JP2002057137A5 - - Google Patents
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- JP2002057137A5 JP2002057137A5 JP2000242905A JP2000242905A JP2002057137A5 JP 2002057137 A5 JP2002057137 A5 JP 2002057137A5 JP 2000242905 A JP2000242905 A JP 2000242905A JP 2000242905 A JP2000242905 A JP 2000242905A JP 2002057137 A5 JP2002057137 A5 JP 2002057137A5
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Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000242905A JP3961749B2 (ja) | 2000-08-10 | 2000-08-10 | 基板洗浄装置及び基板処理装置、基板処理方法 |
| US09/915,289 US6616512B2 (en) | 2000-07-28 | 2001-07-27 | Substrate cleaning apparatus and substrate polishing apparatus with substrate cleaning apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000242905A JP3961749B2 (ja) | 2000-08-10 | 2000-08-10 | 基板洗浄装置及び基板処理装置、基板処理方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002057137A JP2002057137A (ja) | 2002-02-22 |
| JP2002057137A5 true JP2002057137A5 (enExample) | 2005-08-04 |
| JP3961749B2 JP3961749B2 (ja) | 2007-08-22 |
Family
ID=18733846
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000242905A Expired - Lifetime JP3961749B2 (ja) | 2000-07-28 | 2000-08-10 | 基板洗浄装置及び基板処理装置、基板処理方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3961749B2 (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100423206C (zh) * | 2003-07-02 | 2008-10-01 | 上海思恩电子技术有限公司 | 用加热化学气体产生的雾状化学剂处理基片的方法及系统 |
| JP4733616B2 (ja) * | 2006-11-01 | 2011-07-27 | 積水化学工業株式会社 | 表面処理装置 |
| JP5844681B2 (ja) * | 2011-07-06 | 2016-01-20 | 東京エレクトロン株式会社 | 基板液処理装置及び基板液処理方法 |
| CN102989736B (zh) * | 2012-11-26 | 2015-03-18 | 北京七星华创电子股份有限公司 | 一种排风装置 |
| JP6338275B2 (ja) * | 2014-06-27 | 2018-06-06 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理方法および基板処理装置 |
| CN110587471B (zh) * | 2019-10-22 | 2021-08-27 | 武汉新芯集成电路制造有限公司 | 一种自清洁防护罩 |
| CN112005890B (zh) * | 2020-09-14 | 2022-04-15 | 王芝林 | 一种生态养猪场用室内水帘风机降温系统 |
| JP7527729B2 (ja) * | 2020-11-16 | 2024-08-05 | 株式会社ディスコ | 加工装置 |
| CN118500062B (zh) * | 2024-07-18 | 2024-10-01 | 常州市星干干燥设备有限公司 | 一种pfa氟树脂粉末干燥设备 |
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2000
- 2000-08-10 JP JP2000242905A patent/JP3961749B2/ja not_active Expired - Lifetime