JP2002082067A5 - - Google Patents

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Publication number
JP2002082067A5
JP2002082067A5 JP2000268945A JP2000268945A JP2002082067A5 JP 2002082067 A5 JP2002082067 A5 JP 2002082067A5 JP 2000268945 A JP2000268945 A JP 2000268945A JP 2000268945 A JP2000268945 A JP 2000268945A JP 2002082067 A5 JP2002082067 A5 JP 2002082067A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000268945A
Other languages
Japanese (ja)
Other versions
JP2002082067A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000268945A priority Critical patent/JP2002082067A/ja
Priority claimed from JP2000268945A external-priority patent/JP2002082067A/ja
Priority to TW090106381A priority patent/TW493071B/zh
Priority to KR1020010014503A priority patent/KR100885560B1/ko
Priority to CNB011120509A priority patent/CN1179206C/zh
Priority to CN01208700U priority patent/CN2470821Y/zh
Publication of JP2002082067A publication Critical patent/JP2002082067A/ja
Publication of JP2002082067A5 publication Critical patent/JP2002082067A5/ja
Pending legal-status Critical Current

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JP2000268945A 2000-09-05 2000-09-05 基板検査装置 Pending JP2002082067A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2000268945A JP2002082067A (ja) 2000-09-05 2000-09-05 基板検査装置
TW090106381A TW493071B (en) 2000-09-05 2001-03-19 Substrate inspecting device
KR1020010014503A KR100885560B1 (ko) 2000-09-05 2001-03-21 기판검사장치
CNB011120509A CN1179206C (zh) 2000-09-05 2001-03-26 基片检验装置
CN01208700U CN2470821Y (zh) 2000-09-05 2001-03-26 基片检验装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000268945A JP2002082067A (ja) 2000-09-05 2000-09-05 基板検査装置

Publications (2)

Publication Number Publication Date
JP2002082067A JP2002082067A (ja) 2002-03-22
JP2002082067A5 true JP2002082067A5 (ro) 2007-10-18

Family

ID=18755644

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000268945A Pending JP2002082067A (ja) 2000-09-05 2000-09-05 基板検査装置

Country Status (4)

Country Link
JP (1) JP2002082067A (ro)
KR (1) KR100885560B1 (ro)
CN (2) CN2470821Y (ro)
TW (1) TW493071B (ro)

Families Citing this family (32)

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CN101430448B (zh) * 2002-02-26 2012-03-28 乐金显示有限公司 检查液晶板的设备和制作液晶显示器的方法
KR100898781B1 (ko) * 2002-06-14 2009-05-20 엘지디스플레이 주식회사 외관검사장치 및 이를 이용한 액정표시장치의 제조방법
KR100853775B1 (ko) * 2002-06-14 2008-08-25 엘지디스플레이 주식회사 테이블 손상 위치 검출 지그
US7272254B2 (en) * 2003-07-09 2007-09-18 General Electric Company System and method for analyzing and identifying flaws in a manufactured part
JP2006049384A (ja) * 2004-07-30 2006-02-16 Laserfront Technologies Inc ガントリー型xyステージ
KR100599060B1 (ko) * 2004-08-31 2006-07-12 주식회사 디이엔티 평판 표시패널 검사용 광조사방법 및 광조사장치
KR100596333B1 (ko) * 2004-09-22 2006-07-06 주식회사 에이디피엔지니어링 기판 외관 검사 장치
JP4653500B2 (ja) * 2005-01-18 2011-03-16 オリンパス株式会社 座標検出装置及び被検体検査装置
JP2006266748A (ja) * 2005-03-22 2006-10-05 Mitsutoyo Corp 画像測定装置
KR100688985B1 (ko) * 2005-08-05 2007-03-08 삼성전자주식회사 기판검사장치 및 그의 제어방법
KR101166828B1 (ko) * 2005-12-29 2012-07-19 엘지디스플레이 주식회사 평판표시장치용 검사장비 및 검사 방법
CN1987436B (zh) * 2006-12-27 2010-04-21 友达光电股份有限公司 基板检测设备及玻璃基板检测设备
TWI409499B (zh) * 2007-10-19 2013-09-21 Hon Hai Prec Ind Co Ltd 顯微鏡用載物台
KR101011721B1 (ko) * 2008-07-25 2011-01-28 한국에너지기술연구원 집광용 반사판 시험장치
KR200461270Y1 (ko) * 2010-01-20 2012-07-03 한화폴리드리머 주식회사 스마트 윈도우용 검사장치
JP5530984B2 (ja) 2010-07-26 2014-06-25 株式会社ジャパンディスプレイ 検査装置及び検査方法
CN102393576A (zh) * 2011-08-03 2012-03-28 深圳市华星光电技术有限公司 液晶显示器中玻璃基板的目视检查机及检查方法
US8854616B2 (en) 2011-08-03 2014-10-07 Shenzhen China Star Optoelectronics Technology Co., Ltd. Visual inspection apparatus for glass substrate of liquid crystal display and inspection method thereof
WO2014023343A1 (de) * 2012-08-07 2014-02-13 Carl Zeiss Industrielle Messtechnik Gmbh KOORDINATENMESSGERÄT MIT WEIßLICHTSENSOR
CN102997795B (zh) * 2012-12-03 2015-10-21 京东方科技集团股份有限公司 一种摩擦装置和整机设备
CN103604815B (zh) * 2013-11-26 2016-01-13 上海海事大学 玻璃晶片检测装置与标定方法
CN103837552A (zh) * 2014-03-14 2014-06-04 苏州精创光学仪器有限公司 触摸屏保护玻璃外观缺陷检测系统
CN104977306A (zh) * 2014-04-08 2015-10-14 上海微电子装备有限公司 一种表面缺陷检测系统及方法
CN104297259A (zh) * 2014-11-04 2015-01-21 苏州精创光学仪器有限公司 触摸屏保护玻璃外观缺陷检测方法
CN104765172A (zh) * 2015-04-27 2015-07-08 京东方科技集团股份有限公司 一种检测液晶屏的设备和方法
CN105783795A (zh) * 2016-04-15 2016-07-20 中国科学院上海光学精密机械研究所 大型环抛机抛光胶盘平面度的测量装置及其测量方法
CN107664646A (zh) * 2016-07-29 2018-02-06 上海微电子装备(集团)股份有限公司 一种全自动外观缺陷检查装置及方法
CN107064173A (zh) * 2017-01-03 2017-08-18 中国科学院上海光学精密机械研究所 大型平面光学元件表面疵病的检测装置和检测方法
CN106646957B (zh) * 2017-03-14 2018-07-20 惠科股份有限公司 一种显示单元制程控制方法及系统
JP2019169608A (ja) * 2018-03-23 2019-10-03 株式会社ディスコ 研削装置
CN111487035B (zh) * 2019-01-25 2022-02-01 舜宇光学(浙江)研究院有限公司 一种用于近眼检测系统的对准方法及其系统
CN112129775B (zh) * 2020-09-23 2023-03-24 哈尔滨工业大学 一种匀光棒条形光源及基于该光源的光学元件损伤检测装置

Family Cites Families (6)

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JPH0715167A (ja) * 1993-06-21 1995-01-17 Sharp Corp 挿入位置指示器
JPH0735701A (ja) * 1993-07-23 1995-02-07 Sharp Corp パターン目視検査装置
JPH10325780A (ja) * 1997-05-23 1998-12-08 Matsushita Electric Ind Co Ltd ディスプレイ画面検査装置
KR19990025834A (ko) * 1997-09-18 1999-04-06 윤종용 반도체 소자 검사 장치의 검사기판용 지지대
JP4166340B2 (ja) * 1997-09-24 2008-10-15 オリンパス株式会社 基板検査装置
JP4385419B2 (ja) * 1998-11-30 2009-12-16 株式会社ニコン 外観検査方法及び外観検査装置

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