JPH0712940Y2 - IC test equipment - Google Patents

Description

[Detailed Description of the Device] “Industrial Application Field” This device applies a DC voltage to an IC device under test, a DC test for measuring current and voltage when a current is applied, and a logical test for applying a logical pattern. The present invention relates to an IC test device that performs a logic test for determining the logical value of the output of the.

"Prior Art" Fig. 3 shows a part of a conventional IC test apparatus. Test equipment body
In the DC application measurement module 12 provided in 11, the set voltage is supplied from the terminal 13 to the inverting input terminal of the operational amplifier 14, the output terminal of the operational amplifier 14 is connected to one end of the force line 15, and is fed back through the sense line 16. The generated voltage is fed back to the inverting input terminal of the operational amplifier 14 through the high input impedance sense amplifier 17. The output terminal of the operational amplifier 14 is connected to the guard line 19 through the guard driver 18. The force line 15, the sense line 16, and the guard line 19 are connected to terminals 24, 25, and 26 of the test apparatus main body 11 through relay switches 21, 22, and 23, respectively.

Driver 28 of logic test module 27 in test apparatus main body 11
The output side of and the input side of the comparator 29 are relay switches.
Connected to terminal 25 through 31 and terminal 26 is a relay switch
Connected to ground 33 through 32.

The terminals 24 and 25 are connected to the core wires 35 and 36 at one end of the two-core shield wire 34 through relay switches KD ₁ and KD ₂ , respectively, and the terminal 26 is shielded through the relay switch KD ₃ 37.
The terminals 25 and 26 are respectively connected to the inner conductor 39 and the outer conductor 41 at one end of the coaxial line 38 by a relay switch.
It is connected through KL ₁ and KL ₂ .

At the other end of the two-core shielded wire 34, the core wires 35 and 36 are connected to each other and connected to one pin of the IC element 42 under test through the relay switch KD ₄ . At the other end of the coaxial line 38, the inner conductor 39 is connected to the one pin of the IC element under test 42 through the relay switch KL ₃ , and the outer conductor 41 is connected to the relay switch KL.
₄ to ground.

Relay switches 21, 22, 23, KD ₁ , KD ₂ , KD for DC test
_{When 3} and KD ₄ are turned on and the set voltage is applied to the terminal 13, the voltage at the connection point 43 on the relay switches KD ₄ side of the core wires 35 and 36 is fed back to the operational amplifier 14 through the core wire 36 and the sense wire 16. , Sense amplifier 17 has high input impedance and sense line
16, no current flows through the core wire 26, so the voltage at the connection point 43 is the terminal
It operates so that it becomes equal to the set voltage of 13. Force line
15, the current flows with low impedance in the core wire 35, the shield 37 is driven by the guard driver 18 through the guard wire 19, so-called Kelvin connection is realized, high insulation,
Fast settling is performed, and a DC test is performed by applying a set DC voltage to the IC element under test 42.

During the logic test, relay switches 31,32, KL ₁ , KL ₂ , KL ₃ ,
Turn on KL ₄ , and set the logical pattern from driver 28 to coaxial line 38.
Is applied to the IC element 42 to be tested through, and the output of the IC element 42 at that time is received by the comparator 29 through the coaxial line 38 and converted into a logic level. By using the coaxial line 38 in this way, impedance matching between the input / output side and the transmission path is achieved, and the disturbance of the transmission waveform is prevented. In addition, if an attempt is made to transmit a logical pattern through the two-core shielded wire 34, impedance matching cannot be achieved, and the waveform of the logical pattern is disturbed, and a correct test cannot be performed.

“Issues to be solved by the device” As described above, in the conventional IC test equipment,
For each pin of the IC element 42, two transmission lines, a two-core shielded wire 34 for a DC test and a coaxial wire 38 for a logic test, are used, and a relay switch is used for switching between them. A total of 8 pieces of KD _{1 to} KD ₄ and KL _{1 to} KL ₄ were also used.

The purpose of this device is to use one transmission line (cable),
Another object of the present invention is to provide an IC tester which uses a small number of switches and which is Kelvin connected during a DC test, and which is free from the possibility of waveform disturbance of a logic pattern during a logic test.

According to the invention of claim 1, the first terminal to which the force line or the sense line is connected during the DC test and the sense line or the force line during the DC test are connected, and the driver during the logic test. A second terminal to which the comparator is connected and a third terminal to which the guard driver is connected during the DC test and which is connected to the ground during the logic test are provided in the test apparatus body, and at one end of the shielded coaxial line, The outer conductor is connected to the first terminal and is connected to the third terminal through the first switch that is turned on during the logic test, the inner conductor is connected to the second terminal, the shield is connected to the third terminal, and the shield is connected. At the other end of the coaxial line, its outer conductor is connected to one pin of the IC device under test through the second switch that is turned on during the DC test and turned on during the logic test. Is connected to the ground through the third switch, the inner conductor is connected to said one pin.

According to the invention of claim 2, the test device body is provided with the same terminals as the first terminal, the second terminal and the third terminal of claim 1.
At one end of the cable in which the coaxial wire and the single wire are commonly shielded, the single wire is connected to the first terminal, the inner conductor of the coaxial wire is connected to the second terminal, and the outer conductor and the shield are connected to the third terminal, At the other end of the cable, the IC under test passes through the first switch whose single line is turned on during the DC test.
The element is connected to one pin, the inner conductor is connected to the pin, and the outer conductor is connected to ground through a second switch that is turned on during the logic test.

[Embodiment] FIG. 1 shows an embodiment of the invention of claim 1, and the same reference numerals are given to the portions corresponding to those in FIG. In this invention, a coaxial shield wire 45 in which a shield 44 is applied to the coaxial wire 38 is used, and one end of the coaxial shield wire 45 has an outer conductor 41.
Is connected to the terminal 24 and is also connected to the terminal 26 through the relay switch KL ₁ which is turned on during the logic test.
39 is connected to terminal 25 and shield 44 is connected to terminal 26. At the other end of the coaxial shield wire 45, the outer conductor 41 is tested under the relay switch KD ₁ which is turned on during the DC test.
It is connected to one pin of IC element 42 and the inner conductor 39 is connected to that pin.
, And the outer conductor 41 is connected to ground through a relay switch KL ₂ which is turned on during the logic test.

During DC test relay switches 21, 22, 23, KD ₁ is turned on. The force wire 15 is connected to the outer conductor 41 of the coaxial wire 38, and the output voltage from the DC applied measurement module 12 is tested.
The voltage is applied to the pin of the IC element 42, and the voltage is fed back to the DC application measurement module 12 through the inner conductor 39 and the sense line 16 and the set voltage is applied to the pin of the IC element 42 to be tested. Further, the guard line 19 is connected to the shield 44, and the shield 44 is driven by the guard driver. Therefore, so-called Kelvin connection is performed, and high insulation and high-speed settling are performed.

During the logic test, the relay switches 31, 32, KL ₁ and KL ₂ are turned on. The outer conductor 41 of the coaxial line 38 is grounded, and the logic pattern from the logic test module 27 is tested through the coaxial line 38.
It is supplied to the IC element 42 and its output is also supplied to the logic test module 27 through the coaxial line 38. At this time, the coaxial line 38 is impedance-matched with the input / output side thereof, and the logic pattern and the output of the IC element 42 are satisfactorily transmitted without the respective waveforms being disturbed.

As shown in brackets in FIG. 1, a sense line 16 is connected instead of the force line 15 and a force line is used instead of the sense line 16.
15 may be connected. However, since an electric current flows through the force line 15, the outer conductor 41 whose impedance is lower than that of the inner conductor 39.
A configuration in which the force line 15 is connected to is preferable.

FIG. 2 shows an embodiment of the invention of claim 2, and parts corresponding to those of FIG. 3 are designated by the same reference numerals. In this invention, a cable 47 having a common shield 44 for the coaxial wire 38 and the single wire 46 is used. At one end of the cable 47, a single wire 46
Is connected to the terminal 24, the inner conductor 39 is connected to the terminal 25, and the outer conductor 41 and the shield 44 are connected to the terminal 26. cable
Single wire 46 at the other end 47 is connected to one pin of the IC under test element 42 through a relay switch KD ₁ which is turned on when a DC test, the inner conductor 39 is connected to the pin, on the outer conductor during logic testing It is connected to ground through the relay switch KL ₁ , which is said to be.

During DC test relay switches 21, 22, 23, KD ₁ is turned on. The phosph wire 15 is connected to the single wire 46, the sense wire 16 is connected to the inner conductor 39, and the set voltage is applied to one pin of the IC element under test 42. At that time, the guard wire 19 is connected to the outer conductor 41 and the shield 44. Connected to, these are guard-driven,
Kelvin connection provides high insulation and fast settling.

During the logic test, the relay switches 31, 32 and KL ₁ are turned on. The outer conductor 41 of the coaxial line 38 is grounded, and the logical pattern and the output of the IC device under test 42 are transmitted through the coaxial line 38,
It is transmitted through a transmission line with impedance matching.

Also in FIG. 2, the sense line 16 is used instead of the force line 15.
And the force line 15 may be connected instead of the sense line 16. In FIG. 1 and FIG. 2, the logic test module 27
May be only one of the driver 28 and the comparator 29.

[Effect of Device] As described above, according to the device of the present invention, the test device main body 11 and the IC element under test 42 can be connected with one coaxial shield wire 45 or cable 47 for each pin, and the switch is In the example of FIG. 1, the number of three may be two, and in the example of FIG.
The configuration is very simple compared to the case where two transmission lines and eight switches are used.

[Brief description of drawings]

 1 is a connection diagram showing an embodiment of the invention of claim 1, FIG. 2 is a connection diagram showing an embodiment of the invention of claim 2, and FIG. 3 is a connection diagram showing a conventional IC test apparatus.

Claims (2)

[Scope of utility model registration request] 1. A first terminal to which a force line or a sense line is connected at the time of a direct current test, a sense line or a force line at the time of a direct current test, and a driver or a comparator at the time of a logic test are connected to a test apparatus body. A second terminal and a third terminal to which a guard driver is connected during the DC test and which is connected to the ground during the logic test are provided, and the outer conductor is connected to the first terminal at one end of the shielded coaxial line. Is connected to the third terminal through a first switch that is turned on during a logic test, the inner conductor is connected to the second terminal, the shield is connected to the third terminal, and the shielded coaxial cable At the other end, the outer conductor is connected to one pin of the IC device under test through the second switch that is turned on during the DC test and is turned on during the logic test. An IC tester in which the inner conductor is connected to the ground through the switch and the inner conductor is connected to the one pin. 2. A first terminal to which a force line or a sense line is connected during a direct current test, a sense line or a force line during a direct current test, and a driver or a comparator during a logical test are connected to the main body of the test apparatus. A second terminal and a third terminal to which a guard driver is connected during a DC test and which is connected to ground during a logic test are provided, and at one end of a cable in which a coaxial wire and a single wire are commonly shielded, the single wire is Connected to the first terminal, the inner conductor of the coaxial wire is connected to the second terminal, the outer conductor and the shield are connected to the third terminal, and at the other end of the cable, the single wire is turned on during the DC test. Is connected to one pin of the IC device under test through the first switch, the inner conductor is connected to the pin, and the outer conductor is grounded through the second switch that is turned on during the logic test. IC test equipment connected.