JP2002033505A5 - - Google Patents

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Publication number
JP2002033505A5
JP2002033505A5 JP2000218131A JP2000218131A JP2002033505A5 JP 2002033505 A5 JP2002033505 A5 JP 2002033505A5 JP 2000218131 A JP2000218131 A JP 2000218131A JP 2000218131 A JP2000218131 A JP 2000218131A JP 2002033505 A5 JP2002033505 A5 JP 2002033505A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000218131A
Other languages
Japanese (ja)
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JP4438038B2 (ja
JP2002033505A (ja
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Application filed filed Critical
Priority to JP2000218131A priority Critical patent/JP4438038B2/ja
Priority claimed from JP2000218131A external-priority patent/JP4438038B2/ja
Publication of JP2002033505A publication Critical patent/JP2002033505A/ja
Publication of JP2002033505A5 publication Critical patent/JP2002033505A5/ja
Application granted granted Critical
Publication of JP4438038B2 publication Critical patent/JP4438038B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000218131A 2000-07-19 2000-07-19 面型受光素子、およびその製造方法 Expired - Fee Related JP4438038B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000218131A JP4438038B2 (ja) 2000-07-19 2000-07-19 面型受光素子、およびその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000218131A JP4438038B2 (ja) 2000-07-19 2000-07-19 面型受光素子、およびその製造方法

Publications (3)

Publication Number Publication Date
JP2002033505A JP2002033505A (ja) 2002-01-31
JP2002033505A5 true JP2002033505A5 (sh) 2007-09-06
JP4438038B2 JP4438038B2 (ja) 2010-03-24

Family

ID=18713129

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000218131A Expired - Fee Related JP4438038B2 (ja) 2000-07-19 2000-07-19 面型受光素子、およびその製造方法

Country Status (1)

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JP (1) JP4438038B2 (sh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1609011B1 (en) * 2003-04-02 2019-03-13 Oracle America, Inc. Optical communication between face-to-face semiconductor chips
US7723206B2 (en) * 2007-12-05 2010-05-25 Fujifilm Corporation Photodiode
JP5486542B2 (ja) 2011-03-31 2014-05-07 浜松ホトニクス株式会社 フォトダイオードアレイモジュール及びその製造方法
JP6944315B2 (ja) * 2017-09-05 2021-10-06 浜松ホトニクス株式会社 光検出素子
JP7528802B2 (ja) * 2021-02-01 2024-08-06 富士電機株式会社 半導体装置及び温度測定方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS639163A (ja) * 1986-06-30 1988-01-14 Nec Corp 半導体受光素子
JP2642645B2 (ja) * 1987-11-19 1997-08-20 株式会社日立製作所 半導体基板の製造方法及び半導体装置の製造方法
JP2651323B2 (ja) * 1992-07-22 1997-09-10 浜松ホトニクス株式会社 半導体エネルギー検出器
JPH06151946A (ja) * 1992-11-12 1994-05-31 Nippon Telegr & Teleph Corp <Ntt> 半導体受光素子およびその製造方法
JPH07153986A (ja) * 1993-12-01 1995-06-16 Fujitsu Ltd 赤外線検知装置
JP3236774B2 (ja) * 1996-02-16 2001-12-10 日本電信電話株式会社 半導体集積回路
JP3610235B2 (ja) * 1998-07-22 2005-01-12 キヤノン株式会社 面型発光素子装置

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