board 5 during measurement. As a result, the signal pin 41 is connected to the ground line 32.
And the connection to the signal line 31 is released.
Other configurations are the same as those of the first embodiment.

【0022】これにより,上記信号ピン41が伸長状態
(図4(A))で上記信号用測定パッド51に接触する
ことにより,該信号用測定パッド51に帯電した静電気
を,上記信号ピン41及び接地線32を介して徐電する
ことができる。次いで,プローブ40をプリント配線板
5に押し当てると上記信号ピン41は縮退し,上記信号
線31に接続されることにより,特性インピーダンスの
測定を行うことができる状態となる(図4(B))。
As a result, when the signal pin 41 comes into contact with the signal measuring pad 51 in the extended state (FIG. 4A), the static electricity charged on the signal measuring pad 51 is dissipated. The charge can be gradually reduced via the ground line 32. Next, when the probe 40 is pressed against the printed wiring board 5, the signal pins 41 are contracted and connected to the signal lines 31, so that the characteristic impedance can be measured (FIG. 4B). ).

【0023】このように,上記信号ピン41の伸縮機構
が,そのまま切換え手段43を構成するため,簡単な構
造で安価なプローブ40を得ることができる。その他,
実施形態例1と同様の作用効果を有する。
As described above, since the expansion and contraction mechanism of the signal pin 41 constitutes the switching means 43 as it is, an inexpensive probe 40 with a simple structure can be obtained. In addition,
It has the same function and effect as the first embodiment.

【0024】[0024]

【発明の効果】上述のごとく,本発明によれば,確実に
徐電を行いつつ効率よく測定することができる特性イン
ピーダンス測定機を提供することができる。
As described above, according to the present invention, it is possible to provide a characteristic impedance measuring instrument capable of performing an efficient measurement while reliably reducing the electric charge.

【図面の簡単な説明】[Brief description of the drawings]

【図1】実施形態例1における,特性インピーダンス測
定機の説明図。
FIG. 1 is an explanatory diagram of a characteristic impedance measuring instrument according to a first embodiment.

【図2】実施形態例1における,プローブとプリント配
線板の断面説明図。
FIG. 2 is an explanatory sectional view of a probe and a printed wiring board according to the first embodiment.

【図3】実施形態例1における,(A)測定時のプロー
ブの説明図,(B)測定前のプローブの説明図。
3A is an explanatory diagram of a probe at the time of measurement, and FIG. 3B is an explanatory diagram of a probe before measurement, in the first embodiment.

【図4】実施形態例2における,(A)測定前のプロー
ブの説明図,(B)測定時のプローブの説明図。
4A and 4B are explanatory diagrams of a probe before measurement, and FIG. 4B is an explanatory diagram of a probe at the time of measurement in a second embodiment.

【図5】従来例における,特性インピーダンス測定機の
説明図。
FIG. 5 is an explanatory view of a characteristic impedance measuring instrument in a conventional example.

【符号の説明】[Explanation of symbols]

1...特性インピーダンス測定機, 2...TDRメータ, 3...ケーブル, 31...信号線, 32...接地線, 4,40...プローブ, 41...信号ピン, 42...接地ピン, 43...切換え手段, 5...プリント配線板, 51...信号用測定パッド, 52...接地用測定パッド, 1. . . 1. Characteristic impedance measuring machine, . . 2. TDR meter, . . Cable, 31. . . Signal line, 32. . . Ground wire, 4,40. . . Probe, 41. . . Signal pins, 42. . . Ground pin, 43. . . Switching means, 5. . . Printed wiring board, 51. . . Measurement pad for signal, 52. . . Grounding measurement pad,

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 2G011 AA10 AB09 AC08 AD01 AE01 AF07 2G028 AA02 BC01 BF08 CG08 HN09 KQ02 LR09 MS05 5E317 AA02 BB01 BB11 CD29 CD36 GG11 GG16  ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2G011 AA10 AB09 AC08 AD01 AE01 AF07 2G028 AA02 BC01 BF08 CG08 HN09 KQ02 LR09 MS05 5E317 AA02 BB01 BB11 CD29 CD36 GG11 GG16

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 プリント配線板に電気信号を発信し受信
して特性インピーダンスを測定すると共に測定結果を表
示するTDRメータと,該TDRメータにケーブルを介
して電気的に接続されたプローブとを有する特性インピ
ーダンス測定機において,上記プローブは,上記プリン
ト配線板における信号層と電気的に接続された信号用測
定パッドに当接させる信号ピンと,上記プリント配線板
における接地層と電気的に接続された接地用測定パッド
に当接させる接地ピンとを有し,該接地ピンは,上記T
DRメータの接地端子と接続された上記ケーブルの接地
線に接続されており,かつ,上記信号ピンは,上記TD
Rメータの信号端子と接続された上記ケーブルの信号線
との接続と,上記接地線との接続とを切り換える切換え
手段を有することを特徴とする特性インピーダンス測定
機。
1. A TDR meter for transmitting and receiving an electric signal to a printed wiring board to measure a characteristic impedance and display a measurement result, and a probe electrically connected to the TDR meter via a cable. In the characteristic impedance measuring instrument, the probe includes a signal pin to be brought into contact with a signal measurement pad electrically connected to the signal layer of the printed wiring board, and a ground electrically connected to a ground layer of the printed wiring board. A grounding pin to be brought into contact with the measurement pad for measurement.
The signal pin is connected to the ground wire of the cable connected to the ground terminal of the DR meter, and the signal pin is connected to the TD.
A characteristic impedance measuring instrument comprising switching means for switching between connection to a signal line of the cable connected to a signal terminal of an R meter and connection to the ground line.
JP2000345556A 2000-11-13 2000-11-13 Measuring instrument for characteristic impedance Pending JP2002148291A (en)

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005037170A (en) * 2003-07-17 2005-02-10 Hioki Ee Corp Circuit board inspection apparatus
US6891392B2 (en) 2003-02-21 2005-05-10 Lsi Logic Corporation Substrate impedance measurement
US6946866B2 (en) * 2003-05-30 2005-09-20 Lsi Logic Corporation Measurement of package interconnect impedance using tester and supporting tester
JP2010014449A (en) * 2008-07-01 2010-01-21 Aisin Aw Co Ltd Probe for automatic inspection device of electric device and automatic inspection device for the same
JP2012069711A (en) * 2010-09-22 2012-04-05 Sharp Corp Probing jig and high voltage inspection device
CN105116227A (en) * 2015-09-15 2015-12-02 欧朗科技(苏州)有限公司 Impedance test apparatus of Hall element of switch power sensor
CN107782968A (en) * 2016-08-24 2018-03-09 神讯电脑(昆山)有限公司 Impedance test device

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6891392B2 (en) 2003-02-21 2005-05-10 Lsi Logic Corporation Substrate impedance measurement
US6946866B2 (en) * 2003-05-30 2005-09-20 Lsi Logic Corporation Measurement of package interconnect impedance using tester and supporting tester
JP2005037170A (en) * 2003-07-17 2005-02-10 Hioki Ee Corp Circuit board inspection apparatus
JP2010014449A (en) * 2008-07-01 2010-01-21 Aisin Aw Co Ltd Probe for automatic inspection device of electric device and automatic inspection device for the same
JP2012069711A (en) * 2010-09-22 2012-04-05 Sharp Corp Probing jig and high voltage inspection device
CN105116227A (en) * 2015-09-15 2015-12-02 欧朗科技(苏州)有限公司 Impedance test apparatus of Hall element of switch power sensor
CN107782968A (en) * 2016-08-24 2018-03-09 神讯电脑(昆山)有限公司 Impedance test device

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