JP2001509613A - レーザースキャナのためのアナモルフィックな走査レンズ - Google Patents
レーザースキャナのためのアナモルフィックな走査レンズInfo
- Publication number
- JP2001509613A JP2001509613A JP2000502439A JP2000502439A JP2001509613A JP 2001509613 A JP2001509613 A JP 2001509613A JP 2000502439 A JP2000502439 A JP 2000502439A JP 2000502439 A JP2000502439 A JP 2000502439A JP 2001509613 A JP2001509613 A JP 2001509613A
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- scanning
- lens
- scan
- cylindrical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
- G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
- G02B26/125—Details of the optical system between the polygonal mirror and the image plane
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Lenses (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Facsimile Scanning Arrangements (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US5280097P | 1997-07-08 | 1997-07-08 | |
US60/052,800 | 1997-07-08 | ||
US8243398A | 1998-05-20 | 1998-05-20 | |
US09/082,433 | 1998-05-20 | ||
PCT/US1998/012464 WO1999003012A1 (en) | 1997-07-08 | 1998-06-19 | Anamorphic scan lens for laser scanner |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2001509613A true JP2001509613A (ja) | 2001-07-24 |
Family
ID=26731092
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000502439A Pending JP2001509613A (ja) | 1997-07-08 | 1998-06-19 | レーザースキャナのためのアナモルフィックな走査レンズ |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP0995144A1 (zh) |
JP (1) | JP2001509613A (zh) |
KR (1) | KR20010014242A (zh) |
CA (1) | CA2296595A1 (zh) |
IL (1) | IL133751A0 (zh) |
TW (1) | TW394853B (zh) |
WO (1) | WO1999003012A1 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016529535A (ja) * | 2013-06-21 | 2016-09-23 | イエーノプティーク オプティカル システムズ ゲーエムベーハー | 走査装置 |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20080039449A (ko) * | 2005-08-02 | 2008-05-07 | 칼 짜이스 레이저 옵틱스 게엠베하 | 선 초점을 생성하기 위한 광학 시스템, 그러한 광학시스템을 이용하는 스캐닝 시스템, 및 기판의 레이저 공정방법 |
KR100701920B1 (ko) * | 2005-11-15 | 2007-03-30 | 김명수 | 유동기능을 갖는 트랙터용 써레 |
US7466331B2 (en) | 2005-12-07 | 2008-12-16 | Palo Alto Research Center Incorporated | Bow-free telecentric optical system for multiple beam scanning systems |
ITMI20070885A1 (it) | 2007-05-04 | 2008-11-05 | Sapsa Bedding S R L | Materasso con pannello trapuntato e relativi procedimenti di fabbricazione |
KR200448779Y1 (ko) * | 2009-10-09 | 2010-05-24 | (주)엘이디웍스 | 광학계를 포함하는 회전형 디스플레이 장치 |
ITVI20130229A1 (it) * | 2013-09-18 | 2015-03-19 | Ettore Maurizio Costabeber | Macchina stereolitografica con gruppo ottico perfezionato |
JP6571092B2 (ja) * | 2013-09-25 | 2019-09-04 | エーエスエムエル ネザーランズ ビー.ブイ. | ビームデリバリ装置及び方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0364726A (ja) * | 1989-08-02 | 1991-03-20 | Minolta Camera Co Ltd | 光ビーム走査光学系 |
JPH04233867A (ja) * | 1990-06-27 | 1992-08-21 | Xerox Corp | サブミクロンの揺動補正を有する光学的走査システム |
US5168386A (en) * | 1990-10-22 | 1992-12-01 | Tencor Instruments | Flat field telecentric scanner |
JP3193546B2 (ja) * | 1993-01-14 | 2001-07-30 | 旭光学工業株式会社 | 反射型走査光学系 |
US5512949A (en) * | 1993-12-29 | 1996-04-30 | Xerox Corporation | Multiple beam raster output scanner optical system having telecentric chief exit rays |
JP3275548B2 (ja) * | 1994-07-28 | 2002-04-15 | 松下電器産業株式会社 | 光走査装置 |
JPH08160337A (ja) * | 1994-12-09 | 1996-06-21 | Minolta Co Ltd | レーザビーム走査光学装置 |
-
1998
- 1998-06-19 CA CA002296595A patent/CA2296595A1/en not_active Abandoned
- 1998-06-19 EP EP98930259A patent/EP0995144A1/en not_active Withdrawn
- 1998-06-19 KR KR1019997012346A patent/KR20010014242A/ko not_active Application Discontinuation
- 1998-06-19 WO PCT/US1998/012464 patent/WO1999003012A1/en not_active Application Discontinuation
- 1998-06-19 JP JP2000502439A patent/JP2001509613A/ja active Pending
- 1998-06-19 IL IL13375198A patent/IL133751A0/xx unknown
- 1998-07-07 TW TW087111000A patent/TW394853B/zh not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016529535A (ja) * | 2013-06-21 | 2016-09-23 | イエーノプティーク オプティカル システムズ ゲーエムベーハー | 走査装置 |
Also Published As
Publication number | Publication date |
---|---|
TW394853B (en) | 2000-06-21 |
WO1999003012A1 (en) | 1999-01-21 |
KR20010014242A (ko) | 2001-02-26 |
EP0995144A1 (en) | 2000-04-26 |
IL133751A0 (en) | 2001-04-30 |
CA2296595A1 (en) | 1999-01-21 |
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