JP2002090633A - 顕微鏡 - Google Patents
顕微鏡Info
- Publication number
- JP2002090633A JP2002090633A JP2000283296A JP2000283296A JP2002090633A JP 2002090633 A JP2002090633 A JP 2002090633A JP 2000283296 A JP2000283296 A JP 2000283296A JP 2000283296 A JP2000283296 A JP 2000283296A JP 2002090633 A JP2002090633 A JP 2002090633A
- Authority
- JP
- Japan
- Prior art keywords
- objective lens
- correction value
- observation
- sample
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 12
- 230000008859 change Effects 0.000 claims description 4
- 238000007689 inspection Methods 0.000 abstract description 7
- 230000000007 visual effect Effects 0.000 description 19
- 238000005286 illumination Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 6
- 238000003384 imaging method Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000000470 constituent Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
Landscapes
- Microscoopes, Condenser (AREA)
- Lenses (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000283296A JP2002090633A (ja) | 2000-09-19 | 2000-09-19 | 顕微鏡 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000283296A JP2002090633A (ja) | 2000-09-19 | 2000-09-19 | 顕微鏡 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2002090633A true JP2002090633A (ja) | 2002-03-27 |
JP2002090633A5 JP2002090633A5 (enrdf_load_stackoverflow) | 2007-11-01 |
Family
ID=18767681
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000283296A Pending JP2002090633A (ja) | 2000-09-19 | 2000-09-19 | 顕微鏡 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2002090633A (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007272117A (ja) * | 2006-03-31 | 2007-10-18 | Seiko Precision Inc | 顕微鏡、顕微鏡の制御方法、及び顕微鏡の制御プログラム |
JP2008299027A (ja) * | 2007-05-31 | 2008-12-11 | Olympus Corp | 顕微鏡装置、該制御プログラム、及び該制御方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03296011A (ja) * | 1990-04-16 | 1991-12-26 | Olympus Optical Co Ltd | 顕微鏡変倍装置 |
JPH06313850A (ja) * | 1993-04-28 | 1994-11-08 | Olympus Optical Co Ltd | 顕微鏡の像ズレ補正装置 |
-
2000
- 2000-09-19 JP JP2000283296A patent/JP2002090633A/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03296011A (ja) * | 1990-04-16 | 1991-12-26 | Olympus Optical Co Ltd | 顕微鏡変倍装置 |
JPH06313850A (ja) * | 1993-04-28 | 1994-11-08 | Olympus Optical Co Ltd | 顕微鏡の像ズレ補正装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007272117A (ja) * | 2006-03-31 | 2007-10-18 | Seiko Precision Inc | 顕微鏡、顕微鏡の制御方法、及び顕微鏡の制御プログラム |
JP2008299027A (ja) * | 2007-05-31 | 2008-12-11 | Olympus Corp | 顕微鏡装置、該制御プログラム、及び該制御方法 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070918 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20070918 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20101026 |
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A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110215 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20110712 |