JP2002110703A - Package for electronic component housing - Google Patents

Package for electronic component housing

Info

Publication number
JP2002110703A
JP2002110703A JP2000294952A JP2000294952A JP2002110703A JP 2002110703 A JP2002110703 A JP 2002110703A JP 2000294952 A JP2000294952 A JP 2000294952A JP 2000294952 A JP2000294952 A JP 2000294952A JP 2002110703 A JP2002110703 A JP 2002110703A
Authority
JP
Japan
Prior art keywords
electronic component
concave portion
resin
stripe
recess
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000294952A
Other languages
Japanese (ja)
Inventor
Hidenori Tanaka
秀憲 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP2000294952A priority Critical patent/JP2002110703A/en
Publication of JP2002110703A publication Critical patent/JP2002110703A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/1515Shape
    • H01L2924/15153Shape the die mounting substrate comprising a recess for hosting the device
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/161Cap
    • H01L2924/1615Shape
    • H01L2924/16195Flat cap [not enclosing an internal cavity]

Landscapes

  • Die Bonding (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

PROBLEM TO BE SOLVED: To solve the problem of electronic components unable to be adhered firmly and fixed in accompanying of miniaturization of the electronic components. SOLUTION: In a package for electronic component housing comprising an insulation base substance 1 having a recess part 1a for housing the electronic components 3 and a cover body 2, adhering and fixing the electronic components 3 via a resin 5 on the bottom face of the recess part 1a of the insulation base substance 1 and sealing the recess part 1a by the cover body 2, a stripe-like projection part 6 is provided on the bottom face of the recess part 1a of the insulation base substance 1, and the height of the projection part 6 is gradually reduced, from the center of the bottom face of the recess part 1a toward the outer peripheral part.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、半導体素子や弾性
表面波素子等の電子部品を収容する電子部品収納用パッ
ケージに関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a package for housing electronic components such as semiconductor devices and surface acoustic wave devices.

【0002】[0002]

【従来技術】従来、半導体素子や表面弾性波素子等の電
子部品を収容するための電子部品収納用パッケージは、
酸化アルミニウム質焼結体等の電気絶縁材料から成り、
その上面の略中央部に電子部品を収容するための凹部及
び該凹部周辺から外表面にかけて導出されたタングステ
ン、モリブデン、マンガン等の高融点金属粉末から成る
メタライズ配線層を有する絶縁基体と、蓋体とから構成
されており、絶縁基体の凹部底面に電子部品をエポキシ
樹脂等の接着用の樹脂を介して接着固定するとともに電
子部品の各電極をボンディングワイヤを介して電気的に
接続し、最後に絶縁基体上面に蓋体をガラス、樹脂等の
封止部材により接合させ、内部に電子部品を気密封止す
ることによって最終製品としての電子装置となる。
2. Description of the Related Art Conventionally, electronic component storage packages for storing electronic components such as semiconductor elements and surface acoustic wave elements have been developed.
It is made of an electrical insulating material such as an aluminum oxide sintered body,
An insulating base having a concave portion for accommodating an electronic component at a substantially central portion of an upper surface thereof, a metallized wiring layer made of a refractory metal powder of tungsten, molybdenum, manganese or the like led out from the periphery of the concave portion to the outer surface; The electronic component is bonded and fixed to the bottom of the concave portion of the insulating base via a bonding resin such as an epoxy resin, and each electrode of the electronic component is electrically connected via a bonding wire. The lid is joined to the upper surface of the insulating base with a sealing member such as glass or resin, and the electronic components are hermetically sealed inside to provide an electronic device as a final product.

【0003】なお、電子部品の凹部底面への接着は、例
えば、まず凹部底面に未硬化のエポキシ樹脂等の接着用
の樹脂を塗付し、次に凹部底面上に電子部品を位置決め
載置するとともに電子部品に適当な荷重を印加し、電子
部品の下面と凹部底面との間に樹脂を濡れ広がらせて充
填し、最後にこの未硬化の樹脂を加熱硬化することによ
り行われる。
For bonding the electronic component to the bottom surface of the concave portion, for example, first, an uncured epoxy resin or the like is applied to the bottom surface of the concave portion, and then the electronic component is positioned and mounted on the bottom surface of the concave portion. At the same time, an appropriate load is applied to the electronic component, the resin is wet-spread between the lower surface of the electronic component and the bottom surface of the concave portion to fill the resin, and finally, the uncured resin is heated and cured.

【0004】また、近時、電子部品は数mm角以下の小
型化されたものが多用され、この場合、電子部品と凹部
底面との接着面積が狭く接着強度が低下しやすいことか
ら、凹部底面に縞状の突起部を設け、この縞状の突起部
上に跨らせて電子部品を載置することにより電子部品の
下面と凹部底面との間に一定のスペースを確保し、この
スペース内に樹脂を充填することにより樹脂のボリュー
ムを確保し、電子部品の接着強度が低下することを防止
するようにした構造が多用されつつある。
In recent years, electronic components which have been reduced in size to several mm square or less are frequently used. In this case, since the bonding area between the electronic component and the bottom surface of the concave portion is small and the adhesive strength tends to decrease, the bottom surface of the concave portion is often used. A stripe-shaped projection is provided on the electronic component, and the electronic component is placed over the stripe-shaped projection to secure a certain space between the lower surface of the electronic component and the bottom surface of the concave portion. There is a growing use of a structure in which the resin is filled with a resin to secure the volume of the resin and prevent the adhesive strength of the electronic component from being reduced.

【0005】[0005]

【発明が解決しようとする課題】しかしながら、この従
来の電子部品収納用パッケージにおいては、縞状の突起
部の上面がほぼ平坦で、電子部品の下面と縞状の突起部
の上面との間にほとんど隙間がないことから、電子部品
と縞状の突起部の上面との間には樹脂がほとんど入り込
まず樹脂の量が不足し、この電子部品と突起部との接す
る部分における世着強度が極めて低いものとなり、その
結果、電子部品の凹部底面に対する接着強度を十分に強
くすることができなくなってしまうという問題があっ
た。
However, in this conventional electronic component housing package, the upper surface of the striped projection is substantially flat, and the gap between the lower surface of the electronic component and the upper surface of the striped projection is provided. Since there is almost no gap, the resin hardly enters between the electronic component and the upper surface of the stripe-shaped protrusion, and the amount of resin is insufficient, and the adhesion strength at the contact portion between the electronic component and the protrusion is extremely low. As a result, there has been a problem that the bonding strength of the electronic component to the bottom surface of the concave portion cannot be sufficiently increased.

【0006】本発明は上記従来技術における問題点に鑑
みてなされたものであり、その目的は、電子部品が数m
m角以下の小型のものであったとしても、電子部品を凹
部底面に樹脂を介して強固に接着固定することが可能な
電子部品収納用パッケージを提供することにある。
The present invention has been made in view of the above-mentioned problems in the prior art, and has as its object to reduce the number of electronic components to several meters.
An object of the present invention is to provide an electronic component housing package that can firmly adhere and fix an electronic component to the bottom surface of a concave portion via a resin even if the electronic component is a small one having a size of m square or less.

【0007】[0007]

【課題を解決するための手段】本発明の電子部品収納用
パッケージは、電子部品を収容するための凹部を有する
絶縁基体と蓋体とから成り、絶縁基体の凹部底面に電子
部品を樹脂を介して接着固定するとともに凹部を前記蓋
体で封止するようになした電子部品収納用パッケージで
あって、前記絶縁基体の凹部底面に縞状の突起部を設け
るとともに該突起部の高さが凹部底面の中心から外周部
に向かって漸次低くなっていることを特徴とするもので
ある。
A package for storing an electronic component according to the present invention comprises an insulating substrate having a concave portion for accommodating the electronic component and a lid, and the electronic component is provided on the bottom surface of the concave portion of the insulating substrate via a resin. A package for electronic component storage, wherein the recess is sealed with the lid, and a stripe-shaped projection is provided on the bottom surface of the recess of the insulating base, and the height of the projection is reduced. It is characterized in that it gradually decreases from the center of the bottom surface to the outer peripheral portion.

【0008】また本発明の電子部品収納用パッケージ
は、前記縞状突起部の最大高低差が5μm乃至15μm
であることを特徴とするものである。
Further, in the electronic component housing package of the present invention, the maximum height difference of the stripe-shaped projections is 5 μm to 15 μm.
It is characterized by being.

【0009】本発明の電子部品収納用パッケージによれ
ば、絶縁基体の凹部底面に縞状の突起部を設けるととも
に該突起部の高さが凹部底面の中心から外周部に向かっ
て漸次低くなっていることから、電子部品の下面と突起
部の上面との間に、電子部品の中心から外周部に向かっ
て漸次広くなるような隙間を形成させることができ、こ
の隙間内に樹脂を良好に入り込ませることができるた
め、電子部品の下面と突起部の上面との間に一定量の樹
脂を介在させて接着強度を確保することができ、その結
果、電子部品を凹部底面に強固に接着固定することが可
能となる。
According to the electronic component housing package of the present invention, the stripe-shaped projection is provided on the bottom surface of the concave portion of the insulating base, and the height of the projected portion gradually decreases from the center of the bottom surface of the concave portion toward the outer peripheral portion. Therefore, a gap can be formed between the lower surface of the electronic component and the upper surface of the protruding portion so as to gradually increase from the center of the electronic component toward the outer peripheral portion, and the resin can enter the gap well. Therefore, a certain amount of resin can be interposed between the lower surface of the electronic component and the upper surface of the protrusion to secure the adhesive strength, and as a result, the electronic component is firmly bonded and fixed to the bottom surface of the concave portion. It becomes possible.

【0010】[0010]

【発明の実施の形態】次に本発明を添付図面に基づき詳
細に説明する。図1および図2は本発明の電子部品収納
用パッケージの一実施例を示し、1は電気絶縁材料から
成る絶縁基体、2は蓋体である。この絶縁基体1と蓋体
2とで半導体素子や表面弾性波素子等の電子部品3を収
容するための容器4が構成される。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be described in detail with reference to the accompanying drawings. 1 and 2 show an embodiment of an electronic component storage package according to the present invention, wherein 1 is an insulating base made of an electrically insulating material, and 2 is a lid. The insulating base 1 and the lid 2 constitute a container 4 for housing an electronic component 3 such as a semiconductor element or a surface acoustic wave element.

【0011】前記絶縁基体1は酸化アルミニウム質焼結
体、ムライト質焼結体、窒化アルミニウム質焼結体等の
電気絶縁材料から成り、例えば、酸化アルミニウム質焼
結体から成る場合、酸化アルミニウム、酸化珪素、酸化
マグネシウム、酸化カルシウム等の原料粉末に適当な有
機バインダー、溶剤等を添加混合して泥漿物を作るとと
もに該泥漿物をドクターブレード法やカレンダーロール
法等によりシート状に成型してセラミックグリーンシー
トを得、しかる後、前記セラミックグリーンシートに適
当な打ち抜き加工を施すとともにこれを複数枚積層し、
約1600℃の高温で焼成することによって製作され
る。
The insulating substrate 1 is made of an electrically insulating material such as an aluminum oxide sintered body, a mullite sintered body, an aluminum nitride sintered body, and the like. An appropriate organic binder, a solvent, and the like are added to and mixed with raw material powders such as silicon oxide, magnesium oxide, and calcium oxide to form a slurry, and the slurry is formed into a sheet by a doctor blade method, a calendar roll method, or the like to form a ceramic. Obtain a green sheet, and then, after performing appropriate punching processing on the ceramic green sheet and laminating a plurality of these,
It is manufactured by firing at a high temperature of about 1600 ° C.

【0012】前記絶縁基体1はその上面中央部に電子部
品3を収容するための四角形状の凹部1aが設けてある
とともに該凹部1aの底面には縞状の突起部6が形成さ
れており、電子部品3がこの縞状の突起部6に跨るよう
にして載置されエポキシ樹脂等の樹脂5を介して凹部1
a底面に接着固定される。
The insulating base 1 is provided with a rectangular recess 1a for accommodating the electronic component 3 in the center of the upper surface thereof, and a stripe-like projection 6 is formed on the bottom of the recess 1a. The electronic component 3 is placed so as to straddle the stripe-shaped protrusion 6, and the recess 1 is interposed via a resin 5 such as an epoxy resin.
a Adhesively fixed to the bottom surface.

【0013】前記電子部品3の凹部1a底面への接着固
定は、まず縞状の突起部6が形成されている凹部1a底
面に未硬化の熱硬化性エポキシ樹脂等の接着用の樹脂を
塗付し、次に電子部品3を縞状の突起部6上に跨らせて
位置決め載置するとともに電子部品3に適当な荷重を印
加し、接着用の樹脂を電子部品3の下面と凹部1a上面
との間に塗れ広がらせ、その後、熱等で接着用の樹脂を
硬化させることにより行われる。
The bonding and fixing of the electronic component 3 to the bottom surface of the concave portion 1a is performed by first applying a bonding resin such as an uncured thermosetting epoxy resin to the bottom surface of the concave portion 1a where the stripe-shaped projections 6 are formed. Then, the electronic component 3 is positioned and mounted so as to straddle the stripe-shaped protrusions 6, and an appropriate load is applied to the electronic component 3, and a resin for bonding is applied to the lower surface of the electronic component 3 and the upper surface of the recess 1 a. This is performed by spreading the resin between the layers and then curing the bonding resin with heat or the like.

【0014】なお前記縞状の突起部6は、電子部品3と
凹部1a底面との間に一定のスペースを確保するための
スペーサーとして作用し、このスペース内に樹脂5を充
填させることにより電子部品3の絶縁基体1aに対する
接着強度を向上させるようになっている。
The striped projections 6 act as spacers for securing a certain space between the electronic component 3 and the bottom of the recess 1a. By filling the space with the resin 5, the electronic component 3 is filled. 3 to improve the adhesive strength to the insulating substrate 1a.

【0015】本発明の電子部品収納用パッケージにおい
ては、凹部1aの底面に縞状の突起部6を設けるととも
に、各突起部6の高さを凹部1a底面の中心から外周部
に向かって漸次低くしておくことが重要である。
In the electronic component housing package of the present invention, the stripe-shaped projections 6 are provided on the bottom surface of the recess 1a, and the height of each projection 6 is gradually reduced from the center of the bottom surface of the recess 1a toward the outer periphery. It is important to keep it.

【0016】この場合、縞状の突起部6の高さを凹部1
a底面の中心から外周部に向かって漸次低くなるように
形成しておくことにより、電子部品3の下面と突起部6
の上面との間に、電子部品3の外縁に向かって漸次広く
なるような隙間を形成させることができ、この隙間に、
電子部品3を凹部1a底面に接着するための接着用の樹
脂を良好に入り込ませ、電子部品3と突起部6との間に
一定量の樹脂5を介在させて接着強度を確保することが
でき、その結果、電子部品3を凹部1a底面に強固に接
着固定することが可能となる。
In this case, the height of the stripe-shaped protrusion 6 is adjusted to the height of the recess 1.
a The lower surface of the electronic component 3 and the protrusion 6 are formed by gradually lowering from the center of the bottom surface toward the outer peripheral portion.
Between the upper surface of the electronic component 3 and the upper surface of the electronic component 3.
Adhesive resin for adhering the electronic component 3 to the bottom surface of the recess 1a can be satisfactorily penetrated, and a certain amount of the resin 5 can be interposed between the electronic component 3 and the protrusion 6 to secure the adhesive strength. As a result, the electronic component 3 can be firmly bonded and fixed to the bottom surface of the concave portion 1a.

【0017】前記縞状の突起部6は、例えば、タングス
テン、モリブデン、マンガン等の高融点金属粉末から成
り、該高融点金属粉末に適当な有機溶剤、溶媒を添加混
合して得た金属ペーストを従来周知のスクリーン印刷法
等の厚膜手法を採用し、絶縁基体1の凹部1a底面とな
るセラミックグリーンシートに、予め、その高さが凹部
1a底面の中心から外周部に向かって漸次低くなるよう
に印刷塗布しておくことによって絶縁基体1の凹部1a
底面に被着形成される。なお、突起部となる金属ペース
トの高さを、中心から外周に向かって漸次低くなるよう
にするには、例えば、複数パターンのスクリーン製版を
用い、金属ペーストを中心から外周にかけて複数回印刷
塗布する方法や、縞状の所定パターンに印刷塗布した金
属ペーストの外周部を加圧する方法等の方法を用いるこ
とができる。
The striped projections 6 are made of a high melting point metal powder such as tungsten, molybdenum, manganese or the like. A metal paste obtained by adding a suitable organic solvent and a solvent to the high melting point metal powder is mixed. A conventionally well-known thick film method such as a screen printing method is adopted, and the height of the ceramic green sheet serving as the bottom surface of the concave portion 1a of the insulating substrate 1 is gradually reduced in advance from the center of the bottom surface of the concave portion 1a toward the outer peripheral portion. The concave portion 1a of the insulating substrate 1
It is formed on the bottom surface. In order to make the height of the metal paste that becomes the protrusion gradually lower from the center to the outer periphery, for example, using a plurality of patterns of screen printing, the metal paste is printed and applied a plurality of times from the center to the outer periphery. A method such as a method or a method of pressing an outer peripheral portion of a metal paste printed and applied in a predetermined stripe pattern can be used.

【0018】また、前記縞状の突起部6は、最大高低差
が5μm未満では電子部品3の下面と突起部6の上面と
の間に十分な隙間を形成することができず電子部品の接
着強度が低下する傾向にあり、15μmを超えると、電
子部品3と突起部6との隙間が大きくなり過ぎ電子部品
3が突起部6上で一方向に斜めに傾いて接着され易く電
子部品3の接着強度が劣化する傾向にあり、また後述す
るボンディングワイヤを正確に電子部品3の電極に接続
させることが困難となる。従って、前記縞状の突起部6
は、その最大高低差を5μm乃至15μmの範囲として
おくことが好ましい。
If the maximum height difference of the stripe-shaped projections 6 is less than 5 μm, a sufficient gap cannot be formed between the lower surface of the electronic component 3 and the upper surface of the projection 6. When the strength exceeds 15 μm, the gap between the electronic component 3 and the projection 6 becomes too large, and the electronic component 3 is inclined obliquely in one direction on the projection 6 and is easily adhered. The adhesive strength tends to deteriorate, and it becomes difficult to accurately connect a bonding wire described later to the electrode of the electronic component 3. Therefore, the stripe-shaped protrusion 6
It is preferable that the maximum height difference is set in a range of 5 μm to 15 μm.

【0019】更に前記縞状の突起部6は、その最大高さ
が約25μm〜35μmの高さとなるように形成してお
くことが好ましく、凹部1a底面と電子部品3との間に
十分なスペースを確保することができるとともに、縞状
の突起部6にカケ、剥離等の不具合が生じることを効果
的に防止することができる。
Further, it is preferable that the stripe-shaped projections 6 are formed so that the maximum height thereof is about 25 μm to 35 μm, and a sufficient space is provided between the bottom surface of the recess 1 a and the electronic component 3. Can be secured, and the occurrence of defects such as chipping and peeling in the striped projections 6 can be effectively prevented.

【0020】前記縞状の突起部6は、タングステン、モ
リブデン、マンガン等の高融点金属粉末から成る場合、
その表面にニッケル、金等のめっき層を1〜20μm程
度の厚みに被着させておくと、その酸化腐蝕を効果的に
防止し、電子部品をより一層容易かつ確実に接着するこ
とができる。従って、前記縞状の突起部6は、その表面
にニッケル、金等のめっき層を1〜20μmの厚みに被
着させておくことが好ましい。
When the striped projections 6 are made of a high melting point metal powder such as tungsten, molybdenum, and manganese,
If a plating layer of nickel, gold, or the like is applied to the surface to a thickness of about 1 to 20 μm, the oxidation corrosion can be effectively prevented, and the electronic component can be more easily and reliably bonded. Accordingly, it is preferable that a plating layer of nickel, gold, or the like is applied to the surface of the stripe-shaped protrusion 6 to a thickness of 1 to 20 μm.

【0021】前記縞状の突起部6は、更に各突起部の左
右上端の角部を円弧状に面取りした形状としておくこと
が好ましく、電子部品3の下面と突起部6との間に接着
用の樹脂をより一層良好に入り込ませることができる。
It is preferable that the stripe-shaped projections 6 are further formed in such a manner that corners at upper right and left ends of each projection are chamfered in an arc shape, and an adhesive between the lower surface of the electronic component 3 and the projection 6 is formed. Can be more favorably penetrated.

【0022】前記縞状の突起部6は、その縦断面形の幅
が突起部6の底部から上面に向かって漸次狭くなるよう
にして形成しておくと、電子部品3と凹部1aとの間に
形成されるスペースをより一層大きくして充填される樹
脂5の量をより大きく確保することができるとともに、
樹脂量が小さくなる領域である突起部6と電子部品3と
の接触面をより小さくすることができ、電子部品3を凹
部1a底面により一層強固に接着固定することができ
る。従って、前記縞状の突起部6は、その縦断面形の幅
が突起部6の底部から上面に向かって漸次狭くなるよう
にして形成しておくことが好ましい。
If the stripe-shaped projections 6 are formed so that the width of the vertical cross section gradually narrows from the bottom to the upper surface of the projections 6, the gap between the electronic component 3 and the recess 1a is formed. And the amount of the resin 5 to be filled is further increased by increasing the space formed in
The contact area between the protrusion 6 and the electronic component 3, which is a region where the amount of resin is reduced, can be made smaller, and the electronic component 3 can be more firmly bonded and fixed to the bottom surface of the recess 1a. Therefore, it is preferable that the stripe-shaped projections 6 are formed such that the width of the vertical cross section gradually becomes narrower from the bottom to the upper surface of the projections 6.

【0023】また前記絶縁基体1はその凹部1a周辺か
ら容器4の外部にかけてメタライズ配線層7が被着形成
されており、該メタライズ配線層7の凹部1a周辺部は
電子部品3の各電極がボンディングワイヤ8を介し電気
的に接続され、また容器4の外部に導出された部位は錫
−鉛半田等の低融点ロウ材を介して外部電気回路と接続
される。
The metallized wiring layer 7 is formed on the insulating substrate 1 from the periphery of the concave portion 1a to the outside of the container 4, and each electrode of the electronic component 3 is bonded to the peripheral portion of the metallized wiring layer 7 at the concave portion 1a. The part which is electrically connected through the wire 8 and led out of the container 4 is connected to an external electric circuit through a low melting point brazing material such as tin-lead solder.

【0024】前記メタライズ配線層7はタングステン、
モリブデン、マンガン等の高融点金属粉末から成り、該
高融点金属粉末に適当な有機溶剤、溶媒を添加混合して
得た金属ペーストを従来周知のスクリーン印刷法等の厚
膜手法を採用し、絶縁基体1となるセラミックグリーン
シートに予め印刷塗布しておくことによって絶縁基体1
の凹部1a周辺から容器4の外部にかけて被着形成され
る。
The metallized wiring layer 7 is made of tungsten,
A metal paste obtained by adding a suitable organic solvent and a solvent to the high melting point metal powder such as molybdenum, manganese, etc., and adopting a conventionally known thick film method such as a screen printing method. The insulating substrate 1 is printed and coated on a ceramic green sheet serving as the substrate 1 in advance.
From the periphery of the concave portion 1 a to the outside of the container 4.

【0025】更に前記絶縁基体1上面には蓋体2が封止
部材9を介して接合され、これによって絶縁基体1の凹
部1aはその内部が蓋体2によって気密に封止される。
Further, a lid 2 is joined to the upper surface of the insulating base 1 via a sealing member 9, whereby the inside of the recess 1 a of the insulating base 1 is hermetically sealed by the lid 2.

【0026】前記蓋体2は、鉄−ニッケル−コバルト合
金、酸化アルミニウム質焼結体、ムライト質焼結体、窒
化アルミニウム質焼結体等から成り、例えば酸化アルミ
ニウム質焼結体から成る場合、酸化アルミニウム、酸化
マグネシウム、酸化カルシウム等の原料粉末を従来周知
のプレス成形法を採用することによって成型するととも
にこれを約1500℃の温度で焼成することによって形
成される。
The lid 2 is made of an iron-nickel-cobalt alloy, an aluminum oxide sintered body, a mullite sintered body, an aluminum nitride sintered body, or the like. It is formed by molding a raw material powder such as aluminum oxide, magnesium oxide, calcium oxide or the like by using a conventionally known press molding method, and firing it at a temperature of about 1500 ° C.

【0027】かくしてこの電子部品収納用パッケージに
よれば、絶縁基体1の凹部1a底面に電子部品3を樹脂
5を介して接着し、次に前記電子部品3の各電極をメタ
ライズ配線層7にボンディングワイヤ8を介して電気的
に接続させ、最後に絶縁基体1の上面に蓋体2をガラ
ス、樹脂等から成る封止部材9を介して接合させ、絶縁
基体1と蓋体2とから成る容器4内部に電子部品3を気
密に収容することによって最終製品としての電子装置と
なる。
Thus, according to this electronic component storage package, the electronic component 3 is bonded to the bottom surface of the concave portion 1a of the insulating base 1 via the resin 5, and then each electrode of the electronic component 3 is bonded to the metallized wiring layer 7. A container made of the insulating base 1 and the lid 2 is electrically connected via wires 8 and finally the lid 2 is joined to the upper surface of the insulating base 1 via a sealing member 9 made of glass, resin or the like. An electronic device as a final product is obtained by hermetically housing the electronic component 3 inside the electronic device 4.

【0028】なお、本発明は上記実施例に限定されるも
のではなく、本発明の要旨を逸脱しない範囲での種々の
変更・改良を加えることは何ら差し支えない。例えば、
上記実施例においては絶縁基体を酸化アルミニウム質焼
結体等を用いた場合について説明したが、絶縁基体とし
てプラスチック等の樹脂材料製や有機材料と無機材料と
の複合材料製のものを用いてもよい。
The present invention is not limited to the above embodiment, and various changes and improvements may be made without departing from the spirit of the present invention. For example,
In the above embodiment, the case where the insulating substrate is made of aluminum oxide sintered body or the like is described. However, the insulating substrate may be made of a resin material such as plastic or a composite material of an organic material and an inorganic material. Good.

【0029】[0029]

【発明の効果】本発明の電子部品収納用パッケージによ
れば、絶縁基体の凹部底面に縞状の突起部を設けるとと
もに該突起部の高さが凹部底面の中心から外周部に向か
って漸次低くなっていることから、電子部品の下面と突
起部の上面との間に、電子部品の中心から外周部に向か
って漸次広くなるような隙間を形成させることができ、
この隙間内に樹脂を良好に入り込ませることができるた
め、電子部品の下面と突起部の上面との間に一定量の樹
脂を介在させて接着強度を確保することができ、その結
果、電子部品を凹部底面に強固に接着固定することが可
能となる。
According to the electronic component housing package of the present invention, the stripe-shaped projection is provided on the bottom surface of the concave portion of the insulating base, and the height of the projected portion gradually decreases from the center of the bottom surface of the concave portion toward the outer peripheral portion. Therefore, a gap can be formed between the lower surface of the electronic component and the upper surface of the protruding portion so as to gradually increase from the center of the electronic component toward the outer peripheral portion,
Since the resin can be satisfactorily penetrated into the gap, a certain amount of resin can be interposed between the lower surface of the electronic component and the upper surface of the protrusion to secure the adhesive strength. Can be firmly bonded and fixed to the bottom surface of the concave portion.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施例を示す断面図である。FIG. 1 is a sectional view showing an embodiment of the present invention.

【図2】本発明の一実施例を示す平面図である。FIG. 2 is a plan view showing one embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1・・・・絶縁基体 1a・・・凹部 2・・・・蓋体 3・・・・電子部品 4・・・・容器 5・・・・樹脂 6・・・・縞状の突起部 7・・・・メタライズ配線層 8・・・・ボンディングワイヤ 9・・・・封止部材 DESCRIPTION OF SYMBOLS 1 ... Insulating base 1a ... Depression 2 ... Lid 3 ... Electronic components 4 ... Container 5 ... Resin 6 ... Stripe-shaped protrusion 7 ... ... Metalized wiring layer 8 ... Bonding wire 9 ... Sealing member

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】電子部品を収容するための凹部を有する絶
縁基体と蓋体とから成り、絶縁基体の凹部底面に電子部
品を樹脂を介して接着固定するとともに凹部を前記蓋体
で封止するようになした電子部品収納用パッケージであ
って、 前記絶縁基体の凹部底面に縞状の突起部を設けるととも
に該突起部の高さが凹部底面の中心から外周部に向かっ
て漸次低くなっていることを特徴とする電子部品収納用
パッケージ。
An electronic device comprising: an insulating base having a concave portion for accommodating an electronic component; and a lid, wherein the electronic component is bonded and fixed to a bottom surface of the concave portion of the insulating base via a resin, and the concave portion is sealed with the lid. An electronic component housing package as described above, wherein a stripe-shaped protrusion is provided on the bottom surface of the recess of the insulating base, and the height of the protrusion gradually decreases from the center of the bottom surface of the recess toward the outer periphery. A package for storing electronic components, characterized in that:
【請求項2】前記縞状突起部の最大高低差が5μm乃至
15μmであることを特徴とする請求項1に記載の電子
部品収納用パッケージ。
2. The electronic component storage package according to claim 1, wherein the maximum height difference of the stripe-shaped projections is 5 μm to 15 μm.
JP2000294952A 2000-09-27 2000-09-27 Package for electronic component housing Pending JP2002110703A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000294952A JP2002110703A (en) 2000-09-27 2000-09-27 Package for electronic component housing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000294952A JP2002110703A (en) 2000-09-27 2000-09-27 Package for electronic component housing

Publications (1)

Publication Number Publication Date
JP2002110703A true JP2002110703A (en) 2002-04-12

Family

ID=18777457

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000294952A Pending JP2002110703A (en) 2000-09-27 2000-09-27 Package for electronic component housing

Country Status (1)

Country Link
JP (1) JP2002110703A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011047905A (en) * 2009-08-28 2011-03-10 Mitsubishi Heavy Ind Ltd Installation method of ultrasonic vibrator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011047905A (en) * 2009-08-28 2011-03-10 Mitsubishi Heavy Ind Ltd Installation method of ultrasonic vibrator

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