JP2001356357A - Liquid crystal display device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a liquid crystal display device capable of contributing to the improving of productivity and the improving of manufacturing yield. SOLUTION: This display device has data bus lines 18 formed on a substrate, gate bus lines 20 intersecting the data bus lines 18 and measurement patterns 24 which consists of the electrically conductive film identical to that for the gate bus line and exist along directions intersecting the gate bus lines 20.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal display, and more particularly, to a liquid crystal display capable of realizing high productivity and a high production yield.

[0002]

2. Description of the Related Art Liquid crystal display devices have the advantages that they are thin and lightweight, can be driven at a low voltage and consume little current, and have recently been widely used in displays of personal computers and televisions. .

FIG. 25 is a plan view showing a conventional liquid crystal display device.
This will be described with reference to FIG.

[0005] As shown in FIG. 25, pixel electrodes 110 are formed in a matrix on a glass substrate (not shown). The pixel electrode 110 has a TFT (Thin Film Tran)
The source electrode 114 of the sistor 112 is connected.
The drain electrode 116 of the TFT 112 is connected to a data bus line 118 extending vertically in the drawing. T
The source / drain electrodes 114 and 116 of the FT 112 are formed of the same conductive film as the data bus line 118.

A gate bus line 120 is formed to cross data bus line 118. The gate bus line 120 also serves as a gate electrode of the TFT 112. A storage capacitor bus line 122 is formed along the gate bus line 120.

[0006] Such a liquid crystal display device is generally formed by sequentially exposing a pattern on a glass substrate using a step-type projection exposure apparatus or the like.

However, during stepper exposure, there is a case where a deviation occurs in the superposition of patterns, and in such a case, a liquid crystal display device having good display quality cannot be provided.

For this reason, conventionally, the positional deviation between the gate bus lines and the source / drain electrodes has been measured to check the displacement of the pattern superposition during the stepper exposure.

More specifically, as shown in FIG.
A gate bus line 120 is provided between II 'of a certain pixel.
The positional relationship between the gate bus line 120 and the source / drain electrodes 114 and 116 is measured between JJ ′ of another pixel.
And the positional relationship was also measured in several pixels in the same manner, and by comparing these measurement results, the displacement of the pattern superposition was inspected.

The display quality of the liquid crystal display device is ensured by adjusting the step-type projection exposure apparatus or the like as needed in accordance with the shift of the pattern superposition and keeping the shift of the pattern superposition small.

Recently, liquid crystal display devices have become larger and larger.
With miniaturization, disconnection and short-circuit of bus lines are likely to occur. An inspection technique and a repair technique for disconnection and short circuit of the bus line will be described below.

As shown in FIG. 27, data bus line 1
18a and 118c are connected to a peripheral connection line 132b formed outside the display area 128. The data bus lines 118b and 118d are connected to the peripheral connection line 132a. Peripheral connection line 132a,
132b has voltage application terminals 134a and 134, respectively.
b is connected. Also, the data bus line 118a
To 118d have voltage measuring terminals 144a to 144d, respectively.
4d is connected.

Outside the display area 128, a repair wiring 130 crossing the data bus lines 118a to 118d is provided.
a and 130b are formed. Repair wiring 130a
Are connected to the peripheral connection line 132a.

A printed board (not shown) is provided at an edge of the glass substrate (not shown). The wiring 146 is formed on the printed board. The wiring 146 extends on the glass substrate and crosses the repair wiring 130a and the repair wiring 130b.

In the inspection of the data bus lines 118a to 118d, a voltage of, for example, +10 V is applied to the voltage applying terminal 134a, a voltage of, for example, -10V is applied to the voltage applying terminal 134b, and the voltages are measured at the voltage measuring terminals 144a to 144d. It is done by doing.

If there is no particular abnormality in the data bus lines 118a to 118d, the voltage measurement terminals 144b, 14b
At 4d, for example, a voltage of +10 V is measured, and at the voltage measurement terminals 144a and 144c, for example, a voltage of -10 V is measured.

Here, the adjacent gate bus line 118a
The reason why different voltages are applied to .about.118d is to detect a short circuit of the gate bus lines 118a to 118d.
That is, as shown in FIG.
When the same voltage is applied to the data bus lines 118a to 118d, the same voltage as in the normal case is measured at the voltage measurement terminals 144a to 144d even if a short circuit occurs in the data bus lines 118a to 118d. I can't.
On the other hand, adjacent data bus lines 118a to 118a
When a different voltage is applied to the data bus line 118d and the data bus line 11a, as shown in FIG.
8b, a voltage different from the voltage measured in the normal case is applied to the voltage measurement terminals 118a to 118b.
d, the gate bus lines 118a-11
It is possible to detect that a short circuit has occurred in 8d.

On the other hand, when the voltage measured at the voltage measuring terminals 144a to 144d is, for example, 0 V, it can be determined that the corresponding data bus lines 118a to 118d are disconnected. For example, if the data bus line 118c is disconnected as shown in FIG.
Since the voltage of the voltage measurement terminal 144c becomes 0 V, it can be determined that the data bus line 118c is disconnected.

When such a disconnection has occurred, the disconnection is repaired as follows.

That is, first, the data bus line 118c and the repair wiring 130a are connected by irradiating a laser to a region 148 where the data bus line 118c and the repair wiring 130a intersect. In addition, a region 150 where the data bus line 118c and the repair wiring 130b intersect with each other.
By performing laser irradiation on the data bus line 11
8c and the repair wiring 130b.

By irradiating a laser to the region 152 where the wiring 146 and the repair wiring 130a intersect,
The wiring 146 is connected to the repair wiring 130a. Also,
Region 15 where wiring 146 and repair wiring 130b intersect
The wiring 146 is connected to the repair wiring 130b by irradiating the wiring 4 with a laser. Thus, the repair wiring 13
The disconnected data bus line 118c is repaired by the lines 0a and 130b and the wiring 146.

In this state, since the peripheral connection line 132a and the peripheral connection line 132b are short-circuited via the data bus line 118c and the repair wiring 130a, the subsequent inspection cannot be performed. .

Therefore, the repair wiring 130a is cut off at a location 156 near the peripheral connection line 132, whereby the peripheral connection line 132a and the peripheral connection line 132b are cut.
Eliminates the short circuit condition with Thus, the subsequent inspection can be performed.

A glass substrate used for a liquid crystal display device is generally obtained by cutting a mother glass. However, if the cut surface is cut from the mother glass, the cut surface may be cracked or chipped, and the sharp cut surface may injure the operator. For this reason, chamfering is performed on cut surfaces and corners of the glass substrate.

FIG. 31 is a plan view of a liquid crystal display device in which a glass substrate 172 and a glass substrate 174 are opposed to each other. Glass substrate 172 and glass substrate 17
The cut surface of No. 4 is chamfered. The corners of the glass substrate 172 are also chamfered.

In such a liquid crystal display device, since the corners of the glass substrate 172 are chamfered, it is possible to prevent the glass substrate from being cracked or chipped, and to prevent the operator from being injured.

[0027]

However, FIG.
In the conventional liquid crystal display device shown in FIG.
Although the displacement of the pattern overlap in the direction perpendicular to 0 can be inspected, the displacement of the pattern overlap in the direction parallel to the gate bus line 120 cannot be inspected. For this reason, even if there is a shift in the pattern superposition in a direction parallel to the gate bus line 120, such a shift cannot be detected early, and the manufacturing yield of the liquid crystal display device has been reduced.

When the disconnection of the data bus line 118c is to be repaired as shown in FIG. 30, a large number of wirings having a similar shape are formed near the repair wiring 130a to be cut. It takes a long time to specify the repair wiring 130a, which is a factor that lowers productivity. In addition, other wiring may be cut by mistake, which has been a factor of lowering the manufacturing yield.

Conventionally, a technique for controlling the amount of chamfering of a glass substrate has not been established yet, so that one side of a corner of the glass substrate 172 is excessively shaved as shown by hatching in FIG. Yes, in such a case, FIG.
As shown in FIG. 7, a chip 175 may be formed in the glass substrate 172. Further, as shown by hatching in FIG. 33 (a), if the corner 175 of the glass substrate 172 is excessively cut, the glass substrate 172 may not be fixed to the jig in some cases. Further, when the chamfer is performed by rotating the polishing blade, the chamfer may be formed into a shape as shown in FIG.
72 was easily chipped. Such cracking or chipping of the glass substrate has been a factor in lowering the production yield of the liquid crystal display device.

An object of the present invention is to provide a liquid crystal display device which can contribute to improvement in productivity and production yield.

[0031]

The above object is achieved by a data bus line formed on a substrate, a gate bus line intersecting the data bus line, and the same conductive film as the gate bus line. This is achieved by a liquid crystal display device having a measurement pattern extending in a direction intersecting the bus line. As a result, since the measurement pattern extending in the direction intersecting the data bus line is formed, not only the misalignment of the pattern in the direction perpendicular to the gate bus line but also the pattern in the direction parallel to the gate bus line is performed. Can also be measured.

Further, the object is to form a data bus line formed on a substrate, a gate bus line crossing the data bus line, and the same conductive film as the gate bus line. The present invention is achieved by a liquid crystal display device comprising: a storage capacitor bus line extending in a vertical direction; and a measurement pattern formed integrally with the storage capacitor bus line and extending in a direction crossing the gate bus line. . As a result, since the measurement pattern extending in the direction intersecting the data bus line is formed, not only the misalignment of the pattern in the direction perpendicular to the gate bus line but also the pattern in the direction parallel to the gate bus line is performed. Can also be measured.

In addition, the object of the present invention is to provide a liquid crystal display device in which an inspection can be performed by cutting a wiring outside a display area, in which a mark for specifying a place where the wiring should be cut is formed. This is achieved by a liquid crystal display device characterized in that: As a result, the region to be cut can be visually grasped, so that the wiring to be cut can be quickly specified, and it is possible to prevent another wiring from being cut by mistake.

[0034] Further, the object is to provide a first substrate, a second substrate facing the first substrate, and a liquid crystal material sealed between the first substrate and the second substrate. Is achieved by a liquid crystal display device characterized in that a mark capable of measuring a chamfer amount is formed near a corner of the first substrate and / or the second substrate. . Thereby, since the mark is formed at the corner of the glass substrate, the chamfer can be performed while grasping the chamfer amount. Further, after the completion of the chamfering, it is possible to easily inspect whether or not the chamfering amount conforms to the standard.

[0035]

[First Embodiment] A liquid crystal display according to a first embodiment of the present invention will be explained with reference to FIGS. FIG. 1 is a plan view showing the liquid crystal display device according to the present embodiment. FIG. 2 is an enlarged plan view of the liquid crystal display device according to the present embodiment.

As shown in FIG. 1, pixel electrodes 10 are formed in a matrix on a glass substrate (not shown). The pixel electrode 10 has a source electrode 14 of the TFT 12
Is connected.

The drain electrode 16 of the TFT 12 is connected to a data bus line 18 extending in the vertical direction of the drawing. Note that the source electrode 16 and the drain electrode 14 of the TFT 12 are formed of the same conductive film as the data bus line 18.

To cross the data bus line 18,
A gate bus line 20 is formed. The gate bus line 20 also serves as a gate electrode of the TFT 12.

A storage capacitor bus line 22 is formed along the gate bus line 20. The storage capacitor bus line 22 is made of the same conductive film as the gate bus line 20.

A measurement pattern 24 extending in a direction intersecting the direction in which the gate bus line 20 extends is formed integrally with the storage capacitor bus line 22. Measurement pattern 2
4 is a storage capacitor bus line 22 and a gate bus line 2
0 and the same conductive film.

The liquid crystal display device according to the present embodiment configured as described above can measure the displacement of the pattern superposition during the stepper exposure as follows. FIG.
FIG. 2A is an enlarged plan view of one region of the liquid crystal display device according to the present embodiment, and FIG. 2B is an enlarged plan view of another region of the liquid crystal display device according to the present embodiment. Note that pixel electrodes are omitted in FIGS. 2A and 2B.

First, a source / drain electrode 1 between A and A 'of a certain pixel is measured using an image processing type dimension measuring device.
The positional relationship between 4, 6 and the gate bus line 20 is measured.

Next, similarly, the positional relationship between the source / drain electrodes 14 and 16 and the gate bus line 20 between BB 'of another pixel is measured.

Further, the source / drain electrodes 14 and 16 and the gate bus line 20 are similarly formed at several pixels.
By measuring the positional relationship between the two and comparing these measurement results, the shift of the pattern superposition in the direction perpendicular to the gate bus line 20 is calculated.

Next, similarly, the positional relationship between the measurement pattern 24 and the data bus line 18 between C and C 'of a certain pixel is measured.

Similarly, the positional relationship between the measurement pattern 24 and the gate bus line 18 between DD and D 'of another pixel is measured.

Further, the positional relationship between the measurement pattern 24 and the data bus line 18 is measured in a similar manner at several pixels, and the measured results are compared to determine the pattern in the direction parallel to the gate bus line 20. The overlay deviation is calculated.

In this way, it is possible to inspect the displacement of the pattern superposition during the stepper exposure.

In the liquid crystal display device according to the present embodiment, the measurement pattern 24 extending in the direction intersecting with the extending direction of the gate bus line 22 is formed by the same conductive film as the gate bus line 22. The main feature of the present embodiment is that it is possible to inspect the displacement of the pattern superposition in the direction parallel to the gate bus line 22 by using the gate bus line 24.

In the conventional manufacturing process of a liquid crystal display device,
By measuring the positional relationship between the gate bus lines and the source / drain electrodes, the misalignment of the pattern in the stepper exposure was inspected. Although inspection was possible, it was not possible to inspect deviation of pattern superposition in a direction parallel to the gate bus line.

On the other hand, according to the present embodiment, the measurement pattern 2 made of the same conductive film as the gate bus line 22 is used.
4 is formed so as to extend in the direction intersecting with the direction in which the gate bus line 22 extends.
By measuring the positional relationship between the data bus line 22 and the data bus line 22, it is possible to inspect the displacement of the pattern superposition in the direction parallel to the gate bus line 20. That is, according to the present embodiment, not only the misalignment of the pattern in the direction perpendicular to the gate bus line 20 but also the misalignment of the pattern in the direction parallel to the gate bus line 20 can be easily inspected. Can be.

If the step-type projection exposure apparatus or the like is adjusted as needed in accordance with the deviation of the pattern superposition, the deviation of the pattern superposition can be kept small, and the liquid crystal display with good display quality can be maintained. The device can be manufactured with high yield.

In this embodiment, the measurement pattern 24
Is formed integrally with the storage capacitor bus line 24, it is possible to prevent static electricity from being accumulated in the measurement pattern 24 during the manufacturing process of the liquid crystal display device, and to prevent short-circuiting or disconnection of the pattern due to electrostatic discharge. Can be avoided.

(Modification) Next, a modification of the liquid crystal display device according to the present embodiment will be explained with reference to FIG. FIG. 3 is a plan view showing a liquid crystal display device according to the present modification.

The main feature of the liquid crystal display device according to this modification is that the measurement pattern 24a is formed integrally with the gate bus line 20.

In such a liquid crystal display device, by measuring the positional relationship between the measurement pattern 24 a and the data bus line 18, it is possible to inspect the displacement of the pattern overlapping in the direction parallel to the gate bus line 20. . For example, the measurement pattern 2 between EE ′ in FIG.
The positional relationship between the data bus line 4a and the data bus line 18 is measured.

As described above, even when the measurement pattern 24 a is formed integrally with the gate bus line 20, it is possible to inspect the displacement of the pattern overlapping in the direction parallel to the gate bus line 20.

[Second Embodiment] The liquid crystal display according to a second embodiment of the present invention will be explained with reference to FIG. FIG. 4 is a plan view illustrating the liquid crystal display device according to the present embodiment. FIG.
The same components as those of the liquid crystal display device according to the first embodiment shown in FIG. 3 to FIG. 3 are denoted by the same reference numerals, and description thereof will be omitted or simplified.

The main feature of the liquid crystal display device according to the present embodiment is that the measurement pattern 24b is formed separately from the gate bus line 20 and the storage capacitor bus line 22.

As shown in FIG. 4, the measurement pattern 24b
Are formed near the data bus line 18 separately from the gate bus line 20 and the storage capacitor bus line 22.

The measurement pattern 24b is made of the same conductive film as the gate bus line 20, and the gate bus line 20 and the measurement pattern 24b are formed through the same exposure process. Therefore, the gate bus line 20
The relative position between the measurement pattern 24b and the measurement pattern 24b is always constant.

In such a liquid crystal display device, by measuring the positional relationship between the measurement pattern 24 b and the data bus line 18, it is possible to inspect the misalignment of the pattern in the direction parallel to the gate bus line 20. . For example, the measurement pattern 2 between FF 'in FIG.
The positional relationship between 4b and the data bus line 18 is measured.

As described above, even when the measurement pattern 24b is formed separately from the gate bus line 20 and the storage capacitor bus line 22, like the liquid crystal display according to the first embodiment, the gate bus line 20 is It is possible to inspect the misalignment of the pattern in the parallel direction.

In the liquid crystal display device according to the present embodiment, it is not necessary to form the measurement pattern integrally with the gate bus line 20 and the storage capacitor bus line 22, so that the degree of freedom in the layout of the measurement pattern 24b can be increased. it can.

The measurement pattern is the gate bus line 2
0 or the storage capacitor bus line 22, when the measurement pattern is short-circuited with the data bus line 18, the gate bus line 2 is connected via the measurement pattern.
0 and the data bus line 18 may be short-circuited. However, in this embodiment, since the measurement pattern 24b is formed separately from the gate bus line 20, the gate bus is connected via the measurement pattern 24b. The line 20 and the data bus line 18 are not short-circuited. Therefore, according to the present embodiment, even when the measurement pattern 24b is formed, it is possible to avoid a decrease in the manufacturing yield of the liquid crystal display device.

In this embodiment, the measurement pattern 24
b is formed separately from the gate bus line 20 and the storage capacitor bus line 22, static electricity may be accumulated in the measurement pattern 25b during the manufacturing process of the liquid crystal display device. It is also conceivable that a short circuit or disconnection may occur. In order to avoid such obstacles, it is important to take countermeasures against static electricity in the manufacturing process of the liquid crystal display device.

(Modification) Next, a modification of the liquid crystal display device according to the present embodiment will be explained with reference to FIG. FIG. 5 is a plan view showing a liquid crystal display device according to the present modification.

The liquid crystal display according to the present modification is characterized mainly in that the measurement pattern 24c is formed so as to face the data bus line 18.

As described above, even when the measurement pattern 24c is formed so as to face the data bus line 18, like the liquid crystal display device according to the second embodiment shown in FIG. It is possible to inspect the misalignment of the pattern in the parallel direction.

In the liquid crystal display device according to the present modification,
Since the measurement pattern 24c is formed so as to face the data bus line 18, it is not necessary to secure an area for forming the measurement pattern 24c, which can contribute to miniaturization of the liquid crystal display device.

[Third Embodiment] The liquid crystal display according to a third embodiment of the present invention will be explained with reference to FIG. FIG. 6 is a plan view showing the liquid crystal display device according to the present embodiment. FIG.
The same components as those of the liquid crystal display device according to the first or second embodiment shown in FIG. 5 are denoted by the same reference numerals, and description thereof will be omitted or simplified.

As shown in FIG. 6, in the liquid crystal display device according to the present embodiment, the measurement pattern 24d is formed integrally with the gate bus line 20, and the measurement pattern 24d is formed of the same conductive film as the data bus line 18. The main feature is that 26 is formed to face the measurement pattern 24d. The measurement pattern 24d is the data bus line 18
The relative position between the data bus line 18 and the measurement pattern 26 is determined by the same exposure process as
It is always constant.

In such a liquid crystal display device, by measuring the positional relationship between the measurement pattern 24 d and the measurement pattern 26, it is possible to inspect the misalignment of the pattern in the direction parallel to the gate bus line 20.
For example, the measurement pattern 24d between GG 'in FIG.
The positional relationship between the data and the measurement pattern 26 is measured.

As described above, by forming the measurement pattern 24 d made of the same conductive film as the gate bus line 20 and the measurement pattern 26 made of the same conductive film as the data bus line 18, the gate bus line 20 can also be formed. It is possible to inspect the misalignment of the pattern in the parallel direction.

(Modification) Next, a modification of the liquid crystal display device according to the present embodiment will be explained with reference to FIG. FIG. 7 is a plan view showing a liquid crystal display device according to the present modification.

The main feature of the liquid crystal display device according to the present modification is that the measurement pattern 26a is formed below the gate bus line 20 in the drawing and the measurement pattern 24e is formed to face the measurement pattern 26a. There is.

The measurement pattern 26a is made of the same conductive film as the gate bus line, and is formed integrally with the gate bus line. The measurement pattern 24e
Are formed of the same conductive film as the data bus line 18 and are formed through the same exposure process as the data bus line 18.

In such a liquid crystal display device, for example, the positional relationship between the measurement pattern 24e and the measurement pattern 26a between HH 'in FIG. 7 is measured.

As described above, even when the measurement pattern 26a and the measurement pattern 24e are formed on the lower side of the paper of the gate bus line 20, the displacement of the pattern overlapping in the direction parallel to the gate bus line 20 can be reduced. Can be inspected.

[Fourth Embodiment] The liquid crystal display according to a fourth embodiment of the present invention will be explained with reference to FIGS.
FIG. 8 is a conceptual diagram illustrating the liquid crystal display device according to the present embodiment. FIG. 9 shows the TAB of the liquid crystal display device according to the present embodiment.
It is a top view showing the neighborhood of a terminal. FIG. 10 is a conceptual diagram showing a repair state of the disconnection of the data bus line. FIG.
FIG. 4 is a plan view showing a state where a repair wiring is cut from a peripheral connection line. The same components as those of the liquid crystal display device according to the first to third embodiments shown in FIGS. 1 to 7 are denoted by the same reference numerals, and description thereof will be omitted or simplified.

As shown in FIG. 8, on a glass substrate (not shown), data bus lines 18a to 18d extending in the vertical direction of the drawing are formed. Further, a plurality of gate bus lines (not shown) are formed so as to cross the data bus lines 18a to 18d. The data bus lines 18a to 18d and the gate bus lines are the data bus lines 18 of the liquid crystal display according to the first embodiment shown in FIG.
And the gate bus line 20.

The display area 28 has a pixel electrode (not shown).
And a TFT (not shown). Display area 2
The pixel electrodes and TFTs formed in the pixel electrode 8 and the TFTs of the liquid crystal display device according to the first embodiment shown in FIG.
Same as 12.

Outside the display area 28, repair wirings 30a and 30b crossing the data bus lines 18a to 18d
Are formed.

Further, outside the display area 28, peripheral connection lines 32a and 32b are formed. A voltage application terminal 34a for applying a voltage to the peripheral connection line 32a at the time of inspection is connected to the peripheral connection line 32a.
A voltage application terminal 32b for applying a voltage to the peripheral connection line 32b at the time of inspection is connected to the peripheral connection line 32b.

The repair wiring 30a is, as shown in FIG.
It is connected to the peripheral connection line 32a via the terminal 36 and the wiring 35. A triangular mark 37 is formed below the terminal 36 in the drawing. The mark 37 is made of the same conductive film as the terminal 36, and is made of, for example, a laminated film made of an Al / MoN / Mo film.

Since the mark 37 is formed on a transparent glass substrate, and a transparent film such as a silicon oxide film is formed on the mark 37, the mark 37 is easily found with a loupe or the like. I can do it.

The data bus line 18a is connected to the TAB terminal 3
It is connected to the peripheral connection line 32b via the wiring 8a and the wiring 39a. The data bus line 18b is connected to the peripheral connection line 32a via a TAB terminal 38b and a wiring 39b. The data bus line 18c is connected to the peripheral connection line 32b via the TAB terminal 38c and the wiring 39c.
It is connected to the. Data bus line 18d is TAB
Peripheral connection line 32 via terminal 38d and wiring 39d
a. The wiring 40 includes a terminal 42 and a wiring 43
And to the peripheral connection line 32a.

As shown in FIG. 8, outside the display area 28, voltage measuring terminals 44a to 44d are formed. The data bus lines 18a to 18d are connected to voltage measurement terminals 44a to 44d, respectively. Voltage measurement terminal 4
4a to 44d are the data bus lines 18a to 18d during the inspection.
This is for measuring the voltage of 18d.

At the edge of the glass substrate, a printed circuit board (not shown) is provided. Wiring 4 on the printed circuit board
6 are formed. The wiring 46 extends on the glass substrate and crosses the repair wiring 30a and the repair wiring 30b. The wiring 46 is used for electrically connecting the repair wiring 30a and the repair wiring 30b.

In the liquid crystal display device according to the present embodiment, when a disconnection occurs in the data bus line, repair is performed as follows.

Here, as shown in FIG. 10, a case where a disconnection occurs in the data bus line 18c in a certain area 47 will be described as an example.

When such a disconnection has occurred, first,
Laser irradiation is performed in a region 48 where the data bus line 18c and the repair wiring 30a intersect, thereby connecting the data bus line 18c and the repair wiring 30a.

Further, laser irradiation is performed in an area 50 where the data bus line 18c and the repair wiring 30b intersect, whereby the data bus line 18c and the repair wiring 3b are irradiated.
0b.

Further, laser irradiation is performed in a region 52 where the wiring 46 and the repair wiring 30a intersect, thereby connecting the wiring 46 and the repair wiring 30a.

Laser irradiation is performed in a region 54 where the wiring 46 and the repair wiring 30b intersect, thereby connecting the wiring 46 and the repair wiring 30b.

In this manner, the broken data bus line 18c is repaired by the repair wires 30a, 30b and the wire 46.

However, at this stage, the inspection cannot be performed because the peripheral connection lines 32a and 32b are in a short-circuit state via the data bus line 18c and the repair wiring 30a.

That is, the adjacent data bus lines 18a to 18a
Inspection as to whether or not a short circuit occurs between the adjacent data bus lines 18a by applying a voltage of, for example, + 10V to the voltage application terminal 34a and applying a voltage of, for example, -10V to the voltage application terminal 34b. To 18d, voltage measuring terminals 44a to 44d
Is appropriately measured, and when the peripheral connection line 32a and the peripheral connection line 32b are short-circuited, the adjacent data bus line 18a
-18d cannot be applied with different voltages,
It cannot be checked whether a short circuit has occurred.

Therefore, in order to perform such an inspection, the repair wiring 30a is connected to the peripheral connection terminal 32a in order to eliminate the short circuit between the peripheral connection line 32a and the peripheral connection line 32b.
Must be electrically disconnected from the

However, as shown in FIG.
Since the shapes of 8a to 38d and the terminals 36 and 42 are similar to each other, and the shapes of the wirings 35, 39a to 39d and 43 are also similar to each other, it is not easy to specify the wiring 35 to be cut. . Therefore, conventionally, it may take a long time to specify the wiring 35 to be cut, or the other wirings 39a to 39d and 43 may be cut by mistake.

Therefore, in the present embodiment, a mark 37 is formed in the vicinity of the terminal 36 so that the wiring 35 to be cut can be easily specified. In the present embodiment, since the mark 37 is formed near the terminal 36 to be cut, the wiring 35 to be cut can be easily specified.
The wiring 35 can be cut at an appropriate place 56 as shown in FIG.

According to the present embodiment, the wiring 35 to be cut
Can be easily specified, the inspection can be speeded up, and the manufacturing cost of the liquid crystal display device can be reduced.

Further, according to the present embodiment, it is possible to prevent the other wirings 39a to 39d and 43 from being cut by mistake, and therefore, it is possible to improve the production yield of the liquid crystal display device. it can.

[Fifth Embodiment] The liquid crystal display according to a fifth embodiment of the present invention will be explained with reference to FIGS. FIG. 12 is a conceptual diagram illustrating the liquid crystal display device according to the present embodiment. FIG. 13 is a conceptual diagram showing a state where the peripheral connection lines are cut. The same components as those of the liquid crystal display devices according to the first to fourth embodiments shown in FIGS. 1 to 11 are denoted by the same reference numerals, and description thereof will be omitted or simplified.

As shown in FIG. 12, data bus line 4
4a and 44b are the TAB terminals 38a and 38b and the wiring 3
It is connected to the peripheral connection line 32c via 9a and 39b. A voltage application terminal 34 is connected to the peripheral connection line 32c.
a is connected.

Gate bus lines 18a and 18b are formed so as to cross data bus lines 44a and 44b. The gate bus lines 20a and 20b are the same as the gate bus lines 20 of the liquid crystal display according to the first embodiment shown in FIG.

The gate bus lines 20a and 20b are formed with contact holes 58a, formed in an insulating film (not shown).
58b, voltage measuring terminals 60a, 60b
It is connected to the.

The gate bus lines 20, 20b are
Contact hole 62 formed in an insulating film (not shown)
a and 62b are connected to TAB terminals 64a and 64b. The TAB terminals 64a and 64b are connected to the peripheral connection line 32c via wirings 66a and 66b, respectively. A voltage application terminal 3 is connected to the peripheral connection line 32c.
4b is formed.

As shown in FIG. 12, an arrow-shaped mark 37a is formed on the peripheral connection line 32c. Mark 37a
Are formed of the same conductive film as the peripheral connection line 32c.

The data bus lines 18a and 18b and the gate bus lines 20a and 20b are electrically connected to each other via the peripheral connection lines 32c because the TFTs and the like are destroyed by static electricity generated during the manufacturing process of the liquid crystal display device. This is to avoid the situation. That is, the data bus lines 18a,
If the gate bus lines 20a and 20b are electrically connected to each other, the data bus lines 18a and 18b and the gate bus lines 20a and 20b are held at the same potential. It will not be lost.

However, at this stage, since the data bus lines 18a and 18b and the gate bus lines 20a and 20b are short-circuited via the repair wiring 32c, the liquid crystal display device cannot be inspected.

That is, whether or not a short circuit has occurred between the data bus lines 18a and 18b and the gate bus lines 20a and 20b is determined by, for example, applying +
A voltage of 10 V is applied, and for example,-
By applying a voltage of 10 V, different voltages are applied to the data bus lines 18a, 18b and the gate bus lines 20a, 20b, and the voltage measurement terminals 44a, 44
b, 60a, and 60b by appropriately measuring the voltages. The voltage application terminals 34a and 34b
Are short-circuited via the peripheral connection line 32c, different voltages cannot be applied to the data bus lines 18a, 18b and the gate bus lines 20a, 20b, and a short circuit occurs. Cannot be checked.

Therefore, in order to perform such an inspection, it is necessary to disconnect the peripheral connection line 32c in order to eliminate the short circuit between the voltage application terminal 34a and the voltage application terminal 34b.

However, there are cases where a number of wirings similar to the peripheral connection line 32c are formed near the peripheral connection line 32c. In such a case, the peripheral connection line 32c to be cut is conventionally specified. In some cases, it took a long time, or another wiring was cut by mistake.
Even if the peripheral connection line 32c to be disconnected can be specified, it may take a long time to determine where to disconnect.

Therefore, in the present embodiment, an arrow-shaped mark 37a is formed near the portion of the peripheral connection line 32c to be cut. In the present embodiment, since the arrow-shaped mark 37a is formed near the portion to be cut, the peripheral connection line 32c to be cut can be easily specified, and the portion to be cut can also be easily specified. . Then, for example, as shown in FIG.
c can be cut.

When a voltage of, for example, +10 V is applied to the voltage applying terminal 34a and a voltage of, for example, -10 V is applied to the voltage applying terminal 34b in order to check whether or not a short circuit has occurred. Is a voltage measuring terminal 44
The voltage of + 10V is measured at a and 44b, and the voltage of -10V is measured at the voltage measurement terminals 60a and 60b.

On the other hand, as shown in FIG. 13, when the data bus line 18b and the gate bus line 20b are short-circuited in the region 70, the voltage measurement terminals 44a, 44
The voltage measured at b and the voltage measured at the voltage measurement terminals 58a and 58b become equal. In such a case, it can be determined that a short circuit has occurred between the data bus line and the gate bus line.

As described above, according to the present embodiment, the arrow mark 3 is placed near the point 68 of the peripheral connection line 32c to be cut.
Since the portion 7a is formed, the portion 68 to be cut can be easily specified, and the inspection can be speeded up. Therefore, according to the present embodiment, the manufacturing cost of the liquid crystal display device can be reduced.

Further, according to the present embodiment, it is possible to prevent other wirings from being accidentally cut off.
It is also possible to improve the production yield of the liquid crystal display device.

[Sixth Embodiment] The liquid crystal display according to a sixth embodiment of the present invention will be explained with reference to FIGS. FIG. 14 is a conceptual diagram illustrating the liquid crystal display device according to the present embodiment. FIG. 15 is a conceptual diagram showing a state where the wiring is cut. The same components as those of the liquid crystal display devices according to the first to fifth embodiments shown in FIGS. 1 to 13 are denoted by the same reference numerals, and description thereof will be omitted or simplified.

The liquid crystal display device according to the present embodiment has the structure shown in FIG.
Are not provided with the voltage application terminals 34a and 34b as in the liquid crystal display device according to the fifth embodiment shown in FIG.
The inspection is performed by appropriately applying a voltage to 8a, 38b, 64a, and 64b.

As shown in FIG. 14, in the liquid crystal display device according to the present embodiment, the wirings 39a, 39b, 66a, 66b
An arrow-shaped mark 37b is formed near the portion to be cut. The mark 37b is similar to the mark 37a of the liquid crystal display according to the fifth embodiment shown in FIG.

The data bus lines 18a and 18b and the gate bus lines 20a and 20b are electrically connected via the peripheral connection line 32c for the same reason as in the liquid crystal display device according to the fifth embodiment, that is, for the liquid crystal display device. This is to prevent TFTs and the like from being destroyed by static electricity generated during the manufacturing process of the display device.

In the case of the liquid crystal display device according to the present embodiment,
Data bus lines 18a, 18b and gate bus line 2
Since 0a and 20b are short-circuited via the repair wiring 32c, the inspection cannot be performed as it is.

That is, to check whether or not a short circuit has occurred between the data bus lines 18a and 18b and the gate bus lines 20a and 20b, a voltage of, for example, +10 V is applied to the TAB terminals 38a and 38b. 64a, 64
For example, by applying a voltage of −10 V to the data bus lines 18 a and 18 b and the gate bus line 20.
A and 20b are applied by applying different voltages to each other and appropriately measuring the voltages at the voltage measuring terminals 44a, 44b, 60a and 60b.
And the TAB terminals 64a and 64b are connected to the peripheral connection line 32c.
Are short-circuited via the data bus lines 18a, 18b and the gate bus lines 20a, 20b.
Cannot apply different voltages to each other, and it cannot be checked whether a short circuit has occurred.

Therefore, in order to perform such an inspection, the TA
In order to eliminate the short circuit between the B terminals 38a, 38b and the TAB terminals 64a, 64b, the wirings 39a, 39b, 66a,
66b needs to be cut.

However, the wirings 39a, 39b, 66a, 6
In the vicinity of 6b, there are cases where a large number of wirings having similar shapes are formed. In such a case, it takes a long time conventionally to specify the wirings 39a, 39b, 66a, 66b to be cut. Or accidentally cut other wiring.

Therefore, in this embodiment, an arrow mark 37 is provided near the wirings 39a, 39b, 66a, 66b to be cut.
b is formed. In the present embodiment, the wiring 3 to be cut
Arrows 37b near 9a, 39b, 66a, 66b
Are formed, the wires 39a and 39 to be cut are cut.
b, 66a, 66b can be easily specified, and it can be prevented that other wirings are cut by mistake. Then, for example, as shown in FIG.
The wiring 39a, 39b, 66a, 66b can be cut by 1d.

Then, in order to check whether or not a short circuit has occurred, for example, +10 is applied to the TAB terminals 38a and 38b.
When a voltage of V is applied and a voltage of, for example, -10 V is applied to the TAB terminals 64a, 64b, in a normal case, a voltage of +10 V is measured at the voltage measurement terminals 44a, 44b, and-at the voltage measurement terminals 60a, 60b. A voltage of 10 V is measured.

On the other hand, as shown in FIG. 13, when the data bus line 18b and the gate bus line 20b are short-circuited in the region 70, the voltage measurement terminals 44a, 44
The voltage measured at b and the voltage measured at the voltage measurement terminals 58a and 58b become equal. In such a case, it can be determined that a short circuit has occurred between the data bus line and the gate bus line.

As described above, according to the present embodiment, since the arrow mark 37b is formed near the wirings 39a, 39b, 66a, 66b to be cut, the wiring 39 to be cut is formed.
a, 39b, 66a, 66b can be easily specified, and the inspection can be speeded up. Therefore, according to the present embodiment, the manufacturing cost of the liquid crystal display device can be reduced. Further, according to the present embodiment, it is possible to prevent other wirings from being cut by mistake, and therefore, it is also possible to improve the production yield of the liquid crystal display device.

[Seventh Embodiment] The liquid crystal display according to a seventh embodiment of the present invention will be explained with reference to FIGS. FIG. 16 is a plan view showing the liquid crystal display device according to the present embodiment. FIG. 17 is a perspective view of the liquid crystal display device according to the present embodiment. The same components as those of the liquid crystal display devices according to the first to sixth embodiments shown in FIGS. 1 to 15 are denoted by the same reference numerals, and description thereof will be omitted or simplified.

As shown in FIG. 16, a data bus line 18 and a gate bus line 20 are formed on a glass substrate 72. Further, a TFT (not shown), a pixel electrode (not shown), and the like are formed on the glass substrate 72.
A glass substrate 74 is provided to face the glass substrate 72.

At the corners of the glass substrate 72, triangular marks 76
Are formed. The mark 76 is made of, for example, a metal film. The mark 76 may be formed at all corners of the glass substrate 72 or may be formed only at some corners.

The corners of the glass substrate 72 are chamfered. FIG. 17A shows a state before chamfering, and FIG. 17B shows a state after chamfering.

The liquid crystal display according to the present embodiment is characterized mainly in that a triangular mark 76 is formed at a corner of the glass substrate 72. In the conventional liquid crystal display device shown in FIG. 31, the amount of chamfer could not be easily confirmed.
In the present embodiment, triangular marks 76 are provided at the corners of the glass substrate 72.
Is formed, so that the amount of chamfer can be easily confirmed. Therefore, according to the present embodiment, the chamfering operation can be performed while easily checking the chamfering amount, and the accuracy of the chamfering can be improved.

In this embodiment, since the triangular mark 76 is formed at the corner of the glass substrate 72, it is possible to easily inspect whether the chamfer amount conforms to the standard after the chamfering is completed. it can.

Further, according to the present embodiment, the glass substrate whose chamfer amount does not conform to the standard can be eliminated in the chamfering step, so that the defective glass substrate is prevented from flowing out to the next step. The liquid crystal display device can be easily prevented, and the liquid crystal display device can be manufactured with a high yield.

(Modification (Part 1)) Next, a modification (Part 1) of the liquid crystal display device according to the present embodiment will be explained with reference to FIG. FIG. 18 is a perspective view showing a liquid crystal display device according to the present modification.

As shown in FIG. 18A, the main feature of the liquid crystal display device according to the present modification is that numerals are given corresponding to the marks 76. The numerals are made of, for example, the same conductive film as the mark 76.

Then, for example, when chamfering is performed up to the tip of the mark 76 with the numeral 2 as shown in FIG. 18B.

According to this modification, since the numbers are given corresponding to the marks 76, the chamfer amount can be inspected more easily than in the case of the liquid crystal display device according to the seventh embodiment shown in FIG. be able to.

Here, the case where a numeral is attached to the mark 76 has been described as an example. However, the invention is not limited to the numeral, and any character, symbol, or the like can be attached.

(Modification (Part 2)) Next, a modification (Part 2) of the liquid crystal display device according to the present embodiment will be explained with reference to FIG. FIG. 19 is a plan view showing a liquid crystal display device according to the present modification.

As shown in FIG. 19, in the liquid crystal display device according to the present modification, the edge of the glass
The main feature is that a plurality of linear marks 76a are formed.

According to the present modification, since such a mark 76a is formed, chamfering can be performed at an equal angle, and the occurrence of cracks and chips can be further reduced.

(Modification (Part 3)) Next, a modification (Part 3) of the liquid crystal display device according to the present embodiment will be explained with reference to FIG. FIG. 20 is a plan view showing a liquid crystal display device according to the present modification.

As shown in FIG. 20, the liquid crystal display according to the present modification is characterized mainly in that a rectangular mark 76b is formed.

Even when such a rectangular mark 76b is formed, the chamfer amount can be easily inspected.

(Modification (Part 4)) Next, a modification (Part 4) of the liquid crystal display device according to the present embodiment will be explained with reference to FIG. FIG. 21 is a plan view showing a liquid crystal display device according to the present modification.

As shown in FIG. 21, the liquid crystal display device according to the present modification has a polygonal mark 76c formed by combining rectangular marks.
The main feature is that is formed.

According to the present modification, since such a polygonal mark 76c is formed, the liquid crystal display device according to the modification (No. 3) shown in FIG. Compared with this, the chamfer amount can be more easily inspected.

(Modification (Part 5)) Next, a modification (Part 5) of the liquid crystal display device according to the present embodiment will be explained with reference to FIG. FIG. 22 is a plan view showing a liquid crystal display device according to the present modification.

As shown in FIG. 22A, the main feature of the liquid crystal display device according to this modification is that a wide rectangular mark 76d and a narrow rectangular mark 76e are appropriately formed. is there.

Even when the rectangular marks having different widths are formed, the chamfer amount can be easily inspected.

As shown in FIG. 22B, marks having the same width may be continuously arranged, and marks having different widths may be continuously arranged as appropriate.

Also, marks having different widths and shapes may be formed alternately.

(Modification (Part 6)) Next, a modification (Part 6) of the liquid crystal display device according to the present embodiment will be explained with reference to FIG. FIG. 23 is a plan view showing a liquid crystal display device according to the present modification.

As shown in FIG. 23, the liquid crystal display according to the present modification is characterized mainly in that a square mark 76f is formed.

Even when such a square mark 76f is formed, the chamfer amount can be easily inspected.

(Modification (Part 7)) Next, a modification (Part 7) of the liquid crystal display device according to the present embodiment will be explained with reference to FIG. FIG. 24 is a plan view showing a liquid crystal display device according to this modification.

As shown in FIG. 24, in the liquid crystal display device according to the present modification, the wiring 7 formed on the edge of the glass
The main feature is that the mark 76g is formed integrally with the mark 8.

The wiring 78 thus formed for another purpose
Even if the mark 76g is formed integrally with the substrate, the chamfer amount can be easily inspected.

Although the rectangular mark 76g is formed integrally with the wiring 78 in FIG.
And may be formed integrally.

[Modified Embodiment] The present invention is not limited to the above-described embodiment, and various modifications can be made.

For example, the measurement patterns shown in the liquid crystal display devices according to the first to third embodiments are merely examples, and may vary depending on the specifications of the manufacturing apparatus, particles generated during the manufacturing process, static electricity generated during the manufacturing process, pixel design specifications, and the like. Accordingly, an appropriate measurement pattern can be used.

The measurement patterns formed in the first to third embodiments need not always be formed in all pixels. The measurement pattern may be appropriately formed as necessary while taking into consideration that the display characteristics of the liquid crystal display device are not adversely affected.

Also, in the fourth embodiment, the mark 37 is
6, the mark 37 does not necessarily need to be formed of the same conductive film as the terminal 36. For example, the mark 37 may be formed of the same conductive film as the TAB terminal 38a, or the mark 37 may be formed by separately forming a film.

In the fourth to seventh embodiments, the mark is formed by the metal film. However, the mark is not limited to metal, and may be formed of, for example, resin. As the resin, for example, a photoresist can be used.

In the fourth embodiment, the triangular mark 37
But the mark is not limited to a triangle,
Any shape of marking can be used. For example, FIG.
A mark similar to the arrow mark 37a used in the liquid crystal display device of the fifth embodiment shown in FIG. 2 may be formed.

In the fourth embodiment, the case where the data bus line is repaired has been described as an example. Not only the case where the data bus line is repaired, but also any bus line such as the gate bus line and the storage capacitor bus line is repaired. It can also be applied to the case.

In the fourth embodiment, the case where the data bus line is disconnected has been described as an example. However, the present invention is not limited to the case where the data bus line is disconnected. For example, the present invention can also be applied to a case where a disconnection of a gate bus line or a storage capacitor bus line is repaired using a repair wiring.

In the fifth embodiment, the mark 37a is made of the same conductive film as the peripheral connection line 32c. However, the mark 37a does not necessarily need to be made of the same conductive film as the peripheral connection line 32c. For example, the mark 37a may be formed of the same conductive film as the data bus lines 18a and 18b, or the mark 37a may be formed of the same conductive film as the gate bus lines 20a and 20b. Alternatively, the mark 37a may be formed by separately forming a film.

In the fourth to sixth embodiments, a mark is provided near the wiring, but a mark may be provided on the wiring.

Further, in the fourth to sixth embodiments, the place to be cut is specified by marking, but it is not always necessary to specify by marking. In other words, it is only necessary that the portion to be cut can be visually identified. For example, a portion to be cut may be specified by etching a part of a wiring, a TAB terminal, or the like. Alternatively, the part to be cut may be specified by changing the film quality of a part of the wiring, the TAB terminal, or the like.

In the seventh embodiment, the case where the glass substrate 72 on which the data bus lines, the gate bus lines, and the like are formed is chamfered is described as an example. Can be applied. In this case, a mark may be formed at a corner of the glass substrate 74 facing the same.

Also, in the seventh embodiment, the glass substrate 72
Are formed only on the glass substrate 72 and the glass substrate 7.
4 may be formed with marks.

The shapes of the marks formed in the seventh embodiment are merely examples, and any shape of marks can be used.
For example, a circular mark may be formed, or a mark like a measure may be formed.

In the seventh embodiment, the substrate used in the liquid crystal display device has been described as an example. However, if the substrate needs to be chamfered, the same applies to the substrate used in other devices. Can be.

In the seventh embodiment, the mark is formed by a metal film. However, the mark is not limited to metal, and may be formed of, for example, a resin. As the resin, for example, a photoresist can be used.

[0181]

As described above, according to the present invention, the measurement pattern made of the same conductive film as the gate bus line is formed so as to extend in the direction intersecting the direction in which the gate bus line extends. By measuring the positional relationship between the measurement pattern and the data bus line, it is also possible to inspect the misalignment of the pattern in the direction parallel to the gate bus line. That is, according to the present invention, it is possible to easily inspect not only the displacement of the pattern overlapping in the direction perpendicular to the gate bus line but also the displacement of the pattern overlapping in the direction parallel to the gate bus line. If the step-type projection exposure apparatus or the like is adjusted as needed in accordance with the shift of the pattern superposition, the shift of the pattern superposition can be kept small, and as a result, the liquid crystal display device with good display quality can be improved. It can be manufactured with yield.

According to the present invention, the formation of the mark facilitates the specification of the wiring to be cut.
The inspection can be speeded up, and the manufacturing cost of the liquid crystal display device can be reduced. Further, according to the present invention, it is possible to prevent other wirings from being cut by mistake, so that it is also possible to improve the production yield of the liquid crystal display device.

Further, according to the present invention, since the marks are formed at the corners of the glass substrate, the chamfering operation can be performed while easily checking the amount of chamfering, and the accuracy of the chamfering can be improved. According to the present invention, since the mark is formed at the corner of the glass substrate, after the chamfering is completed,
Whether or not the chamfer amount conforms to the standard can be easily inspected. Further, according to the present invention, a glass substrate whose chamfer amount does not conform to the standard can be eliminated in the chamfering process, so that a defective glass substrate can be easily prevented from flowing out to the next process. Accordingly, a liquid crystal display device can be manufactured with a high yield.

[Brief description of the drawings]

FIG. 1 is a plan view (part 1) illustrating a liquid crystal display device according to a first embodiment of the present invention.

FIG. 2 is a plan view (part 2) showing the liquid crystal display device according to the first embodiment of the present invention.

FIG. 3 is a plan view showing a liquid crystal display according to a modification of the first embodiment of the present invention.

FIG. 4 is a plan view illustrating a liquid crystal display according to a second embodiment of the present invention.

FIG. 5 is a plan view showing a liquid crystal display according to a modification of the second embodiment of the present invention.

FIG. 6 is a plan view illustrating a liquid crystal display according to a third embodiment of the present invention.

FIG. 7 is a plan view showing a liquid crystal display according to a modification of the third embodiment of the present invention.

FIG. 8 is a conceptual diagram illustrating a liquid crystal display according to a fourth embodiment of the present invention.

FIG. 9 illustrates the T of the liquid crystal display according to the fourth embodiment of the present invention.
It is a top view showing the vicinity of AB terminal.

FIG. 10 is a conceptual diagram showing a repair state of a disconnection of a data bus line of a liquid crystal display according to a fourth embodiment of the present invention.

FIG. 11 is a plan view showing a state where a repair wiring of a liquid crystal display device according to a fourth embodiment of the present invention is cut off from a peripheral connection line.

FIG. 12 is a conceptual diagram illustrating a liquid crystal display according to a fifth embodiment of the present invention.

FIG. 13 is a conceptual diagram showing a state in which peripheral connection lines of a liquid crystal display according to a fifth embodiment of the present invention are cut off.

FIG. 14 is a conceptual diagram illustrating a liquid crystal display according to a sixth embodiment of the present invention.

FIG. 15 is a conceptual diagram showing a state in which wiring of a liquid crystal display according to a sixth embodiment of the present invention has been cut.

FIG. 16 is a plan view illustrating a liquid crystal display according to a seventh embodiment of the present invention.

FIG. 17 is a perspective view illustrating a liquid crystal display device according to a seventh embodiment of the present invention.

FIG. 18 is a perspective view showing a liquid crystal display device according to a modification (Part 1) of the seventh embodiment of the present invention.

FIG. 19 is a plan view showing a liquid crystal display device according to a modification (Part 2) of the seventh embodiment of the present invention.

FIG. 20 is a plan view showing a liquid crystal display device according to a modification (Part 3) of the seventh embodiment of the present invention.

FIG. 21 is a plan view illustrating a liquid crystal display device according to a modification (Part 4) of the seventh embodiment of the present invention.

FIG. 22 is a plan view showing a liquid crystal display device according to a modification (part 5) of the seventh embodiment of the present invention.

FIG. 23 is a plan view showing a liquid crystal display device according to a modification (6) of the seventh embodiment of the present invention.

FIG. 24 is a plan view showing a liquid crystal display device according to a modification (7) of the seventh embodiment of the present invention.

FIG. 25 is a plan view showing a conventional liquid crystal display device (part 1).

FIG. 26 is an enlarged plan view showing a conventional liquid crystal display device.

FIG. 27 is a conceptual diagram showing a conventional liquid crystal display device (part 2).

FIG. 28 is a conceptual diagram showing a case where the same voltage is applied to adjacent data bus lines.

FIG. 29 is a conceptual diagram showing a case where a short circuit occurs in a data bus line of a conventional liquid crystal display device (part 2).

FIG. 30 is a conceptual diagram showing a disconnection repair technique of a conventional liquid crystal display device (part 2).

FIG. 31 is a plan view showing a conventional liquid crystal display device (part 3).

FIG. 32 is a conceptual diagram (part 1) showing a chamfering failure of a conventional liquid crystal display device (part 3).

FIG. 33 is a conceptual diagram (part 2) showing a chamfering failure of a conventional liquid crystal display device (part 3).

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 ... Pixel electrode 12 ... TFT 14 ... Source electrode 16 ... Drain electrode 18 ... Data bus line 18a-18d ... Data bus line 20 ... Gate bus line 22 ... Storage capacitor bus line 24 ... Measurement pattern 24a ... Measurement pattern 24b ... Measurement pattern 24c ... measurement pattern 24d ... measurement pattern 24e ... measurement pattern 26 ... measurement pattern 26a ... measurement pattern 28 ... display area 30a, 30b ... repair wiring 32a, 32b ... peripheral connection line 32c ... peripheral connection line 34a, 34b ... voltage application terminal 35 ... wiring 36 ... terminal 37 ... mark 37a ... mark 37b ... mark 38a to 38d ... TAB terminal 39a to 39d ... wiring 40 ... wiring 42 ... terminal 43 ... wiring 44a to 44d ... voltage measuring terminal 46 ... wiring 48 ... area 50 ... area 52 ... area 54 ... area 56 ... Places 58a, 58b ... Contact holes 60a, 60b ... Voltage measurement terminals 62a, 62b ... Contact holes 64a, 64b ... TAB terminals 66a, 66b ... Wiring 68 ... Places 70 ... Areas 71a to 71d ... Places 72 ... Glass substrate 74 ... Glass Substrate 76 ... mark 76a ... mark 76b ... mark 76c ... mark 76d ... mark 76e ... mark 76f ... mark 76g ... mark 78 ... wiring 110 ... pixel electrode 112 ... TFT 114 ... source electrode 116 ... drain electrode 118 ... data bus line 118a- 118d ... data bus line 120 ... gate bus line 122 ... storage capacitor bus line 128 ... display area 130a, 130b ... repair wiring 132a, 132b ... peripheral connection line 134a, 134b ... voltage application terminal 144a-144d ... voltage measurement terminal 146 ... wiring 148 ... region 150 ... region 152 ... region 154 ... region 156 ... location 172 ... glass substrate 174 ... glass substrate 175 ... chipping

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) G09F 9/00 352 G09F 9/30 330Z 5F033 9/30 330 338 5G435 338 H01L 21/02 A H01L 21/02 G02F 1/136 500 21/3205 H01L 21/88 Z (72) Inventor Takeshi Kaneshiro 4-1-1, Kamidadanaka, Nakahara-ku, Kawasaki-shi, Kanagawa Prefecture Inside Fujitsu Limited (72) Inventor Makoto Tachibana Kawasaki-shi, Kanagawa Prefecture Fujitsu Limited (72) Ueodanaka 4-chome, Nakahara-ku (72) Inventor Yoichi Hirose 4-1-1, Kamiodanaka, Nakahara-ku, Kawasaki-shi, Kanagawa F-term in Fujitsu Limited (reference) 2G014 AA02 AA03 AB21 AC09 2H088 FA13 HA01 HA02 HA08 MA20 2H090 JA11 JB02 JC18 2H092 JA24 JA37 JA41 JB22 JB31 JB61 JB77 NA29 PA01 5C094 AA42 AA43 AA48 BA03 BA43 CA19 DA13 DB01 DB02 DB04 DB08 EA03 EA04 EA10 EB02 FA01 FB12 GB10 5F033 HH08 HH20 HH32 VV12 VV15 XX31 XX34 XX36 XX37 5G435 AA17 BB12 CC09 KK03 KK05

Claims (4)

[Claims] 1. A data bus line formed on a substrate, a gate bus line intersecting the data bus line, and a same conductive film as the gate bus line, and extending in a direction intersecting the gate bus line. A liquid crystal display device comprising: an existing measurement pattern. 2. A data bus line formed on a substrate, a gate bus line intersecting the data bus line, and a conductive film identical to the gate bus line, and extending along the gate bus line. A liquid crystal display device comprising: a storage capacitor bus line; and a measurement pattern formed integrally with the storage capacitor bus line and extending in a direction crossing the gate bus line. 3. A liquid crystal display device capable of performing an inspection by cutting a wiring outside a display area, wherein a mark for specifying a portion where the wiring is to be cut is formed. Liquid crystal display device. 4. A liquid crystal display comprising a first substrate, a second substrate facing the first substrate, and a liquid crystal material sealed between the first substrate and the second substrate. In the device, a mark capable of measuring a chamfer amount is formed near a corner of the first substrate and / or the second substrate.