JP2002022988A5 - - Google Patents
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- JP2002022988A5 JP2002022988A5 JP2000208581A JP2000208581A JP2002022988A5 JP 2002022988 A5 JP2002022988 A5 JP 2002022988A5 JP 2000208581 A JP2000208581 A JP 2000208581A JP 2000208581 A JP2000208581 A JP 2000208581A JP 2002022988 A5 JP2002022988 A5 JP 2002022988A5
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- JP
- Japan
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000208581A JP4895320B2 (ja) | 2000-07-10 | 2000-07-10 | 光導波路デバイスの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000208581A JP4895320B2 (ja) | 2000-07-10 | 2000-07-10 | 光導波路デバイスの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002022988A JP2002022988A (ja) | 2002-01-23 |
| JP2002022988A5 true JP2002022988A5 (no) | 2007-04-12 |
| JP4895320B2 JP4895320B2 (ja) | 2012-03-14 |
Family
ID=18705139
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000208581A Expired - Fee Related JP4895320B2 (ja) | 2000-07-10 | 2000-07-10 | 光導波路デバイスの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4895320B2 (no) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100632281B1 (ko) | 2001-12-28 | 2006-10-12 | 히다치 가세고교 가부시끼가이샤 | 폴리머 광도파로 필름 |
| KR100471193B1 (ko) * | 2002-09-18 | 2005-03-10 | 스마트전자 주식회사 | 보호막이 형성된 소자와 그 보호막 형성방법 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2700316B2 (ja) * | 1987-06-10 | 1998-01-21 | 三菱電機株式会社 | 有機物質表面の改質方法 |
| US5472502A (en) * | 1993-08-30 | 1995-12-05 | Semiconductor Systems, Inc. | Apparatus and method for spin coating wafers and the like |
| JP3333864B2 (ja) * | 1995-08-25 | 2002-10-15 | 日本電信電話株式会社 | 光導波路の製造方法 |
| JP3961092B2 (ja) * | 1997-06-03 | 2007-08-15 | 株式会社東芝 | 複合配線基板、フレキシブル基板、半導体装置、および複合配線基板の製造方法 |
| JPH1152198A (ja) * | 1997-08-08 | 1999-02-26 | Kyocera Corp | 光接続構造 |
| JP3477381B2 (ja) * | 1998-07-21 | 2003-12-10 | 日本電信電話株式会社 | フッ素化による光学用高分子材料の屈折率制御方法 |
| JP3759841B2 (ja) * | 1998-08-31 | 2006-03-29 | 富士通株式会社 | 薄膜積層型光学部品及び要素部品の被覆構造 |
| JP2001033640A (ja) * | 1999-07-22 | 2001-02-09 | Kyocera Corp | 光導波路 |
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2000
- 2000-07-10 JP JP2000208581A patent/JP4895320B2/ja not_active Expired - Fee Related