JP2010048729A - Probe and probe unit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a probe which can be further reduced in size with a uniformed contact pressure. <P>SOLUTION: The probe includes two probe needles 2 and 3, each including a spiral part 2a or 3a formed with the same diameter and the same pitch, a first contact part 2b or 3b formed on one end side of each spiral part 2a or 3a, and a second contact part 2c or 3c formed on the other end side of each spiral part 2a or 3a. The first contact part 2b or 3b and the second contact part 2c or 3c are formed so as to be located within the range of the radius of the spiral part 2a or 3a around axial line L of each spiral part 2a or 3a or less, and the probe needles 2 and 3 are combined to each other with each spiral part 2a or 3a being shifted by half pitch and with the axial line L thereof being matched to each other. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an electrical inspection probe used in a circuit board inspection apparatus and brought into contact with an inspection object, and a probe unit including the probe.

As this type of probe, a probe device (hereinafter also referred to as “probe”) including two probe needles disclosed in Patent Document 1 below is known. The probe includes a first probe needle having a helically-shaped portion that can be elastically expanded and contracted, and a second probe needle that is surrounded by the helical-shaped portion of the first probe needle and has an elastically expandable shape. It is configured with. According to this probe, even if two probe needles are arranged, the second probe needle is located in the spiral shape of the first probe needle, so that an increase in the size of the probe can be prevented.
Japanese Patent Laying-Open No. 2005-91087 (page 3-5, FIG. 4)

  However, the above probe has the following problems. That is, in this probe, since the other probe needles are arranged in one probe needle, the shapes of the two probe needles are always different. Therefore, this probe has a problem that it is difficult to make the contact pressure to the probing object uniform. In addition, it is difficult to further reduce the outer diameter of one probe needle in which another probe needle is disposed, and as a result, it is difficult to further reduce the probe size. Yes.

  The present invention has been made in view of such problems, and a main object of the present invention is to provide a probe and a probe unit that can be further miniaturized while making the contact pressure uniform.

  In order to achieve the above object, the probe according to claim 1 is provided with a spiral portion having the same diameter and the same pitch, a first contact portion formed on one end side of the spiral portion, and the other end side of the spiral portion. Two probe needles having a formed second contact portion are provided, and the first contact portion and the second contact portion are located within a range equal to or less than a radius of the spiral portion with the axis of the spiral portion as a center. The probe needles are combined in a state where the axes of the spiral portions coincide with each other and the spiral portions are shifted by approximately half a pitch. Here, “substantially shifted by a half pitch” means that each spiral portion expands or contracts (extends or expands) in the use state of the probe even if the position is shifted by a predetermined distance before and after the position that is accurately shifted by a half pitch. It is said that it has shifted | deviated in the state which can maintain the state which does not mutually contact when it shortens.

  Further, in the probe according to claim 2, in the probe according to claim 1, a part of each spiral portion of each probe needle is integrally coupled with a resin mold.

  According to a third aspect of the present invention, in the probe according to the first or second aspect, each of the second contact portions is disposed at a position where the distance from the axis is different from each other.

  A probe unit according to a fourth aspect includes a plurality of probes according to the first or second aspect, a plurality of mounting holes penetrating in the thickness direction, and one probe in the mounting hole. A plate-like base to be mounted in a state where the first contact portion of the probe protrudes from one side of the probe, and disposed on the other side of the base, and for each part corresponding to the mounting hole And a relay substrate on which a pair of electrodes in contact with the respective second contact portions of the probe are disposed.

  A probe unit according to claim 5 includes a plurality of probes according to claim 3, a plurality of mounting holes penetrating in the thickness direction, and one probe in each of the mounting holes. A plate-like base mounted with the first contact portion projecting from one surface side, and disposed on the other surface side of the base, and for each portion corresponding to the mounting hole, A relay substrate on which a pair of electrodes in contact with each of the second contact portions is disposed, and the pair of electrodes has a radius centered on the axis of the spiral portion of the second contact portions. It is formed in two concentric circles defined corresponding to the distance from the axis.

  In the probe according to claim 1, the spiral portions of the two probe needles are formed to have the same diameter and the same pitch, and the first contact portion and the second contact portion formed at each end of each spiral portion are axes. Are formed so as to be located within a range of the radius of the spiral portion around the center, and the axes of the spiral portions coincide with each other, and the spiral portions are combined with each other with a substantially half-pitch deviation. Therefore, according to this probe, the entire outer diameter can be made compact. In addition, since each spiral part that contracts (elastically deforms) in the probing state has the same shape, the first contact part of each probe needle can contact the probing object with a substantially uniform contact pressure. Measurement errors due to non-uniform pressure can be greatly reduced.

  In addition, according to the probe of the second aspect, since the two probe needles are integrally molded by resin molding, the probe needles are extremely easily and in a short time, unlike the configuration in which each probe needle is individually attached. Can be attached or replaced.

  Further, according to the probe of the third aspect, the second contact portions of the probe needles are arranged so that the distances from the axis are different from each other. When contacting the second contact portion of the probe needle, the shape of one electrode that contacts the second contact portion close to the axis of the pair of electrodes of the relay substrate is a circular shape in plan view or an annular shape in plan view, In addition, the shape of the other electrode in contact with the second contact portion far from the axis is an annular shape in plan view having a diameter larger than that of the one electrode, so that the probe can be attached to the axis of the spiral portion when mounting the probe in the mounting hole. The second contact portion can be reliably brought into contact with a predetermined electrode no matter what state is rotated around and mounted.

  Further, according to the probe unit of the fourth aspect, since the outer diameter of the probe is compact, it is possible to realize a further fine pitch between the probes and to realize a miniaturization of the probe unit itself. Can do.

  In addition, according to the probe unit of the fifth aspect, since the outer diameter of the probe is compact, it is possible to realize a further fine pitch between the probes and to realize a miniaturization of the probe unit itself. Can do. Furthermore, the shape of the pair of electrodes formed on the relay substrate and in contact with the second contact portion of each probe is formed in two concentric circles (one electrode in contact with the second contact portion close to the axis is circular in plan view) Alternatively, the shape of the other electrode that is formed in an annular shape in plan view and that is in contact with the second contact portion far from the axis is formed in an annular shape in plan view having a larger diameter than that of one electrode). When mounting the probe, no matter what state the probe is rotated around the axis of the spiral portion, the second contact portion can be reliably brought into contact with the predetermined electrode. The time required can be shortened.

  Hereinafter, the best mode of a probe and a probe unit according to the present invention will be described with reference to the accompanying drawings.

  First, the configuration of the probe 1 will be described with reference to FIGS.

  As shown in FIG. 2, the probe 1 includes two probe needles 2 and 3, and the probe needles 2 and 3 are combined and integrated. The probe needle 2 includes a spiral portion 2a having a constant diameter and a constant pitch, a first contact portion 2b formed on one end side (the upper end side in the figure) of the spiral portion 2a, and the spiral portion 2a. A second contact portion 2c formed on the other end side (lower end side in the figure) is provided. In this case, the first contact portion 2b is formed (arranged) so as to be located within a range equal to or less than the radius of the spiral portion 2a with the axis L of the spiral portion 2a as the center. Specifically, in this example, as shown in FIG. 3, the first contact portion 2b is formed at a position where the distance from the axis L is the same as the radius of the spiral portion 2a. Similarly, as shown in FIG. 4 as an example in this example, the second contact portion 2c is positioned within a range equal to or less than the radius of the spiral portion 2a centered on the axis L of the spiral portion 2a. Is formed (placed) at a position where the distance is the same as the radius of the spiral portion 2a. The first contact portion 2b and the second contact portion 2c are both formed in a columnar body parallel to the axis L.

  2 to 4, the probe needle 3 has the same diameter as the probe needle 2 and the same pitch and the same length as one end of the spiral portion 3a (upper end side in FIG. 2). And a second contact portion 3c formed on the other end side (lower end side in the figure) of the spiral portion 3a. In this case, the first contact portion 3b is formed (arranged) so as to be located within a range equal to or less than the radius of the spiral portion 3a with the axis L of the spiral portion 3a as the center. Specifically, in this example, as shown in FIG. 3, the first contact portion 3b is formed at a position where the distance from the axis L is the same as the radius of the spiral portion 3a. Similarly, the second contact portion 3c is formed (arranged) so as to be located within a range equal to or less than the radius of the spiral portion 3a centered on the axis L of the spiral portion 3a. In this example, as shown in FIG. 4 as an example, the second contact portion 3c is formed such that the other end side of the spiral portion 3a is bent toward the inside of the spiral portion 3a (close to the axis line L). The second contact portion 2c is formed at a position different from the second contact portion 2c. The first contact portion 3b and the second contact portion 3c are both formed in a columnar body parallel to the axis L.

  In this example, the probe needles 2 and 3 are each formed by winding and bending one metal wire (wire). In addition, a manufacturing method is not limited to this, The manufacturing method which forms each probe needle | hook 2 and 3 simultaneously by etching a metal cylinder can also be employ | adopted.

  As shown in FIG. 2, the probe 1 has a state in which the axes L of the spiral portions 2a and 3a coincide with each other and the spiral portions 2a and 3a are deviated by a half pitch (an example of a "substantially deviated half pitch" in the present invention). In other words, the probe needles 2 and 3 are combined so that the spiral portions 2a and 3a have a double spiral shape as a whole. For this reason, in the probe 1, even if each probe needle 2 and 3 expands and contracts (elastically deforms) along the axis L direction, the probe needles 2 and 3 are reliably in contact with each other as long as the expansion and contraction amount is within a predetermined range. To be avoided. Furthermore, in the probe 1, as shown in the figure, a part of each spiral part 2a, 3a (intermediate part of each spiral part 2a, 3a) is resin-molded, whereby both end parts of each spiral part 2a, 3a are molded. Are protruded from the resin mold portion, and the probe needles 2 and 3 are integrally coupled. In this example, as an example, the probe needles 2 and 3 combined as described above are filled with the resin material 5 in the cylindrical body 4 which is a rigid insulator fitted on the spiral portions 2a and 3a. It is resin molded.

  Next, the configuration of the probe unit 11 including the probe 1 will be described with reference to FIGS.

  As shown in FIGS. 1 and 2, the probe unit 11 includes a plurality of probes 1, a base 12 and a relay board 13. The base 12 is configured by a rigid insulating plate (a plate-like block body). The base 12 is formed with a plurality of mounting holes 14 penetrating in the thickness direction (vertical direction in FIGS. 1 and 2). In this case, the mounting hole 14 has an inner diameter of a region (also referred to as “small-diameter region”) 14a near the surface 12a facing the probing object in the base 12 smaller than the outer diameter of the cylindrical body 4, and each spiral portion 2a, The outer diameter of the cylindrical body 4 is formed to be slightly larger than the outer diameter of the cylindrical body 4, and the inner diameter of a region 14 b near the back surface 12 b with respect to the opposing surface 12 a (also referred to as “large diameter region”) 14 b is formed. . Further, since the probe 1 is configured by combining the two probe needles 2 and 3 in a double spiral shape as described above, the maximum diameter (in this example, the outer diameter of the cylindrical body 4) is also extremely high. It is configured to be compact (small diameter). Therefore, since the inner diameter of the large-diameter region 14b of the mounting hole 14 can be reduced, the formation pitch of the mounting holes 14 can be formed extremely short.

  In the probe 1, the cylindrical body 4 is positioned in the large diameter region 14 b of the mounting hole 14, one in each mounting hole 14, and the first contact portion in each of the spiral portions 2 a and 3 a is in the small diameter region 14 a of the mounting hole 14. It is mounted in a state in which the formation side of 2b and 3b is located and the first contact portions 2b and 3b protrude from the facing surface 12a of the base 12 (the protrusion length is the same). In this case, as described later, the opening on the large-diameter region 14b side in each mounting hole 14 is closed by the relay substrate 13 attached to the back surface 12b side of the base 12, but each probe 1 is on the large-diameter region 14b side. 2 so that the spiral portions 2a and 3a (hereinafter also referred to as "rear end portions of the spiral portions 2a and 3a") located in the position are compressed (elastically deformed), that is, as shown in FIG. In addition, the end portion of the cylindrical body 4 (the end portion on the first contact portion 2b, 3b side) abuts on a step 12c formed at the boundary portion between the small diameter region 14a and the large diameter region 14b in the mounting hole 14, and The two contact portions 2c and 3c are mounted in the mounting holes 14 with their tips (lower ends in the figure) in contact with electrodes 15 and 16 described later. Further, when the opening on the large-diameter region 14b side in each mounting hole 14 is closed by the relay substrate 13 in this way, the end of the cylindrical body 4 is configured to contact the step 12c. The removal of the probe 1 from 14 is prevented.

  As shown in FIGS. 1 and 2, the relay substrate 13 is attached to the base 12 with one surface (upper surface in the drawing) 13 a in contact with the back surface 12 b of the base 12. In addition, as shown in FIG. 5, an electrode 15 having a circular shape in plan view (an example of a concentric circle) and a position surrounding the electrode 15 are provided at a position facing the mounting holes 14 of the base 12 on the surface 13 a of the relay substrate 13. An electrode 16 having a circular shape in a plan view (another example of concentric circles) is formed. In this case, the electrodes 15 and 16 are formed so that their centers substantially coincide with the axis L of the spiral portions 2 a and 3 a in the probe 1. Further, the radius of the electrode 15 is defined to be longer than the distance from the axis L of the second contact portion 3c. Further, the annular electrode 16 is formed so that its inner diameter is larger than the outer diameter of the electrode 15 and smaller than the diameter of each of the spiral portions 2a and 3a, and the outer diameter thereof is that of each of the spiral portions 2a and 3a. The diameter is larger than the diameter and smaller than the inner diameter of the large diameter region 14 b in the mounting hole 14. Thereby, when the probe 1 is mounted in the mounting hole 14, the second contact portion 2c of the probe needle 2 can be mounted regardless of the state in which the probe 1 is rotated about the axis of the spiral portions 2a and 3a. Always contacts the electrode 16, and the second contact portion 3 c of the probe needle 3 can always contact the electrode 15. A pair of lead-out electrodes 17 and 18 corresponding to the respective electrodes 15 and 16 are formed for each probe 1 on the other surface 13b of the relay substrate 13, and the lead-out electrodes 17 are connected through the through holes 19 and the like. Is connected to the electrode 15, and the extraction electrode 18 is connected to the electrode 16.

  Next, the operation of the probe unit 11 including the probe 1 will be described.

  In a state where the probe unit 11 is probed with respect to a probing object (not shown), the tips of the first contact portions 2b and 3b of the probes 1 protruding from the facing surface 12a of the base 12 correspond to the probing object. It is in a state where it is pressed into the relay substrate 13 in contact with the part to be operated. In this case, the spiral portions 2a and 3a are formed to have the same diameter and the same length as a whole, and are combined in a state in which the axis lines L coincide with each other and are shifted by a half pitch (double spiral shape). Therefore, the portions close to the first contact portions 2b and 3b exposed from the resin material 5 in the spiral portions 2a and 3a (hereinafter also referred to as “tip portions of the spiral portions 2a and 3a”) are also included. Are formed in the same diameter and the same length (that is, substantially the same shape), and are combined in a double spiral shape. Accordingly, the probe needles 2 and 3 of the probe 1 are contracted (elastically deformed) in the same state at the tip ends of the spiral portions 2a and 3a, so that the respective first contact portions 2b and 3b are substantially in contact with the probing object. Contact with uniform contact pressure.

  In the probe unit 11, when the first contact portions 2 b and 3 b of the probe 1 are worn due to repeated probing, the probe 1 can be easily removed from the mounting hole 14 by removing the relay substrate 13 from the base 12. It can be removed and replaced. At this time, since the two probe needles 2 and 3 are integrated by resin molding, unlike the configuration in which the probe needles 2 and 3 are individually attached, they can be exchanged extremely easily and in a short time. It has become.

  Thus, in the probe 1, the spiral portions 2a and 3a of the probe needles 2 and 3 are formed with the same diameter and the same pitch, and the probe needles 2 and 3 are connected to the axes L of the spiral portions 2a and 3a. The spiral portions 2a and 3a are combined and configured so as to be shifted by a half pitch. In addition, the first contact portions 2b and 3b and the second contact portions 2c and 3c formed at the respective end portions of the spiral portions 2a and 3a are located within a range not more than the radius of the spiral portions 2a and 3a with the axis L as the center. It is arranged to do.

  Therefore, according to this probe 1, the whole outer diameter can be made compact. Further, since the spiral portions 2a and 3a that contract (elastically deform) in the probing state have the same shape, the first contact portions 2b and 3b of the probe needles 2 and 3 contact the probing object with a substantially uniform contact pressure. As a result, measurement errors due to non-uniform contact pressure can be greatly reduced. Further, according to the probe unit 11 provided with the probe 1, since the outer diameter of the probe 1 is compact, a further fine pitch between the probes 1 can be realized, and the probe unit 11 itself has a small size. Can also be realized.

  In addition, according to the probe 1 and the probe unit 11, since the two probe needles 2 and 3 are integrated by resin molding, unlike the configuration in which the probe needles 2 and 3 are individually attached, In addition, the probe 1 can be attached or exchanged in a short time.

  Furthermore, according to the probe 1 and the probe unit 11, the second contact portions 2 c and 3 c of the probe needles 2 and 3 are arranged so that the distances from the axis L are different from each other, whereby each second contact By forming the electrodes 15 and 16 of the relay substrate 13 in contact with the portions 2c and 3c into two concentric circles (in the above example, circular in plan view and circular in plan view) as described above, the mounting hole When the probe 1 is mounted in 14, the second contact portion 2 c is surely brought into contact with the electrode 16 no matter what state the probe 1 is rotated around the axis of the spiral portions 2 a and 3 a. In addition, the second contact portion 3c can be reliably brought into contact with the electrode 15.

  In addition, this invention is not limited to said structure. For example, in the probe 1 described above, the cylindrical body 4 is externally fitted to the probe needles 2 and 3, and the resin material 5 is filled inside and resin molded, so that the large diameter region 14 b of the mounting hole 14 in the probe 1 is obtained. The outer diameter of the portion accommodated in the large diameter region 14b is precisely defined to the size matched to the inner diameter of the large diameter region 14b, and the axial deflection of the cylindrical body 4 in the large diameter region 14b is reduced, whereby each probe needle Although the displacement in the radial direction of the mounting hole 14 with respect to the second and third needle tips is reduced, a cylindrical body that is coaxial with the axis L of each of the spiral portions 2a and 3a is formed only by the resin material 5, Each probe needle 2 and 3 can also be resin-molded.

  Further, in the probe 1 described above, the probe needles 2 and 3 are almost entirely made of the spiral portions 2a and 3a and a part thereof is resin-molded. However, the portion that is elastically deformed in the probing state is as described above. Since only the tip portions of the spiral portions 2a and 3a are provided, the tip portions of the probe needles 2 and 3 may be formed at least in a spiral shape and combined with each other in a double spiral shape. Further, the first contact portions 2b and 3b and the second contact portions are provided at the end portions of the spiral portions 2a and 3a so that the probing object and the electrodes 15 and 16 of the relay substrate 13 can be contacted more favorably. Although the structure which arrange | positions the contact parts 2c and 3c is employ | adopted, the structure which makes the probing object and each electrode 15 and 16 contact the edge part of the spiral parts 2a and 3a directly is also employable. In this configuration, since the first contact portions 2b and 3b and the second contact portions 2c and 3c can be omitted, the configuration of the probe needles 2 and 3 and hence the probe 1 can be simplified.

  Although not shown, the outer peripheral surface of the cylindrical body 4 (in the case where the probe needles 2 and 3 are integrated only by the resin material 5 without using the cylindrical body 4, the outer periphery of the cylindrical resin material 5 is formed. A configuration in which a convex portion along the axis L direction of the spiral portions 2a and 3a is formed on the surface), and a concave groove that fits the convex portion is formed on the inner surface of the large-diameter region 14b of the mounting hole 14 (in addition, a cylinder) The probe 1 may be elastically deformed in the spiral portions 2a and 3a by fitting the convex portion and the concave groove to form a concave groove in the body 4 or the like and providing a convex portion on the inner surface of the large-diameter region 14b. It is also possible to adopt a configuration in which the mounting hole 14 is mounted in a state in which the rotation about the axis L is impossible. In this configuration, since the electrodes 15 and 16 need only be provided on the portion of the one surface 13a of the relay substrate 13 that contacts the second contact portions 2c and 3c, the electrodes 15 and 16 are not limited to concentric circles, It can be formed into a shape.

  Further, in the probe unit 11 having a configuration in which the number of the probes 1 is small, even if the time required for mounting one probe 1 is increased, there may be no case that a big problem occurs. Therefore, in such a probe unit 11, the probe needles 2 and 3 are fixed to the corresponding electrodes 16 and 15 of the relay substrate 13 without integrating the two probe needles 2 and 3 by resin molding. It is also possible to adopt a configuration that does this. In this configuration, the shapes of the electrodes 15 and 16 formed on the relay substrate 13 are not limited to the above-described circular shape in a plan view or an annular shape in a plan view, and can be various shapes. In addition, the mounting hole 14 does not necessarily require the large-diameter region 14b, and the small-diameter region 14a can be formed over the entire thickness direction of the base 12, thereby simplifying the structure of the base 12. it can.

2 is a perspective view of a probe unit 11. FIG. Sectional drawing which cut | disconnected one mounting hole 14 of the base 12, the probe 1 mounted in this mounting hole 14, and the relay board | substrate 13 along the axis L of the spiral parts 2a and 3a except the probe needles 2 and 3. It is. It is the top view of the probe 1 seen from the 1st contact part 2b, 3b side. It is the bottom view of the probe 1 seen from the 2nd contact part 2c, 3c side. 4 is an enlarged plan view for explaining the configuration of electrodes 15 and 16 formed on a relay substrate 13; FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Probe 2, 3 Probe needle 2a, 3a Spiral part 2b, 3b 1st contact part 2c, 3c 2nd contact part 4 Cylindrical body 5 Resin material 11 Probe unit 12 Base 13 Relay board 14 Mounting hole 11 Probe unit L Axis line

Claims (5)

Two probe needles having a spiral portion formed with the same diameter and the same pitch, a first contact portion formed on one end side of the spiral portion, and a second contact portion formed on the other end side of the spiral portion Prepared,
The first contact portion and the second contact portion are formed so as to be located within a range not more than a radius of the spiral portion around the axis of the spiral portion,
A probe configured by combining the probe needles in a state in which the axes of the spiral portions coincide with each other and the spiral portions are shifted by approximately a half pitch.   2. The probe according to claim 1, wherein each of the probe needles has a part of each of the spiral portions integrally coupled with a resin mold.   The probe according to claim 1 or 2, wherein each of the second contact portions is disposed at a position where distances from the axis are different from each other. A plurality of probes according to claim 1 or 2 are provided,
A plate-like base on which a plurality of mounting holes penetrating in the thickness direction are formed, the probes are mounted in the mounting holes one by one, and the first contact portion of the probe protrudes from one surface side When,
A relay substrate disposed on the other surface side of the base and provided with a pair of electrodes that are in contact with the second contact portions of the probe for each portion corresponding to the mounting hole. Probe unit. A plurality of probes according to claim 3 are provided,
A plate-like base in which a plurality of mounting holes penetrating in the thickness direction are formed, the probes are mounted in the mounting holes one by one, and the first contact portion of the probe protrudes from one surface side When,
A relay substrate disposed on the other surface side of the base and provided with a pair of electrodes that are in contact with the second contact portions of the probe for each portion corresponding to the mounting hole. ,
The pair of electrodes is a probe unit formed in two concentric circles in which the radius of the spiral portion with respect to the axis is defined in accordance with the distance from the axis of each second contact portion.

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