JP2001356488A - レーザ描画装置 - Google Patents

レーザ描画装置

Info

Publication number
JP2001356488A
JP2001356488A JP2000178253A JP2000178253A JP2001356488A JP 2001356488 A JP2001356488 A JP 2001356488A JP 2000178253 A JP2000178253 A JP 2000178253A JP 2000178253 A JP2000178253 A JP 2000178253A JP 2001356488 A JP2001356488 A JP 2001356488A
Authority
JP
Japan
Prior art keywords
laser
wavelength
light
optical system
light source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000178253A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001356488A5 (enExample
Inventor
Shuichi Takeuchi
修一 竹内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pentax Corp
Original Assignee
Asahi Kogaku Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Kogaku Kogyo Co Ltd filed Critical Asahi Kogaku Kogyo Co Ltd
Priority to JP2000178253A priority Critical patent/JP2001356488A/ja
Priority to US09/879,161 priority patent/US6791594B2/en
Publication of JP2001356488A publication Critical patent/JP2001356488A/ja
Publication of JP2001356488A5 publication Critical patent/JP2001356488A5/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/435—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material
    • B41J2/47—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material using the combination of scanning and modulation of light
    • B41J2/471—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material using the combination of scanning and modulation of light using dot sequential main scanning by means of a light deflector, e.g. a rotating polygonal mirror
    • B41J2/473—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material using the combination of scanning and modulation of light using dot sequential main scanning by means of a light deflector, e.g. a rotating polygonal mirror using multiple light beams, wavelengths or colours
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/12—Scanning systems using multifaceted mirrors
    • G02B26/123—Multibeam scanners, e.g. using multiple light sources or beam splitters
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2051—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
    • G03F7/2053—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a laser

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Microscoopes, Condenser (AREA)
  • Laser Beam Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2000178253A 2000-06-14 2000-06-14 レーザ描画装置 Pending JP2001356488A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2000178253A JP2001356488A (ja) 2000-06-14 2000-06-14 レーザ描画装置
US09/879,161 US6791594B2 (en) 2000-06-14 2001-06-13 Laser imaging apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000178253A JP2001356488A (ja) 2000-06-14 2000-06-14 レーザ描画装置

Publications (2)

Publication Number Publication Date
JP2001356488A true JP2001356488A (ja) 2001-12-26
JP2001356488A5 JP2001356488A5 (enExample) 2007-07-19

Family

ID=18679710

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000178253A Pending JP2001356488A (ja) 2000-06-14 2000-06-14 レーザ描画装置

Country Status (2)

Country Link
US (1) US6791594B2 (enExample)
JP (1) JP2001356488A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006235370A (ja) * 2005-02-25 2006-09-07 Fuji Photo Film Co Ltd 画像形成装置および画像形成方法
TWI401539B (zh) * 2007-03-28 2013-07-11 Orc Mfg Co Ltd Exposure drawing device
JP2019158926A (ja) * 2018-03-07 2019-09-19 キヤノン株式会社 パターン形成装置及び物品の製造方法
JP2020013137A (ja) * 2019-08-23 2020-01-23 株式会社ニコン パターン露光装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7256803B2 (en) * 2002-09-26 2007-08-14 Futurelogic, Inc. Direct thermal printer
JP5651935B2 (ja) * 2008-08-28 2015-01-14 株式会社リコー 画像処理装置
GB2477139A (en) * 2010-01-25 2011-07-27 Datalase Ltd Inkless printing apparatus

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62237865A (ja) * 1986-04-09 1987-10-17 Fuji Photo Film Co Ltd 光走査装置
US5587825A (en) * 1991-06-26 1996-12-24 Asahi Kogaku Kogyo Kabushiki Kaisha Scanning optical system
US6141030A (en) * 1997-04-24 2000-10-31 Konica Corporation Laser exposure unit including plural laser beam sources differing in wavelength

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006235370A (ja) * 2005-02-25 2006-09-07 Fuji Photo Film Co Ltd 画像形成装置および画像形成方法
TWI401539B (zh) * 2007-03-28 2013-07-11 Orc Mfg Co Ltd Exposure drawing device
JP2019158926A (ja) * 2018-03-07 2019-09-19 キヤノン株式会社 パターン形成装置及び物品の製造方法
JP7114277B2 (ja) 2018-03-07 2022-08-08 キヤノン株式会社 パターン形成装置及び物品の製造方法
JP2020013137A (ja) * 2019-08-23 2020-01-23 株式会社ニコン パターン露光装置

Also Published As

Publication number Publication date
US6791594B2 (en) 2004-09-14
US20010053164A1 (en) 2001-12-20

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