JP2002040050A - Probe device and probe unit - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a probe device capable of preventing the breakage of a measuring instrument by static electricity charged on a circuit board. SOLUTION: This probe device comprises a pair of conductive members 11, a short circuit member 12 for electrically connecting the conductive members 11 to each other by making contact with the respective conductive members 11, and a housing 13 for supporting the conductive members 11 and the short circuit member 12. The respective conductive members 11 are arranged so as to cross the short circuit 12 and make contact with the short circuit member 12. The conductive members 11 are mounted on the housing 13 through an elastic member 15, so that the conductive members 11 are relatively displaceable to the housing 13 and also separable from the short circuit member 12 after electrostatic elimination.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe device for inspecting circuit wiring on a circuit board, and more particularly to a probe device suitable for measuring impedance between circuit wirings.

[0002]

2. Description of the Related Art With the recent increase in processing speed of electronic equipment, high-frequency electric signals are applied to circuit wiring on a circuit board. For this reason, it is necessary to measure the impedance between circuit wirings, in particular, between a GND pattern and another pattern, and to check whether the circuit wiring can normally operate the circuit.

A conventional impedance measuring device will be described with reference to FIG.

[0006] The measuring device comprises a probe device 201 and a measuring device 202.

The probe device 201 includes a pair of pins 2 that respectively contact two circuit wirings 101 to be measured.
01a and 201b, each pin 201a or 201b
b is the transmission / reception terminal 202a of the measurement signal of the measuring instrument and GND
The terminal is connected to the terminal 202b.

In measurement, a pair of pins 201a and 201b are brought into contact with the circuit wiring 101, and a measurement signal is transmitted from the transmission / reception terminal 202a of the measuring instrument 202 to the circuit wiring via the pin 201a, and the reflected wave is similarly transmitted to the pin 201a. The impedance is measured by receiving the signal at the transmission / reception terminal 202a through the terminal and observing and calculating the signal.

[0007]

On the other hand, in recent years, so-called multilayer boards have been developed from the viewpoint of improving the mounting density and the like of circuit boards. Such a multilayer substrate has capacitance due to the lamination of circuit wirings as conductors, and is easily charged with high voltage by static electricity.

For this reason, if the pins of the probe device are brought into contact with the circuit wiring, the static electricity accumulated on the circuit board will rush into the measuring instrument, causing the destruction of the measuring instrument. is there.

As a method for preventing the destruction of the measuring instrument due to static electricity, for example, there has been proposed a method for removing charge from a circuit board by a so-called ion blower. However, according to this method, even if static electricity on the surface layer of the circuit board can be removed. In some cases, static electricity in the inner layer cannot be completely removed.

Also, among the components of the probe device, there is a problem that pins or the like that directly contact the circuit wiring are liable to be worn out or broken down by repeatedly contacting the circuit wiring.

Accordingly, it is a primary object of the present invention to provide a probe device and a probe unit which can prevent a measuring instrument from being damaged by static electricity charged on a circuit board.

Another object of the present invention is to provide a probe unit capable of coping with wear and failure of components of a probe device.

[0013]

According to the present invention, a pair of conductive members, a short-circuit member that contacts each of the conductive members to electrically connect the conductive members, A support member that supports the short-circuit member, and a probe device, wherein each of the conductive members is
A probe device is provided, wherein the probe device is arranged to cross the short-circuit member and contact the short-circuit member, and the conductive member is attached to the support member via an elastic member. .

Further, according to the present invention, there is provided a probe unit detachably attached to a probe device main body, wherein a pair of conductive members and each of the conductive members are brought into contact with each other to electrically connect the conductive members. And a support member for supporting the conductive member and the short-circuit member. Each of the conductive members is arranged to traverse the short-circuit member and to contact the short-circuit member. Further, there is provided a probe unit, wherein the conductive member is attached to the support member via an elastic member.

According to the present invention, a pair of first conductive members to which a test signal is supplied, a second conductive member connected to GND, and the first and second conductive members are supported. And a supporting member, wherein each of the first conductive members traverses the second conductive member,
The probe device is provided so as to be in contact with the second conductive member, and the first conductive member is attached to the support member via an elastic member.

Further, according to the present invention, there is provided a probe unit detachably attached to a probe device main body, comprising: a pair of first conductive members to which an inspection signal is supplied;
D, and a support member that supports the first and second conductive members, wherein each of the first conductive members traverses the second conductive member. The probe unit is provided so as to be in contact with the second conductive member, and the first conductive member is attached to the support member via an elastic member.

Further, according to the present invention, a pair of conductive members, a short-circuit member for contacting each of the conductive members to electrically connect the conductive members, and a short-circuit member for connecting the conductive members to each other. And a supporting member for supporting the conductive member, wherein each of the conductive members traverses the short-circuit member, and is arranged to contact the short-circuit member, and further, the conductive member is A probe device is provided that is displaced relative to the support member so as to be able to return to an original position.

According to the present invention, a pair of first conductive members to which a test signal is supplied, a second conductive member connected to GND, and the first and second conductive members are supported. And a supporting member, wherein each of the first conductive members traverses the second conductive member,
The probe device is provided so as to be in contact with the second conductive member, and further, the first conductive member is displaced relative to the support member so as to be able to return to an original position. You.

[0019]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 shows a probe device A according to an embodiment of the present invention, a measuring instrument B to which the probe device A is connected,
FIG. In the present embodiment, an object is to measure the impedance between circuit wirings to be inspected.

The probe device A includes a probe unit 1
And a main unit 2, and as will be described later, the probe unit 1 is configured to be detachable from the main unit 2, so that the probe unit 1 can be replaced as appropriate. Hereinafter, the configuration of the probe unit 1 will be described with reference to FIG. 2 which is a cross-sectional view taken along line XX of FIG. 1 and FIG. 3 which is a cross-sectional view taken along line YY of FIG.

The probe unit 1 includes a pair of conductive members 1
1a and 11b, a short-circuit member 12 for contacting the conductive members 11a and 11b to electrically connect the conductive members 11a and 11b, and a conductive member 1
And a housing 13 as a support member for supporting the short-circuit members 1a and 11b.

The probe unit 1 is connected to the main unit 2 by positioning the probe unit 1 with the main unit 2, and guide pins 14a and 14a for reinforcing the connection.
b is provided in the housing 13.

For the housing 13, for example, a material having an insulating property such as plastic is desirable.

The conductive members 11a and 11b are slightly elongated rod-like members bent in the middle, and are made of a conductive material such as a metal such as copper. Conductive members 11a and 1
1b is provided on one end side (the main body 2 side)
Housing 1 via tubular elastic members 15a and 15b
3 is attached.

The elastic member 15 is fixed so as to be fitted in a hole provided in the housing 13, and is made of, for example, an elastic material such as rubber, resin, or the like, and is made of an insulating material. Desirably. Conductive member 11a
And 11b penetrate the elastic member 15 and are supported by the housing 13 via the elastic member 15.

With this configuration, the conductive member 11
When an external force acts on the conductive members 11a and 11b, the conductive members 11a and 11b
3, and can be displaced relative to
When the external force is released, it returns to the original position.

Next, the conductive members 11a and 11b have their ends 11a 'and 11b'
From the measuring instrument B to receive an inspection signal from the measuring instrument B via the main body 2, and the pin-shaped end 11
a ′ and 11b ′ are inserted into two holes 21 provided in the main body 2, respectively. In the present embodiment,
Although the signal pins are formed integrally as a part of the conductive members 11a and 11b, they may be configured separately and independently as long as they are electrically connected.

On the other hand, the other ends (11a ″ and 11b ″) of the conductive members 11a and 11b are open, and the other ends contact the circuit wiring to be inspected. When measuring the impedance between two circuit wirings, the conductive members 11a and 11b come into contact with the respective circuit wirings, and one of the two circuit wirings usually forms a GND pattern. Circuit wiring.

Next, the short-circuit member 12 is made of a conductive material such as a metal such as copper.
Is fixedly attached inside. As shown in FIG. 2, the conductive members 11a and 11b are arranged substantially in parallel so as to cross over the short-circuit member 12, and contact the surface of the short-circuit member 12 as shown in FIG. Are located in

As a result, under normal conditions, the conductive member 1
1a and 11b are in a state of being electrically connected by the short-circuit member 12, that is, in a short-circuited state.

The short-circuit member 12 includes the conductive member 11
a and 11b project in a semicircle, and the conductive members 11a and 11b
Is slightly bent in accordance with the shape of the projecting portion. This is mainly to ensure the contact between the conductive members 11a and 11b and the short-circuit member 12.

Next, the main body 2 will be described.

The main body 2 has a recess 23 into which the probe unit 1 is inserted obliquely, and two holes into which the guide pins 14a and 14b of the probe unit 1 are removably inserted. 22, and ends 11a 'of the conductive members 11a and 11b formed as signal pins
And 11b 'are respectively inserted into and removed from the holes 21a.
And 21b.

In the main body 2, the probe unit 1 is inclined and inserted and attached because the conductive member 11 of the probe unit 1 is attached to the circuit board to be inspected.
a and 11b can be contacted at a preferable angle. As shown in FIG. 3, the probe unit 1 is attached to the main body portion 2 indicated by a broken line in an inclined manner, so that the circuit on the circuit board is formed. Conductive member 1 that contacts wiring
1b (and 11a hidden in the figure) can contact the circuit board at an oblique angle.

The probe unit 1 and the main body 2 are detachable by inserting the guide pins 14a and 14b into and out of the hole 22 so as to be detachable.
The probe unit 1 including components such as 1a and 11b, which are likely to be worn out or broken down, can be appropriately replaced.
By making the probe unit 1 replaceable in this way, the main body 2 with relatively little wear and failure can be used repeatedly, and a single main body 2 can use a plurality of types of probe units 1.

The main body 2 has a cylindrical screw bar 24 on its upper surface. The screw bar 24 enables the probe device A to be attached to another machine or instrument. For example, a moving device of the probe device in an automatic circuit board inspection system, a handle gripped by an inspector during a manual inspection, and the like are provided. It is possible to attach to. The screw bar 24 has a coaxial structure, and a screw portion on the outer periphery is a ground, and a central core wire is a signal line. The screw portion and the core wire are respectively connected to the conductive member 2 inside the main body portion 2.
1a and 21b. By connecting the core wire and the screw portion to the measuring instrument, the input / output of the inspection signal becomes possible.

The main body 2 has holes 25a and 25b as mounting holes on its upper surface.

Next, the measuring instrument B has the same configuration as a known measuring instrument, and has a transmitting / receiving terminal 3a and a GND terminal 3b.
A test signal is issued to the circuit wiring to be inspected, the reflected wave is received at the transmission / reception terminal 3a, and the impedance between the circuit wirings is measured by observation and calculation.
In the present embodiment, the transmission / reception terminal 3a is
Is electrically connected to the conductive member 11b, and the GND terminal 3b is connected to the outer peripheral portion of the screw bar 24,
That is, it is assumed that they are electrically connected to the conductive member 11a. The measuring instrument B has a GN of the measuring line.
A GND terminal 3c is provided separately from the D terminal 3b, and the potential of the casing of the main body is dropped to the ground.

Next, the function of the probe device A having such a configuration, particularly, the function of the probe unit 1 will be described.

As described above, in recent years, circuit boards have been increasingly multi-layered, and static electricity is easily charged at a high voltage. When a conductive member of a probe device is brought into contact with circuit wiring, the static electricity accumulated on the circuit board is reduced. It rushes into the measuring instrument and is a cause of the destruction of the measuring instrument.

In the present embodiment, the probe unit 1 has a function of removing static electricity charged on the circuit board in order to prevent such static electricity from entering the measuring instrument. Such a static elimination function will be described with reference to FIGS.
4A to 4C are views showing the internal structure of the probe unit 1 in the same cross section as in FIG.

FIG. 4A shows the conductive members 11b and 1
1a (hidden behind the conductive member 11b in the figure.
The same applies to the description of FIG. ) Indicates a state in which it is not in contact with the circuit board. In this state, the conductive member 11a
Since 11 and 11b are both in contact with the short-circuit member 12, they are in an electrically short-circuited state. At this time, since the conductive member 11a is electrically connected to the GND terminal 3b of the measuring device B, the conductive member 11b is also connected to the GND terminal of the measuring device B.
It is in a state of being electrically connected to the D terminal 3b.

FIG. 4B shows the moment when the other ends 11a "and 11b" of the conductive members 11a and 11b contact the surface of the circuit wiring of the circuit board by moving the probe unit 1 toward the circuit board. Is shown. At the moment of contact, the conductive members 11a and 11b do not receive a reaction force from the circuit board, so that both the conductive members 11a and 11b remain in contact with the short-circuit member 12. For this reason, both are electrically short-circuited, and the GND of the measuring instrument B is
It is in a state of being electrically connected to the terminal 3b.

Then, static electricity charged between the circuit wirings in contact with the conductive members 11a and 11b is applied to the GND of the measuring instrument B.
This flows from the terminal 3b to GND. As a result,
The static electricity charged between the circuit wirings is removed, and the transmitting and receiving terminals 3
This prevents static electricity from rushing into the measuring instrument B from a and destroying the measuring instrument B.

FIG. 4C shows a state where the probe unit 1 is further moved toward the circuit board. With the movement of the probe unit 1, the conductive members 11a and 11a
A reaction force from the circuit wiring (circuit board) is applied to the other ends 11a ″ and 11b ″ of b. At this time, FIG.
As shown in (c), since the conductive members 11a and 11b are attached to the housing 13 via the elastic members 15a and 15b, the conductive members 11a and 11b relatively move with respect to the housing 13 due to the elastic deformation of the elastic members 15a and 15b. Will be done.

As a result, the conductive members 11a and 11b
As a result, the electrical connection between the conductive members 11a and 11b is released, and the G
Only the conductive member 11a is electrically connected to the ND terminal 3b, and the conductive member 11b is electrically disconnected from the GND terminal 3b and is electrically connected only to the transmission / reception terminal 3a. Therefore, it is possible to measure the impedance between the circuit wirings on the circuit board.

When the measurement of the impedance is completed and the conductive members 11a and 11b are separated from the circuit wiring, the reaction force disappears, and the restoring force of the elastic members 15a and 15b causes the conductive members 11a and 11b to move as shown in FIG. And returns to the state of being electrically short-circuited by contact with the short-circuit member 12. Therefore, repetitive inspection becomes possible.

In the state shown in FIG. 4B, the time required for discharging static electricity to GND is approximately 20 to 50.
About msec is sufficient. Therefore, when the probe unit 1 is moved to bring the conductive members 11a and 11b into contact with the circuit wiring, the conductive members 11a and 11b
It is not necessary to temporarily stop the movement of the probe unit 1 at the moment when b comes into contact with the circuit wiring. Even if the probe unit 1 is smoothly moved as before without being aware of static electricity elimination, The static elimination function is fully exhibited.

As described above, in this embodiment, since the probe unit 1 has the charge eliminating function, it is possible to prevent the measuring instrument B from being destroyed by the static electricity charged on the circuit board to be inspected. Further, the charge removing function is performed by the conductive member 11a.
And 11b are attached to the housing 13 via the elastic members 15a and 15b.
By mounting a short-circuit member 12 for electrically short-circuiting the housing 11b to the housing 13, the structure can be simplified, the number of parts can be reduced, and
The size of the probe unit 1 can be reduced. As a result,
As in the present embodiment, the probe unit 1 can be detachably attached to the main body 2 and can be replaced.

In the present embodiment, the conductive members 11a and 11b are attached to the housing 13 via the elastic members 15a and 15b, so that the conductive members 11a and
1b is configured to be displaced relative to the housing 13, but the conductive members 11a and 11b are also made of a material having elasticity so that the elastic members 15a and 15b
In addition to the elastic deformation of the housing 1, the conductive members 11a and 11b
3 can be displaced relatively.

Further, as described above, in the present embodiment, the charge removing function of the probe unit 1 is such that the conductive members 11a and 11b normally contact the short-circuit member 12 to be electrically short-circuited and the conductive member 11a And 11b are relatively displaced with respect to the housing 13 within a range in which they can return to their original positions.

Therefore, such a function is provided by the conductive member 11.
In addition to attaching the conductive members 11a and 11b to the housing 13 via the elastic members 15a and 15b, for example, the conductive members 11a and 11b may be made of a material having elasticity and directly connected to the housing 13 without passing through the elastic members 15a and 15b. Various configurations can be adopted, such as being displaced relative to the housing 13 by the elastic deformation of the conductive members 11a and 11b themselves after being attached.

In the present embodiment, the conductive member 1
1a is electrically connected to the GND terminal 3b of the measuring instrument B and is connected to GND, so that the short-circuit member 12 that contacts the conductive member 11a is connected to GND, and the conductive member 11b that contacts this is also connected to GND. However, the short-circuit member 12 may be independently electrically connected to GND.

An example of the configuration of the probe unit 1 'in such a case will be described with reference to FIGS. FIG. 5 is a diagram showing the internal structure of the probe unit 1 ′ in the same cross section as in FIG. 2, and FIG. 6 is a cross-sectional view of a main part along line ZZ in FIG.

5 and 6, the same components as those of the above-described probe unit 1 are denoted by the same reference numerals. The probe unit 1 'is different from the probe unit 1 in that the short-circuit member 12' is in contact with the guide pin 14b. 5 and 6, the guide pins 14b are also made of a conductive material.
By electrically connecting b to GND in some way, it is possible to always electrically connect the short-circuit member 12 'to GND.

In order to electrically connect the guide pin 14 to GND, for example, the hole 22 of the main body 2 into which the guide pin 14 is fitted and the GND terminal 3c of the measuring instrument B are electrically connected via the casing of the main body. It may be configured to be connected to each other.
Furthermore, a terminal that is electrically connected to the hole 22 may be separately provided in the main body 2, and the terminal may be electrically connected to GND such as a power supply circuit that drives the entire system.

The preferred embodiment of the present invention has been described above. However, it goes without saying that the present invention is not limited to the above embodiment, and various modifications can be made without departing from the spirit of the present invention. .

[0059]

As described above, according to the present invention,
The destruction of the measuring instrument due to static electricity charged on the circuit board can be prevented.

Further, according to the present invention, the probe unit is made detachable from the probe device main body, so that it is possible to cope with wear and failure of the component parts.

[Brief description of the drawings]

FIG. 1 shows a probe device A according to an embodiment of the present invention;
It is the schematic which showed the measuring instrument B with which the probe apparatus A was connected.

FIG. 2 is a sectional view of the probe unit 1 taken along a line XX in FIG.

FIG. 3 is a view including a cross-sectional view of the probe unit 1 along a line YY in FIG. 2;

FIGS. 4A to 4C are diagrams illustrating a static elimination function of the probe unit 1. FIGS.

FIG. 5 is a sectional view showing an internal structure of a probe unit 1 ′.

FIG. 6 is a cross-sectional view of a main part taken along line ZZ in FIG. 5;

FIG. 7 is a schematic diagram of a conventional measuring device.

Continued on the front page F term (reference) 2G011 AA02 AA13 AB06 AB07 AB09 AC00 AC14 AD01 AE01 AF01 2G028 AA04 BB10 BC01 BE10 CG08 DH03 HN09 KQ02 MS05

Claims (16)

[Claims] 1. A pair of conductive members, a short-circuit member that contacts each of the conductive members to electrically connect the conductive members, and a support member that supports the conductive member and the short-circuit member. ,
A probe device comprising: each of the conductive members traverses the short-circuit member; and
The probe device is arranged so as to be in contact with the short-circuit member, and the conductive member is attached to the support member via an elastic member. 2. The probe device according to claim 1, wherein the pair of conductive members are formed in a rod shape from a material having elasticity, and are arranged substantially parallel to each other. 3. The short-circuit member according to claim 1, wherein a portion that contacts the conductive member protrudes, and the conductive member is bent at a portion that contacts the short-circuit member. A probe device as described. 4. The probe device according to claim 1, wherein one end of the conductive member comes into contact with a circuit wiring to be inspected. 5. The probe device according to claim 1, wherein the support member is made of an insulating material. 6. A probe unit detachably attached to a probe device main body, comprising: a pair of conductive members; and a short-circuit member that electrically connects between the conductive members by contacting each of the conductive members. A supporting member that supports the conductive member and the short-circuit member;
Each of the conductive members traverses the short circuit member, and
The probe unit is arranged so as to be in contact with the short-circuit member, and the conductive member is attached to the support member via an elastic member. 7. A support pin for reinforcing a connection between the probe device main body and the probe unit, and a pair of signals for electrically connecting the probe device main body to each of the conductive members. The probe unit according to claim 6, further comprising a pin. 8. The probe unit according to claim 7, wherein the signal pin and the conductive member are formed integrally. 9. A pair of first conductive members to which a test signal is supplied, a second conductive member connected to GND, and a support member that supports the first conductive member and the second conductive member. A probe device comprising: a first conductive member, each of the first conductive members being arranged to traverse the second conductive member and to contact the second conductive member; A probe device attached to the support member via an elastic member. 10. A probe unit detachably attached to a probe device main body, comprising: a pair of first conductive members to which a test signal is supplied; a second conductive member connected to GND; and the first conductive member. And a support member for supporting the second conductive member, wherein each of the first conductive members is arranged to traverse the second conductive member and to contact the second conductive member, Further, the first conductive member is attached to the support member via an elastic member. 11. A pair of guide pins for reinforcing the connection between the probe device main body and the probe unit, and a pair of guide pins for electrically connecting the probe device main body to each of the first conductive members. The probe unit according to claim 10, further comprising a signal pin. 12. The probe unit according to claim 11, wherein the guide pin is made of a conductive material, and the second conductive member is electrically connected. 13. A pair of conductive members, a short-circuit member that contacts each of the conductive members to electrically connect the conductive members, and a support member that supports the conductive member and the short-circuit member. ,
A probe device comprising: each of the conductive members traverses the short-circuit member; and
The probe device is arranged so as to be in contact with the short-circuit member, and the conductive member is displaced relative to the support member so as to be able to return to an original position. 14. The conductive member is made of an elastic material so as to be elastically deformed and relatively displaced relative to the support member so as to be able to return to an original position. 14. The probe device according to 13. 15. A pair of first conductive members to which a test signal is supplied, a second conductive member connected to GND, and a support member that supports the first conductive member and the second conductive member. A probe device comprising: a first conductive member, each of the first conductive members being arranged to traverse the second conductive member and to contact the second conductive member; A probe device which is displaced relative to the support member so as to be able to return to an original position. 16. The device according to claim 16, wherein the first conductive member is made of an elastic material such that the first conductive member is elastically deformed to be relatively displaced relative to the support member so as to be able to return to an original position. The probe device according to claim 15.