JPH0422306Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Technical Field] The present invention relates to a wiring testing device, and more specifically, it connects a DC module to a predetermined pin of a semiconductor to be tested either directly or indirectly through a matrix circuit. The present invention relates to a device for testing wiring disconnection in a semiconductor testing device configured to perform signal testing.

[Prior art]

As shown in FIG. 2, one type of semiconductor testing device is configured to perform DC signal testing by connecting a DC module 2 directly or indirectly to a predetermined pin of a semiconductor to be tested 1 via a matrix circuit 3. There are things that have been done.

By the way, when using such an apparatus, if the wiring of the DC module 2 or matrix circuit 3 that constitutes the semiconductor inspection apparatus is disconnected, correct inspection cannot be performed. Therefore, prior to a series of inspections, it is desirable to test whether or not the wiring of the DC module 2 and matrix circuit 3 constituting these semiconductor inspection apparatuses is broken.

Therefore, conventionally, a circuit meter (tester), for example, is connected between both ends of the wiring of such a semiconductor inspection apparatus to measure the resistance value of the wiring, thereby testing whether there is a disconnection.

However, according to such a conventional configuration, a tester must be connected to each wiring, which requires a large amount of man-hours and labor, and has the disadvantage that tests are easily omitted or errors occur.

[Purpose of invention]

The present invention focuses on these points, and its purpose is to realize a wiring testing device that has a relatively simple configuration and can perform accurate disconnection testing in a short time.

[Summary of the idea]

The present invention achieves these objectives by providing a guard terminal, a sense terminal, and a sense terminal on the high voltage side and the low voltage side, respectively.
A wiring test device that is connected between a DC module to be tested and a DC module for testing that is equipped with a force terminal, and that tests for disconnection in the wiring of the DC module to be tested, which corresponds to each terminal of the DC module to be tested. Six open/close switches S1 to S6 are installed as follows.
and six terminals T1 to T6 to which one end of each of these open/close switches S1 to S6 is individually connected and each terminal of the DC module to be tested is individually connected.
and a terminal T7 to which the other ends of the on/off switches S1 to S3 corresponding to the high voltage side terminals of the DC module under test are connected in common, and to which the sense terminal and force terminal on the high voltage side of the DC module under test are connected. , a terminal T8 to which the other ends of the on/off switches S4 to S6 corresponding to the low voltage side terminals of the DC module under test are commonly connected, and to which the sense terminal and force terminal on the low voltage side of the DC module under test are connected; It is equipped with a series circuit of a switch S7 and a resistor R connected between terminals T7 and T8, and when conducting a disconnection test of the force terminal system, the on/off switches S3, S4, and S7 are turned on and the signal from the DC module to be tested is While supplying signals, measure the voltage between terminals T7 and T8 with the test DC module. For the disconnection test of the sense terminal system, turn on the on/off switches S2 to S5 while supplying signals from the DC module to be tested. Measure the voltage between terminals T7 and T8 with the test DC module, and for the disconnection test of the guard terminal system, turn on the on/off switches S1 and S6 and connect the test DC module while supplying the signal from the test DC module. It is characterized by measuring the voltage between terminals T7 and T8.

〔Example〕

Hereinafter, a detailed explanation will be given using the drawings.

FIG. 1 is a configuration explanatory diagram showing an embodiment of the present invention. In Figure 1, A is the DC module to be tested, B is the disconnection tester according to the present invention, and C is the disconnection tester according to the present invention.
is a test DC module connected according to the DC module A to be tested.

In this embodiment, the DC module A to be tested is a module that automatically switches between constant voltage source mode and constant current source mode and can also measure voltage and current. In such module A, HG, HS and HF are the high voltage side guard terminal, sense terminal and force terminal, respectively.
LG, LS, and LF are the low voltage side guard terminal, sense terminal, and force terminal, respectively. Guard terminal HG is connected to summing amplifier SA2 via guard amplifier GA1. Sense terminal HS
is the summing amplifier SA via the voltage detection circuit VS1
1 and is also connected to the summing amplifier SA2. A power amplifier PA is connected to the force terminal HF via a current detection circuit CS, and the current detection circuit CS is connected to a summing amplifier SA3. A limiter LM1 in which diodes of opposite polarity are connected in parallel is connected between the sense terminal HS and the force terminal HF. The force terminal LF is connected to a common potential point. The sense terminal LS is connected to the summing amplifier SA1 via the voltage detection circuit VS2 and the inverter INV, and is also connected to the summing amplifier SA2. Guard terminal LG is connected to voltage detection circuit VS2 via guard amplifier GA2. A limiter LM2 in which diodes of opposite polarity are connected in parallel is connected between the sense terminal LS and the force terminal LF. A reference voltage source RV1 is connected to the summing amplifier SA1, and a reference voltage source RV1 is connected to the summing amplifier SA3.
2 are connected. These summing amplifiers SA
1 and the summing amplifier SA3 are connected to a power amplifier via a changeover switch SW1 that selects and sets a constant voltage operation mode and a constant current operation mode. Further, an analog-to-digital converter A/D for measurement is connected to the voltage detection circuit VS1 and the summing amplifier SA2 via a changeover switch SW2 that selects and sets a voltage measurement mode and a current measurement mode.

The disconnection tester B has a plurality of open/close switches S1 to S1, which are provided corresponding to each connection terminal HG, HS, HF, LF, LS, and LG of the module A to be tested, and are selectively opened and closed according to the test. S6 and one end of each of these open/close switches S1 to S6 are individually connected to each connection terminal of the module A to be tested.
Multiple test target connection terminals T1 to T6 to which HG, HS, HF, LF, LS, and LG are individually connected
and one terminal T7 is connected to each open/close switch S1 to S corresponding to the high voltage side wiring of the module A to be tested.
3 are connected in common, and the other ends of the open/close switches S4 to S6 corresponding to the low voltage side wiring of the module A to be tested are commonly connected to the other terminal T8. A pair of test terminals are provided to which a predetermined test module C corresponding to the module A to be tested is connected.

As the test module C, for example, a module configured similarly to the test module A is used, and the high voltage side sense terminal HS and force terminal
HF is commonly connected to terminal T7, and low voltage side sense terminal LS and force terminal LF are commonly connected to terminal T8.
to connect to.

Furthermore, this embodiment shows an example in which a series circuit of an on-off switch S7 and a resistor R is connected between test terminals T7 and T8.

The operation of the device configured in this way will be explained.

First, the connection terminal to be tested T1 of disconnection tester B
Each connection terminal HG of module A to be tested is connected to T6,
Connect HS, HF, LF, LS, and LG directly or indirectly through a matrix circuit to connect test terminal T.
7 and T8, the sense terminal and force terminal of the test module C are connected in common. When testing for disconnection in the force terminal HF and LF systems, on-off switches S3, S4 and S7 are closed. Then, the operating conditions of the test module A are set to, for example, 20 V/10 mA, and the operating conditions of the test module C are set to 0 V/2 μA. Note that the resistance R is 1KΩ. As a result, if the force terminal HF, LF system is not disconnected, the resistance R
Since 10mA flows through the test terminals T7 and T8, a voltage of 10V will be generated between the test terminals T7 and T8.If the wire is disconnected, no current will flow through the resistor R and the test terminals T
No voltage is generated between T7 and T8. Therefore, by measuring the voltage between the test terminals T7 and T8 with the test module C, it is possible to detect whether or not there is a disconnection in the force terminal HF and LF systems. next,
When testing the disconnection of the sense terminals HS and LS systems, close the open/close switches S2 to S5 and set the operating conditions of the test module A to 10V/200mA, for example.
At the same time, set the operating conditions of test module C to 0V/2μA. As a result, if the sense terminals HS and LS systems are not disconnected, a voltage of 10V will be generated between test terminals T7 and T8, and if they are disconnected, the sense signal line has high impedance, so the power supply frequency Since we are picking up the hum component of the
A voltage of 10V±1.4V will be generated. Therefore, in test module C, test terminals T7 and T8
By measuring the voltage between the sense terminals HS,
It is possible to detect whether there is a disconnection in the LS system.
When testing guard terminals HG and LG systems for disconnection, close switches S1 and S6, and set the operating conditions of module A to test to 10V/1, for example.
Set it to 200mA and set the operating conditions of test module C to 0V/200μA. As a result, if the guard terminals HG and LG systems are not disconnected, the voltage of the guard signal line becomes equal to the voltage of the sense signal line, and a voltage of 10V ± 1.4V is generated between test terminals T7 and T8, and the disconnection occurs. If so, test terminals T7 and T8
No voltage is generated between them. Therefore, by measuring the voltage between the test terminals T7 and T8 with the test module C, it is possible to detect whether there is a disconnection in the guard terminal HG or LG system.

In addition, the open/close switches S1 to S1 in each of the above tests
The opening/closing control of S7 can be performed automatically, for example, in accordance with control signals sent from other modules of the semiconductor testing device.

With this configuration, the disconnection test of the DC module to be tested can be automatically performed in a short period of time, and there is no possibility of omissions or errors in the test as in the conventional method.

In addition, in the above embodiment, as the test target DC module A and the test DC module C, an example is shown in which a module is used that automatically switches between constant voltage source mode and constant current source mode and can also measure voltage and current. , a voltage generation module, a voltage measurement module, a current generation module, a current measurement module, etc. may be combined.

[Effect of idea]

As described above, according to the present invention, it is possible to realize a wiring testing device that can perform an accurate disconnection test in a short time with a relatively simple configuration, and has a great practical effect.

[Brief explanation of drawings]

FIG. 1 is a configuration explanatory diagram showing an embodiment of the present invention;
FIG. 2 is a configuration explanatory diagram showing an example of a semiconductor inspection device. A...DC module to be tested, B...Disconnection tester, S1-S6...Open/close switch, T1-T6
... Connection terminal to be tested, T7, T8... Test terminal semiconductor inspection device, C... Test DC module.

Claims (1)

[Claim for Utility Model Registration] A DC module to be tested is provided with a guard terminal, a sense terminal, and a force terminal on the high-voltage side and low-voltage side, respectively. A wiring testing device for testing disconnection, which includes six on-off switches S1 to S6 provided corresponding to each terminal of a DC module to be tested.
and six terminals T1 to T6 to which one end of each of these open/close switches S1 to S6 is individually connected and each terminal of the DC module to be tested is individually connected.
and a terminal T7 to which the other ends of the on/off switches S1 to S3 corresponding to the high voltage side terminals of the DC module under test are connected in common, and to which the sense terminal and force terminal on the high voltage side of the DC module under test are connected. , a terminal T8 to which the other ends of the on/off switches S4 to S6 corresponding to the low voltage side terminals of the DC module under test are commonly connected, and to which the sense terminal and force terminal on the low voltage side of the DC module under test are connected; It is equipped with a series circuit of a switch S7 and a resistor R connected between terminals T7 and T8, and when conducting a disconnection test of the force terminal system, the on/off switches S3, S4, and S7 are turned on and the signal from the DC module to be tested is While supplying signals, measure the voltage between terminals T7 and T8 with the test DC module. For the disconnection test of the sense terminal system, turn on the on/off switches S2 to S5 while supplying signals from the DC module to be tested. Measure the voltage between terminals T7 and T8 with the test DC module, and for the disconnection test of the guard terminal system, turn on the on/off switches S1 and S6 and connect the test DC module while supplying the signal from the test DC module. A wiring testing device characterized in that it measures the voltage between terminals T7 and T8.