JP2001512818A - 光学位置測定装置に対する走査ユニット - Google Patents

光学位置測定装置に対する走査ユニット

Info

Publication number
JP2001512818A
JP2001512818A JP2000506501A JP2000506501A JP2001512818A JP 2001512818 A JP2001512818 A JP 2001512818A JP 2000506501 A JP2000506501 A JP 2000506501A JP 2000506501 A JP2000506501 A JP 2000506501A JP 2001512818 A JP2001512818 A JP 2001512818A
Authority
JP
Japan
Prior art keywords
detector
signal
reference pulse
scanning unit
pulse signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000506501A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001512818A5 (enExample
Inventor
ホルツアプフェル・ヴォルフガング
マイヤー・エルマル
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Publication of JP2001512818A publication Critical patent/JP2001512818A/ja
Publication of JP2001512818A5 publication Critical patent/JP2001512818A5/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/366—Particular pulse shapes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
    • G01D5/2454—Encoders incorporating incremental and absolute signals
    • G01D5/2455—Encoders incorporating incremental and absolute signals with incremental and absolute tracks on the same encoder
    • G01D5/2457—Incremental encoders having reference marks

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Eye Examination Apparatus (AREA)
  • Body Structure For Vehicles (AREA)
  • Vehicle Body Suspensions (AREA)
JP2000506501A 1997-08-07 1998-07-24 光学位置測定装置に対する走査ユニット Pending JP2001512818A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19734136.5 1997-08-07
DE19734136 1997-08-07
PCT/EP1998/004658 WO1999008074A1 (de) 1997-08-07 1998-07-24 Abtasteinheit für eine optische positionsmesseinrichtung

Publications (2)

Publication Number Publication Date
JP2001512818A true JP2001512818A (ja) 2001-08-28
JP2001512818A5 JP2001512818A5 (enExample) 2006-01-05

Family

ID=7838220

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2000506501A Pending JP2001512818A (ja) 1997-08-07 1998-07-24 光学位置測定装置に対する走査ユニット
JP22321898A Expired - Fee Related JP4324261B2 (ja) 1997-08-07 1998-08-06 光学位置測定装置用の走査ユニット

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP22321898A Expired - Fee Related JP4324261B2 (ja) 1997-08-07 1998-08-06 光学位置測定装置用の走査ユニット

Country Status (6)

Country Link
US (2) US6392224B1 (enExample)
EP (2) EP0896206B1 (enExample)
JP (2) JP2001512818A (enExample)
AT (2) ATE229642T1 (enExample)
DE (4) DE19830925A1 (enExample)
WO (1) WO1999008074A1 (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005121640A (ja) * 2003-10-14 2005-05-12 Dr Johannes Heidenhain Gmbh 光学式位置測定装置
JP2006220655A (ja) * 2005-02-11 2006-08-24 Dr Johannes Heidenhain Gmbh 位置測定装置
JP2014098666A (ja) * 2012-11-15 2014-05-29 Canon Inc インクリメンタルエンコーダ
JP2017111068A (ja) * 2015-12-18 2017-06-22 セイコーＮｐｃ株式会社 光エンコーダ

Families Citing this family (56)

* Cited by examiner, † Cited by third party
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EP0896206B1 (de) * 1997-08-07 2002-12-11 Dr. Johannes Heidenhain GmbH Abtasteinheit für eine optische Positionsmesseinrichtung
DE19859670A1 (de) 1998-12-23 2000-06-29 Heidenhain Gmbh Dr Johannes Abtastkopf und Verfahren zu dessen Herstellung
EP1028309B1 (de) * 1999-02-04 2003-04-16 Dr. Johannes Heidenhain GmbH Optische Positionsmesseinrichtung
DE60033075T3 (de) * 1999-04-16 2012-08-30 Canon K.K. Kodierer
US6545262B1 (en) 1999-06-04 2003-04-08 Dr. Johannes Heidenhein Gmbh Position measuring system
DE19962278A1 (de) * 1999-12-23 2001-08-02 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung
FR2808167B1 (fr) * 2000-04-28 2005-03-18 Mars Alimentaire Procede de realisation de confiseries en vrac
DE10020575A1 (de) * 2000-04-28 2001-10-31 Heidenhain Gmbh Dr Johannes Abtasteinheit für eine optische Positionsmesseinrichtung
DE10022619A1 (de) 2000-04-28 2001-12-06 Heidenhain Gmbh Dr Johannes Abtasteinheit für eine optische Positionsmesseinrichtung
DE10020895B4 (de) * 2000-04-29 2011-07-28 Rodi, Anton, 69181 Positionsgebervorrichtung
US6713756B2 (en) * 2000-05-09 2004-03-30 Olympus Corporation Optical encoder and optical rotary encoder
DE10029380A1 (de) * 2000-06-20 2002-01-03 Pwb Ruhlatec Ind Prod Gmbh Taktlineal oder Taktscheibe
DE10058239B4 (de) * 2000-11-17 2012-01-26 Dr. Johannes Heidenhain Gmbh Positionsmeßeinrichtung
JP4720058B2 (ja) * 2000-11-28 2011-07-13 株式会社Sumco シリコンウェーハの製造方法
GB0109057D0 (en) 2001-04-11 2001-05-30 Renishaw Plc Absolute postition measurement
CA2458964A1 (en) * 2001-08-30 2003-03-13 William G. Thorburn Harmonic suppressing photodetector array
CN1250933C (zh) * 2001-09-04 2006-04-12 约翰尼斯海登海恩博士股份有限公司 位置测量装置及运行位置测量装置的方法
DE10217726A1 (de) * 2002-04-17 2003-11-27 Heidenhain Gmbh Dr Johannes Optische Positionsmesseinrichtung
DE10244234A1 (de) * 2002-09-23 2004-03-25 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE10319609A1 (de) * 2003-05-02 2004-11-18 Dr. Johannes Heidenhain Gmbh Optoelektronische Detektoranordnung
GB0316921D0 (en) * 2003-07-19 2003-08-27 Renishaw Plc Reader for a scale marking
DE10338991A1 (de) * 2003-08-18 2005-03-17 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE10346380B4 (de) * 2003-09-26 2014-01-16 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE602005002287T2 (de) * 2004-03-17 2008-05-29 Canon K.K. Optischer Encoder
JP4498024B2 (ja) * 2004-06-15 2010-07-07 キヤノン株式会社 光学式エンコーダ
GB0413710D0 (en) * 2004-06-21 2004-07-21 Renishaw Plc Scale reading apparatus
US20050285026A1 (en) * 2004-06-25 2005-12-29 Fanuc Ltd Linear encoder
JP4054817B2 (ja) * 2004-08-20 2008-03-05 シャープ株式会社 光学式エンコーダおよびそれを用いた電子機器
JP4908764B2 (ja) * 2005-02-04 2012-04-04 キヤノン株式会社 光学式エンコーダ
DE102005023984A1 (de) * 2005-05-20 2006-11-23 Dr. Johannes Heidenhain Gmbh Positionsmessgerät
US20070024865A1 (en) * 2005-07-26 2007-02-01 Mitchell Donald K Optical encoder having slanted optical detector elements for harmonic suppression
US7552873B2 (en) * 2005-09-14 2009-06-30 Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. Transmissive optical encoder
DE102006024579B4 (de) * 2006-05-18 2016-09-29 Dr. Johannes Heidenhain Gmbh Vorrichtung zur Bestimmung der Position eines entlang mindestens einer Verschieberichtung bewegbaren Objektes
US7400269B2 (en) * 2006-11-09 2008-07-15 Avago Technologies Ecbu Ip Pte Ltd Coding element with integrated limit switch
US7858922B2 (en) * 2006-11-20 2010-12-28 Dr. Johannes Heidenhain Gmbh Position-measuring device
US8011112B2 (en) * 2006-12-07 2011-09-06 Leica Geosystems Ag Method and apparatus for determining positions
US7943897B2 (en) * 2007-06-20 2011-05-17 Sharp Kabushiki Kaisha Optical encoder and electronic equipment
US20090027692A1 (en) * 2007-07-24 2009-01-29 Mitutoyo Corporation Reference signal generating configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels
US7973941B2 (en) * 2007-07-24 2011-07-05 Mitutoyo Corporation Reference signal generating configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels
US7965393B2 (en) 2007-07-24 2011-06-21 Mitutoyo Corporation Reference signal generating configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels
ES2353355T5 (es) † 2008-09-10 2014-03-31 Fagor, S.Coop. Dispositivo optoelectrónico de medida
JP5641746B2 (ja) * 2010-02-12 2014-12-17 株式会社ミツトヨ 光電式エンコーダ
JP5545366B2 (ja) * 2010-05-31 2014-07-09 株式会社安川電機 ロータリエンコーダ、ロータリモータ及びロータリモータシステム
DE102012210309A1 (de) * 2012-06-19 2013-12-19 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
GB201301186D0 (en) 2012-12-20 2013-03-06 Renishaw Plc Optical element
EP3052896A1 (en) * 2013-10-01 2016-08-10 Renishaw Plc. Position measurement encoder
JP6128328B2 (ja) * 2013-11-05 2017-05-17 株式会社安川電機 エンコーダ、エンコーダ付きモータ、サーボシステム
WO2015078860A1 (en) 2013-11-26 2015-06-04 Renishaw Plc Metrological scale
JP6497848B2 (ja) * 2014-04-14 2019-04-10 キヤノン株式会社 アブソリュートエンコーダ、処理方法、プログラム、駆動装置、および産業機械
CN105758435B (zh) * 2016-04-14 2018-02-09 清华大学深圳研究生院 一种绝对式光栅尺
DE102018200449A1 (de) 2018-01-12 2019-07-18 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE102018202556A1 (de) * 2018-02-20 2019-08-22 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
EP3623769A1 (en) 2018-09-12 2020-03-18 Renishaw PLC Measurement device
GB201916662D0 (en) 2019-11-15 2020-01-01 Renishaw Plc Encoder apparatus
GB201916641D0 (en) 2019-11-15 2020-01-01 Renishaw Plc Position measurement device
DE102019219151A1 (de) 2019-12-09 2021-06-10 Dr. Johannes Heidenhain Gesellschaft Mit Beschränkter Haftung Optische Positionsmesseinrichtung

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US4263506A (en) 1978-12-21 1981-04-21 Hewlett-Packard Company Pulse generating apparatus
DE3007311C2 (de) 1980-02-27 1985-11-28 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Digitales lichtelektrisches Längen- oder Winkelmeßsystem
DE3204012C1 (de) 1982-02-05 1983-02-03 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Inkrementale Messeinrichtung
DE3536466A1 (de) * 1985-10-12 1987-04-16 Bodenseewerk Geraetetech Nullimpulserzeuger zur erzeugung eines impulses bei erreichen einer vorgegebenen lage eines traegers
DE3616144A1 (de) 1986-05-14 1987-11-19 Heidenhain Gmbh Dr Johannes Fotoelektrische messeinrichtung
US4866268A (en) 1988-05-20 1989-09-12 General Motors Corporation Optical fast synchronization shaft position and speed sensor
US5279044A (en) * 1991-03-12 1994-01-18 U.S. Philips Corporation Measuring device for determining an absolute position of a movable element and scale graduation element suitable for use in such a measuring device
US5274229A (en) 1991-06-11 1993-12-28 Hewlett-Packard Company Absolute position encoder
US5241172A (en) * 1991-11-04 1993-08-31 Hewlett-Packard Company Variable pitch position encoder
DE4203073C2 (de) 1992-02-04 1994-12-15 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung
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DE59305801D1 (de) 1993-12-08 1997-04-17 Heidenhain Gmbh Dr Johannes Längenmesssystem
GB2288015B (en) 1994-03-31 1997-11-19 Mitutoyo Corp Optical encoder having a photodiode array that serves both for a light detector and an index scale
JP2695623B2 (ja) * 1994-11-25 1998-01-14 株式会社ミツトヨ 光学式エンコーダ
DE19511068A1 (de) 1995-03-25 1996-09-26 Heidenhain Gmbh Dr Johannes Lichtelektrische Positionsmeßeinrichtung
DE19525874A1 (de) 1995-07-15 1997-01-16 Heidenhain Gmbh Dr Johannes Positionsmeßvorrichtung
DE19530560A1 (de) * 1995-08-19 1997-02-20 Ct Fuer Intelligente Sensorik Längen- oder Winkelmeßeinrichtung
DE19726935B4 (de) 1997-06-25 2014-06-12 Dr. Johannes Heidenhain Gmbh Optische Positionsmeßeinrichtung
EP0896206B1 (de) 1997-08-07 2002-12-11 Dr. Johannes Heidenhain GmbH Abtasteinheit für eine optische Positionsmesseinrichtung

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005121640A (ja) * 2003-10-14 2005-05-12 Dr Johannes Heidenhain Gmbh 光学式位置測定装置
JP2006220655A (ja) * 2005-02-11 2006-08-24 Dr Johannes Heidenhain Gmbh 位置測定装置
JP2014098666A (ja) * 2012-11-15 2014-05-29 Canon Inc インクリメンタルエンコーダ
JP2017111068A (ja) * 2015-12-18 2017-06-22 セイコーＮｐｃ株式会社 光エンコーダ

Also Published As

Publication number Publication date
EP0896206B1 (de) 2002-12-11
JPH11142114A (ja) 1999-05-28
WO1999008074A1 (de) 1999-02-18
US6392224B1 (en) 2002-05-21
EP1002219A1 (de) 2000-05-24
DE59806554D1 (de) 2003-01-16
JP4324261B2 (ja) 2009-09-02
EP1002219B1 (de) 2002-12-04
DE19830925A1 (de) 1999-02-11
EP0896206A3 (de) 1999-03-10
ATE229171T1 (de) 2002-12-15
US6198534B1 (en) 2001-03-06
DE19833439B4 (de) 2014-08-28
DE19833439A1 (de) 1999-02-11
ATE229642T1 (de) 2002-12-15
EP0896206A2 (de) 1999-02-10
DE59806597D1 (de) 2003-01-23

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