JP2002040223A - 被加熱体保持部材およびそれを用いた加熱炉 - Google Patents

被加熱体保持部材およびそれを用いた加熱炉

Info

Publication number
JP2002040223A
JP2002040223A JP2000221892A JP2000221892A JP2002040223A JP 2002040223 A JP2002040223 A JP 2002040223A JP 2000221892 A JP2000221892 A JP 2000221892A JP 2000221892 A JP2000221892 A JP 2000221892A JP 2002040223 A JP2002040223 A JP 2002040223A
Authority
JP
Japan
Prior art keywords
heated
heating furnace
holding member
heating
pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000221892A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002040223A5 (https=
Inventor
Tomonori Yamada
智紀 山田
Isao Narita
勲 成田
Tetsuo Suzuki
哲男 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Industries Inc
Original Assignee
Toray Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries Inc filed Critical Toray Industries Inc
Priority to JP2000221892A priority Critical patent/JP2002040223A/ja
Publication of JP2002040223A publication Critical patent/JP2002040223A/ja
Publication of JP2002040223A5 publication Critical patent/JP2002040223A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Optical Filters (AREA)
  • Resistance Heating (AREA)
  • Furnace Charging Or Discharging (AREA)
JP2000221892A 2000-07-24 2000-07-24 被加熱体保持部材およびそれを用いた加熱炉 Pending JP2002040223A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000221892A JP2002040223A (ja) 2000-07-24 2000-07-24 被加熱体保持部材およびそれを用いた加熱炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000221892A JP2002040223A (ja) 2000-07-24 2000-07-24 被加熱体保持部材およびそれを用いた加熱炉

Publications (2)

Publication Number Publication Date
JP2002040223A true JP2002040223A (ja) 2002-02-06
JP2002040223A5 JP2002040223A5 (https=) 2007-09-06

Family

ID=18716215

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000221892A Pending JP2002040223A (ja) 2000-07-24 2000-07-24 被加熱体保持部材およびそれを用いた加熱炉

Country Status (1)

Country Link
JP (1) JP2002040223A (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7214455B2 (en) 2002-05-29 2007-05-08 Toray Industries, Inc. Photosensitive resin composition and process for producing heat-resistant resin film
JP2007226128A (ja) * 2006-02-27 2007-09-06 Toppan Printing Co Ltd カラーフィルタ製造用ホットプレート及びカラーフィルタ製造方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04219921A (ja) * 1990-12-20 1992-08-11 Fujitsu Ltd 半導体製造装置
JPH08279548A (ja) * 1993-12-28 1996-10-22 Sharp Corp ホットプレート型のプロキシミティベーク炉に使用するピン及びそれを使用した炉
JPH11337266A (ja) * 1998-05-28 1999-12-10 Toray Ind Inc カラーフィルタ製造用オーブンおよびこれを用いたカラーフィルタの製造方法
JP2000119737A (ja) * 1998-10-16 2000-04-25 Nsk Warner Kk ワークの炉内配置方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04219921A (ja) * 1990-12-20 1992-08-11 Fujitsu Ltd 半導体製造装置
JPH08279548A (ja) * 1993-12-28 1996-10-22 Sharp Corp ホットプレート型のプロキシミティベーク炉に使用するピン及びそれを使用した炉
JPH11337266A (ja) * 1998-05-28 1999-12-10 Toray Ind Inc カラーフィルタ製造用オーブンおよびこれを用いたカラーフィルタの製造方法
JP2000119737A (ja) * 1998-10-16 2000-04-25 Nsk Warner Kk ワークの炉内配置方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7214455B2 (en) 2002-05-29 2007-05-08 Toray Industries, Inc. Photosensitive resin composition and process for producing heat-resistant resin film
JP2007226128A (ja) * 2006-02-27 2007-09-06 Toppan Printing Co Ltd カラーフィルタ製造用ホットプレート及びカラーフィルタ製造方法

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