JP2002141359A5 - - Google Patents

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Publication number
JP2002141359A5
JP2002141359A5 JP2001245939A JP2001245939A JP2002141359A5 JP 2002141359 A5 JP2002141359 A5 JP 2002141359A5 JP 2001245939 A JP2001245939 A JP 2001245939A JP 2001245939 A JP2001245939 A JP 2001245939A JP 2002141359 A5 JP2002141359 A5 JP 2002141359A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001245939A
Other languages
Japanese (ja)
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JP4986347B2 (ja
JP2002141359A (ja
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Publication date
Application filed filed Critical
Priority to JP2001245939A priority Critical patent/JP4986347B2/ja
Priority claimed from JP2001245939A external-priority patent/JP4986347B2/ja
Publication of JP2002141359A publication Critical patent/JP2002141359A/ja
Publication of JP2002141359A5 publication Critical patent/JP2002141359A5/ja
Application granted granted Critical
Publication of JP4986347B2 publication Critical patent/JP4986347B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2001245939A 2000-08-25 2001-08-14 半導体装置の作製方法 Expired - Fee Related JP4986347B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001245939A JP4986347B2 (ja) 2000-08-25 2001-08-14 半導体装置の作製方法

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2000256530 2000-08-25
JP2000256530 2000-08-25
JP2000-256530 2000-08-25
JP2001245939A JP4986347B2 (ja) 2000-08-25 2001-08-14 半導体装置の作製方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2012001720A Division JP2012089878A (ja) 2000-08-25 2012-01-09 発光装置

Publications (3)

Publication Number Publication Date
JP2002141359A JP2002141359A (ja) 2002-05-17
JP2002141359A5 true JP2002141359A5 (zh) 2008-07-10
JP4986347B2 JP4986347B2 (ja) 2012-07-25

Family

ID=26598536

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001245939A Expired - Fee Related JP4986347B2 (ja) 2000-08-25 2001-08-14 半導体装置の作製方法

Country Status (1)

Country Link
JP (1) JP4986347B2 (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012089878A (ja) * 2000-08-25 2012-05-10 Semiconductor Energy Lab Co Ltd 発光装置
JP2004138958A (ja) 2002-10-21 2004-05-13 Semiconductor Energy Lab Co Ltd 表示装置
KR101100875B1 (ko) * 2003-12-11 2012-01-02 삼성전자주식회사 결정화용 레이저빔 조사 장치, 이를 이용한 결정화 방법및 이를 포함하는 박막 트랜지스터 표시판의 제조 방법
JP5110803B2 (ja) * 2006-03-17 2012-12-26 キヤノン株式会社 酸化物膜をチャネルに用いた電界効果型トランジスタ及びその製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2939865B2 (ja) * 1995-07-03 1999-08-25 カシオ計算機株式会社 薄膜半導体装置およびそれを用いた表示装置
JPH08316486A (ja) * 1995-05-17 1996-11-29 Sanyo Electric Co Ltd 薄膜半導体素子
JPH09289318A (ja) * 1996-04-19 1997-11-04 Sharp Corp 薄膜トランジスタ及びその製造方法
JPH1093091A (ja) * 1996-09-13 1998-04-10 Toshiba Corp 半導体装置の製造方法
JPH1098193A (ja) * 1996-09-19 1998-04-14 Sony Corp 薄膜半導体装置
JPH11103064A (ja) * 1997-09-26 1999-04-13 Sharp Corp 半導体装置の製造方法

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