JP2002086351A5 - - Google Patents

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Publication number
JP2002086351A5
JP2002086351A5 JP2001195330A JP2001195330A JP2002086351A5 JP 2002086351 A5 JP2002086351 A5 JP 2002086351A5 JP 2001195330 A JP2001195330 A JP 2001195330A JP 2001195330 A JP2001195330 A JP 2001195330A JP 2002086351 A5 JP2002086351 A5 JP 2002086351A5
Authority
JP
Japan
Prior art keywords
polishing
pad
polishing table
polishing apparatus
polishing pad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
JP2001195330A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002086351A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001195330A priority Critical patent/JP2002086351A/ja
Priority claimed from JP2001195330A external-priority patent/JP2002086351A/ja
Publication of JP2002086351A publication Critical patent/JP2002086351A/ja
Publication of JP2002086351A5 publication Critical patent/JP2002086351A5/ja
Abandoned legal-status Critical Current

Links

JP2001195330A 2000-06-30 2001-06-27 ポリッシング装置 Abandoned JP2002086351A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001195330A JP2002086351A (ja) 2000-06-30 2001-06-27 ポリッシング装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000-199923 2000-06-30
JP2000199923 2000-06-30
JP2001195330A JP2002086351A (ja) 2000-06-30 2001-06-27 ポリッシング装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2006157961A Division JP2006272546A (ja) 2000-06-30 2006-06-07 研磨装置及び研磨方法

Publications (2)

Publication Number Publication Date
JP2002086351A JP2002086351A (ja) 2002-03-26
JP2002086351A5 true JP2002086351A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 2004-12-24

Family

ID=26595196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001195330A Abandoned JP2002086351A (ja) 2000-06-30 2001-06-27 ポリッシング装置

Country Status (1)

Country Link
JP (1) JP2002086351A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6913517B2 (en) * 2002-05-23 2005-07-05 Cabot Microelectronics Corporation Microporous polishing pads
JP5160954B2 (ja) * 2008-05-15 2013-03-13 株式会社荏原製作所 研磨方法
JP7141228B2 (ja) * 2018-03-28 2022-09-22 富士紡ホールディングス株式会社 梱包物及び被運搬物
JP7341022B2 (ja) * 2019-10-03 2023-09-08 株式会社荏原製作所 基板研磨装置および膜厚マップ作成方法

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