JP2002020858A - Jig for vacuum vapor deposition apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily exchange a part of components constituting a jig, and to eliminate an accident of breakage caused by stacking the jigs. SOLUTION: This jig comprises a base part 1, first and second set parts 2 and 3 installed on the base part, a holder plate 4 fitted to an outer surface side of the both set parts and a mask plate 5 fitted to an inner surface side of the both set parts. Each component except the base part comprises a plurality of members, and the mask plate is attracted by the magnetic force.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum deposition apparatus for adjusting electric characteristics of a piezoelectric plate on which a basic excitation electrode is formed, and more particularly to a jig for temporarily fixing a holder holding the piezoelectric plate during deposition. Things.

[0002]

2. Description of the Related Art As shown in FIG. 8, a piezoelectric vibrator, for example, an AT-cut quartz vibrator, exhibits electrical characteristics such as frequency when a quartz plate Q1 formed with excitation electrodes is held in a holder H. For final adjustment, partial vapor deposition is generally performed on the excitation electrode.

In conventional partial vapor deposition, a quartz oscillator Q (shown by dotted lines) before hermetic sealing with a cap as shown in FIG. 8 is circumferentially attached at predetermined intervals to a ring-shaped jig. Is stored in a vacuum chamber. Then, an appropriate amount of a deposition material is radiated from a nozzle provided in the chamber to each crystal oscillator, and electric characteristics such as frequency are adjusted by an additional mass. Normally, while measuring the electrical characteristics of the quartz resonator in real time, the radiation amount of the vapor deposition material, the radiation timing is controlled, and when the predetermined adjustment is completed, the radiation is stopped, and the ring jig rotates by a predetermined angle. Then, the adjustment of the next crystal oscillator is started. These series of operations are performed by computer control. Usually, the nozzle side is fixed in a chamber, and the ring-shaped jig rotates in the chamber to adjust the frequency.

FIG. 9 is a plan view of a ring-shaped jig used for the adjustment work, and FIG. 10 is a sectional view taken along the line CC of FIG.
The ring-shaped jig includes the base ring 7 and the base ring 7.
A mask plate 9 and a holder plate 8 attached to the holder. Each component is made of metal such as stainless steel. The base ring has an annular shape as a whole as shown in FIG. 9, and an upright portion 71 is formed in the vicinity of the inner periphery in a circumferential shape, and a comb-like portion 72 (not shown) is continuously formed on the upright portion 71. Is formed. A holder plate 8 divided into three parts is fixed to the outer surface of the upright portion 71 by screws, and a mask plate 9 divided into three parts is fixed to the inner surface by screws. The crystal resonator Q is attached to the holder plate 8, and the vapor deposition material is radiated to the crystal vibration plate through the vapor deposition holes 91 of the mask plate in the direction shown by the arrow.

[0005]

However, the structure of the above-described conventional jig has the following problems. 1. The base ring has a structure in which the upright portion is integrated. For example, when a part of the comb-shaped portion is worn or damaged, it is necessary to replace the entire base ring. In addition, there is a product in which the height of the piezoelectric vibrator, that is, the distance from the retainer to the upper surface of the piezoelectric vibrating plate (quartz vibrating plate) is reduced due to the recent trend of lowering the height of electronic components. When corresponding to a variety, it is necessary to prepare a base ring for each variety, such as making the thickness of the comb-shaped portion different.

[0006] 2. The jigs are often stacked during storage or waiting for the next process, but depending on the stacking method, the base ring, the holder plate, and the mask plate may be damaged.

[0007] 3. Further, the mask plate often adheres to the evaporation substance and requires frequent cleaning. However, since the mask plate is fixed to the base ring with screws, it takes a long time to remove the mask plate, and there is a problem that workability is low. There is also a method of removing the deposition material by brushing without removing the mask plate from the base ring, but this may cause generation of foreign matters such as brush residue.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and one object of the present invention is to facilitate replacement of a part of a jig, and to eliminate a damage accident caused by stacking of the jig. That is another purpose.

[0009]

In order to solve the above-mentioned problems, the present invention provides a piezoelectric vibrating plate held by a holder by attaching a thin-film metal to the electric characteristics. A jig for use in a vacuum deposition apparatus for adjusting the thickness of the jig, the jig having a base portion and a plurality of first comb-like portions detachably attached to the base portion and extending upward. A set portion and a second comb-like portion detachably attached to one side surface of the first comb-like portion and corresponding to a pitch of the comb-like portion, and holding the piezoelectric vibration plate A holder plate for temporarily fixing the holder, and a mask having a through-hole detachably attached to the other side surface of the first comb-shaped portion and provided in correspondence with the piezoelectric vibrating plate held by the holder. And a plate.

According to a second aspect of the present invention, there is provided a jig for use in a vacuum deposition apparatus for adjusting electric characteristics by attaching a thin film metal to a piezoelectric vibrating plate held by a holder. Has a ring-shaped base portion, a first comb-shaped portion which is curved in accordance with the curvature of the ring-shaped base portion and extends upward, and which is detachably mounted on the ring-shaped base portion. A plurality of set portions to be attached and a bendable portion corresponding to the first comb-shaped portion, which is detachably attached to one side surface of the first comb-shaped portion, and the first comb portion; A plurality of holder plates having a second comb-like portion corresponding to the pitch of the tooth-like portion and temporarily holding a retainer holding the piezoelectric vibrating plate; and a plurality of holder plates corresponding to the first comb-like portion. Bendable and removable on the other side of the first comb With attached, it may be configured comprising a plurality of mask plates having apertures which are provided corresponding to the piezoelectric vibrating plates held at the retainer.

According to the above configuration, the base portion and the set portion having the comb-like portion are separated from each other, and a plurality of set portions are attached to the base portion in a corresponding manner. Even when worn or damaged, only the worn and damaged set portion needs to be replaced. Further, even when the size of the piezoelectric vibrator changes, it is possible to cope with the size change by preparing a set portion having a comb-like portion corresponding to the size.

According to a third aspect of the present invention, at least three of the set portions are formed with the comb-shaped portion and an elongated portion formed higher than the holder plate and the mask plate. Is also good.

By employing this configuration, even if a plurality of the jigs are stacked, the elongated portion functions as a spacer, and protects the comb-like portion, the holder plate, and the mask plate. In addition, by forming the concave portion that fits into the extension portion on the lower surface of the set portion, the positioning and fixing during stacking can be reliably performed.

Further, as set forth in claim 4, the attachment of the mask plate to the set portion may be performed using a magnetic force. For example, as set forth in claim 5, a magnet may be stored in the set portion, and a mask plate made of a magnetic material may be attached to the set portion. Claim 6
As shown in (1), the mask plate may be made of a sheet-like magnet and attached to the set portion. In any of the configurations, it is preferable to adopt a configuration in which, for example, a positioning projection is formed on the set portion and a corresponding through hole is formed on the mask plate side so that the mask plate is accurately positioned and fixed.

According to the above construction, the removal of the mask plate becomes extremely easy, so that the workability is improved and the occurrence of troubles due to foreign matters and the like caused by brushing cleaning, which has conventionally been performed without removing the mask plate, can be eliminated. .

[0016]

Embodiments of the present invention will be described with reference to the drawings. 1 is a plan view of a jig for a vacuum evaporation apparatus, FIG. 2 is a sectional view taken along line AA of FIG. 1, and FIG. 3 is a sectional view taken along line BB of FIG. 4 and 5 are front views of the setting portion, FIG. 6 is a front view of the holder plate, and FIG. 7 is a front view of the mask plate.

The jig according to the present invention comprises a base portion 1, a first set portion 2 and a second set portion 3 installed on the base portion, and a holder plate 4 attached to the outer surfaces of the two set portions. And a mask plate 5 attached to the inner surfaces of the two sets. Except for the base portion, each is composed of a plurality of members. In this embodiment, the first set portion 2 and the second set portion 3 correspond to one base portion.
Use three holder plates 4 and three mask plates 5 each.

The crystal unit attached to the jig has the configuration shown in FIG. 8 shown in the conventional example, and has an excitation electrode (not shown).
This is a state before the hermetic sealing, in which the plated quartz vibration plate Q1 is mounted on a retainer (hermetic terminal with a supporter) H. In the drawing, L is a lead terminal.

The base 1 has a ring shape and is made of an aluminum alloy or the like. A step portion 11 formed one step lower is formed on the inner peripheral side of the base portion 1, and a plurality of protrusions 12 are formed in the step portion 11 at predetermined intervals in a circumferential direction. On the step portion 11, three first set portions 2 and two second set portions 3 are alternately arranged. The first set portion 2 and the second set portion 3 are curved in accordance with the curvature of the base portion, and form a ring shape by being aligned. Also, holes 20, 30 (30) corresponding to the plurality of projections 12, respectively, are formed on the lower surfaces of the first set portion 2 and the second set portion 3.
(Not shown) are formed. By fitting these, the first set portion 2 and the second set portion 3 are designed to be positioned and fixed on the base.

A first setting section 2 and a second setting section 3
Are formed, and first comb-shaped portions 22, 32 are formed by forming grooves downward at predetermined intervals from the upper surface of the upright portion. Further, a plurality of magnet storage portions 23 and 33 are formed in the upright portions of the first set portion 2 and the second set portion 3, respectively, and a set of magnets 61 and 62 is stored in each magnet storage portion. The magnet 61 has a stronger magnetic force than the magnet 62, and is designed so that the magnet 62 does not stick to the mask plate 5 when the mask plate is separated from the set portion.
The upright portions 21 and 31 have protrusions 2 protruding inward.
Reference numerals 4 and 34 are provided at predetermined intervals and are used for positioning the mask plate 5.

The second set portion is provided with an extension 35 formed higher than the comb-like portion 32, the holder plate 4, and the mask plate 5, and the extension 35 is fitted on the lower surface of the extension. A matching recess 36 is formed.

A holder plate 4 is fixed to the outer surface of the upright portions 21 and 31 of the first set portion 2 and the second set portion 3 by magnetic force and screws, respectively.
Mask plates 5 are fixed to the inner side surfaces by magnetic force. The holder plate 4 is made of a thin metal plate such as SUS304 stainless steel having excellent flexibility, and has a second comb-shaped portion 42 corresponding to the first comb-shaped portion 22.
Are formed continuously. The mask plate 5 is S
US430 is a magnetic material made of stainless steel, and is located between the combs of the first and second comb-like portions 22 and 23, and is provided on a base electrode (excitation electrode) portion of each of the quartz vibrating plates Q1 to be held. Correspondingly, a plurality of evaporation holes 51 are formed. The mask plate 5 has projections 24,..., 34,... Formed on the first set portion and the second set portion.
The through holes 52 and 53 are formed so as to be fitted with. In addition,
The through-hole 52 has a size that fits just into the projection, but the through-hole 53 has a slightly elliptical shape, which makes it easy to attach the mask plate to each set portion and manufactures each part. Errors are allowed.

The nozzle that emits the vapor deposition metal is disposed inside the jig shown in FIG. 1 (inside the ring), and proceeds with the partial vapor deposition while measuring the electrical characteristics of the crystal unit Q to be adjusted. Although not shown, a gear for rotating the base portion is provided at a lower portion of the base portion, and intermittently rotates the base portion intermittently in synchronization with the execution of the adjustment of the electric characteristics to sequentially adjust the electric characteristics. Is advanced.

In the above embodiment, an example in which the set section is divided into six parts has been described.
Alternatively, a nine-split configuration using three second set units may be used. In this case, there is an advantage that each component can be replaced in a smaller unit. The same effect can be obtained even if the holder plate and the mask plate are finely divided.

Further, since the mask plate is formed of a sheet-like magnet, the mask plate can be attached to the set portion with a simple structure without special measures for the set portion.

Although an example in which the base portion and each set portion are formed in a ring shape has been described, the present invention is not limited to this. A unit, a holder plate, and a mask plate may be used. In this case, the present invention can also be effectively applied to a point where the mask plate is attached by a magnetic force.

[0027]

According to the present invention, the base portion and the set portion having the comb-like portions are separated from each other, and a plurality of set portions are attached to the base portion in correspondence with each other. Even when the part is worn or damaged, only the worn and damaged set part needs to be replaced. Further, even when the size of the piezoelectric vibrator changes, it is possible to cope with the size change by preparing a set portion having a comb-like portion corresponding to the size. Therefore, it is possible to obtain a jig for a vacuum evaporation apparatus which can reduce the cost for managing and maintaining components, can flexibly cope with a change in the size of the piezoelectric vibrator, and is easy to handle.

According to the third aspect, even if a plurality of the jigs are stacked, the extended portion functions as a spacer to protect the comb-like portion, the holder plate and the mask plate.
Therefore, it is possible to eliminate a damage accident caused by stacking jigs.

Further, according to the fourth to sixth aspects, the removal of the mask plate becomes extremely easy, so that the workability is improved and foreign matter or the like generated by brushing cleaning which has conventionally been performed without removing the mask plate is achieved. Problems can be eliminated.

[Brief description of the drawings]

FIG. 1 is a plan view showing an embodiment according to the present invention.

FIG. 2 is a sectional view taken along line AA of FIG.

FIG. 3 is a sectional view taken along line BB of FIG. 1;

FIG. 4 is a front view of a first set unit.

FIG. 5 is a front view of a second set unit.

FIG. 6 is a front view of the holder plate.

FIG. 7 is a front view of a mask plate.

FIG. 8 is a diagram showing a structure of a crystal resonator.

FIG. 9 shows a conventional example.

FIG. 10 shows a conventional example.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Base part 2 1st set part 3 2nd set part 4, 8 Holder plate 5, 9 Mask plate 61, 62 Magnet 7 Base ring Q Quartz crystal oscillator (piezoelectric oscillator)

Claims (6)

[Claims] 1. A piezoelectric vibrating plate held by a holder,
A jig for use in a vacuum evaporation apparatus for adjusting electrical characteristics by attaching a thin film metal, the jig being detachably attached to a base portion and a plurality of the jigs on the base portion, and extending upward. A set portion having a first comb-like portion; and a second comb-like portion detachably attached to one side surface of the first comb-like portion and corresponding to a pitch of the comb-like portion. And a holder plate for temporarily fixing a holder holding the piezoelectric vibrating plate, and a piezoelectric vibrating plate which is detachably attached to the other side surface of the first comb-like portion and held by the holder. A jig for a vacuum deposition apparatus, comprising: 2. A piezoelectric vibrating plate held by a holder,
A jig for use in a vacuum evaporation apparatus for adjusting electrical characteristics by attaching a thin-film metal, wherein the jig is curved in accordance with a curvature of the ring-shaped base, and is upwardly curved. A plurality of set portions detachably mounted on the ring-shaped base portion, and a plurality of set portions that can be bent corresponding to the first comb-shaped portion. In the first
A second comb corresponding to a pitch of the first comb-shaped portion, which is detachably attached to one side surface of the comb-shaped portion;
A plurality of holder plates, each having a comb-like portion and temporarily holding a holder holding the piezoelectric vibrating plate; and a first bendable portion corresponding to the first comb-like portion;
A mask plate having a plurality of mask plates which are removably attached to the other side surface of the comb-shaped portion and have through holes provided corresponding to the piezoelectric vibrating plate held by the holder. Utensils. 3. The at least three set portions among the set portions are formed with an extension portion that is higher than the comb-like portion, the holder plate, and the mask plate. The jig for a vacuum evaporation apparatus according to claim 2. 4. The jig for a vacuum evaporation apparatus according to claim 1, wherein the mask plate is attached to the set portion using a magnetic force. 5. The jig for a vacuum evaporation apparatus according to claim 4, wherein a magnet is stored in said set portion, and a mask plate made of a magnetic material is attached to said set portion. 6. The jig for a vacuum evaporation apparatus according to claim 4, wherein the mask plate is made of a sheet-like magnet, and is attached to the set portion.